公开(公告)号：US20070076942A1

公开(公告)日：2007-04-05

申请号：US10554087

申请日：2004-04-20

申请人： Yasuo Yatsugake ,  Hitoshi Kato ,  Moyuru Yasuhara ,  Takashi Irie

发明人： Yasuo Yatsugake ,  Hitoshi Kato ,  Moyuru Yasuhara ,  Takashi Irie

IPC分类号： G06K9/00

CPC分类号： G01N21/9501 ,  G01N21/94

摘要： The present invention provides a system capable of automatically making a diagnosis of a semiconductor device manufacturing apparatus, based on a result of particle detection on a substrate such as a semiconductor wafer. In one preferred embodiment, the surface of the wafer is divided into square-shaped minute areas of 0.1 mm to 0.5 mm, and existence of particles in each minute area is inspected. Based on the inspection result, data, in which existence of particles in each minute area is correlated with the address thereof, is created. The surface of the wafer is divided into several tens to several hundreds of evaluation areas. A binarized data is assigned to each evaluation area, and is determined based on the fact that the number of the minute areas in which particles are detected included in the evaluation area is larger, or not larger than a predetermined reference value. A correspondence table, showing the relationship between binarized data arrangements and the causes of particle adhesion, which is made based on empirical rules or experimental results, is prepared. By applying the binarized data made based on the inspection result to the correspondence table, the cause of particle adhesion can be identified.

摘要翻译： 本发明提供一种能够基于半导体晶片等基板上的粒子检测结果自动进行半导体装置制造装置的诊断的系统。 在一个优选实施例中，将晶片的表面分成0.1mm至0.5mm的方形微小区域，并且检查每个微小区域中的颗粒的存在。 基于检查结果，创建了每个微小区域中的粒子的存在与其地址相关联的数据。 晶片的表面分为几十到几百个评估区域。 将二值化数据分配给每个评估区域，并且基于包括在评估区域中的检测粒子的微小区域的数量较大或不大于预定参考值的事实来确定。 准备了基于经验规则或实验结果的二值化数据配置与颗粒粘附原因之间的关系的对应表。 通过将基于检查结果的二值化数据应用于对应表，可以确定颗粒附着的原因。

公开(公告)号：US07089111B2

公开(公告)日：2006-08-08

申请号：US11193420

申请日：2005-08-01

申请人： Takashi Irie

发明人： Takashi Irie

IPC分类号： G01C21/34

CPC分类号： G01C21/36

摘要： A vehicle navigation system includes a road-between-guidance-target-points configuration determining unit (9) for determining a configuration of a road between two successive guidance target points whose information is extracted from information stored in a guidance target point storing unit (8). A continuous guidance threshold distance setting unit (10) sets a threshold distance for continuous guidance based on the road configuration by using a table or the like. A distance-between-guidance-target-points calculating unit (11) calculates a distance between the two successive guidance target points. When the calculated distance between the two successive guidance target points is shorter than the set threshold distance for continuous guidance, a route guidance unit (12) provides continuous guidance for users through a guidance unit (16).

摘要翻译： 车辆导航系统包括：引导目标点构成决定单元（9），用于根据存储在引导目标点存储单元（8）中的信息，确定从其提取信息的两个连续的引导对象点之间的道路的结构 ）。 连续引导阈值距离设定单元（10）通过使用表等来基于道路配置设置用于连续引导的阈值距离。 引导目标点计算单元（11）之间的距离计算两个连续引导目标点之间的距离。 当两个连续引导目标点之间的计算距离小于连续引导的设定阈值距离时，路径引导单元（12）通过引导单元（16）为用户提供持续的引导。

公开(公告)号：US20050261831A1

公开(公告)日：2005-11-24

申请号：US11193420

申请日：2005-08-01

申请人： Takashi Irie

发明人： Takashi Irie

IPC分类号： G09B29/00 ,  G01C21/00 ,  G01C21/26 ,  G01C21/34 ,  G01C21/36 ,  G08G1/0969 ,  G09B29/10

CPC分类号： G01C21/36

摘要： A vehicle navigation system includes a road-between-guidance-target-points configuration determining unit (9) for determining a configuration of a road between two successive guidance target points whose information is extracted from information stored in a guidance target point storing unit (8). A continuous guidance threshold distance setting unit (10) sets a threshold distance for continuous guidance based on the road configuration by using a table or the like. A distance-between-guidance-target-points calculating unit (11) calculates a distance between the two successive guidance target points. When the calculated distance between the two successive guidance target points is shorter than the set threshold distance for continuous guidance, a route guidance unit (12) provides continuous guidance for users through a guidance unit (16).

摘要翻译： 车辆导航系统包括：引导目标点构成决定单元（9），用于根据存储在引导目标点存储单元（8）中的信息，确定从其提取信息的两个连续的引导对象点之间的道路的结构 ）。 连续引导阈值距离设定单元（10）通过使用表等来基于道路配置设置用于连续引导的阈值距离。 引导目标点计算单元（11）之间的距离计算两个连续引导目标点之间的距离。 当两个连续引导目标点之间的计算距离小于连续引导的设定阈值距离时，路径引导单元（12）通过引导单元（16）为用户提供持续的引导。

公开(公告)号：US06798509B2

公开(公告)日：2004-09-28

申请号：US10162765

申请日：2002-06-06

申请人： Tsuyoshi Sonehara ,  Kyoko Kojima ,  Takashi Irie

发明人： Tsuyoshi Sonehara ,  Kyoko Kojima ,  Takashi Irie

IPC分类号： G01N2100

CPC分类号： G01N21/6456

摘要： The disclosed invention provides methods and instruments for fluorescence detection making it possible to separate and detect analytes of a plurality of species in a migration (separation) channel with length of the order of millimeters. Analyte samples disperse across the whole detection region of a migration channel filled with a sieving matrix. Electrodes located in contact with a power supply and the sieving matrix cause the analytes to electophoretically migrate at predetermined velocity V. The detection region is irradiated by excitation light whose intensity changes in a cycle equaling pitch p in the direction that the analytes move. Fluorescence emission from the analytes exposed to the excitation light is detected by a detector. Fluctuation &dgr;i (t) of output current from the detector is analyzed by a spectrum analyzer and the obtained spectrum is displayed. Florescence detection according to the invention is not affected by band broadening of analytes injected into the sample injection end of the migration channel.

摘要翻译： 所公开的发明提供用于荧光检测的方法和仪器，使得可以在长度为毫米数的迁移（分离）通道中分离和检测多个物种的分析物。 分析物样品分散在填充有筛分基质的迁移通道的整个检测区域。 与电源和筛分基体接触的电极使得分析物以预定的速度V电泳迁移。检测区域被激发光照射，其激发光以等于间距p的方向在分析物移动的方向上变化。 通过检测器检测暴露于激发光的分析物的荧光发射。 通过频谱分析仪分析来自检测器的输出电流的波动偏差（t），并显示所获得的频谱。 根据本发明的花期检测不受注入到迁移通道的样品注入端的分析物的带宽的影响。

公开(公告)号：US06514702B1

公开(公告)日：2003-02-04

申请号：US09670701

申请日：2000-09-28

申请人： Kazunori Okano ,  Hideki Kambara ,  Chihiro Uematsu ,  Hiroko Matsunaga ,  Takashi Irie ,  Tomoharu Kajiyama ,  Kenji Yasuda

发明人： Kazunori Okano ,  Hideki Kambara ,  Chihiro Uematsu ,  Hiroko Matsunaga ,  Takashi Irie ,  Tomoharu Kajiyama ,  Kenji Yasuda

IPC分类号： C12Q168

CPC分类号： B82Y30/00 ,  B01J19/0046 ,  B01J2219/00317 ,  B01J2219/00576 ,  B01J2219/00596 ,  B01J2219/00608 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00617 ,  B01J2219/00619 ,  B01J2219/00621 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00641 ,  B01J2219/00644 ,  B01J2219/00653 ,  B01J2219/00659 ,  B01J2219/00677 ,  B01J2219/00702 ,  B01J2219/00704 ,  B01J2219/00713 ,  B01J2219/00722 ,  B01L3/5085 ,  B01L3/5088 ,  B01L2300/0819 ,  B01L2400/0421 ,  C12Q1/6837 ,  C40B40/06 ,  C12Q2565/607 ,  C12Q2561/119

摘要： There are beforehand prepared a monomer having a reaction residue and a polynucleotide probe set comprising plural kinds of polynucleotide probes having a residue bonded to the reaction residue. The monomer is mixed with each kind of polynucleotide probes comprising any plural probes selected from the polynucleotide probe set. Each kind of the resultant mixtures is added to each of different small holes to make the mixture into gel matrix. Thus, a polynucleotide probe chip is produced. Sample DNA is forcibly migrated in the gels by electrophoresis. Laser light is projected onto the side face of the chip. The fluorescence emitted from the whole surface of the chip is collectively detected with a high-sensitive two-dimensional detector. Thus, the polynucleotide probe chip, holding various kinds of DNA probes, for detecting DNA can be provided. This chip has high hybridization-efficiency and makes high-sensitivity and high-speed DNA detection possible.

摘要翻译： 预先制备具有反应残基的单体和含有残基与反应残基连接的多种多核苷酸探针的多核苷酸探针组。 将单体与包含选自多核苷酸探针组的任何多个探针的各种多核苷酸探针混合。 将各种所得混合物加入每个不同的小孔中以使混合物成为凝胶基质。 因此，产生多核苷酸探针芯片。 样品DNA通过电泳在凝胶中强制迁移。 激光投射到芯片的侧面。 从芯片的整个表面发射的荧光由高灵敏度二维检测器共同检测。 因此，可以提供用于检测DNA的保持各种DNA探针的多核苷酸探针芯片。 该芯片具有高杂交效率，可实现高灵敏度和高速DNA检测。

公开(公告)号：US5744800A

公开(公告)日：1998-04-28

申请号：US477654

申请日：1995-06-07

申请人： Hiroshi Kakibayashi ,  Hisaya Murakoshi ,  Hidekazu Okuhira ,  Takashi Irie ,  Jiro Tokita ,  Keiichi Kanehori ,  Yasuhiro Mitsui

发明人： Hiroshi Kakibayashi ,  Hisaya Murakoshi ,  Hidekazu Okuhira ,  Takashi Irie ,  Jiro Tokita ,  Keiichi Kanehori ,  Yasuhiro Mitsui

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/26 ,  H01J2237/2617

摘要： A transmission electron microscope makes it possible to search for defects without applying an undesirable treatment to a specimen by using a reference specimen prepared separately from a specimen to be observed. A pair of specimen holders detachable from the column of the electron microscope are adjacently arranged at upper and lower stages respectively along an electron beam axis to position the specimens closely to each other in an electron beam illuminating position. The pair of holders can be independently set to or removed from the electron beam illuminating position. The specimen holders include devices for selectively finely adjusting the spacing between the specimens, the angle of the specimen with respect to the electron beam axis and with respect to a plane perpendicular to the electron beam axis.

摘要翻译： 透射电子显微镜使得可以通过使用与要观察的样品分开制备的参考样品，来对样品进行不期望的处理来搜索缺陷。 从电子显微镜柱分离的一对试样支架分别沿着电子束轴相邻地设置在上部和下部阶段，以使电极在照射位置彼此紧密地定位。 该对保持器可以独立地设置在电子束照明位置或从电子束照射位置移除。 样品架包括用于选择性地精细调节样品之间的间距，样品相对于电子束轴线的角度和相对于垂直于电子束轴线的平面的角度的装置。

公开(公告)号：US5485016A

公开(公告)日：1996-01-16

申请号：US231847

申请日：1994-04-25

申请人： Takashi Irie ,  Yasuhiro Mitsui ,  Kazuaki Mizokami ,  Katsumi Kuriyama

发明人： Takashi Irie ,  Yasuhiro Mitsui ,  Kazuaki Mizokami ,  Katsumi Kuriyama

IPC分类号： G01N27/62 ,  H01J49/04 ,  H01J49/10 ,  H01J49/26

CPC分类号： H01J49/168 ,  H01J49/0422 ,  H01J49/145

摘要： A mass spectrometer for analyzing trace impurities on a level between ppt and ppb contained in silicon material gas such as monosilane gas. The mass spectrometer includes an ion formation region, reaction region, and mass analysis region. Ion formation gas is introduced into the ion formation region and sample gas (silicon material gas) is introduced into the reaction region. The ion formation region ionizes ion formation gas by an ionizer and forms primary ions. When the pressure of ion formation gas is made higher than the pressure of sample gas, the ion formation gas flows into the reaction region from the ion formation region together with primary ions and is mixed with the sample gas. In the reaction region, an ion-molecule reaction is produced between the primary ions and trace impurities contained in the sample gas and the trace impurities contained in the sample gas are ionized. The ion intensity of trace impunities, the concentration of trace impurities in the sample gas is determined using a calibration curve. When the gas pressure in the reaction region is kept at almost 1 atmosphere, the reaction is promoted and when the ion-molecule reaction time is optimized according to the size of the reaction region and the voltage condition, impurities on a level between ppt and ppb can be detected and determined.

摘要翻译： 用于分析硅材料气体（如硅烷气体）中含有的ppt和ppb之间的痕量杂质的质谱仪。 质谱仪包括离子形成区域，反应区域和质量分析区域。 将离子形成气体引入离子形成区域，并将样品气体（硅材料气体）引入反应区域。 离子形成区域通过离子发生器离子化形成气体并形成初级离子。 当离子形成气体的压力高于样品气体的压力时，离子形成气体与一次离子一起从离子形成区域流入反应区域，并与样品气体混合。 在反应区域中，在原料离子和样品气体中含有的微量杂质之间产生离子分子反应，并将样品气体中所含的痕量杂质离子化。 使用校准曲线确定痕量缺陷的离子强度，样品气体中微量杂质的浓度。 当反应区域的气体压力保持在大致1气道时，促进反应，当根据反应区域的大小和电压条件优化离子分子反应时间时，ppt与ppb之间的杂质 可以被检测和确定。