MOTION GUIDE DEVICE AND SCREW DEVICE
    72.
    发明申请
    MOTION GUIDE DEVICE AND SCREW DEVICE 审中-公开
    运动指南装置和螺丝装置

    公开(公告)号:US20120073396A1

    公开(公告)日:2012-03-29

    申请号:US13375149

    申请日:2011-05-21

    IPC分类号: F16H25/12 F16C33/10 F16C29/06

    摘要: Provided are a motion guide device and a screw device each having a cover for protecting the device against moisture, such as coolant, and powder dust. The motion guide device has a raceway member 11, a moving member main body 21 mounted on the raceway member 11 through a plurality of rolling elements and cap members 22 attached to respective end surfaces of the moving member main body 21 in a relative moving direction. A seal cover 50 is provided having a cover main body 51 that covers each of the cap members 22 and a seal section 55 that is provided between the cover main body 51 and a cap member-side end surface of the moving member main body 21 to stop a gap between the cap member-side end surface of the moving member main body 21 and the cover main body 51. This structure makes it possible to reliably prevent any foreign material, such as powder dust or swarf, and moisture, such as coolant, from getting into the inside of the moving member 20.

    摘要翻译: 提供了一种运动引导装置和螺旋装置,每个具有用于保护装置防止湿气(例如冷却剂)和粉尘的盖的运动引导装置和螺钉装置。 运动引导装置具有滚道构件11,移动构件主体21,其通过多个滚动元件安装在滚道构件11上,并且在相对移动方向上安装在移动构件主体21的相应端面上的盖构件22。 密封盖50设置有覆盖盖体22的盖主体51和设置在盖主体51和移动部件主体21的盖部件侧端面之间的密封部55, 停止移动构件主体21的盖构件侧端面与盖主体51之间的间隙。这种结构使得可以可靠地防止诸如粉尘或切屑的任何异物和诸如冷却剂的湿气 从进入移动构件20的内部。

    Process for fabricating piezoelectric element
    74.
    发明授权
    Process for fabricating piezoelectric element 有权
    压电元件制造工艺

    公开(公告)号:US08006357B2

    公开(公告)日:2011-08-30

    申请号:US11813551

    申请日:2006-02-15

    摘要: In a production method of a piezoelectric element, an unneeded electric field is prevented from being applied to a piezoelectric thin film layer during the production process, resulting in a high performance piezoelectric element production method. The production method includes a first process for depositing an under electrode layer, a piezoelectric thin film layer and an upper electrode layer successively on a substrate such that the under electrode layer and the upper electrode layer form a short-circuit, a second process, after the first process, for etching including dry etching, the second process commenced while the under electrode layer and the upper electrode layer are short-circuited, a third process, after the second process, for polarizing by applying a voltage across the under electrode layer and the upper electrode layer, a fourth process, after the third process, for individualizing each piezoelectric element.

    摘要翻译: 在压电元件的制造方法中,在制造工序中,不需要的电场被防止施加于压电薄膜层,从而形成高性能的压电元件的制造方法。 该制造方法包括:在基板上依次沉积下电极层,压电薄膜层和上电极层的第一工艺,使得下电极层和上电极层形成短路,第二工序后 第一工艺,用于蚀刻包括干蚀刻,第二工艺在下电极层和上电极层短路的同时开始;第三工序,在第二工艺之后,通过施加电压跨越下电极层和 上电极层,第四工序,第三工序后,用于使各压电元件个体化。

    PROCESS FOR FABRICATING PIEZOELECTRIC ELEMENT
    76.
    发明申请
    PROCESS FOR FABRICATING PIEZOELECTRIC ELEMENT 有权
    制造压电元件的工艺

    公开(公告)号:US20100125988A1

    公开(公告)日:2010-05-27

    申请号:US11813551

    申请日:2006-02-15

    IPC分类号: H01L41/22

    摘要: A method for fabricating a piezoelectric element capable of ensuring high piezoelectric characteristics by preventing generation of unnecessary electric field in a piezoelectric thin film layer during the fabrication process. The method for fabricating a piezoelectric element comprises a first step for depositing a lower electrode layer, a piezoelectric thin film layer and an upper electrode layer sequentially on a substrate, a second step for performing etching including dry etching, a third step for performing polarization by applying a voltage between the lower electrode layer and the upper electrode layer, and a fourth step for segmenting into individual piezoelectric elements wherein the lower electrode layer and the upper electrode layer are held in short circuit state at least when dry etching is performed.

    摘要翻译: 一种制造压电元件的方法,其能够通过在制造过程中防止在压电薄膜层中产生不必要的电场而确保高的压电特性。 制造压电元件的方法包括:第一步骤,用于在衬底上依次沉积下电极层,压电薄膜层和上电极层;第二步骤,用于执行包括干蚀刻的蚀刻;第三步骤,用于通过 在下电极层和上电极层之间施加电压,以及第四步骤,用于分割成各个压电元件,其中至少在进行干蚀刻时,下电极层和上电极层保持在短路状态。

    Optical stacked structure inspecting method and optical stacked structure inspecting apparatus
    77.
    发明授权
    Optical stacked structure inspecting method and optical stacked structure inspecting apparatus 失效
    光学层叠结构检查方法和光学堆叠结构检查装置

    公开(公告)号:US07692801B2

    公开(公告)日:2010-04-06

    申请号:US11415293

    申请日:2006-05-02

    申请人: Yuki Nakamura

    发明人: Yuki Nakamura

    IPC分类号: G01B11/28

    CPC分类号: G01N21/9506 G01B11/0625

    摘要: An inspecting method inspects an optical stacked structure having a reflection layer and at least one light transmitting thin film sequentially stacked on a substrate. The inspecting method irradiates inspection light on the optical stacked structure from a side provided with the light transmitting thin film, measures a light intensity of reflected light from each layer, that changes depending on a change in an optical path length to each layer, and inspects a thickness of the light transmitting thin film based on the light intensity of reflected light for a specific wavelength.

    摘要翻译: 检查方法检查具有反射层和顺序堆叠在基板上的至少一个透光薄膜的光学堆叠结构。 检查方法从设置有透光薄膜的一侧将检查光照射在光学堆叠结构上,测量每层反射光的光强度,其随着每层光程长度的变化而变化,并且检查 基于特定波长的反射光的光强度的透光薄膜的厚度。

    Multiple propagation wave parameter measuring method and apparatus and machine-readable recording medium recording multiple propagation wave parameter measuring program
    80.
    发明授权
    Multiple propagation wave parameter measuring method and apparatus and machine-readable recording medium recording multiple propagation wave parameter measuring program 有权
    多传播波参数测量方法和设备以及记录多个传播波参数测量程序的机器可读记录介质

    公开(公告)号:US06446025B1

    公开(公告)日:2002-09-03

    申请号:US09277684

    申请日:1999-03-26

    IPC分类号: G01B1102

    CPC分类号: H04B7/086 G01S3/46

    摘要: In a multiple propagation wave parameter measuring method, transmission waves are radiated into an outer space. The transmission waves are received as a multiple propagation wave. Arrival directions of the transmission waves are measured on the basis of reception signals. The transmission wave arriving from one direction of the measured arrival directions is defined as a desired wave, and the transmission waves arriving from remaining directions are defined as unnecessary waves. A weight with which a reception power ratio of the desired wave to the unnecessary waves becomes maximum is calculated. The reception signals are multiplied with the weight to extract the reception signal in which the unnecessary waves are suppressed. A change in delay time of the desired wave from a transmitting device to a receiving device is calculated on the basis of the reception signal in which the unnecessary waves are suppressed. A machine-readable recording medium storing a multiple propagation wave parameter measuring program is also disclosed.

    摘要翻译: 在多传播波参数测量方法中,传输波被辐射到外部空间中。 传输波被作为多传播波被接收。 基于接收信号测量发送波的到达方向。 从测量的到达方向的一个方向到达的发送波被定义为期望的波,并且从剩余方向到达的发送波被定义为不必要的波。 计算出期望波与无用波的接收功率比变为最大的权重。 接收信号与权重相乘以提取不需要的波被抑制的接收信号。 根据不需要的波被抑制的接收信号,计算从发送装置到接收装置的期望波的延迟时间的变化。 还公开了一种存储多传播波参数测量程序的机器可读记录介质。