公开(公告)号：US08992685B2

公开(公告)日：2015-03-31

申请号：US12753978

申请日：2010-04-05

申请人： Hitoshi Kato ,  Manabu Honma ,  Hiroyuki Kikuchi ,  Yu Wamura ,  Jun Ogawa

发明人： Hitoshi Kato ,  Manabu Honma ,  Hiroyuki Kikuchi ,  Yu Wamura ,  Jun Ogawa

IPC分类号： C23C16/00 ,  H01L21/67 ,  H01L21/687 ,  C23C16/54 ,  C23C16/52

CPC分类号： H01L21/67207 ,  C23C16/52 ,  C23C16/54 ,  H01L21/67109 ,  H01L21/6719 ,  H01L21/68764 ,  H01L21/68771

摘要： In a substrate processing apparatus, a film deposition device and a heat processing device to perform an anneal processing are airtightly connected to a vacuum conveying chamber, and a substrate rotating unit to cause a substrate to rotate around a vertical axis is provided in the vacuum conveying chamber. A control unit is arranged to stop a relative rotation of a plurality of reactive gas supplying units, a separating gas supplying unit and a table by a rotation device in the middle of a film deposition process of the substrate, cause a conveying unit to take out the substrate from a vacuum chamber, and output a control signal that causes a substrate rotating unit to change a direction of the substrate.

摘要翻译： 在基板处理装置中，进行退火处理的成膜装置和热处理装置气密地连接到真空输送室，并且在真空输送中设置使基板绕垂直轴旋转的基板旋转单元 房间。 控制单元设置成在基板的成膜过程的中间通过旋转装置停止多个反应气体供给单元，分离气体供给单元和台的相对旋转，使得输送单元取出 来自真空室的基板，并且输出使基板旋转单元改变基板的方向的控制信号。

公开(公告)号：US08882915B2

公开(公告)日：2014-11-11

申请号：US12753932

申请日：2010-04-05

申请人： Hitoshi Kato ,  Manabu Honma ,  Hiroyuki Kikuchi

发明人： Hitoshi Kato ,  Manabu Honma ,  Hiroyuki Kikuchi

IPC分类号： C23C16/455 ,  C23C16/458 ,  C23C16/46 ,  H01L21/67 ,  C23C16/48 ,  C23C16/40 ,  C23C16/54 ,  H01L21/687

CPC分类号： H01L21/67115 ,  C23C16/402 ,  C23C16/45519 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/45578 ,  C23C16/458 ,  C23C16/46 ,  C23C16/463 ,  C23C16/482 ,  C23C16/54 ,  H01L21/6719 ,  H01L21/67207 ,  H01L21/68764 ,  H01L21/68771

摘要： A rotation table on which a wafer is placed is rotated around a vertical axis in order to supply to an upper surface of the wafer a first reaction gas for allowing the first reaction gas to be adsorbed on the upper surface, an auxiliary gas that reacts with the first reaction gas to produce an intermediate product having reflowability, and a second reaction gas that is reacted with the intermediate product to produce a reaction product in this order; and the reaction product is heated by a heating lamp in order to densify the reaction product.

摘要翻译： 放置晶片的旋转台围绕垂直轴旋转，以向晶片的上表面提供用于允许第一反应气体吸附在上表面上的第一反应气体，与 产生具有回流性的中间产物的第一反应气体和与中间产物反应以产生反应产物的第二反应气体; 并且通过加热灯加热反应产物以使反应产物致密化。

公开(公告)号：US08770571B2

公开(公告)日：2014-07-08

申请号：US13553544

申请日：2012-07-19

申请人： Yutaka Ando ,  Shunsuke Nishimura ,  Takashi Yokoya ,  Hitoshi Kato

发明人： Yutaka Ando ,  Shunsuke Nishimura ,  Takashi Yokoya ,  Hitoshi Kato

IPC分类号： B65H31/34 ,  B65H9/10

CPC分类号： B65H31/34 ,  B65H2511/13 ,  B65H2513/51 ,  B65H2701/1315 ,  B65H2220/01 ,  B65H2220/02

摘要： A sheet stacking apparatus includes an alignment unit configured to align a sheet stacked on a stacking tray in a width direction which is orthogonal to a direction in which the sheet is discharged. The alignment unit includes first and second alignment members configured to move in the width direction. The first and second alignment members come into contact with side ends in the width direction of the sheet stacked on the stacking tray to align the sheet. When a second sheet of a different length in the width direction from that of a first sheet is stacked while shifted in the width direction on the first sheet which is already stacked on the stacking tray, the sheet stacking apparatus prohibits an alignment operation of the alignment unit on the second sheet.

摘要翻译： 片材堆垛装置包括：对准单元，被配置为在与片材排出的方向正交的宽度方向上排列堆叠在堆垛盘上的片材。 对准单元包括构造成沿宽度方向移动的第一和第二对准构件。 第一和第二对准构件与层叠在堆叠托盘上的片材的宽度方向上的侧端接触，以对准片材。 当在已经堆叠在堆叠托盘上的第一片材​​上沿宽度方向偏移而沿宽度方向上与第一片材的宽度方向不同长度的第二片材堆叠时，片材堆叠装置禁止对准 单位在第二张。

公开(公告)号：US08596630B2

公开(公告)日：2013-12-03

申请号：US13432168

申请日：2012-03-28

申请人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Tomoharu Sato

发明人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Tomoharu Sato

IPC分类号： B31F1/00

CPC分类号： G03G15/6544 ,  B42C1/125 ,  B65H37/06 ,  B65H45/30 ,  B65H2511/13 ,  B65H2511/30 ,  B65H2513/50 ,  B65H2701/13212 ,  B65H2801/27 ,  G03G15/6582 ,  B65H2220/01 ,  B65H2220/02

摘要： A sheet processing apparatus which is capable of stabilizing a stop position of the sheet bundle, to thereby enable creation of a high finish quality product, and is compact in size and can be manufactured at low costs. Conveyance belts convey the sheet bundle to a flattening position. A pressing roller flattens the folded spine of the sheet bundle by pressing the folded spine. Clampers hold the sheet bundle such that the sheet bundle is not moved when flattening is performed. A CPU starts to stop driving of the conveyance belts when the sheet bundle is conveyed to a predetermined location upstream of the flattening position in the conveying direction of the sheet bundle, and stops the sheet bundle at the flattening position by holding the sheet bundle with the clampers before the conveyance of the sheet bundle is stopped.

摘要翻译： 能够稳定片材摞的停止位置的片材处理装置，从而能够产生高质量的产品，并且尺寸紧凑并且可以以低成本制造。 输送带将纸张束传送到平坦的位置。 按压辊通过按压折叠的脊柱来平整片材束的折叠脊。 夹持器夹住片材束，使得当进行平坦化时片材束不移动。 当纸张束被输送到纸张捆的输送方向上的平坦化位置上游的预定位置时，CPU开始停止传送带的驱动，并且通过将纸张束保持在平坦位置而将纸张束停止在平坦化位置 在纸张捆的输送之前的夹紧器停止。

公开(公告)号：US08465591B2

公开(公告)日：2013-06-18

申请号：US12491313

申请日：2009-06-25

申请人： Hitoshi Kato ,  Manabu Honma ,  Anthony Dip

发明人： Hitoshi Kato ,  Manabu Honma ,  Anthony Dip

IPC分类号： C23C16/00

CPC分类号： C23C16/402 ,  C23C16/45521 ,  C23C16/45551

摘要： A disclosed film deposition apparatus includes a turntable having in one surface a substrate receiving portion along a turntable rotation direction; a first reaction gas supplying portion for supplying a first reaction gas; a second reaction gas supplying portion for supplying a second reaction gas; a separation area between a first process area where the first reaction gas is supplied and a second process area where the second reaction gas is supplied, the separation area including a separation gas supplying portion for supplying a first separation gas in the separation area, and a ceiling surface opposing the one surface to produce a thin space; a center area having an ejection hole for ejecting a second separation gas along the one surface; and an evacuation opening for evacuating the chamber.

公开(公告)号：US08459641B2

公开(公告)日：2013-06-11

申请号：US12825071

申请日：2010-06-28

申请人： Naoki Ishikawa ,  Hitoshi Kato ,  Yasuo Fukatsu

发明人： Naoki Ishikawa ,  Hitoshi Kato ,  Yasuo Fukatsu

IPC分类号： B65H9/04

CPC分类号： B65H9/004 ,  B65H2404/722 ,  B65H2801/06

摘要： In a sheet processing apparatus that is required for high productivity, it is needed to execute skew correction of a sheet in a short time. Thus, when the sheet is struck against a roller or a skew correction member at a high speed to execute skew correction, it may cause a scratch or a noise caused by an impact. Accordingly, the sheet is struck against a skew correction stopper that is moving at a speed slower than a sheet conveyance speed to execute skew correction.

摘要翻译： 在高生产率所需的片材处理装置中，需要在短时间内执行片材的扭曲校正。 因此，当片材以高速撞击辊或歪斜校正构件以执行歪斜校正时，其可能引起由冲击引起的擦伤或噪音。 因此，片材被撞击以比片材输送速度慢的速度移动的歪斜校正止挡件，以执行扭曲校正。

公开(公告)号：US08376360B2

公开(公告)日：2013-02-19

申请号：US12116122

申请日：2008-05-06

申请人： Tsuyoshi Moriyama ,  Hitoshi Kato ,  Yasuo Fukatsu ,  Naoki Ishikawa

发明人： Tsuyoshi Moriyama ,  Hitoshi Kato ,  Yasuo Fukatsu ,  Naoki Ishikawa

IPC分类号： B65H39/10

CPC分类号： B65H39/10 ,  B65H31/24 ,  B65H2405/15 ,  B65H2405/3311 ,  B65H2511/152 ,  B65H2511/30 ,  B65H2511/415 ,  B65H2513/42 ,  B65H2801/06 ,  B65H2220/01 ,  B65H2220/02

摘要： A sheet stacking apparatus including first and second stacking trays configured to stack sheets, a detection unit configured to detect a sheet stacking amount on the first stacking tray, a setting unit configured to set an upper limit on stacking amount for controlling the sheet stacking amount that is less than a maximum sheet stacking amount on the first stacking tray, and a control unit configured to stop stacking of sheets on the first stacking tray and stack sheets on the second stacking tray in a case where the sheet stacking amount which is detected by the detection unit reaches the upper limit on stacking amount that is set by the setting unit.

摘要翻译： 一种纸张堆垛装置，包括：第一和第二堆叠纸张，被配置为堆叠纸张;检测单元，被配置为检测第一堆垛盘上的纸张堆垛量;设置单元，被配置为设置用于控制纸张堆垛量的堆积量的上限， 小于第一堆叠托盘上的最大片材堆积量，以及控制单元，其被配置为在由第二堆叠托盘检测到的片材堆积量的情况下停止堆叠第一堆叠托盘上的片材和堆叠片材 检测单元达到由设定单元设定的叠放量的上限。

公开(公告)号：US20130036886A1

公开(公告)日：2013-02-14

申请号：US13568306

申请日：2012-08-07

申请人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Taishi Tomii

发明人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Taishi Tomii

IPC分类号： B65H7/10 ,  B23Q15/00

CPC分类号： B65H7/10 ,  B65H2220/09 ,  B65H2301/331 ,  B65H2301/3613 ,  B65H2511/20 ,  B65H2511/222 ,  B65H2511/242 ,  B65H2553/40 ,  B65H2553/81 ,  B65H2701/1313 ,  B65H2701/1315 ,  B65H2801/06 ,  B65H2801/27 ,  Y10T83/145 ,  B65H2220/03 ,  B65H2220/01 ,  B65H2220/02

摘要： A sheet processing apparatus capable of high-speed and accurate detection of a lateral displacement and a skew of a sheet. A motor laterally shifts the sensors during sheet conveyance by a conveying motor, to determine first and second positions of the sheet lateral edge detected respectively by first and second sensors. A finisher controller determines a third position of the lateral edge of the sheet closer to a sheet trailing edge, based on the first and second positions and an amount of conveyance of the sheet from when the first position is detected to when the second position is detected. A lateral displacement of the sheet is corrected by laterally shifting the sheet according to the third position of the sheet lateral edge.

摘要翻译： 一种片材处理设备，能够高速且准确地检测片材的横向位移和歪斜。 电动机在输送电动机的纸张输送期间侧向移动传感器，以确定由第一和第二传感器分别检测的纸张侧边缘的第一和第二位置。 整理器控制器基于第一和第二位置以及从检测到第一位置到检测到第二位置时的片材的传送量，确定片材的侧边缘的第三位置更接近片材后缘 。 通过根据片材侧边缘的第三位置横向移动片材来校正片材的横向位移。

公开(公告)号：US08372202B2

公开(公告)日：2013-02-12

申请号：US12539633

申请日：2009-08-12

申请人： Hitoshi Kato ,  Manabu Honma

发明人： Hitoshi Kato ,  Manabu Honma

IPC分类号： C23C16/455 ,  C23C16/00

CPC分类号： H01L21/02104 ,  C23C16/45551

摘要： A disclosed film deposition apparatus includes a turntable including a substrate receiving area; a first reaction gas supplier for supplying a first reaction gas to a surface of the turntable having the substrate receiving area; a second reaction gas supplier, arranged away from the first reaction gas supplier along a circumferential direction of the turntable, for supplying a second reaction gas to the surface; a separation area located along the circumferential direction between a first process area of the first reaction gas and a second process area of the second reaction gas; a separation gas supplier for supplying a first separation gas to both sides of the separation area; a first heating unit for heating the first separation gas to the separation gas supplier; an evacuation opening for evacuating the gases supplied to the turntable; and a driver for rotating the turntable in the circumferential direction.

摘要翻译： 公开的薄膜沉积设备包括：转盘，其包括基板接收区域; 第一反应气体供应器，用于向具有基板接收区域的转台的表面供应第一反应气体; 第二反应气体供应器，沿着转台的圆周方向布置成远离第一反应气体供应器，用于向表面供应第二反应气体; 沿着圆周方向位于第一反应气体的第一处理区域和第二反应气体的第二处理区域之间的分离区域; 用于将分离气体供给到分离区域的两侧的分离气体供给装置; 第一加热单元，用于将第一分离气体加热到分离气体供应器; 用于排出供应到转台的气体的排气口; 以及用于在圆周方向上旋转转盘的驱动器。

公开(公告)号：US08352704B2

公开(公告)日：2013-01-08

申请号：US13283333

申请日：2011-10-27

申请人： Hitoshi Kato ,  Shuichi Sato

发明人： Hitoshi Kato ,  Shuichi Sato

IPC分类号： G06F12/00

CPC分类号： H04Q11/04 ,  G06F12/0223 ,  G06F12/08 ,  H04Q2213/13034 ,  H04Q2213/13103 ,  H04Q2213/13389

摘要： According to one embodiment, a switching apparatus includes a storage module, a setting module, a managing module and a reconstruction module. The storage module stores data pertaining to the switching function by dividing the data into a plurality of groups. The setting module sets, for each of the plurality of groups, a base address to be allocated by an operating system when the program is started up. The managing module records and manages the base address and data size information of each group when the program is terminated. The reconstruction module, when the program is started up, refers to the base address and the data size information recorded when the program is terminated last time, and reconstructs data in the virtual memory space for each of the plurality of groups based on a reference result.

摘要翻译： 根据一个实施例，切换装置包括存储模块，设置模块，管理模块和重建模块。 存储模块通过将数据划分成多个组来存储关于切换功能的数据。 所述设定模块针对所述多个组中的每一个设置当所述程序启动时由操作系统分配的基地址。 当程序终止时，管理模块记录和管理每个组的基地址和数据大小信息。 重建模块，当程序启动时，是指基本地址和上次程序终止时记录的数据大小信息，并且基于参考结果重建多个组中的每个组的虚拟存储器空间中的数据 。