公开(公告)号：US20190237291A1

公开(公告)日：2019-08-01

申请号：US16381938

申请日：2019-04-11

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kengo ASAI ,  Hiroyasu SHICHI ,  Hisayuki TAKASU ,  Toru IWAYA

IPC: H01J37/08 ,  H01J37/305 ,  H01J37/30 ,  H01J27/04

CPC classification number: H01J37/08 ,  H01J27/04 ,  H01J37/30 ,  H01J37/305 ,  H01J2237/081 ,  H01J2237/082 ,  H01J2237/303

Abstract: To provide an ion gun of a penning discharge type capable of achieving a milling rate which is remarkably higher than that in the related art, an ion milling device including the same, and an ion milling method.An ion generation unit includes a cathode that emits electrons, an anode that is provided within the ion generation unit and has an inner diameter of 5.2 mm or less, and magnetic-field generation means using a permanent magnet of which a maximum energy product ranges from 110 kJ/m3 to 191 kJ/m3.

公开(公告)号：US09484176B2

公开(公告)日：2016-11-01

申请号：US14018028

申请日：2013-09-04

Applicant: Thomas Schenkel ,  Qing Ji ,  Arun Persaud ,  Amy V. Sy

Inventor： Thomas Schenkel ,  Qing Ji ,  Arun Persaud ,  Amy V. Sy

IPC: H01J7/24 ,  H01J27/04

CPC classification number: H01J27/04

Abstract: This disclosure provides systems, methods, and apparatus for ion generation. In one aspect, an apparatus includes an anode, a first cathode, a second cathode, and a plurality of cusp magnets. The anode has a first open end and a second open end. The first cathode is associated with the first open end of the anode. The second cathode is associated with the second open end of the anode. The anode, the first cathode, and the second cathode define a chamber. The second cathode has an open region configured for the passage of ions from the chamber. Each cusp magnet of the plurality of cusp magnets is disposed along a length of the anode.

Abstract translation: 本公开提供了用于离子产生的系统，方法和装置。 一方面，一种装置包括阳极，第一阴极，第二阴极和多个尖点磁体。 阳极具有第一开口端和第二开口端。 第一阴极与阳极的第一开口端相关联。 第二阴极与阳极的第二开口端相关联。 阳极，第一阴极和第二阴极限定室。 第二阴极具有用于离开室的通道的开放区域。 多个尖部磁体的每个尖头磁体沿着阳极的长度设置。

公开(公告)号：US09362078B2

公开(公告)日：2016-06-07

申请号：US13728964

申请日：2012-12-27

Applicant: Luke Perkins

Inventor： Luke Perkins

IPC: H01J7/24 ,  H01J27/04 ,  H01J37/08 ,  H05H3/06

CPC classification number: H01J27/04 ,  H01J37/08 ,  H01J2237/082 ,  H05H3/06

Abstract: An ion source for use in a radiation generator tube includes a back passive cathode electrode, a passive anode electrode downstream of the back passive cathode electrode, a magnet adjacent the anode, and a front passive cathode electrode downstream of the passive anode electrode. The front passive cathode electrode and the back passive cathode electrode define an ionization region therebetween. At least one field emitter array (FEA) cathode is configured to electrostatically discharge due to an electric field in the ion source. The back passive cathode electrode and the passive anode electrode, and the front passive cathode electrode and the passive anode electrode, have respective voltage differences therebetween, and the magnet generating a magnetic field, such that a Penning-type trap is produced to confine electrons from the electrostatic discharge to the ionization region. At least some of the electrons in the ionization region interact with an ionizable gas to create ions.

Abstract translation: 用于辐射发生器管的离子源包括后无源阴极电极，位于后无源阴极电极下游的无源阳极电极，与阳极相邻的磁体和在被动阳极电极下游的前无源阴极电极。 前无源阴极电极和后无源阴极电极在其间限定电离区域。 至少一个场发射极阵列（FEA）阴极被配置为由于离子源中的电场而静电放电。 后无源阴极电极和被动阳极电极以及前被动阴极电极和被动阳极电极之间具有各自的电压差，并且磁体产生磁场，使得产生Penning型阱以将电子从 静电放电到电离区域。 电离区域中的至少一些电子与可电离气体相互作用以产生离子。

公开(公告)号：US09214313B2

公开(公告)日：2015-12-15

申请号：US13082983

申请日：2011-04-08

Applicant: Joseph M. Matesa, Jr. ,  Paul E. Fischione

Inventor： Joseph M. Matesa, Jr. ,  Paul E. Fischione

IPC: H01J1/50 ,  H01J37/08 ,  H01J27/04 ,  H01J37/305

CPC classification number: H01J37/08 ,  H01J27/04 ,  H01J37/3056 ,  H01J2237/061 ,  H01J2237/0815

Abstract: An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam. A final electrode defines the output boundary of the ion source to provide un-perturbed drift of the ions into the vacuum chamber.

Abstract translation: 公开了一种离子源，其利用与一系列绝缘体隔离的独立供电的电极。 离子源包括具有中空内部的阳极电极，其中阳极设置在阴极和反阴极之间。 磁体或电磁铁通过阳极的孔沿轴向施加磁场。 气体以可控的压力被引入阳极区域。 离子源包括用于产生等离子体的阳极和阴极之间的第一电压差和用于从等离子体提取离子的阳极和反阴极之间的第二电压差，形成离子束，其优选地为窄 直径在低光束能量。 特别地，调整反阴极和阳极之间的电压差以控制提取的离子的初始光束发散。 具有独立电源的可选聚焦电极进一步聚焦离子束。 最终电极定义了离子源的输出边界，以提供离子到真空室中的无扰动漂移。

公开(公告)号：US20120104273A1

公开(公告)日：2012-05-03

申请号：US12917510

申请日：2010-11-02

Applicant: Geoffrey Ryding ,  Drew Arnold ,  William H. Park ,  Ronald Horner

Inventor： Geoffrey Ryding ,  Drew Arnold ,  William H. Park ,  Ronald Horner

IPC: H01J27/00

CPC classification number: H01J27/04 ,  H01J37/08 ,  H01J2237/082

Abstract: Multiple control electrodes are provided asymmetrically within the plasma chamber of an ion source at respective positions along the length of the plasma chamber. Biasing the control electrodes selectively can selectively enhance the ion extraction current at adjacent positions along the length of the extraction slit. A method of generating an ion beam is disclosed in which the strengths of the transverse electric fields at different locations along the length of the plasma chamber are controlled to modify the ion beam linear current density profile along the length of the slit. The method is used for controlling the uniformity of a ribbon beam.

Abstract translation: 多个控制电极在离子源的等离子体室内沿着等离子体室的长度的各个位置处非对称地设置。 选择性地偏压控制电极可以选择性地提高沿着提取狭缝的长度的相邻位置处的离子提取电流。 公开了一种产生离子束的方法，其中控制沿着等离子体室的长度的不同位置处的横向电场的强度，以沿着狭缝的长度修改离子束线性电流密度分布。 该方法用于控制带束束的均匀性。

公开(公告)号：US07566883B2

公开(公告)日：2009-07-28

申请号：US11622989

申请日：2007-01-12

Applicant: David M. Burtner ,  Scott A. Townsend ,  Daniel E. Siegfried

Inventor： David M. Burtner ,  Scott A. Townsend ,  Daniel E. Siegfried

IPC: H01J49/10 ,  H01J37/08 ,  H01J7/24

CPC classification number: H01J27/022 ,  H01J27/04 ,  H01J27/146 ,  H01J2237/002 ,  H01J2237/08

Abstract: One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.

Abstract translation: 一个或多个热转印片可以在离子源中容易地移除和替换。 离子源具有可移除的阳极组件，其包括热分解片，其是可分离的并且与基底组件相容以便于维护阳极组件的可消耗部件。 热转印片材可以介于阳极组件内的消耗部件之间。 热转印片材可以是导热的并且是电绝缘的或导电的。

公开(公告)号：US20070125966A1

公开(公告)日：2007-06-07

申请号：US11622989

申请日：2007-01-12

Applicant: David Burtner ,  Scott Townsend ,  Daniel Siegfried

Inventor： David Burtner ,  Scott Townsend ,  Daniel Siegfried

IPC: H01J37/08

CPC classification number: H01J27/022 ,  H01J27/04 ,  H01J27/146 ,  H01J2237/002 ,  H01J2237/08

Abstract: One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.

Abstract translation: 一个或多个热转印片可以在离子源中容易地移除和替换。 离子源具有可移除的阳极组件，其包括热分解片，其是可分离的并且与基底组件相容以便于维护阳极组件的可消耗部件。 热转印片材可以介于阳极组件内的消耗部件之间。 热转印片材可以是导热的并且是电绝缘的或导电的。

公开(公告)号：US06929725B2

公开(公告)日：2005-08-16

申请号：US10655896

申请日：2003-09-04

Applicant: Manfred Friedrich ,  Horst Tyrroff

Inventor： Manfred Friedrich ,  Horst Tyrroff

IPC: H01J27/04 ,  C23C14/34

CPC classification number: H01J27/04

Abstract: A sputter ion source includes an ionizer; a sputter cathode, including a cathode, a sputter insert, and a shielding cap; a forming electrode; cathode insulator; a hollow, cylindrical shielding cathode, surrounding the sputter cathode, and tapered rotationally symmetrically in the region of the sputter insert; and a vacuum-tight housing for enclosing all of the foregoing. The sputter ion source has a prolonged operating life, low maintenance costs, and prevents atomization of parts of the ion source, for generating negative ions, in the vicinity of the cathode insert.

Abstract translation: 溅射离子源包括电离器; 溅射阴极，包括阴极，溅射插入件和屏蔽盖; 成形电极; 阴极绝缘子; 围绕溅射阴极的中空的圆柱形屏蔽阴极，并且在溅射插入件的区域中旋转对称地成锥形; 以及用于封闭所有上述内容的真空密封外壳。 溅射离子源具有延长的使用寿命，低维护成本，并且防止在阴极插件附近产生负离子的离子源部分的雾化。

公开(公告)号：US20030218429A1

公开(公告)日：2003-11-27

申请号：US10442283

申请日：2003-05-21

Applicant: NISSIN ELECTRIC CO., LTD.

Inventor： Toshiaki Kinoyama

IPC: H01J007/24

CPC classification number: H01J27/04 ,  H01J27/20

Abstract: In an ion source, within a support body which supports a plasma production chamber for producing a plasma on the basis of an ion source flange, a cavity is provided ranging from a position near the plasma production chamber to a position near the ion source flange. The cavity serves as a cooling medium passage which introduces a cooling medium to a position near the plasma production chamber to cool the plasma production chamber. The plasma production chamber is cooled at a position very near it by the cooling medium. Therefore, temperature of the plasma production chamber at the time of plasma production is kept at low temperatures.

Abstract translation: 在离子源中，在基于离子源凸缘的支撑等离子体生产室的支撑体内，从等离子体生成室附近的位置到靠近离子源凸缘的位置设置空腔。 该空腔用作冷却介质通道，其将冷却介质引入等离子体生产室附近的位置以冷却等离子体生产室。 等离子体生产室在冷却介质非常接近它的位置被冷却。 因此，等离子体生成时的等离子体生成室的温度保持在低温。

公开(公告)号：US20020029746A1

公开(公告)日：2002-03-14

申请号：US09847404

申请日：2001-05-03

Applicant: NISSIN ELECTRIC CO., LTD.

Inventor： Takatoshi Yamashita

IPC: C23C016/00

CPC classification number: H01J37/08 ,  H01J27/04 ,  H01J2237/31701

Abstract: This ion source 2 has the heating furnace 4 for heating a solid material 6 to produce a vapor 8, the plasma production vessel 16 for producing a plasma 24 by ionizing this vapor 8, and the vapor conduit tube 10 connecting both the heating furnace 4 and the plasma production vessel 16. In this ion source 2, using indium fluoride 6a as the solid material 6, an ion beam 30 containing indium ions is led out, while the temperature of the heating furnace 4 is kept in a range from 450null to 1170null C., and below the temperature of the plasma production vessel 16.

Abstract translation: 该离子源2具有用于加热固体材料6以产生蒸汽8的加热炉4，用于通过使该蒸汽8离子来产生等离子体24的等离子体生产容器16和连接加热炉4和 在该离子源2中，使用氟化铟6a作为固体材料6，引出含有铟离子的离子束30，而加热炉4的温度保持在450〜 1170℃，低于等离子体生产容器16的温度。