公开(公告)号：US07172916B2

公开(公告)日：2007-02-06

申请号：US10701552

申请日：2003-11-06

申请人： Kyu-dong Jung ,  Chan-Bong Jun ,  Hyung Choi ,  Seok-jin Kang ,  Seog-woo Hong ,  Seok-whan Chung ,  Moon-chul Lee ,  Eun-sung Lee

发明人： Kyu-dong Jung ,  Chan-Bong Jun ,  Hyung Choi ,  Seok-jin Kang ,  Seog-woo Hong ,  Seok-whan Chung ,  Moon-chul Lee ,  Eun-sung Lee

IPC分类号： H01L21/00

CPC分类号： B81C1/00285

摘要： A method and apparatus for vacuum-mounting at least one micro electro mechanical system (MEMS) on a substrate includes a gas injecting section for injecting an inert gas into a vacuum chamber; a substrate aligning section for aligning a semiconductor substrate and a cover, the cover having a cavity formed therein and a getter attached to an interior surface of the cavity; a bonding section for bonding the semiconductor substrate and the cover together; and a controlling section for controlling the substrate aligning section to align the semiconductor and the cover, for controlling the gas injecting section to inject the inert gas into the vacuum chamber, and for controlling the bonding section to bond the semiconductor substrate and the cover together after the inert gas is injected.

摘要翻译： 用于真空安装至少一个微机电系统（MEMS）在基板上的方法和装置包括用于将惰性气体注入真空室的气体注入部分; 用于对准半导体衬底和盖的衬底对准部分，所述盖具有形成在其中的空腔和附着到腔的内表面的吸气剂; 用于将半导体衬底和盖结合在一起的接合部分; 以及控制部分，用于控制衬底对准部分以对准半导体和盖子，用于控制气体注入部分以将惰性气体注入真空室中，并且用于控制接合部分将半导体衬底和盖子结合在一起，之后 注入惰性气体。

公开(公告)号：US20060211186A1

公开(公告)日：2006-09-21

申请号：US11156287

申请日：2005-06-17

申请人： Yun Chun ,  Hyung Choi

发明人： Yun Chun ,  Hyung Choi

IPC分类号： H01L21/8234 ,  H01L21/4763 ,  H01L21/3205

CPC分类号： H01L21/823437 ,  H01L21/823481

摘要： Disclosed herein is a method for forming a gate in a semiconductor device, which can improve the characteristics of the device. The method comprises the steps of: providing a substrate having active and field regions; selectively etching a portion of the active region to form a trench; forming on the substrate including the trench an amorphous conductive film for forming a gate; subjecting the resulting structure to an annealing process so as to convert the amorphous conductive film into a crystalline conductive film; and selectively etching the crystalline conductive film so as to form a gate covering the corner portion of the trench.

摘要翻译： 这里公开了一种用于在半导体器件中形成栅极的方法，其可以改善器件的特性。 该方法包括以下步骤：提供具有活性和场区的衬底; 选择性蚀刻有源区的一部分以形成沟槽; 在包括沟槽的基板上形成用于形成栅极的非晶导体膜; 对所得到的结构进行退火处理，以将非晶导电膜转化为结晶导电膜; 并且选择性地蚀刻结晶导电膜以形成覆盖沟槽的角部的栅极。

公开(公告)号：US20060170520A1

公开(公告)日：2006-08-03

申请号：US11324303

申请日：2006-01-04

申请人： Byeoung-ju Ha ,  Seog-woo Hong ,  In-sang Song ,  Hyung Choi

发明人： Byeoung-ju Ha ,  Seog-woo Hong ,  In-sang Song ,  Hyung Choi

IPC分类号： H03H9/54

CPC分类号： H03H3/02 ,  H03H9/174 ,  Y10T29/42

摘要： A film bulk acoustic resonator (FBAR) including a substrate having an etched air gap therethrough; a resonance part having a first electrode, a piezoelectric film and a second electrode which are laminated in turn above the air gap; and an etching resistance layer disposed between the air gap and the resonance part to limit an etching depth in forming the air gap, thereby preventing damage to the resonance part.

公开(公告)号：US20060134855A1

公开(公告)日：2006-06-22

申请号：US11154384

申请日：2005-06-15

申请人： Hyung Choi ,  Jong Park ,  Kee Lee ,  Jong Lee

发明人： Hyung Choi ,  Jong Park ,  Kee Lee ,  Jong Lee

IPC分类号： H01L21/8242 ,  H01L21/20

CPC分类号： H01L27/10814 ,  H01L27/10855 ,  H01L28/75 ,  H01L28/91

摘要： A method for forming a capacitor of a semiconductor device includes forming a first insulation layer having a storage node plug on a semiconductor substrate; forming an etch stop layer and a second insulation layer sequentially on the substrate having the first insulation layer; forming a hole exposing a portion of the storage node plug by selectively etching the second insulation layer by using the etch stop layer; recessing a portion of the storage node plug exposed by the hole; forming a barrier metal layer on a surface of the recessed storage node plug; forming a storage node electrode connected to the storage node plug through the barrier metal layer in the hole; and forming a dielectric layer and a metal layer for a plate electrode sequentially on the storage node electrode.

摘要翻译： 一种形成半导体器件的电容器的方法包括在半导体衬底上形成具有存储节点插头的第一绝缘层; 在具有第一绝缘层的基板上依次形成蚀刻停止层和第二绝缘层; 通过使用所述蚀刻停止层选择性地蚀刻所述第二绝缘层，形成暴露所述存储节点插塞的一部分的孔; 使由孔露出的存储节点插头的一部分凹陷; 在所述凹形存储节点插塞的表面上形成阻挡金属层; 形成通过所述孔中的所述阻挡金属层与所述存储节点插头连接的存储节点电极; 以及在所述存储节点电极上依次形成用于平板电极的电介质层和金属层。

公开(公告)号：US20050256590A1

公开(公告)日：2005-11-17

申请号：US10500004

申请日：2002-12-24

申请人： Hyung Choi

发明人： Hyung Choi

IPC分类号： G06F13/00 ,  G06F19/00 ,  G08C19/28 ,  H04L29/08 ,  H04M11/00 ,  H04Q9/00 ,  G05B11/01

CPC分类号： H04L67/34 ,  G08C2201/21

摘要： The present invention relates to a system and method for downloading remote control data using the Internet. In the system and method, a server unit is provided with remote control data, a user selects required remote control data through a client personal computer and a remote control code transmitting system, and the selected data is transmitted to a remote controller in a wired or wireless manner. In accordance with the present invention, the user can appropriately utilize a single remote controller for various apparatuses.

摘要翻译： 本发明涉及使用因特网下载遥控数据的系统和方法。 在系统和方法中，向服务器单元提供远程控制数据，用户通过客户端个人计算机和遥控代码传输系统选择所需的遥控数据，并且所选择的数据以有线或 无线方式。 根据本发明，用户可以适当地利用单个遥控器用于各种装置。

公开(公告)号：US20050169570A1

公开(公告)日：2005-08-04

申请号：US11033720

申请日：2005-01-13

申请人： Yong-sung Kim ,  Seok-whan Chung ,  Jae-ho You ,  Hyung Choi ,  Woong-lin Hwang

发明人： Yong-sung Kim ,  Seok-whan Chung ,  Jae-ho You ,  Hyung Choi ,  Woong-lin Hwang

IPC分类号： H01S5/022 ,  G02B6/12 ,  G11B7/12 ,  G11B7/135 ,  G11B7/22

CPC分类号： G11B7/1362 ,  G11B7/123 ,  G11B7/22 ,  H01L2224/81 ,  H01S5/02248 ,  H01S5/02292

摘要： A micro optical bench structure and a method of manufacturing a micro optical bench structure are provided. The micro optical bench structure includes: a lower substrate; an upper substrate which is bonded to the lower substrate, and has a through-hole for exposing the lower substrate; and a first optical device which is installed at the lower substrate, and units relating to the first optical device.

摘要翻译： 提供微型光学台架结构和制造微型光学台架结构的方法。 微型光学台架结构包括：下基板; 上基板，其结合到下基板，并具有用于使下基板曝光的通孔; 以及安装在下基板上的第一光学装置和与第一光学装置相关的单元。

公开(公告)号：US06823099B2

公开(公告)日：2004-11-23

申请号：US09984735

申请日：2001-10-31

申请人： Jin-hwan Kim ,  Hyung Choi

发明人： Jin-hwan Kim ,  Hyung Choi

IPC分类号： G02B635

CPC分类号： G02B6/3582 ,  C09D11/328 ,  G02B6/3514 ,  G02B6/3546

摘要： An optical bench with improved structure, in which tolerance for misalignment of optical elements becomes great with shortened optical path, the optical bench including a substrate and input and output optical fibers arranged on the substrate with a predetermined separation gap therebetween, where far ends of the input and output optical fibers form a zigzag pattern to guide input and output beams. Input and output optical elements are arranged at the far end of each input and output optical fiber, respectively, condensing and/or diverging the input and output beams. Micro-mirrors receive the input beam from the input optical elements and reflecting the received input beam toward predetermined channels.

摘要翻译： 具有改进结构的光学台架，其中光学元件的未对准偏差随着光路的缩短而变大，光学台架包括基板和布置在基板上的输入和输出光纤，其间具有预定的间隔，其中远端 输入和输出光纤形成Z字形图案以引导输入和输出光束。 输入和输出光学元件分别布置在每个输入和输出光纤的远端，会聚和/或分散输入和输出光束。 微镜从输入光学元件接收输入光束并将接收的输入光束反射到预定的通道。

公开(公告)号：US08525862B2

公开(公告)日：2013-09-03

申请号：US12923719

申请日：2010-10-05

申请人： Seok-jin Kang ,  Hyung Choi ,  Eung-yeoul Yoon

发明人： Seok-jin Kang ,  Hyung Choi ,  Eung-yeoul Yoon

IPC分类号： B41J2/45 ,  B41J27/00 ,  B41J2/435

CPC分类号： B41J2/451 ,  H01L2224/16

摘要： A lens integrated light emitting diode array, a line printer head using the light emitting diode array, and a method of manufacturing the light emitting diode array. The light emitting diode array includes a plurality of light emitting diodes formed on a surface of a transparent substrate and a plurality of lenses formed on another surface opposite to the surface of the transparent substrate, wherein the plurality of light emitting diodes are divided into a plurality of groups to be arranged to respectively correspond to the plurality of lenses.

摘要翻译： 透镜集成发光二极管阵列，使用发光二极管阵列的行式打印头，以及制造发光二极管阵列的方法。 发光二极管阵列包括形成在透明基板的表面上的多个发光二极管和形成在与透明基板的表面相对的另一表面上的多个透镜，其中多个发光二极管被分成多个 的组被分别对应于多个透镜。

公开(公告)号：US08100511B2

公开(公告)日：2012-01-24

申请号：US12250749

申请日：2008-10-14

申请人： Kyong-il Kim ,  Sung-joon Park ,  Jun-woo Suh ,  Hyung Choi

发明人： Kyong-il Kim ,  Sung-joon Park ,  Jun-woo Suh ,  Hyung Choi

IPC分类号： B41J2/05 ,  B41J2/04 ,  H05B3/00 ,  C23C14/00

CPC分类号： B41J2/1639 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1626 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2202/03 ,  C23C14/0676 ,  Y10T29/49083

摘要： A heater of a thermal inkjet printhead. The heater is formed of tantalum aluminum oxynitride (Ta—Al—ON), wherein the tantalum aluminum oxynitride is formed of about 30 to about 60 atomic % tantalum, about 10 to about 30 atomic % aluminum, about 5 to about 30 atomic % oxygen, and about 5 to about 30 atomic % nitrogen.

摘要翻译： 热喷墨打印头的加热器。 加热器由钽氮氧化铝（Ta-Al-ON）形成，其中钽铝氧氮化物由约30至约60原子％的钽，约10至约30原子％的铝，约5至约30原子％的氧， ，和约5至约30原子％的氮气。

公开(公告)号：US20110097113A1

公开(公告)日：2011-04-28

申请号：US12923719

申请日：2010-10-05

申请人： Seok-jin Kang ,  Hyung Choi ,  Eung-yeoul Yoon

发明人： Seok-jin Kang ,  Hyung Choi ,  Eung-yeoul Yoon

IPC分类号： G03G15/04 ,  H01L33/08 ,  H01L33/60

CPC分类号： B41J2/451 ,  H01L2224/16

摘要： A lens integrated light emitting diode array, a line printer head using the light emitting diode array, and a method of manufacturing the light emitting diode array. The light emitting diode array includes a plurality of light emitting diodes formed on a surface of a transparent substrate and a plurality of lenses formed on another surface opposite to the surface of the transparent substrate, wherein the plurality of light emitting diodes are divided into a plurality of groups to be arranged to respectively correspond to the plurality of lenses.

摘要翻译： 透镜集成发光二极管阵列，使用发光二极管阵列的行式打印头，以及制造发光二极管阵列的方法。 发光二极管阵列包括形成在透明基板的表面上的多个发光二极管和形成在与透明基板的表面相对的另一表面上的多个透镜，其中多个发光二极管被分成多个 的组被分别对应于多个透镜。