公开(公告)号：US08402826B2

公开(公告)日：2013-03-26

申请号：US12304603

申请日：2007-10-15

Applicant: Johannes Classen ,  Lars Tebje

Inventor： Johannes Classen ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: A micromechanical z-sensor includes a sensitivity, a torsion spring, and a seismic additional mass, the torsion spring having a spring width, and the seismic additional mass including webs having a web width. The web width is selected smaller than the spring width.

Abstract translation: 微机械z传感器包括灵敏度，扭转弹簧和地震附加质量，扭簧具有弹簧宽度，并且地震附加质量包括具有腹板宽度的腹板。 卷材宽度选择为小于弹簧宽度。

公开(公告)号：US08336382B2

公开(公告)日：2012-12-25

申请号：US12610961

申请日：2009-11-02

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Patrick Wellner ,  Dietrich Schubert ,  Lars Tebje

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Patrick Wellner ,  Dietrich Schubert ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0831 ,  Y10T29/49124

Abstract: An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.

Abstract translation: 描述了一种加速度传感器，其具有基底基板，相对于基底基板以固定方式设置的第一电极结构，具有第一电极区域的传感器元件和具有至少一个弹簧元件的弹簧装置。 通过弹簧元件，传感器元件联接到基底基板，使得由于作用在传感器元件上的加速度，传感器元件相对于基底基板偏转，从而改变第一电极结构与第一电极结构之间的距离 电极区域。 传感器元件和第一电极结构至少部分地位于另一个之上，并且由公共功能层形成。

公开(公告)号：US20120060604A1

公开(公告)日：2012-03-15

申请号：US12734228

申请日：2008-10-02

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01P3/44 ,  F16F3/00

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20120006115A1

公开(公告)日：2012-01-12

申请号：US13138102

申请日：2009-12-03

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A yaw rate sensor includes a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and has a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode which is disposed at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected to the substrate via at least one drive spring, the detection mass is connected to the drive frame via at least one detection spring, and the first movable element is excitable to a drive oscillation parallel to the substrate surface, and the first detection mass is deflectable perpendicular to the substrate surface.

Abstract translation: 横摆率传感器包括具有基板表面的基板，设置在基板表面上方并具有驱动框架和第一检测块的第一可移动元件，第一电极，设置在第一检测质量下方一定距离处 并连接到所述基板表面，以及第二电极，所述第二电极设置在所述第一检测质量块的上方并连接到所述基板表面。 驱动框架经由至少一个驱动弹簧连接到基板，检测质量块经由至少一个检测弹簧连接到驱动框架，并且第一可移动元件可激发到平行于基板表面的驱动振荡，并且 第一检测质量可垂直于基底表面偏转。

公开(公告)号：US20110140692A1

公开(公告)日：2011-06-16

申请号：US12927259

申请日：2010-11-09

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC: G01R33/02 ,  G01P15/105

CPC classification number: G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

Abstract: A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

Abstract translation: 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US20110079863A1

公开(公告)日：2011-04-07

申请号：US12924160

申请日：2010-09-21

Applicant: Johannes Classen ,  Christian Bierhoff

Inventor： Johannes Classen ,  Christian Bierhoff

IPC: H01L29/84 ,  H01L21/02

CPC classification number: G01C19/5783 ,  B81B2201/025 ,  B81C1/00166

Abstract: A micromechanical structure which includes a substrate having a main plane of extension, and a seismic mass which is movable relative to the substrate. The micromechanical structure includes a fixed electrode which is connected to the substrate, and a counterelectrode which is connected to the seismic mass. The fixed electrode has a first fixed electrode region and a second fixed electrode region which is connected in an electrically conductive manner to the first fixed electrode region. The counterelectrode is partially situated between the first and the second fixed electrode region, perpendicular to the main plane of extension.

Abstract translation: 一种微机械结构，其包括具有主平面延伸的基板和相对于基板可移动的地震质量。 微机械结构包括连接到基板的固定电极和连接到地震块的反电极。 固定电极具有第一固定电极区域和与导电方式连接到第一固定电极区域的第二固定电极区域。 反电极部分地位于第一和第二固定电极区域之间，垂直于主延伸平面。

公开(公告)号：US20110056295A1

公开(公告)日：2011-03-10

申请号：US12806311

申请日：2010-08-09

Applicant: Johannes Classen

Inventor： Johannes Classen

IPC: G01P15/125 ,  H01R43/00

CPC classification number: B81B7/02 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A micromechanical system includes a first movable element, which is connected to a substrate via a first spring element, and a second movable element, which is connected to the substrate via a second spring element. The first movable element and the second movable element are movable in relation to the substrate independent of one another. Furthermore, the first movable element and the second movable element are situated one above the other in at least some sections in a direction perpendicular to the substrate surface.

Abstract translation: 微机械系统包括经由第一弹簧元件连接到基板的第一可移动元件和经由第二弹簧元件连接到基板的第二可移动元件。 第一可移动元件和第二可移动元件可相对于基板相互独立地移动。 此外，第一可移动元件和第二可移动元件在垂直于基板表面的方向中的至少一些部分中彼此上下放置。

公开(公告)号：US07730783B2

公开(公告)日：2010-06-08

申请号：US11985254

申请日：2007-11-13

Applicant: Johannes Classen ,  Markus Heitz ,  Lars Tebje ,  Fouad Bennini

Inventor： Johannes Classen ,  Markus Heitz ,  Lars Tebje ,  Fouad Bennini

IPC: G01P15/00

CPC classification number: G01P15/125 ,  G01P15/0802

Abstract: An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.

Abstract translation: 加速度传感器包括悬挂在基板上方的弹簧上并且可以在垂直于基板的表面的方向上偏转的地震质量。 为了减少由于干扰加速度导致的地震质体沿着衬底表面的偏转，这导致了垂直于衬底表面的地震质量偏转测量的伪造，弹簧包括两个弯曲杆 通过横档相互连接。

公开(公告)号：US20090152654A1

公开(公告)日：2009-06-18

申请号：US12323653

申请日：2008-11-26

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Patrick Wellner ,  Dietrich Schubert ,  Lars Tebje

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Patrick Wellner ,  Dietrich Schubert ,  Lars Tebje

IPC: B81B3/00 ,  H01L21/00

CPC classification number: G01P15/125 ,  G01P15/0802

Abstract: A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.

Abstract translation: 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。