Method of manufacturing semiconductor device having optical devices
    62.
    发明授权
    Method of manufacturing semiconductor device having optical devices 有权
    具有光学器件的半导体器件的制造方法

    公开(公告)号:US08394705B2

    公开(公告)日:2013-03-12

    申请号:US12783216

    申请日:2010-05-19

    Abstract: Provided is a method of manufacturing a semiconductor device. According to the method, a first buried oxide layer is formed in the semiconductor substrate in a first region, such that a first semiconductor layer is defined on the first buried oxide layer. An active portion is defined by forming a trench in the semiconductor substrate in a second region. A capping semiconductor pattern is formed on a top surface and an upper portion of a sidewall of the active portion. An oxide layer is formed by oxidizing the capping semiconductor pattern and an exposed lower portion of the sidewall of the active portion, such that the oxide layer surrounds a non-oxidized portion of the active portion. The non-oxidized portion of the active portion is a core and one end of the core is connected to a first optical device formed at the first semiconductor.

    Abstract translation: 提供一种制造半导体器件的方法。 根据该方法,在第一区域中的半导体衬底中形成第一掩埋氧化物层,使得第一半导体层被限定在第一掩埋氧化物层上。 通过在第二区域中在半导体衬底中形成沟槽来限定有源部分。 在有源部分的侧壁的顶表面和上部形成封盖半导体图案。 通过氧化覆盖半导体图案和有源部分的侧壁的暴露下部来形成氧化物层,使得氧化物层包围有源部分的未氧化部分。 有源部分的未氧化部分是芯,并且芯的一端连接到形成在第一半导体处的第一光学器件。

    Waveguide photo-detector
    63.
    发明授权
    Waveguide photo-detector 有权
    波导光电探测器

    公开(公告)号:US08242571B2

    公开(公告)日:2012-08-14

    申请号:US12763990

    申请日:2010-04-20

    Abstract: Provided is a waveguide photodetector that may improve an operation speed and increase or maximize productivity. The waveguide photodetector includes a waveguide layer extending in a first direction, an absorption layer disposed on the waveguide layer, a first electrode disposed on the absorption layer, a second electrode disposed on the waveguide layer, the second electrode being spaced from the first electrode and the absorption layer in a second direction crossing the first direction, and at least one bridge electrically connecting the absorption layer to the second electrode.

    Abstract translation: 提供了可以提高操作速度并增加或最大化生产率的波导光电检测器。 波导光电检测器包括沿第一方向延伸的波导层,设置在波导层上的吸收层,设置在吸收层上的第一电极,设置在波导层上的第二电极,第二电极与第一电极间隔开, 所述吸收层在与所述第一方向交叉的第二方向上,以及至少一个电桥将所述吸收层电连接到所述第二电极。

    PHOTONICS CHIP AND OPTICAL APPARATUS INCLUDING THE SAME
    64.
    发明申请
    PHOTONICS CHIP AND OPTICAL APPARATUS INCLUDING THE SAME 有权
    光电芯片和光学设备,包括它们

    公开(公告)号:US20120121218A1

    公开(公告)日:2012-05-17

    申请号:US13190403

    申请日:2011-07-25

    CPC classification number: G02B6/4292 G02B6/3644 G02B6/3652 G02B6/3885

    Abstract: Provided are a photonics chip and an optical apparatus including the same. The chip may include a substrate, an optical waveguide, an optical coupler, and a plurality of alignment units. The optical waveguide is formed on the substrate. The optical coupler is formed at the optical waveguide. The alignment units align an optical connector which fixes at least one optical fiber coupled to the optical coupler, on the substrate.

    Abstract translation: 提供了一种光子学芯片和包括其的光学装置。 芯片可以包括基板,光波导,光耦合器和多个对准单元。 光波导形成在基板上。 光耦合器形成在光波导处。 对准单元对准在衬底上固定耦合到光耦合器的至少一个光纤的光连接器。

    METHOD OF TUNING RESONANCE WAVELENGTH OF RING RESONATOR
    65.
    发明申请
    METHOD OF TUNING RESONANCE WAVELENGTH OF RING RESONATOR 失效
    调谐谐振器谐振波长的方法

    公开(公告)号:US20120081197A1

    公开(公告)日:2012-04-05

    申请号:US13175567

    申请日:2011-07-01

    CPC classification number: H01P7/088 G02F1/0147 G02F1/3132 H01P1/2135

    Abstract: Provided is a method of tuning a resonance wavelength of a ring resonator. The method of tuning the resonance wavelength of a ring resonator includes preparing a ring resonator which contains a ring waveguide and a dielectric layer covering the ring waveguide, and heating the ring resonator to induce a refractive index phase change of the dielectric layer.

    Abstract translation: 提供了调谐环形谐振器的谐振波长的方法。 调谐环形谐振器的谐振波长的方法包括制备环形谐振器,该环形谐振器包含环形波导和覆盖环形波导的电介质层,并且加热环形谐振器以引起电介质层的折射率相位变化。

    OPTICAL COUPLER
    66.
    发明申请
    OPTICAL COUPLER 审中-公开
    光耦合器

    公开(公告)号:US20110038588A1

    公开(公告)日:2011-02-17

    申请号:US12642707

    申请日:2009-12-18

    CPC classification number: G02B6/124

    Abstract: Provided is an optical coupler. The optical coupler includes a lower cladding layer on a substrate, a core layer on the lower cladding layer, the core layer comprising a diffraction grating coupler and an optical waveguide, and an upper cladding layer on the core layer. The upper cladding layer has a thickness of about one quarter of a wavelength of an optical signal passing through the core layer divided by a refractive index of the first upper cladding layer. Thus, Fresnel reflection may be minimized, and also, it may prevent a Fabry-Perot interferometer from occurring.

    Abstract translation: 提供了一种光耦合器。 光耦合器包括在基底上的下包层,下包覆层上的芯层,芯层包括衍射光栅耦合器和光波导,以及芯层上的上覆层。 上包层具有通过芯层的光信号的波长的大约四分之一的厚度除以第一上包层的折射率。 因此,菲涅尔反射可以被最小化,并且也可以防止发生法布里 - 珀罗干涉仪。

    Optical device
    67.
    发明授权
    Optical device 失效
    光学装置

    公开(公告)号:US07881574B2

    公开(公告)日:2011-02-01

    申请号:US12491454

    申请日:2009-06-25

    CPC classification number: G02B6/1228 G02B6/12004 G02B6/124 G02B6/34

    Abstract: Provided is an optical device, which includes a substrate, a first cladding disposed on the substrate, a first optical waveguide extended in a first direction on the first cladding, and having a first refractive index, a side grating formed in at least one side of the first optical waveguide, a second optical waveguide filling a space of the side grating, extended in a second direction across the first direction on the first cladding, and having a second refractive index, and a second cladding disposed on the second optical waveguide, and having a third refractive index, wherein the first refractive index is greater than the second refractive index, and the second refractive index is greater than the third refractive index.

    Abstract translation: 提供了一种光学装置,其包括基板,设置在基板上的第一包层,在第一包层上沿第一方向延伸的第一光波导,并且具有第一折射率,在至少一侧形成的侧光栅 所述第一光波导,填充所述侧光栅的空间的第二光波导,沿着所述第一包层上的所述第一方向的第二方向延伸并具有第二折射率,以及设置在所述第二光波导上的第二包层,以及 具有第三折射率,其中所述第一折射率大于所述第二折射率,并且所述第二折射率大于所述第三折射率。

    Interband tunneling intersubband transition semiconductor laser
    68.
    发明授权
    Interband tunneling intersubband transition semiconductor laser 有权
    带间隧穿带内过渡半导体激光器

    公开(公告)号:US07756176B2

    公开(公告)日:2010-07-13

    申请号:US11952408

    申请日:2007-12-07

    Abstract: An interband resonant tunneling intersubband transition laser is disclosed, and includes a semiconductor substrate, and a first cladding layer, an active region structure layer and a second cladding layer formed on the semiconductor substrate. The active region structure layer includes quantum well layers and quantum barrier layers that are alternately stacked and have a broken energy bandgap. Thus, the interband resonant tunneling intersubband transition laser operates in a cascade mode in which an intersubband radiative transition and interband tunneling of carriers consecutively and repetitively occur in the active region structure layer, and thus can achieve a high output from a simple, compact structure.

    Abstract translation: 公开了一种带间谐振隧穿带间过渡激光器,并且包括半导体衬底和形成在半导体衬底上的第一覆层,有源区结构层和第二覆层。 有源区结构层包括量子阱层和量子势垒层,其交替堆叠并具有破坏的能带隙。 因此,带间共振隧穿带间过渡激光器以级联模式工作,其中载流子系统中的子带间辐射跃迁和带间隧穿在连续重复地发生在有源区结构层中,从而可以通过简单紧凑的结构实现高输出。

    METHOD OF FABRICATING SEMICONDUCTOR DEVICE UNCONSTRAINED BY OPTICAL LIMIT AND APPARATUS OF FABRICATING THE SEMICONDUCTOR DEVICE
    69.
    发明申请
    METHOD OF FABRICATING SEMICONDUCTOR DEVICE UNCONSTRAINED BY OPTICAL LIMIT AND APPARATUS OF FABRICATING THE SEMICONDUCTOR DEVICE 审中-公开
    制造光限制半导体器件的方法和制造半导体器件的设备

    公开(公告)号:US20100130010A1

    公开(公告)日:2010-05-27

    申请号:US12538080

    申请日:2009-08-07

    Abstract: Provided are a method of fabricating a semiconductor device unconstrained by optical limit and an apparatus of fabricating the semiconductor device. The method includes: forming an etch target layer on a substrate; forming a hard mask layer on the etch target layer; forming first mask patterns on the hard mask layer; forming first spacers on sidewalls of the first mask patterns; forming hard mask patterns having an opening by using the first mask patterns and the first spacers as a mask to etch the hard mask layer; aligning second mask patterns on the hard mask patterns to fill the opening; forming second spacers on sidewalls of the second mask patterns; forming fine mask patterns by using the second mask patterns and the second spacers as a mask to etch the hard mask patterns; and forming fine patterns by using the fine mask patterns as a mask to etch the etch target layer.

    Abstract translation: 提供一种制造不受光学极限约束的半导体器件的方法和制造半导体器件的装置。 该方法包括:在衬底上形成蚀刻目标层; 在蚀刻靶层上形成硬掩模层; 在硬掩模层上形成第一掩模图案; 在所述第一掩模图案的侧壁上形成第一间隔物; 通过使用第一掩模图案和第一间隔物作为掩模形成具有开口的硬掩模图案以蚀刻硬掩模层; 对准硬掩模图案上的第二掩模图案以填充开口; 在所述第二掩模图案的侧壁上形成第二间隔物; 通过使用第二掩模图案和第二间隔物作为掩模来形成精细的掩模图案以蚀刻硬掩模图案; 并通过使用精细掩模图案作为掩模来形成精细图案以蚀刻蚀刻目标层。

    OSCILLATION CIRCUIT BASED ON METAL-INSULATOR TRANSITION DEVICE AND METHOD OF DRIVING THE OSCILLATION CIRCUIT
    70.
    发明申请
    OSCILLATION CIRCUIT BASED ON METAL-INSULATOR TRANSITION DEVICE AND METHOD OF DRIVING THE OSCILLATION CIRCUIT 失效
    基于金属绝缘体过渡装置的振荡电路及驱动振荡电路的方法

    公开(公告)号:US20100060369A1

    公开(公告)日:2010-03-11

    申请号:US12516105

    申请日:2007-10-31

    CPC classification number: H01L49/003 H01L29/94 H03B17/00

    Abstract: Provided are an oscillatory circuit based on a metal-insulator transition (MIT) device that can generate a simple and very high oscillating frequency using the MIT device, and a method of driving the oscillatory circuit. The oscillatory circuit includes the MIT device that comprises an MIT thin film and an electrode thin film connected to the MIT thin film and in which an abrupt MIT is generated due to an MIT generating voltage, a resistor that is serially connected to the MIT device, an electric al power source limiting the maximum amount of an applied current and applying a direct current constant voltage to the MIT device, and a light source irradiating electromagnetic waves on the MIT device, wherein the oscillating properties are generated by irradiating the electromagnetic waves using the light source.

    Abstract translation: 提供了一种基于金属 - 绝缘体转变(MIT)器件的振荡电路,其可以使用MIT器件产生简单且非常高的振荡频率,以及驱动振荡电路的方法。 振荡电路包括MIT设备,其包括MIT薄膜和连接到MIT薄膜的电极薄膜,并且其中由于MIT产生电压而产生突然MIT;串联连接到MIT设备的电阻器, 限制施加电流的最大量并向MIT装置施加直流恒定电压的电动电源以及在MIT装置上照射电磁波的光源,其中振荡特性是通过使用 光源。

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