公开(公告)号：US20090261252A1

公开(公告)日：2009-10-22

申请号：US12457734

申请日：2009-06-19

申请人： Masaki Hasegawa ,  Hisaya Murakoshi ,  Hiroshi Makino

发明人： Masaki Hasegawa ,  Hisaya Murakoshi ,  Hiroshi Makino

IPC分类号： G01N23/04

CPC分类号： H01J37/265 ,  G06T7/0004 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/29 ,  H01J2237/22 ,  H01J2237/24592

摘要： Because a mirror electron imaging type inspection apparatus for obtaining an inspection object image with mirror electrons has been difficult to optimize inspection conditions, since the image forming principles of the apparatus are different from those of conventional SEM type inspection apparatuses. In order to solve the above conventional problem, the present invention has made it possible for the user to examine such conditions as inspection speed, inspection sensitivity, etc. intuitively by displaying the relationship among the values of inspection speed S, inspection object digital signal image pixel size D, inspection object image size L, and image signal acquisition cycle P with use of a time delay integration method as a graph on an operation screen. The user can thus determine a set of values of a pixel size, an inspection image width, and a TDI sensor operation cycle easily with reference to the displayed graph.

公开(公告)号：US20090166557A1

公开(公告)日：2009-07-02

申请号：US11338843

申请日：2006-01-25

申请人： Hiroshi Makino ,  Zhaohui Cheng ,  Kenji Tanimoto ,  Hideo Todokoro

发明人： Hiroshi Makino ,  Zhaohui Cheng ,  Kenji Tanimoto ,  Hideo Todokoro

IPC分类号： G21K5/10 ,  G01N23/00

CPC分类号： H01J37/073 ,  H01J37/026 ,  H01J37/28 ,  H01J2237/0048 ,  H01J2237/0635 ,  H01J2237/24564 ,  H01J2237/2594

摘要： The invention solves charge nonuniformity of a specimen surface resulting from emission variation of a carbon nanotube electron source and individual difference of emission characteristics. During charge control processing, charge of the specimen surface is measured in real time. As means for solving charge nonuniformity resulting from nonuniformity of electron illumination density, electrons illuminating the specimen and the specimen are moved relatively to average electron illumination density. Moreover, an absorption current flowing into the specimen and the numbers of secondary electrons emitted from the specimen and of backscattered electrons are measured as means for monitoring charge of the specimen surface in real time.

摘要翻译： 本发明解决了由碳纳米管电子源的发射变化引起的样品表面的电荷不均匀性和发射特性的个体差异。 在充电控制处理期间，实时测量样品表面的电荷。 作为解决由电子照射密度不均匀引起的电荷不均匀的手段，照射样品和样品的电子相对于平均电子照射密度移动。 此外，测量流入样本的吸收电流和从样本和背散射电子发射的二次电子的数量作为用于实时监测样品表面的电荷的装置。

公开(公告)号：US07432503B2

公开(公告)日：2008-10-07

申请号：US11319721

申请日：2005-12-29

申请人： Toshifumi Honda ,  Hiroshi Makino

发明人： Toshifumi Honda ,  Hiroshi Makino

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/21 ,  H01J37/243 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

摘要： In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is taken by using a large beam current; a high-magnification image is taken by using a small beam current; control amounts for correcting a change in luminance, a focus deviation, misalignment, and visual field misalignment of taken images, which are generated due to a variation of a beam current are saved in advance in a memory of an overall control system; and these amounts are corrected every time the beam current is switched, thereby making it possible to take the images without any adjustment operation after switching the currents.

摘要翻译： 在本发明中，为了实现半导体晶片的测量，检查，缺陷检查等的扫描型电子显微镜中的图像检测时间的缩短和高质量图像检测，低倍率图像被采用 使用大束电流; 通过使用小束电流拍摄高倍率图像; 在整个控制系统的存储器中预先保存用于校正由于波束电流的变化而产生的拍摄图像的亮度变化，聚焦偏移，未对准和视场未对准的控制量; 并且每当切换电流时校正这些量，从而可以在切换电流之后进行没有任何调整操作的图像。

公开(公告)号：US20070272857A1

公开(公告)日：2007-11-29

申请号：US11698025

申请日：2007-01-26

申请人： Masaki Hasegawa ,  Hisaya Murakoshi ,  Hiroshi Makino

发明人： Masaki Hasegawa ,  Hisaya Murakoshi ,  Hiroshi Makino

IPC分类号： G01N23/00

CPC分类号： H01J37/265 ,  G06T7/0004 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/29 ,  H01J2237/22 ,  H01J2237/24592

摘要： Because a mirror electron imaging type inspection apparatus for obtaining an inspection object image with mirror electrons has been difficult to optimize inspection conditions, since the image forming principles of the apparatus are different from those of conventional SEM type inspection apparatuses. In order to solve the above conventional problem, the present invention has made it possible for the user to examine such conditions as inspection speed, inspection sensitivity, etc. intuitively by displaying the relationship among the values of inspection speed S, inspection object digital signal image pixel size D, inspection object image size L, and image signal acquisition cycle P with use of a time delay integration method as a graph on an operation screen. The user can thus determine a set of values of a pixel size, an inspection image width, and a TDI sensor operation cycle easily with reference to the displayed graph.

摘要翻译： 由于用于获得具有镜电子的检查对象图像的镜像电子成像型检查装置难以优化检查条件，因为该装置的图像形成原理与常规SEM型检查装置的图像形成原理不同。 为了解决上述常规问题，本发明使得用户可以通过显示检查速度S，检查对象数字信号图像的值之间的关系来直观地检查诸如检查速度，检查灵敏度等条件 像素尺寸D，检查对象图像尺寸L和图像信号采集周期P，使用时间延迟积分方法作为操作画面上的图形。 因此，用户可以参照所显示的图形容易地确定像素尺寸，检查图像宽度和TDI传感器操作循环的一组值。

公开(公告)号：US20070145787A1

公开(公告)日：2007-06-28

申请号：US11315240

申请日：2005-12-23

申请人： Atsushi Ikeda ,  Takashi Kikuta ,  Kentaro Hirose ,  Nobuyasu Bessho ,  Kinju Uchida ,  Samson Asfaw ,  Kenji Hori ,  Robert Gore ,  Hiroshi Makino

发明人： Atsushi Ikeda ,  Takashi Kikuta ,  Kentaro Hirose ,  Nobuyasu Bessho ,  Kinju Uchida ,  Samson Asfaw ,  Kenji Hori ,  Robert Gore ,  Hiroshi Makino

IPC分类号： B60J7/057

CPC分类号： B60J7/05

摘要： A sunroof device includes a roof panel having a first opening portion, a ceiling member having a second opening portion so as to face the first opening portion, a movable panel moved between a full-closed position and an open position, the movable panel passing through a half-closed position, a motor for driving the movable panel, a controlling means for controlling an operation of the motor, an operating member to be operated or released by a passenger in the vehicle, and a switch for inputting an operation signal for operating the motor, and inputting a stop signal for stopping the motor. The controlling means drives the motor until the movable panel reaches the full-closed position while moving towards the full-closed position by the operating member being operated even if the operating member is released after the movable panel reaches the half-closed position.

摘要翻译： 天窗装置包括具有第一开口部分的顶板，具有与第一开口部分相对的第二开口部分的顶板部件，在全闭合位置和打开位置之间移动的可移动板，可移动板通过 半闭合位置，用于驱动可动面板的电动机，用于控制电动机的操作的控制装置，由乘客在车辆中操作或释放的操作构件，以及用于输入操作信号的开关 电机，并输入停止信号，停止电机。 即使在可动面板到达半闭合位置之后操作构件被释放，控制装置驱动马达，直到可移动面板到达全闭合位置，同时由操作构件操作而向全闭合位置移动。

公开(公告)号：US20070069127A1

公开(公告)日：2007-03-29

申请号：US11478615

申请日：2006-07-03

申请人： Hirohito Okuda ,  Takashi Hirol ,  Hiroshi Makino

发明人： Hirohito Okuda ,  Takashi Hirol ,  Hiroshi Makino

IPC分类号： G21K7/00

CPC分类号： H01J37/21 ,  G01R31/307 ,  H01J37/244 ,  H01J37/29 ,  H01J2237/216 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/262

摘要： An apparatus and method for electron beam inspection with projection electron microscopy, is constructed so as to allow correction of changes in focus offsets due to changes in the electrically charged state particularly during inspection. The apparatus includes: a focus measure sensor unit; a focus measure calculation unit which calculates focus measure from the multiple image signals converted by the focus measure sensor unit; a focus position calculation unit which calculates the height of a confocal plane conjugate to the plane of convergence of a planar electron beam by an objective lens, on the basis of the calculated focus measure, and then calculates the focus position of the objective lens on the basis of the calculated height of the confocal plane; and a focus position correction unit which corrects the focus position of the objective lens according to the calculated focus position of the objective lens.

摘要翻译： 用投影电子显微镜进行电子束检查的装置和方法被构造成允许校正由于带电状态的变化引起的焦点偏移变化，特别是在检查期间。 该装置包括：焦距测量传感器单元; 焦点测量计算单元，其从由所述焦点测量传感器单元转换的多个图像信号计算焦点测量; 焦点位置计算单元，基于计算出的焦点测量，计算由物镜与平面电子束的会聚平面共轭的高度，然后计算物镜的聚焦位置 共焦平面计算高度的基础; 以及聚焦位置校正单元，其根据计算出的物镜的聚焦位置校正物镜的聚焦位置。

公开(公告)号：US20060243908A1

公开(公告)日：2006-11-02

申请号：US11452989

申请日：2006-06-15

申请人： Hiroyuki Shinada ,  Atsuko Takafuji ,  Takanori Ninomiya ,  Yuko Sasaki ,  Mari Nozoe ,  Hisaya Murakoshi ,  Taku Ninomiya ,  Yuji Kasai ,  Hiroshi Makino ,  Yutaka Kaneko ,  Kenji Tanimoto

发明人： Hiroyuki Shinada ,  Atsuko Takafuji ,  Takanori Ninomiya ,  Yuko Sasaki ,  Mari Nozoe ,  Hisaya Murakoshi ,  Taku Ninomiya ,  Yuji Kasai ,  Hiroshi Makino ,  Yutaka Kaneko ,  Kenji Tanimoto

IPC分类号： G21K7/00

CPC分类号： G01N23/225 ,  G01R31/307 ,  H01J37/28 ,  H01J2237/2817

摘要： An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.

摘要翻译： 使用扫描电子显微镜检查样品的装置包括样品台，用于扫描样品上的第一束电流的电子束的第一电子 - 光学系统，用于扫描第二电子束的电子束的第二电子 - 光学系统 光束电流小于样品上的第一光束电流，移动样品台的机构，设置在每个第一和第二电子光学系统中的检测二次电子的检测器。 第一电子 - 光学系统可在第一模式中操作，并且第二电子 - 光学系统可以以比第一模式更高的分辨率在第二模式中操作。 在第一模式中，在样品台连续移动时观察样品，在第二模式中，通过在样品台保持静止时使用检测器检测二次电子来观察样品。

公开(公告)号：US20060151700A1

公开(公告)日：2006-07-13

申请号：US11319721

申请日：2005-12-29

申请人： Toshifumi Honda ,  Hiroshi Makino

发明人： Toshifumi Honda ,  Hiroshi Makino

IPC分类号： G21K7/00

CPC分类号： G01N23/2251 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/21 ,  H01J37/243 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

摘要： In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is taken by using a large beam current; a high-magnification image is taken by using a small beam current; control amounts for correcting a change in luminance, a focus deviation, misalignment, and visual field misalignment of taken images, which are generated due to a variation of a beam current are saved in advance in a memory of an overall control system; and these amounts are corrected every time the beam current is switched, thereby making it possible to take the images without any adjustment operation after switching the currents.

摘要翻译： 在本发明中，为了实现半导体晶片的测量，检查，缺陷检查等的扫描型电子显微镜中的图像检测时间的缩短和高质量图像检测，低倍率图像被采取 使用大束电流; 通过使用小束电流拍摄高倍率图像; 在整个控制系统的存储器中预先保存用于校正由于波束电流的变化而产生的拍摄图像的亮度变化，聚焦偏移，未对准和视场未对准的控制量; 并且每当切换电流时校正这些量，从而可以在切换电流之后进行没有任何调整操作的图像。

公开(公告)号：US06857039B1

公开(公告)日：2005-02-15

申请号：US09615070

申请日：2000-07-12

申请人： Hiroshi Makino

发明人： Hiroshi Makino

IPC分类号： G06F3/00 ,  G06F13/40 ,  G11C7/10

CPC分类号： G06F13/4077

摘要： A data bus included in a bi-directional bus circuitry is divided into a first bus node and a second bus node by a repeater circuit. The repeater circuit includes a first tristate buffer for amplifying and transmitting data from the first bus node to the second bus node, and a second tristate buffer connected in reverse direction. When the data bus is not used, the first and second tristate buffers are both activated, and the repeater circuit functions as a latch circuit. Therefore, in the bi-directional bus circuitry, even when the data bus is not used, the potential level of the data bus can be prevented from being left unfixed, ensuring stable operation.

摘要翻译： 包括在双向总线电路中的数据总线通过中继器电路被分成第一总线节点和第二总线节点。 中继器电路包括用于放大和传输数据从第一总线节点到第二总线节点的第一三态缓冲器，以及反向连接的第二三态缓冲器。 当不使用数据总线时，第一和第二三态缓冲器都被激活，并且中继器电路用作锁存电路。 因此，在双向总线电路中，即使不使用数据总线，也可以防止数据总线的潜在电平不固定，确保稳定运行。

公开(公告)号：US06556071B2

公开(公告)日：2003-04-29

申请号：US10098432

申请日：2002-03-18

申请人： Hiromi Notani ,  Hiroshi Makino

发明人： Hiromi Notani ,  Hiroshi Makino

IPC分类号： G05F110

CPC分类号： H02M3/07 ,  H02M2001/0032 ,  Y02B70/16

摘要： On a sleep state, a voltage dropping circuit 2 supplies a power supply line VA1 with a voltage obtained by dropping a voltage of a power supply line VA2, instead of a voltage in accordance with ON state of a switch QA1. A power supply line GND has a voltage equal to the ground voltage. A charge pump circuit 10 outputs the ground voltage on an active state. The charge pump circuit 10 outputs a voltage which is lower than the ground voltage, on the sleep state. A source electrode and a substrate electrode are connected to the power supply lines VA1 and VA2 in each of PMOS transistors Q3 and Q4 of an internal circuit 1 (latch circuit), respectively. A source electrode is connected to the power supply line GND in each of nMOS transistors Q5 and Q6 of the internal circuit 1. A substrate electrode is supplied with the voltage which is outputted from the charge pump circuit, in each of the nMOS transistors Q5 and Q6 of the internal circuit 1. As a result, it is possible to reduce a leakage current withholding data in the internal circuit on the sleep state, even if the supply voltage drops on the sleep state.

摘要翻译： 在睡眠状态下，电压下降电路2向电源线VA1提供通过降低电源线VA2的电压而获得的电压，而不是根据开关QA1的导通状态的电压。 电源线GND具有等于接地电压的电压。 电荷泵电路10在接通状态下输出接地电压。 电荷泵电路10在睡眠状态下输出低于接地电压的电压。 源电极和基板电极分别连接到内部电路1（锁存电路）的PMOS晶体管Q3和Q4中的电源线VA1和VA2。 源电极连接到内部电路1的nMOS晶体管Q5和Q6中的每一个中的电源线GND。在每个nMOS晶体管Q5中向基板电极提供从电荷泵电路输出的电压， Q6。因此，即使电源电压下降到休眠状态，也可以在睡眠状态下减少内部电路中的泄漏电流保留数据。