公开(公告)号：US20110140692A1

公开(公告)日：2011-06-16

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01P15/105

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US08461833B2

公开(公告)日：2013-06-11

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01R33/00

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US08833135B2

公开(公告)日：2014-09-16

申请号：US13197084

申请日：2011-08-03

申请人： Axel Franke ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01P15/125 ,  G01P21/00 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.

摘要翻译： 描述了具有基板和相对于基板可移动地悬挂的质量块的传感器系统，该传感器系统包括用于沿着偏转方向检测地震质体相对于基底的偏转的检测装置，该检测装置包括第一测量 固定在基板上的电极和固定在基板上的第二测量电极，以及沿偏转方向在第一测量电极和地震块之间垂直于偏转方向的第一重叠大于第二重叠， 垂直于偏转方向，在第二测量电极和地震质量之间。

公开(公告)号：US20120036915A1

公开(公告)日：2012-02-16

申请号：US13197084

申请日：2011-08-03

申请人： Axel FRANKE ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

发明人： Axel FRANKE ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01P21/00 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.

摘要翻译： 描述了具有基板和相对于基板可移动地悬挂的质量块的传感器系统，该传感器系统包括用于沿着偏转方向检测地震质体相对于基底的偏转的检测装置，该检测装置包括第一测量 固定在基板上的电极和固定在基板上的第二测量电极，以及沿偏转方向在第一测量电极和地震块之间垂直于偏转方向的第一重叠大于第二重叠， 垂直于偏转方向，在第二测量电极和地震质量之间。

公开(公告)号：US20110109327A1

公开(公告)日：2011-05-12

申请号：US12925067

申请日：2010-10-12

申请人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01R27/26

CPC分类号： G01C19/5755 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0136 ,  G01D5/24 ,  G01P15/125 ,  G01P2015/0814

摘要： A sensor for capacitive detection of a mechanical deflection includes a substrate having a first substrate electrode and a second substrate electrode; and a mass movable relative to the substrate. The mass is divided into: a first electrically separate region having a first ground electrode; and a second electrically separate region of the mass having a second ground electrode. At least one portion of the first ground electrode is situated in a first region between the first substrate electrode and the second substrate electrode, and forms a first differential capacitor. At least one portion of the second ground electrode is situated in a second region between the first substrate electrode and the second substrate electrode, and forms a second differential capacitor.

摘要翻译： 用于电容式检测机械偏转的传感器包括具有第一基板电极和第二基板电极的基板; 以及相对于基板移动的质量。 质量分为：具有第一接地电极的第一电分离区域; 以及具有第二接地电极的所述质量体的第二电分离区域。 第一接地电极的至少一部分位于第一基板电极和第二基板电极之间的第一区域中，并且形成第一差分电容器。 第二接地电极的至少一部分位于第一基板电极和第二基板电极之间的第二区域中，并形成第二差分电容器。

公开(公告)号：US20110050251A1

公开(公告)日：2011-03-03

申请号：US12846314

申请日：2010-07-29

申请人： Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

发明人： Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01R27/26

CPC分类号： G01P15/125 ,  B81B3/0094 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/033 ,  G01D5/2412 ,  H02N1/008

摘要： A capacitive sensor and a capacitive actuator having at least one seismic mass deflectably mounted on a substrate. A comb electrode having comb fingers is mounted on the seismic mass, and a comb electrode having comb fingers is mounted on the substrate in such a way that the comb fingers are situated parallel to a deflection direction of the seismic mass and interlock in a comb-like manner. The characteristic curve of the sensor or actuator is adjusted by optimizing the geometry of at least one comb electrode, in particular of at least one comb finger.

摘要翻译： 电容式传感器和电容式致动器，其具有可偏转地安装在基板上的至少一个地震质量块。 具有梳齿的梳状电极安装在地震块上，并且具有梳齿的梳形电极以这样的方式安装在基底上，使得梳齿平行于抗震块的偏转方向定位， 喜欢的方式 通过优化至少一个梳状电极，特别是至少一个梳齿的几何形状来调节传感器或致动器的特性曲线。

公开(公告)号：US08493078B2

公开(公告)日：2013-07-23

申请号：US12925067

申请日：2010-10-12

申请人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01R27/26

CPC分类号： G01C19/5755 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0136 ,  G01D5/24 ,  G01P15/125 ,  G01P2015/0814

摘要： A sensor for capacitive detection of a mechanical deflection includes a substrate having a first substrate electrode and a second substrate electrode; and a mass movable relative to the substrate. The mass is divided into: a first electrically separate region having a first ground electrode; and a second electrically separate region of the mass having a second ground electrode. At least one portion of the first ground electrode is situated in a first region between the first substrate electrode and the second substrate electrode, and forms a first differential capacitor. At least one portion of the second ground electrode is situated in a second region between the first substrate electrode and the second substrate electrode, and forms a second differential capacitor.

摘要翻译： 用于电容式检测机械偏转的传感器包括具有第一基板电极和第二基板电极的基板; 以及相对于基板移动的质量。 质量分为：具有第一接地电极的第一电分离区域; 以及具有第二接地电极的所述质量体的第二电分离区域。 第一接地电极的至少一部分位于第一基板电极和第二基板电极之间的第一区域中，并且形成第一差分电容器。 第二接地电极的至少一部分位于第一基板电极和第二基板电极之间的第二区域中，并形成第二差分电容器。

公开(公告)号：US08773293B2

公开(公告)日：2014-07-08

申请号：US13368077

申请日：2012-02-07

申请人： Alexander Buhmann ,  Marian Keck

发明人： Alexander Buhmann ,  Marian Keck

IPC分类号： H03M1/06 ,  G01D5/244

CPC分类号： G01D5/2448 ,  H03L7/08 ,  H03L2207/50 ,  H03M1/06

摘要： A measurement signal correction apparatus includes an analog/digital converter, a correction factor providing unit, and a measurement signal correction unit. The analog/digital converter is configured to convert an analog measurement signal read in using an interface into a digital measurement signal using a reference frequency signal. The correction factor providing unit is configured to provide a correction factor determined on the basis of the reference frequency signal. The measurement signal correction unit is configured to multiply the digital measurement signal by the correction factor in order to obtain a corrected measurement signal.

摘要翻译： 测量信号校正装置包括模拟/数字转换器，校正因子提供单元和测量信号校正单元。 模拟/数字转换器被配置为使用参考频率信号将使用接口读入的模拟测量信号转换为数字测量信号。 校正因子提供单元被配置为提供基于参考频率信号确定的校正因子。 测量信号校正单元被配置为将数字测量信号乘以校正因子，以获得校正的测量信号。

公开(公告)号：US20120200326A1

公开(公告)日：2012-08-09

申请号：US13367834

申请日：2012-02-07

申请人： Alexander Buhmann ,  Marian Keck

发明人： Alexander Buhmann ,  Marian Keck

IPC分类号： H03L7/08 ,  H03L7/00

CPC分类号： G06F1/0342 ,  G01C19/5776 ,  G06F1/022 ,  G06F1/0328 ,  H03L7/0991

摘要： A method for reducing signal edge jitter in an output signal from a numerically controlled oscillator includes processing an input signal with a first accumulator to provide a first accumulator output signal and continuing to use a carry in the processing of the input signal with the first accumulator in the event of an overflow. The method further includes processing the input signal with a second accumulator to provide a second accumulator output signal and rejecting a carry in the processing of the input signal with the second accumulator in the event of an overflow. The method further includes outputting the second accumulator output signal at an output of the numerically controlled oscillator and synchronizing the second accumulator using the first accumulator output signal.

摘要翻译： 一种用于减少来自数控振荡器的输出信号中的信号边缘抖动的方法包括：利用第一累加器处理输入信号，以提供第一累加器输出信号，并且继续使用与第一累加器对输入信号进行处理的进位 发生溢出事件。 该方法还包括利用第二累加器来处理输入信号以在溢出的情况下提供第二累加器输出信号并且拒绝与第二累加器的输入信号的处理中的进位。 该方法还包括在数控振荡器的输出处输出第二累加器输出信号，并使用第一累加器输出信号使第二累加器同步。

公开(公告)号：US08775491B2

公开(公告)日：2014-07-08

申请号：US13367834

申请日：2012-02-07

申请人： Alexander Buhmann ,  Marian Keck

发明人： Alexander Buhmann ,  Marian Keck

IPC分类号： G06F1/02 ,  G06F1/03

CPC分类号： G06F1/0342 ,  G01C19/5776 ,  G06F1/022 ,  G06F1/0328 ,  H03L7/0991

摘要： A method for reducing signal edge jitter in an output signal from a numerically controlled oscillator includes processing an input signal with a first accumulator to provide a first accumulator output signal and continuing to use a carry in the processing of the input signal with the first accumulator in the event of an overflow. The method further includes processing the input signal with a second accumulator to provide a second accumulator output signal and rejecting a carry in the processing of the input signal with the second accumulator in the event of an overflow. The method further includes outputting the second accumulator output signal at an output of the numerically controlled oscillator and synchronizing the second accumulator using the first accumulator output signal.

摘要翻译： 一种用于减少来自数控振荡器的输出信号中的信号边缘抖动的方法包括：利用第一累加器处理输入信号，以提供第一累加器输出信号，并且继续使用与第一累加器对输入信号进行处理的进位 发生溢出事件。 该方法还包括利用第二累加器来处理输入信号以在溢出的情况下提供第二累加器输出信号并且拒绝与第二累加器的输入信号的处理中的进位。 该方法还包括在数控振荡器的输出处输出第二累加器输出信号，并使用第一累加器输出信号使第二累加器同步。