Method for forming an interlayer insulating film, and semiconductor device
    71.
    发明授权
    Method for forming an interlayer insulating film, and semiconductor device 失效
    用于形成层间绝缘膜的方法和半导体器件

    公开(公告)号:US06524972B1

    公开(公告)日:2003-02-25

    申请号:US09521843

    申请日:2000-03-09

    申请人: Kazuo Maeda

    发明人: Kazuo Maeda

    IPC分类号: H01L21469

    摘要: A method for forming an interlayer insulating film is disclosed. This method comprises the steps of: forming an underlying insulating film on an object to be formed; and forming a porous SiO2 film on said underlying insulating film by a Chemical Vapor Deposition that employs a source gas containing TEOS (tetraethoxy silane) and O3 where the O3 is contained in the source gas with first concentration that is lower than concentration necessary for oxidizing the TEOS. Alternative method for forming an interlayer insulating film is also disclosed. This method comprises the step of: forming an underlying insulating film on an object to be formed; performing Cl (chlorine) plasma treatment for the underlying insulating film; and forming a porous SiO2 film on the underlying insulating film by a Chemical Vapor Deposition that employs a source gas containing TEOS (tetraethoxy silane) and O3.

    摘要翻译: 公开了一种用于形成层间绝缘膜的方法。 该方法包括以下步骤:在要形成的物体上形成底层绝缘膜; 并通过化学气相沉积在所述底层绝缘膜上形成多孔SiO 2膜,所述化学气相沉积采用含有TEOS(四乙氧基硅烷)和O 3的源气体,其中所述源气体中含有O 3的第一浓度低于氧化所需的浓度 还公开了用于形成层间绝缘膜的替代方法。 该方法包括以下步骤:在要形成的物体上形成下面的绝缘膜; 对下层绝缘膜进行Cl(氯)等离子体处理; 并通过采用含有TEOS(四乙氧基硅烷)和O 3的源气体的化学气相沉积在底层绝缘膜上形成多孔SiO 2膜。

    Impurity processing apparatus and method for cleaning impurity processing apparatus
    73.
    发明授权
    Impurity processing apparatus and method for cleaning impurity processing apparatus 失效
    杂质处理装置和清洗杂质处理装置的方法

    公开(公告)号:US06435196B1

    公开(公告)日:2002-08-20

    申请号:US09451706

    申请日:1999-12-01

    IPC分类号: B08B600

    CPC分类号: H01L21/67028

    摘要: The present invention relates to an impurity processing apparatus in which impurities such as phosphorus, boron, or the like are doped in a semiconductor substrate, etc., or a PSG (PhosphoSilicateGlass) film, a BSG (BoroSilicateGlass) film, or a BPSG (BoroPhosphoSilicateGlass) film, or a carbon film, etc. This apparatus includes a chamber having an introduction port for an impurity-containing ion gas which is connected to an impurity-containing gas supply section, a substrate holder supporting a substrate which is to be ion-injected, or doped, or on which a film is formed using the impurity-containing gas, an introduction port of a water-containing gas which is provided upstream of the substrate holder in accordance with a flow direction of the impurity-containing gas, and is connected to a water-containing gas supply section, and first plasma generating means in a space extending from the introduction port for water-containing gas to the substrate holder for converting water-containing gas to a plasma.

    摘要翻译: 本发明涉及在半导体衬底等中掺杂诸如磷,硼等杂质的杂质处理装置,或PSG(磷酸硅酸盐玻璃)膜,BSG(硼硅酸盐玻璃)膜或BPSG( BoroPhospho硅酸盐玻璃)膜或碳膜等。该装置包括具有与含杂质气体供给部连接的含杂质离子气体导入口的室,支撑待离子化的基板的基板保持架 注入或掺杂,或者使用含杂质的气体形成膜,根据含杂质气体的流动方向设置在衬底保持器的上游的含水气体的引入口, 并且连接到含水气体供给部,并且在从含水气体的导入口延伸到用于转换含水气体的基板保持器的空间中的第一等离子体产生装置 g气体到等离子体。

    Throwaway insert for ball end mill
    75.
    发明授权
    Throwaway insert for ball end mill 失效
    球头铣刀的抛丸刀片

    公开(公告)号:US6024519A

    公开(公告)日:2000-02-15

    申请号:US145761

    申请日:1998-09-02

    IPC分类号: B23C5/10 B23C5/20

    摘要: A throwaway insert for a ball end mill having an ideal cutting edge shape corresponding to the cutting speeds and loads at different portions of the cutting edges, high in strength and capable of discharging chips smoothly. As viewed in a direction perpendicular to the line connecting noses, each cutting edge forms a convex curve with its nose portion at the lowest level. As viewed in a direction perpendicular to the abovesaid direction, rake faces form symmetrical, downwardly sloping convex accurate surfaces or straight surfaces having a positive rake angle of 5-25.degree.. The wedge angle at the cutting edges is set at 85-65.degree.. Thus, the rake angle will be negative at the noses and positive at other portions. Further, the rake angle increases toward the side where the cutting speed is higher. The thickness of the insert increases toward the side where the load is greater. Since this insert is a modification of a negative insert, i.e. an insert of the type having a side perpendicular to its bottom, it has enough strength. Chips can be discharged smoothly too.

    摘要翻译: 一种用于球头铣刀的一次性刀片,其具有对应于切削刃的不同部分处的切削速度和负载的理想切削刃形状,强度高并能平滑地排出切屑。 从垂直于连接鼻部的线的方向观察,每个切割刃形成凸起曲线,其鼻部部分处于最低水平。 从与上述方向垂直的方向观察,前刀面形成对称的,向下倾斜的凸形精确表面或具有5-25°的正前角的直线表面。 切削刃处的楔角设定在85-65°。 因此,前角在鼻部为负,其他部分为正。 此外,前角朝向切割速度较高的一侧增加。 插入件的厚度朝向负载较大的一侧增加。 由于该插入件是负插入件的改型,即具有与其底部垂直的一侧的插入件,其具有足够的强度。 芯片也可顺利放电。

    Pin boot for a disc brake
    76.
    发明授权
    Pin boot for a disc brake 失效
    引导引导用于碟形刹车

    公开(公告)号:US5183136A

    公开(公告)日:1993-02-02

    申请号:US822898

    申请日:1992-01-21

    CPC分类号: F16J3/042 F16D55/22655

    摘要: A pin boot for use in a disc brake including a support mechanism for supporting a disc brake main body, a slide hole and a pin which is fittable with the support member, which pin boot comprises: a flange portion mounted to a boss portion of an opening of the slide hole of the support member; a freely expandable bellows which extends from the flange portion; and a seal portion which adjoins the bellows and is engageable with the pin of the disc brake, characterized in that the rigidity of at least one of the bellows, the seal member and a connecting portion for connecting the bellows with the seal member is non-uniform with respect to peripheral direction thereof.

    Automatic communication standby device in cordless telephone
    77.
    发明授权
    Automatic communication standby device in cordless telephone 失效
    自动通信待机设备在无绳电话

    公开(公告)号:US4511761A

    公开(公告)日:1985-04-16

    申请号:US389501

    申请日:1982-06-17

    CPC分类号: H02J7/0042

    摘要: A switching element is inserted in a power supply line to a transmission circuit in the portable unit of a cordless telephone. The charge potential which is supplied from the base unit to the portable unit actuates the switching element to break the power supply line when the portable unit is replaced on the cradle of the base unit.

    摘要翻译: 将开关元件插入到无绳电话的便携式单元中的发送电路的电源线中。 当在基座单元的支架上更换便携式单元时,从基座单元供应到便携式单元的充电电位使开关元件断开电源线。

    Idling device for lever hoist
    78.
    发明授权
    Idling device for lever hoist 失效
    手摇葫芦的怠速装置

    公开(公告)号:US4474360A

    公开(公告)日:1984-10-02

    申请号:US473302

    申请日:1983-03-08

    申请人: Kazuo Maeda

    发明人: Kazuo Maeda

    IPC分类号: B66D3/14 B66D1/14 B66D1/42

    CPC分类号: B66D3/14

    摘要: An idling device is able to bring a lever hoist into an idling condition including a change gear provided on driving member threadedly engaged on a driving shaft for driving a sheave for winding-up a chain or rope for a load, an operating lever rockably driven by a hand, winding-up and winding-off driving pawls engageable with teeth of the change gear and changeable for hoisting or lowering the load, and a braking assembly for preventing the change gear from being driven by the gravitational force of the load and adapted to be clamped and released by rotative movement of the driving member relative to the driving shaft. According to the invention, the idling device comprises an anchoring member fixed at one end of the driving shaft, a manually operatable knob rotatably and axially slidably fitted on the driving shaft between the anchoring member and the driving member for manually driving the driving member from a brake clamping position to a brake releasing position, and anchor operating member fitted in an aperture formed in the knob and radially slidable therein toward and away from the anchoring member to clamp and release the knob relative to the driving shaft, thus enabling the lever hoist braking assembly to be maintained in the released condition and to be changed from the released condition into the clamped condition.

    摘要翻译: 怠速装置能够将杠杆葫芦置于怠速状态,包括设置在驱动构件上的变速齿轮,所述变速齿轮螺纹地接合在驱动轴上,用于驱动用于卷绕用于负载的链条或绳索的滑轮,操作杆,其可摇动地由 可以与变速齿轮的齿接合并且可改变以提升或降低负载的手,上弦和释放驱动爪,以及用于防止变速齿轮被负载的重力驱动的制动组件,并且适于 通过驱动构件相对于驱动轴的旋转运动而被夹紧和释放。 根据本发明,怠速装置包括固定在驱动轴的一端的锚定构件,可手动操作的手柄,可旋转地并且轴向地可滑动地装配在锚定构件和驱动构件之间的驱动轴上,用于从驱动构件 制动器夹持位置到制动器释放位置,以及锚定操作构件,其安装在形成在旋钮中的孔中并且可径向地在其中朝向和远离固定构件滑动,以相对于驱动轴夹紧和释放旋钮,从而使得杠杆升降制动 组件保持在释放状态,并从释放状态变为夹紧状态。

    Lever hoist
    79.
    发明授权
    Lever hoist 失效
    杠杆式起重机

    公开(公告)号:US4469308A

    公开(公告)日:1984-09-04

    申请号:US469654

    申请日:1983-02-25

    CPC分类号: B66D5/32 B66D3/14 Y10T74/214

    摘要: A lever hoist comprises a change gear provided in a driving shaft for driving a sheave for winding-up a chain or rope for a load, an operating lever rockably driven by a hand, winding-up and winding-off driving pawls engageable with teeth of the change gear and changeable in response to the purpose of hoisting or lowering the load, and a braking assembly for preventing the change gear from being driven by a gravity of the load and having a spring for releasing the braking assembly. According to the invention the lever hoist further comprises a brake spring control member rotatably fitted on the driving shaft, a brake clamping spring arranged between the driving member and the brake spring control member, and a direction change transmission mechanism for transforming rotation of the brake spring control member into axial urging force of the brake clamping spring. The lever hoist is capable of lifting and lowering even a light load by repeatedly rocking the operating lever and includes the brake spring control member which is rotated to release the brake clamping and hence the load sheave into a freely rotatable condition.

    摘要翻译: 杠杆式起重机包括设置在驱动轴中的变速齿轮,用于驱动用于卷绕用于负载的链条或绳索的滑轮,由手可摆动地驱动的操作杆,能够与齿啮合的手动卷绕和释放驱动爪 变速齿轮并且可以响应于提升或降低负载的目的而变化;以及制动组件,用于防止变速齿轮被负载的重力驱动并具有用于释放制动组件的弹簧。 根据本发明,杠杆式起重机还包括可旋转地装配在驱动轴上的制动弹簧控制构件,布置在驱动构件和制动弹簧控制构件之间的制动夹紧弹簧,以及用于变换制动弹簧的旋转的换向传递机构 控制构件进入制动夹紧弹簧的轴向推力。 杠杆式起重机能够通过重复摇动操作杆而能够提升和降低轻负载,并且包括制动弹簧控制构件,该制动弹簧控制构件被旋转以释放制动夹紧,因此将负载滑轮转变成可自由转动的状态。