公开(公告)号：US10468633B2

公开(公告)日：2019-11-05

申请号：US14284461

申请日：2014-05-22

Applicant: Universal Display Corporation ,  Kent State University

Inventor： Yue Cui ,  Deng-ke Yang ,  Ruiqing Ma ,  Gregory McGraw ,  Julia J. Brown

IPC: H01L51/52 ,  G02B3/00

Abstract: Novel microlens array architectures for enhanced light outcoupling from light emission are provided. Organic light emitting devices (OLEDs) that include an outcoupling layer including these novel microlens array architectures and method for fabricating such OLEDs are provided. These devices may be used to provide OLEDs with optimized light extraction.

公开(公告)号：US20190115535A1

公开(公告)日：2019-04-18

申请号：US16202579

申请日：2018-11-28

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L51/00 ,  H01L51/56 ,  B41M3/00 ,  B41J2/14

CPC classification number: H01L51/0003 ,  B41J2/14 ,  B41M3/006 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54 ,  H01L51/0013 ,  H01L51/5004 ,  H01L51/56 ,  H01L2251/552

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US10128468B2

公开(公告)日：2018-11-13

申请号：US15441331

申请日：2017-02-24

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Matthew King ,  Elliot H. Hartford, Jr.

IPC: H01L51/00 ,  H01L51/56 ,  B05B15/02 ,  C23C14/12 ,  C23C14/22 ,  B05B15/555

CPC classification number: H01L51/56 ,  B05B12/18 ,  B05B15/555 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14475 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  C23C14/24 ,  H01L51/0004 ,  H01L51/0005 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.

公开(公告)号：US09142778B2

公开(公告)日：2015-09-22

申请号：US14081161

申请日：2013-11-15

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw

IPC: H01L51/40 ,  H01L51/00 ,  C23C14/04 ,  C23C14/12 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L51/56

Abstract: Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.

Abstract translation: 提供了用于沉积有机层的源，器件和技术，例如用于OLED。 蒸发器可以将冷却的侧壁之间的材料蒸发并且朝向具有可调节的掩模开口的掩模蒸发。 可以调节掩模开口以控制材料在衬底上的沉积图案，以便校正在沉积期间发生的材料堆积。 可以从冷却的侧壁收集材料以供重新使用。

公开(公告)号：US20140361270A1

公开(公告)日：2014-12-11

申请号：US14284461

申请日：2014-05-22

Applicant: Universal Display Corporation ,  Kent State University

Inventor： Yue CUI ,  Deng-ke YANG ,  Ruiqing Ma ,  Gregory McGraw ,  Julia J. Brown

IPC: H01L51/52 ,  H01L27/32 ,  H01L51/56

CPC classification number: H01L51/5275 ,  G02B3/0043 ,  G02B3/0056

Abstract: Novel microlens array architectures for enhanced light outcoupling from light emission are provided. Organic light emitting devices (OLEDs) that include an outcoupling layer including these novel microlens array architectures and method for fabricating such OLEDs are provided. These devices may be used to provide OLEDs with optimized light extraction.

Abstract translation: 提供了用于增强光出射耦合的新型微透镜阵列结构。 提供了包括包括这些新型微透镜阵列结构的输出耦合层和用于制造这种OLED的方法的有机发光器件（OLED）。 这些器件可用于为OLED提供优化的光提取。

公开(公告)号：US20140235012A1

公开(公告)日：2014-08-21

申请号：US13896744

申请日：2013-05-17

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Gregory McGraw ,  Paul E. Burrows ,  Siddharth Harikrishna Mohan

IPC: H01L51/00 ,  H01L51/56 ,  B05B7/02

CPC classification number: H01L51/56 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  H01L51/0004 ,  Y02E10/549

Abstract: Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.

Abstract translation: 本文公开的实施例提供具有具有一个或多个喷嘴的喷嘴模具的装置，每个喷嘴具有一个或多个集成的撇渣器。 使用集成的喷嘴/分离器结构允许在OVJP型沉积技术中进行更高分辨率的打印，而不需要通过允许相对狭窄的有机材料束而使用阴影掩模，该有机材料束可以距离基板相对高的距离放置 。

公开(公告)号：US12089482B2

公开(公告)日：2024-09-10

申请号：US18103667

申请日：2023-01-31

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw ,  Gregg Kottas ,  Xin Xu ,  Julia J. Brown

IPC: B05B12/18 ,  H10K50/11 ,  H10K71/00 ,  H10K71/13 ,  H10K101/10 ,  H10K101/40

CPC classification number: H10K71/13 ,  B05B12/18 ,  H10K50/11 ,  H10K71/00 ,  H10K2101/10 ,  H10K2101/40

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20240237505A1

公开(公告)日：2024-07-11

申请号：US18544876

申请日：2023-12-19

Applicant: Universal Display Corporation

Inventor： Seckin Gokaltun ,  Gregory McGraw ,  William E. Quinn ,  Craig Anthony Outten ,  Jeff HAWTHORNE

IPC: H10K71/00 ,  B23K26/064 ,  B23K26/16 ,  B23K26/36 ,  H10K71/16

CPC classification number: H10K71/811 ,  B23K26/064 ,  B23K26/16 ,  B23K26/36 ,  H10K71/162

Abstract: Embodiments of the disclosed subject matter provide a laser source configured to output a laser beam, a beam transfer cavity to receive the outputted laser beam on a first side of the apparatus and output the laser beam on a second side of the apparatus, wherein the first side is opposite the second side, and a plume removal device having an exhaust aperture on the second side of the apparatus facing a heat affected zone (HAZ). A bottom surface of the plume removal device may be facing the substrate, where organic matter is disposed on the substrate, and the HAZ may be aligned with the surface of the substrate having the organic matter to be ablated by the laser beam.

公开(公告)号：US11976360B2

公开(公告)日：2024-05-07

申请号：US18099339

申请日：2023-01-20

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Siddharth Harikrishna Mohan ,  Matthew King

IPC: C23C16/455 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  H10K71/13

CPC classification number: C23C16/45563 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US11946131B2

公开(公告)日：2024-04-02

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  Edwin Van Den Tillaart ,  William E. Quinn ,  Sven Pekelder ,  Matthew King

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/22 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/00 ,  H10K71/16

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/228 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/60 ,  H10K71/16

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.