Anisotropic etching of a semiconductor device using tilted etching holes
    62.
    发明授权
    Anisotropic etching of a semiconductor device using tilted etching holes 失效
    使用倾斜蚀刻孔的半导体器件的各向异性蚀刻

    公开(公告)号:US06737729B2

    公开(公告)日:2004-05-18

    申请号:US10001214

    申请日:2001-10-23

    IPC分类号: H01L2982

    摘要: A semiconductor device is provided that simplifies wiring pattern and is capable of being etched through an etching hole as a concavity is produced over a short time period. A dielectric film 12 is formed so as to shield the concavity formed upon the upper surface of a silicon substrate 10. A circuit pattern that has a thermoelectric conversion element 18 is formed upon the dielectric film. The upper surface of the silicon wafer becomes a (100) surface, and a first etching hole 16 extending in the direction of the silicon substrate and a second etching hole 17 extending in the direction are formed. These holes intersect in a cross shape. Shapes of the first and second etching holes become parallelograms which have oblique sides tilted with respect to and . Imaginary rectangles passing though the vertices of the first and second etching holes are continuous. As a cross shape is removed from the silicon substrate, etching is rapid due to the appearance of (411) surfaces at the intersecting part.

    摘要翻译: 提供一种半导体器件,其简化了布线图案,并且能够在短时间内产生凹陷时通过蚀刻孔蚀刻。 形成电介质膜12以屏蔽形成在硅衬底10的上表面上的凹面。在电介质膜上形成具有热电转换元件18的电路图案。 硅晶片的上表面成为(100)表面,并且形成沿硅衬底的<110>方向延伸的第一蚀刻孔16和沿<-110>方向延伸的第二蚀刻孔17。 这些孔相交十字形。 第一和第二蚀刻孔的形状变为相对于<110>和<-110>倾斜的倾斜边的平行四边形。 穿过第一和第二蚀刻孔的顶点的虚拟矩形是连续的。 由于从硅衬底去除了十字形状,所以由于在交叉部分的(411)表面的外观,蚀刻很快。

    Exhaust gas purification apparatus for internal combustion engine
    63.
    发明授权
    Exhaust gas purification apparatus for internal combustion engine 有权
    内燃机废气净化装置

    公开(公告)号:US09528412B2

    公开(公告)日:2016-12-27

    申请号:US14409122

    申请日:2012-06-19

    摘要: An exhaust gas purification catalyst is recovered from the sulfur poisoning more appropriately. For this purpose, an exhaust gas purification apparatus for an internal combustion engine selectively executes first control in which an air-fuel ratio of an exhaust gas allowed to flow into an exhaust gas purification catalyst is set to be not more than a theoretical air-fuel ratio to remove a sulfur component from the exhaust gas purification catalyst; and second control in which the air-fuel ratio of the exhaust gas allowed to flow into the exhaust gas purification catalyst is set to an air-fuel ratio that is lower than the air-fuel ratio of the exhaust gas set in the first control to remove the sulfur component from the exhaust gas purification catalyst; wherein the exhaust gas purification apparatus for the internal combustion engine comprises a control unit which executes any one of the first control and the second control on the basis of at least one of purification performance of the exhaust gas purification catalyst, a travel distance of a vehicle that carries the internal combustion engine, and a number of times of removal of the sulfur component from the exhaust gas purification catalyst.

    摘要翻译: 更适当地从硫中毒中回收废气净化催化剂。 为此,内燃机的废气净化装置选择性地执行第一控制,其中允许流入排气净化催化剂的废气的空燃比被设定为不大于理论空燃比 以从废气净化催化剂中除去硫成分; 并且允许流入排气净化催化剂的废气的空燃比被设定为低于设定在第一控制中的排气的空燃比的空燃比的第二控制, 从废气净化催化剂中除去硫成分; 其特征在于,所述内燃机的废气净化装置具有控制单元,其基于所述排气净化催化剂的净化性能,车辆的行驶距离,行驶距离,所述第一控制和所述第二控制中的至少一个, 其承载内燃机,并且从废气净化催化剂中多次除去硫成分。

    Electrostatic induction power generator
    64.
    发明授权
    Electrostatic induction power generator 有权
    静电感应发电机

    公开(公告)号:US09496807B2

    公开(公告)日:2016-11-15

    申请号:US13512624

    申请日:2010-12-24

    CPC分类号: H02N1/08

    摘要: An electrostatic induction power generator includes a spherical member for making a distance between surfaces of a first substrate and a second substrate facing each other constant. A housing is provided with a first reference surface to which a surface of the second substrate facing the first substrate is fixed and which is a positioning reference for the second substrate with respect to the surface facing the first substrate in a vertical direction, and a second reference surface with which the spherical member is slidably in contact and which is a positioning reference for the spherical member with respect to the surface facing the first substrate in the vertical direction. The spherical member is slidably in contact with a surface of the first substrate facing the second substrate.

    摘要翻译: 一种静电感应发电机,包括:第一基板和第二基板的面彼此面对的距离恒定的球形部件。 壳体设置有第一参考表面,第二基板的面向第一基板的表面被固定到第一参考表面,并且其是相对于在垂直方向上面向第一基板的表面的第二基板的定位参考,第二参考表面 参考表面,球形构件与球形构件可滑动地接触,并且作为球形构件相对于在垂直方向上面向第一衬底的表面的定位参考。 球形构件与第一衬底的面向第二衬底的表面可滑动地接触。

    Exhaust cleaner for internal combustion engine
    67.
    发明授权
    Exhaust cleaner for internal combustion engine 有权
    内燃机排气净化器

    公开(公告)号:US09255509B2

    公开(公告)日:2016-02-09

    申请号:US14002268

    申请日:2011-04-15

    摘要: The exhaust cleaner for internal combustion engine is equipped with NOx storage reduction catalyst (161, 162) which is disposed in exhaust passage of an internal combustion engine and which absorb and reduce the NOx contained in exhaust gas. The NOx storage reduction catalyst (161, 162) each include a coating layer that has been formed on the inner wall of cells through which the exhaust passage, the coating layer having the catalytic function. The coating layers have been formed so that the thickness of the coating layer of the NOx storage reduction catalyst (161) located upstream in the flow of the exhaust gas is smaller than the thickness of the coating layer of the NOx storage reduction catalyst (162) located downstream. Due to this configuration, the NOx storage reduction catalyst (161, 162) are inhibit from being poisoned by sulfur and high NOx removal percentage is maintained.

    摘要翻译: 用于内燃机的排气净化器配备有NOx吸留还原催化剂(161,162),其设置在内燃机的排气通道中并吸收和还原废气中所含的NOx。 NOx储存还原催化剂(161,162)各自包括已经形成在排气通道,具有催化功能的涂层的单元的内壁上的涂层。 已经形成涂层,使得位于排气流中上游的NOx存储还原催化剂(161)的涂层的厚度小于NOx储存还原催化剂(162)的涂层厚度, 位于下游。 由于这种构造,可以抑制NOx储存还原催化剂(161,162)被硫中毒,并且维持高的NOx去除率。

    Electrostatic induction power generator
    69.
    发明授权
    Electrostatic induction power generator 有权
    静电感应发电机

    公开(公告)号:US08796902B2

    公开(公告)日:2014-08-05

    申请号:US13386907

    申请日:2010-07-29

    IPC分类号: H02N1/00

    CPC分类号: H02N1/08

    摘要: An electrostatic induction generator has a first substrate and a second substrate that can move relative to each other while remaining opposed to each other, an electret provided in the first substrate, and a first electrode and a second electrode provided on a surface side opposed to the electret in the second substrate. A positional relationship between the electret and the first electrode and a positional relationship between the electret and the second electrode change in association with a change of relative positions between the first substrate and the second substrate, whereby an electrostatic capacitance between the electret and the first electrode and an electrostatic capacitance between the electret and the second electrode change to output an electric power. A structure that decreases the electrostatic capacitance between the first electrode and the second electrode is provided between the first electrode and the second electrode.

    摘要翻译: 静电感应发生器具有第一基板和第二基板,该第一基板和第二基板可相对于彼此保持相对移动,设置在第一基板中的驻极体以及设置在与第一基板相对的表面侧上的第一电极和第二电极 驻极体在第二衬底中。 驻极体和第一电极之间的位置关系以及驻极体与第二电极之间的位置关系随着第一基板和第二基板之间的相对位置的变化而变化,由此驻极体与第一电极之间的静电电容 并且驻极体和第二电极之间的静电电容改变以输出电力。 降低第一电极和第二电极之间的静电电容的结构设置在第一电极和第二电极之间。

    Exhaust purification system for internal combustion engine
    70.
    发明授权
    Exhaust purification system for internal combustion engine 失效
    内燃机排气净化系统

    公开(公告)号:US08661789B2

    公开(公告)日:2014-03-04

    申请号:US13390610

    申请日:2009-11-18

    IPC分类号: F01N3/00 F01N3/10

    摘要: An exhaust purification system for an internal combustion engine capable of lean-burn driving comprises: an NSR catalyst disposed in an exhaust passageway; an SCR disposed downstream of the NSR catalyst; a NOx sensor, disposed downstream of the SCR, for producing output in response to NOx concentration; and rich-spike means for causing a rich-spike. When the NOx sensor has produced output indicative of a NOx concentration higher than a given NOx concentration, the system increases the amount of the NOx contained in the exhaust gas discharged during the rich-spike. Under a given high-load condition, the air-fuel ratio is made stoichiometric during the rich-spike caused at a particular timing. Under a given low-load condition, the amount of exhaust gas is increased during the rich-spike.

    摘要翻译: 一种能够进行稀薄燃烧驱动的内燃机的排气净化系统,其特征在于,具备:设置在排气通路内的NSR催化剂; 设置在NSR催化剂下游的SCR; 设置在SCR的下游的NOx传感器,用于响应于NOx浓度产生输出; 和丰富的尖峰意味着造成一个丰富的尖峰。 当NOx传感器已经产生表示NOx浓度高于给定NOx浓度的输出时,系统增加了在浓尖期间排出的废气中所含的NOx的量。 在给定的高负荷条件下,在特定时间引起的丰富尖峰期间,空燃比是化学计量的。 在给定的低负荷条件下,在高峰期,排气量增加。