摘要:
A method of forming a silicon-containing film deposited on a substrate, which comprises the steps of forming a gaseous atmosphere of at least one silicon compound selected from the group consisting of compounds represented by general formulas (A), (B), (C), (D), (E) and (F) in a deposition chamber containing the substrate, and applying light energy to the compound to exite and decompose the compound. The compounds of the general formulas (A)-(F) are defined below: (A) Si.sub.n H.sub.m X.sub.l (wherein X is a halogen atom, n is an integer of not less than 3, and m and l are integers of not less than 1, respectively, m+l=2n; if l is an integer of not less than 2, a plurality of X's may represent different halogen atoms) representing a cyclic silicon compound; (B) Si.sub.a X.sub.2a+2 (wherein X is a halogen atom and a is an integer of 1 to 6) representing a chain halogenated silicon compound; (C) Si.sub.b X.sub.2b (wherein X is a halogen atom and b is an integer of 3 to 6) representing a cyclic halogenated silicon compound; (D) Si.sub. c X.sub.d Y.sub.e (wherein X and Y are different halogen atoms, c is an integer of 3 to 6, d and e are integers of not less than 1, and d+e=2c) representing a cyclic halogenated silicon compound; (E) Si.sub.f Y.sub.g Y.sub.h (X and Y are different halogen atoms, f is an integer of 1 to 6, g and h are integers of not less than 1, and g+h=2f+2) representing a chain halogenated silicon compound; and (F) Si.sub.i H.sub.j X.sub.k (wherein X is a halogen atom, i,j and k are integers of not less than 1, and j+k=2i+2) representing a silicon compound.
摘要:
A method for forming a deposited film comprises forming a gaseous atmosphere of a silane compound represented by the general formula: Si.sub.n H.sub.2n+2 (n.gtoreq.1) and a halogen compound in a deposition chamber in which a substrate is arranged, and exciting and decomposing these compounds by utilization of photoenergy thereby to form the deposited film containing silicon atoms on said substrate.A method for forming a deposited film comprises forming a gaseous atmosphere of a silane compound represented by the general formula: Si.sub.n H.sub.2n+2 (n.gtoreq.1), a halogen compound and a compound containing atoms belonging too the group III or the group V of the periodic table in a deposition chamber in which a substrate is arranged, and exciting and decomposing these compounds by utilization of photoenergy thereby to form a deposited film containing silicon atoms and the atoms belonging to the group III or the group V of the periodic table on said substrate.
摘要:
A process for forming a deposition film, wherein a gaseous atmosphere of a silicon compound selected from(i) a silicon compound having at least one azo group directly bonded to a silicon atom and(ii) a silicon compound having at least one azide group directly bonded to a silicon atomis formed in a deposition chamber in which a substrate is placed, said compound is excited and decomposed utilizing light energy, and a deposition film containing silicon atoms is formed on said substrate.A compound containing atoms of a group III element or a group V element of the Periodic Table may be included in the atmosphere in the deposition chamber, the compounds excited and decomposed utilizing light energy, and a deposition film containing silicon atoms and the atoms in the group III or V element of the Periodic Table formed on said substrate.
摘要:
This invention consists in improvements in a buried-heterostructure laser with buried optical guide, and facilitates the oscillation of the laser in the fundamental mode thereof and also enhances the available percentage of production of the laser. An active layer and an optical guide layer are sandwiched between two cladding layers, to form an optical confinement region. The width of the semiconductor material assembly varies in the direction of the stacked layers, and the narrowest part thereof is located on a side opposite to the optical guide layer with reference to the position of the active layer. The side surface of said semiconductor material assembly parallel to the traveling direction of laser radiation is buried by a burying layer.
摘要:
A predetermined amount of exhaust gas recirculation is constantly provided through a first passageway (21) connected between an engine intake manifold (12) and an exhaust manifold (13). A vacuum actuated valve (19) constitutes a second passageway which is connected in parallel with the first passageway (21). The valve (19) is opened to allow exhaust gas recirculation through the second passageway except during idling and heavy load operation of an engine (11), thereby preventing excessive emission of smoke under these conditions.
摘要:
The present invention is directed to a to a diesel engine comprising a throttle valve disposed in an intake passage, which gradually opens in accordance with an increase in the level of the load of the engine. A recirculated exhaust gas conduit is also provided for recirculating a partial amount of the exhaust gas into the intake passage located at the downstream side side of the throttle valve so that the exhaust gas recirculation ratio could be reduced in accordance with an increase in the level of the engine load. In addition a solenoid valve is disposed in the recirculated exhaust gas conduit for stopping the recirculating of the exhaust gas when the engine is being operated under a heavy load.
摘要:
A lapped seam can having a high safety characteristic used as containers of soft drinks or beer wherein the cut-burrs at the end of the inner end portion of the can blank are completely removed so that micro-leak passages apt to occur in the lapped seam can are shut off, thereby permitting a long term storage of the can content without deterioration by preventing metal from being dissolved out from said inner end portion.
摘要:
A coated printing paper has a favorable offset printability, which can achieve good ink fixing and ink absorption properties even in ink jet printing, which has suitable dot diffusion even when printed by an ink jet printer using pigment ink, and can prevent the occurrence of white lines. The coated printing paper comprises a base paper and a coating layer which is applied to at least one surface of the base paper and contains a pigment and a binder as major components, wherein the base paper comprises a cationic compound, the coating layer contains, as a pigment, 50 parts by mass or more of ground calcium carbonate based on 100 parts by mass of total pigments in the coating layer, and the applied amount of the coating layer is 2.0 g/m2 to 7.0 g/m2, both inclusive, per surface.
摘要翻译:涂布印刷纸具有良好的印刷印刷性,即使在喷墨印刷中也能获得良好的油墨定影和油墨吸收性能,即使在使用颜料油墨的喷墨打印机印刷时也具有合适的点散射,并且可以防止白色 线条。 涂布印刷纸包括原纸和涂布层,其涂覆在原纸的至少一个表面上,并且含有颜料和粘合剂作为主要成分,其中原纸包含阳离子化合物,涂层含有作为 颜料,50质量份以上的研磨碳酸钙,相对于涂层中的总颜料100质量份,涂层的涂布量为2.0g / m 2〜7.0g / m 2, 表面。
摘要:
A high strength press-formed member includes a steel sheet constituting the member including a composition including by mass %, C: 0.12% to 0.69%, Si: 3.0% or less, Mn: 0.5% to 3.0%, P: 0.1% or less, S: 0.07% or less, Al: 3.0% or less, N: 0.010% or less, Si+Al: at least 0.7%, and remainder as Fe and incidental impurities, wherein a microstructure of the steel sheet includes martensite, retained martensite, and bainite containing bainitic ferrite, an area ratio of said martensite with respect to the entire microstructure of the steel sheet is 10% to 85%, at least 25% of said martensite is tempered martensite, content of retained austenite is 5% to 40%, area ratio of said bainitic ferrite in said bainite with respect to the entire microstructure of the steel sheet is at least 5%, total of area ratios of said martensite, said retained austenite, and said bainitic ferrite in said bainite with respect to the entire microstructure of the steel sheet is at least 65%, and average carbon concentration in the retained austenite is at least 0.65 mass %.
摘要:
An image forming apparatus to generate image data of print data containing a drawing object for reuse within a job includes a cache unit, an object parallel processing unit, a page parallel processing unit, and a processing control unit. The cache unit generates data based on the drawing object and caches generated data. The object parallel processing unit divides each page of the print data per drawing object unit and subjects a divided page to raster image processor (RIP) processing in parallel. The page parallel processing unit subjects the print data to the RIP processing per page unit. The processing control unit controls such that, in the print data, the object parallel processing unit executes processing sequentially from an initial page until the data having a value equal to or more than a threshold value is cached and the page parallel processing unit executes processing after the data is cached.