摘要:
In a semiconductor device including a plurality of memory cells, a deposition preventing film is formed on an interlayer insulating film in which a plurality of holes are formed, or a seed film is selectively formed on the interlayer insulating film and on an inner surface and a bottom surface of the holes. A film of Ru, Ir or Pt is deposited by chemical vapor deposition on the deposition preventing film, or on the interlayer insulating film by utilizing the seed film, under the condition where underlayer dependency occurs. In consequence, lower electrodes are formed in accordance with a pattern of the deposition preventing film or the seed film. A dielectric film is formed on the lower electrodes and the deposition preventing film at a predetermined temperature. The material of the lower electrodes does not lose conduction even when exposed to the predetermined temperature employed for forming the dielectric film. Upper electrodes are further formed on the dielectric film. The upper and lower electrodes and an oxide dielectric film together constitute capacitors of the memory cells.
摘要:
The new structure of a memory cell which enables avoiding the problem of a step without increasing the number of processes, the structure of a semiconductor integrated circuit in which a common part of the same substrate in a manufacturing process is increased and the structure of the semiconductor integrated circuit which allows measures for environment obstacles without increasing the number of processes are disclosed. Memory cell structure in which a capacitor is formed in the uppermost layer of plural metal wiring layers by connecting the storage node of the capacitor to a diffusion layer via plugs and pads is adopted. It is desirable that a dielectric film formed in a metal wiring layer under the uppermost layer and a supplementary capacitor composed of a storage node and a plate electrode are connected to the capacitor. It is also desirable that the plate electrode of the capacitor covers the chip.
摘要:
A semiconductor integrated circuit device and a method of manufacturing such a device provides the advantages that undulations are prevented from being produced in the polycrystal silicon plugs in the bit line contact holes and that the undesired phenomenon of transversally etching the silicide film at the contacts of the bit lines and the polycrystal silicon plugs is avoided. The bit lines BL formed at the time of forming a first wiring layer 18 is made of a laminate film having a titanium film 18a, a titanium nitride film 18b and a tungsten film 18c and a titanium silicide film 20 containing nitrogen or oxygen is formed in the contact areas of the bit lines BL and the plugs 19. A titanium silicide film 20 containing nitrogen or oxygen is also formed in the contact areas of the first wiring layer 18 and the semiconductor substrate 1. The titanium silicide film 20 may be replaced by a tungsten silicide film containing nitrogen or oxygen, a cobalt silicide film containing nitrogen or oxygen or a cobalt silicide film.
摘要:
An object of the present invention is to realize a resonator-type SAW filter permitting higher extra-passband suppressibility by minimizing occurrence of an unwanted spurious peak. A resonator-type SAW filter in which a plurality of SAW resonators each having reflectors and an interdigital transducer and being connected in series and parallel with the other, wherein in at least one of the SAW resonators, particularly in at least one of the SAW resonators connected in series with one another, an inter-electrode pitch &lgr;REF in the reflectors has a different value from an inter-electrode pitch &lgr;IDT in the interdigital transducers.
摘要:
A solid-liquid separation device includes a plurality of fixed members and movable members that are movably disposed between the adjacent fixed members, and a screw extending through the fixed members and the movable members in a state where the screw is not in contact with the fixed members and the movable members. The screw is rotationally driven about a center axis line thereof. A filtrate separated from an object is discharged to the outside of the solid-liquid separation portion through filtrate discharge gaps, and the object that has a reduced liquid content ratio is discharged from the outlet to the outside. In order to increase significantly a dewatering ratio, the movable members are formed to move while penetrating closer to the center axis line of the screw than an outer circumferential edge of the blade of the screw, without coming into contact with the screw.
摘要:
According to a method of generating a key of the present invention, a first device and a second device are first brought into contact with one vibrator. In this state, the vibrator generates vibration. A first acceleration sensor provided in the first device and a second acceleration sensor provided in the second device detect the vibration. Subsequently, the first device notifies the second device of a first feature value based upon the detection result of the first acceleration sensor. The second device notifies the first device of a second feature value based upon the detection result of the second acceleration sensor. Then the first device compares the notified second feature value with the first feature value and generates a key based upon the comparison result. The second device compares the notified first feature value with the second feature value and generates a key based upon the comparison result.
摘要:
The object of the present invention is to provide a food product for enhancing chewing ability having hardness, viscosity and so on suitable for the mouth of a small child from the age of one year to five years and eleven months, in particular a young child in the age of approximately one and one-half years who can utilize teeth for chewing after weaning. The food product for enhancing chewing ability of the present invention contains at least one type of main raw material selected from the flour group consisting of wheat flour, rice flour and starchy flour, and at least one type of secondary raw material selected from the group consisting of sorbitol and glycerol. This food product for enhancing chewing ability preferably has a breaking stress, breaking strain, brittleness stress and cohesiveness within predetermined ranges.
摘要:
The present inventors discovered that microfiltration retentates of whey, and products obtained by treating whey using centrifugation and/or ammonium sulfate precipitation, have the activity of inhibiting rotavirus infection. In one embodiment, the present invention provides a method of preventing rotavirus infection, comprising administering to a subject a composition that comprises a whey cream serum obtained by treating whey by centrifugation, or a dehydrated product thereof, wherein the antiviral activity of said composition is retained after heat treatment.
摘要:
Provided are a bismuth-based piezoelectric material whose insulation property is improved while its performance as a piezoelectric body is not impaired, and a piezoelectric device using the piezoelectric material. The piezoelectric material includes a perovskite-type metal oxide represented by the following general formula (1): Bix(Fe1-yCoy)O3 (1) where 0.95≦x≦1.25 and 0≦y≦0.30, and a root mean square roughness Rq (nm) of a surface of the piezoelectric material satisfies a relationship of 0
摘要:
A sheet winding apparatus for a vehicle includes a fixed shaft, a winding shaft rotatably supported at the fixed shaft, the winding shaft including a winding shaft-side fitting portion, a sheet whose end portion is fixed to the winding shaft, a supporting member inserted into the winding shaft, a torsion spring including a coil portion and biasing the winding shaft in a winding-up direction of the sheet, a soundproof tube, a supporting member-side fitting portion formed at the supporting member and engaging with the winding shaft-side fitting portion, a tube-side fitting portion formed at the soundproof tube and engaging with the winding shaft-side fitting portion, a holding portion formed at the supporting member and protruding in an axial direction of the supporting member, and a position-setting portion provided at the soundproof tube and sandwiched and held by the coil portion and the holding portion.