Substrate processing apparatus
    61.
    发明授权

    公开(公告)号:US06511315B2

    公开(公告)日:2003-01-28

    申请号:US10047604

    申请日:2002-01-16

    申请人: Koji Hashimoto

    发明人: Koji Hashimoto

    IPC分类号: F27D300

    摘要: In a substrate processing apparatus, processing units are stacked in a multistage manner around a transport robot arranged at the center of a processing area for forming a processing part. In a second hierarchy, rotary coating units are arranged through an indexer and a transport robot. In a fourth hierarchy located above the second hierarchy, rotary developing units are stacked above the rotary coating units respectively. Multistage thermal processing units and an edge exposure unit are horizontally arranged above an interface mechanism part. Thus, a substrate processing apparatus capable of reducing the area for setting the same is provided.

    Detector for detecting frequencies in more than one band
    63.
    发明授权
    Detector for detecting frequencies in more than one band 有权
    用于检测多个频带中的频率的检测器

    公开(公告)号:US06476614B1

    公开(公告)日:2002-11-05

    申请号:US09581882

    申请日:2000-09-11

    IPC分类号: G01R3108

    CPC分类号: H01P5/185 H01P1/203

    摘要: A detector detects frequencies in two predetermined bands separately with respective predetermined coupling. The detector includes a first transmission line, and second and third transmission lines and disposed near the first transmission line. One end of the first transmission line is connected to a terminating resistor, and the other end of the first transmission line is connected to an anode terminal of a detecting diode through a wideband matching circuit. A cathode terminal of the detecting diode is connected to a load circuit.

    摘要翻译: 检测器以相应的预定耦合分开检测两个预定频带中的频率。 检测器包括第一传输线,以及设置在第一传输线附近的第二和第三传输线。 第一传输线的一端连接到终端电阻器,第一传输线的另一端通过宽带匹配电路连接到检测二极管的阳极端子。 检测二极管的阴极端子连接到负载电路。

    Method of reattaching a toner seal
    64.
    发明授权
    Method of reattaching a toner seal 有权
    重新安装调色剂密封件的方法

    公开(公告)号:US06445893B2

    公开(公告)日:2002-09-03

    申请号:US09887115

    申请日:2001-06-25

    IPC分类号: G03G1508

    CPC分类号: G03G15/0894 G03G2215/088

    摘要: A method of reattaching a toner seal to a toner frame having a developer containing portion for containing a developer therein, a developer supplying opening for supplying the developer therethrough from the developer containing portion, in order to seal the developer supplying opening, which method includes (a) the detaching step of detaching the already taken-up toner seal from a take-up spool for taking up the toner seal, (b) the sticking step of sticking the toner seal on the toner frame so as to seal the developer supplying opening, (c) the folding-back step of folding back the toner seal from the end portion of the stuck portion of the toner seal, and (d) the attaching step of attaching the free end portion of the folded-back toner seal to the take-up spool for taking up the toner seal to unseal the developer supplying opening so that the operation of a detecting lever for detecting that a predetermined amount of the toner seal has been taken up to unseal the developer supplying opening may be restricted by the toner seal.

    摘要翻译: 一种将调色剂密封件重新附接到具有用于容纳显影剂的显影剂容纳部分的调色剂框架的方法,用于将显影剂从显影剂容纳部分供给到显影剂供给口中的显影剂供给口,以便密封显影剂供应口,该方法包括 a)将已经取出的调色剂密封件从用于卷取调色剂密封件的卷取卷轴分离的拆卸步骤,(b)将调色剂密封件粘贴在调色剂框架上以将密封显影剂供给开口的粘贴步骤 (c)从调色剂密封件的粘贴部分的端部折回调色剂密封件的折回步骤,以及(d)将折回式调色剂密封件的自由端部分附接到调色剂密封件的安装步骤 用于卷取调色剂密封件以开启显影剂供应开口的卷取卷轴,使得用于检测预定量的调色剂密封件已经被吸收的检测杆的操作以开启显影剂供应 开口可能受到墨粉密封的限制。

    Amplifier
    65.
    发明授权
    Amplifier 失效
    放大器

    公开(公告)号:US6144260A

    公开(公告)日:2000-11-07

    申请号:US973600

    申请日:1998-03-02

    摘要: The present invention relates to an amplifier comprising a first amplification circuit (1) formed of a first transistor (10) and a second amplification circuit (2) formed of a second transistor (11), wherein a first filter (3) having a desired pass-band and a desired attenuation band is connected between the output section of the foregoing first amplification circuit (1) and the input section of the foregoing second amplification circuit (2), thereby reducing noises in the output.

    摘要翻译: PCT No.PCT / JP96 / 01564 Sec。 371日期:1998年3月23日 102(e)1998年3月23日PCT PCT 1996年6月7日PCT公布。 出版物WO96 / 42134 日期:1996年12月27日本发明涉及一种放大器,包括由第一晶体管(10)形成的第一放大电路(1)和由第二晶体管(11)形成的第二放大电路(2),其中第一滤波器 在上述第一放大电路(1)的输出部分和上述第二放大电路(2)的输入部分之间连接具有期望的通带和期望的衰减频带的3),从而减少输出中的噪声。

    Method for designing Levenson photomask
    66.
    发明授权
    Method for designing Levenson photomask 失效
    设计Levenson光掩模的方法

    公开(公告)号:US6004701A

    公开(公告)日:1999-12-21

    申请号:US46794

    申请日:1998-03-24

    CPC分类号: G03F1/30

    摘要: In a Levenson photomask design method of partially forming a plurality of opening patterns for passing incident light in a light-shielding film for shielding the incident light, and arranging, on some patterns, phase shifters, line segment pairs of different patterns which are adjacent to each other within a predetermined distance R are extracted in units of line segments obtained by dividing the patterns. A pattern within a predetermined distance S from the central point of the opposite region of a line segment pair of interest in a direction perpendicular to the line segments is obtained. The obtained pattern is subjected to a process simulation to obtain resolution easiness representing the easiness in resolving the adjacent patterns. On the basis of the resolution easiness obtained for the adjacent pattern pair within the distance R, a phase shifter is arranged in ascending order of resolution easiness to give a phase difference. Resolution suitable for the exposure condition used can be obtained by a simple method. When the shifter arrangement is determined in consideration of the resolution easiness, a high-resolution shifter arrangement can be realized for a Levenson phase shift mask.

    摘要翻译: 在莱文森光掩模设计方法中,部分地形成用于使入射光入射到遮光膜中的入射光的多个开口图案,用于屏蔽入射光,并且在某些图案上布置移相器,与不同图案相邻的线段对 以规定的距离R为单位,以通过划分图案而得到的线段为单位提取。 获得与垂直于线段的方向相关的线段对的相对区域的中心点的预定距离S内的图案。 对所获得的图案进行处理模拟以获得表示分辨相邻图案的容易性的分辨率容易度。 基于在距离R内对相邻图案对获得的分辨率容易度,移位器按分辨率的顺序排列顺序排列以给出相位差。 可以通过简单的方法获得适合于所使用的曝光条件的分辨率。 考虑到分辨率容易度来确定移位器装置时,可以实现对莱文森相移掩模的高分辨率移位器装置。

    Gene detection method
    67.
    发明授权
    Gene detection method 失效
    基因检测方法

    公开(公告)号:US5972692A

    公开(公告)日:1999-10-26

    申请号:US886161

    申请日:1997-06-30

    摘要: A single stranded nucleic acid probe having a base sequence complementary to the gene to be detected is immobilized onto the surface of an electrode or the tip of an optical fiber, and the nucleic probe is reacted with the gene sample denatured to a single stranded form, and then the nucleic acid probe hybridized with the gene is detected. In this procedure, to the reaction system consisting of the nucleic acid probe and the gene sample, a double stranded nucleic acid recognizing substance capable of binding specifically to the double stranded nucleic acid and being active electrochemically or optically is added. The detection of the nucleic acid probe is conducted by electrochemical or optical determination utilizing the electrode or optical fiber mentioned above. By this method, safer and more convenient detection of the gene is possible at a higher sensitivity even in a reduced time period.

    摘要翻译: 将具有与待检测基因互补的碱基序列的单链核酸探针固定在电极表面或光纤尖端上,使核酸探针与基因样品变性为单链形式, 然后检测与该基因杂交的核酸探针。 在该方法中,对于由核酸探针和基因样品构成的反应体系,添加能够特异性结合双链核酸并且以电化学或光学活性结合的双链核酸识别物质。 通过使用上述电极或光纤的电化学或光学测定来进行核酸探针的检测。 通过这种方法,即使在减少的时间内也可以以更高的灵敏度检测更基础的基因。

    Method for designing phase-shifting masks with automatization capability
    68.
    发明授权
    Method for designing phase-shifting masks with automatization capability 失效
    设计具有自动化功能的相移掩模的方法

    公开(公告)号:US5538815A

    公开(公告)日:1996-07-23

    申请号:US120386

    申请日:1993-09-14

    IPC分类号: G03F1/28 G03F9/00

    CPC分类号: G03F1/28

    摘要: A method for designing a phase-shifting mask in a manner that a phase shifter of the mask is arranged so that a phase difference between light transmitted through clear areas with the phase shifter and light transmitted through clear areas without the phase shifter is set to 180.degree. or further different combination of phase differences being such as 0.degree., 90.degree. and 270.degree.. The method includes the steps of: defining a threshold value in a manner that the threshold value falls within a range which is possible to resolve using the phase-shifting masks; measuring a distance between neighboring shapes of the clear area; storing adjacent relationship of the neighboring shapes whose distance is less than the threshold; and automatically placing the phase shifter on one of the neighboring shapes of the clear areas in a manner that mutually neighboring clear area have an opposite phase to each other.

    摘要翻译: 一种用于以掩模的移相器的方式设计移相掩模的方法,使得透过透过区域的光与移相器之间的相位差和透过透明区域而没有移相器的光被设置为180° DEG或相差的其他不同组合如0°,90°和270°。 该方法包括以下步骤:以阈值落在可以使用相移掩模解析的范围内的方式定义阈值; 测量透明区域的相邻形状之间的距离; 存储距离小于阈值的相邻形状的相邻关系; 并且以相互相邻的清除区域彼此具有相反的相位的方式自动地将移相器放置在透明区域的相邻形状中的一个上。

    High corrosion resistant amorphous alloys
    69.
    发明授权
    High corrosion resistant amorphous alloys 失效
    高耐蚀非晶合金

    公开(公告)号:US5460663A

    公开(公告)日:1995-10-24

    申请号:US231591

    申请日:1994-04-20

    CPC分类号: C22C45/10

    摘要: Amorphous alloys having an extremely high corrosion resistance comprise Cr and at least one element selected from Ta and Nb, as essential components, and are spontaneously passive owing to the formation of stable protective films, even in very corrosive environments such as poorly oxidizing concentrated hydrochloric acid. The amorphous alloy may further include one or more elements appropriately selected from other alloying elements of Al, Ti, Zr, Fe, Co, Ni, Cu, Mo and W. The amorphous alloys have advantageous properties, such as very high corrosion resistance, high corrosion resistance at elevated temperatures and high wear resistance, and, therefore are useful in chemical plants or other industrial and domestic applications.

    摘要翻译: 具有非常高的耐腐蚀性的非晶合金包括Cr和至少一种选自Ta和Nb的元素作为必要组分,并且由于形成稳定的保护膜而自发被动,即使在非常腐蚀的环境中,例如氧化不良的浓盐酸 。 非晶合金还可以包括从Al,Ti,Zr,Fe,Co,Ni,Cu,Mo和W的其他合金元素中适当选择的一种或多种元素。非晶合金具有优异的性能,例如非常高的耐腐蚀性,高 在高温下的耐腐蚀性和高耐磨性,因此在化工厂或其他工业和家用应用中是有用的。

    Amorphous alloys resistant against hot corrosion
    70.
    发明授权
    Amorphous alloys resistant against hot corrosion 失效
    耐热腐蚀的非晶态合金

    公开(公告)号:US5454884A

    公开(公告)日:1995-10-03

    申请号:US328416

    申请日:1994-10-25

    IPC分类号: C22C45/00 C22C45/08 C22C45/10

    CPC分类号: C22C45/00 C22C45/08

    摘要: An amorphous alloy which is resistant to hot corrosion in sulfidizing and oxidizing atmospheres at high temperatures, consisting of at least one element selected from the group of Al and Cr and at least one element selected from refractory metals of Mo. W, Nb and Ta, a portion of the set forth refractory metals being allowed to be substituted with at least one element selected from Ti, Zr, Fe, Co, Ni and Cu. The addition of Si further improves the alloy's oxidation resistance.

    摘要翻译: 一种耐高温硫化和氧化气氛中的热腐蚀的非晶合金,由选自Al和Cr中的至少一种元素和选自Mo.W,Nb和Ta的难熔金属中的至少一种元素组成, 所述难熔金属的一部分被允许被选自Ti,Zr,Fe,Co,Ni和Cu中的至少一种元素取代。 Si的添加进一步提高了合金的抗氧化性。