摘要:
A method for forming an interlayer insulating film is disclosed. This method comprises the steps of: forming an underlying insulating film on an object to be formed; and forming a porous SiO2 film on said underlying insulating film by a Chemical Vapor Deposition that employs a source gas containing TEOS (tetraethoxy silane) and O3 where the O3 is contained in the source gas with first concentration that is lower than concentration necessary for oxidizing the TEOS. Alternative method for forming an interlayer insulating film is also disclosed. This method comprises the step of: forming an underlying insulating film on an object to be formed; performing Cl (chlorine) plasma treatment for the underlying insulating film; and forming a porous SiO2 film on the underlying insulating film by a Chemical Vapor Deposition that employs a source gas containing TEOS (tetraethoxy silane) and O3.
摘要:
There is provided a method of forming a silicon-containing insulating film on a substrate by reacting a compound having siloxane bonds and Si—R bonds (R is alkyl group) with a plasmanized reaction gas containing an oxidizing gas and H2.
摘要:
The present invention relates to an impurity processing apparatus in which impurities such as phosphorus, boron, or the like are doped in a semiconductor substrate, etc., or a PSG (PhosphoSilicateGlass) film, a BSG (BoroSilicateGlass) film, or a BPSG (BoroPhosphoSilicateGlass) film, or a carbon film, etc. This apparatus includes a chamber having an introduction port for an impurity-containing ion gas which is connected to an impurity-containing gas supply section, a substrate holder supporting a substrate which is to be ion-injected, or doped, or on which a film is formed using the impurity-containing gas, an introduction port of a water-containing gas which is provided upstream of the substrate holder in accordance with a flow direction of the impurity-containing gas, and is connected to a water-containing gas supply section, and first plasma generating means in a space extending from the introduction port for water-containing gas to the substrate holder for converting water-containing gas to a plasma.
摘要:
A method for forming an interlayer insulating film is disclosed. This method comprises the steps of: forming an Si—C film or an Si—C—H film on an underlying insulating film by performing plasma polymerization for an Si and C containing compound; forming a porous SiO2 film by performing O (oxygen) plasma oxidation for the Si—C film or the Si—C—H film; and forming a cover insulating film on the porous SiO2 film by performing H (hydrogen) plasma treatment for the porous SiO2 film.
摘要:
A throwaway insert for a ball end mill having an ideal cutting edge shape corresponding to the cutting speeds and loads at different portions of the cutting edges, high in strength and capable of discharging chips smoothly. As viewed in a direction perpendicular to the line connecting noses, each cutting edge forms a convex curve with its nose portion at the lowest level. As viewed in a direction perpendicular to the abovesaid direction, rake faces form symmetrical, downwardly sloping convex accurate surfaces or straight surfaces having a positive rake angle of 5-25.degree.. The wedge angle at the cutting edges is set at 85-65.degree.. Thus, the rake angle will be negative at the noses and positive at other portions. Further, the rake angle increases toward the side where the cutting speed is higher. The thickness of the insert increases toward the side where the load is greater. Since this insert is a modification of a negative insert, i.e. an insert of the type having a side perpendicular to its bottom, it has enough strength. Chips can be discharged smoothly too.
摘要:
A pin boot for use in a disc brake including a support mechanism for supporting a disc brake main body, a slide hole and a pin which is fittable with the support member, which pin boot comprises: a flange portion mounted to a boss portion of an opening of the slide hole of the support member; a freely expandable bellows which extends from the flange portion; and a seal portion which adjoins the bellows and is engageable with the pin of the disc brake, characterized in that the rigidity of at least one of the bellows, the seal member and a connecting portion for connecting the bellows with the seal member is non-uniform with respect to peripheral direction thereof.
摘要:
A switching element is inserted in a power supply line to a transmission circuit in the portable unit of a cordless telephone. The charge potential which is supplied from the base unit to the portable unit actuates the switching element to break the power supply line when the portable unit is replaced on the cradle of the base unit.
摘要:
An idling device is able to bring a lever hoist into an idling condition including a change gear provided on driving member threadedly engaged on a driving shaft for driving a sheave for winding-up a chain or rope for a load, an operating lever rockably driven by a hand, winding-up and winding-off driving pawls engageable with teeth of the change gear and changeable for hoisting or lowering the load, and a braking assembly for preventing the change gear from being driven by the gravitational force of the load and adapted to be clamped and released by rotative movement of the driving member relative to the driving shaft. According to the invention, the idling device comprises an anchoring member fixed at one end of the driving shaft, a manually operatable knob rotatably and axially slidably fitted on the driving shaft between the anchoring member and the driving member for manually driving the driving member from a brake clamping position to a brake releasing position, and anchor operating member fitted in an aperture formed in the knob and radially slidable therein toward and away from the anchoring member to clamp and release the knob relative to the driving shaft, thus enabling the lever hoist braking assembly to be maintained in the released condition and to be changed from the released condition into the clamped condition.
摘要:
A lever hoist comprises a change gear provided in a driving shaft for driving a sheave for winding-up a chain or rope for a load, an operating lever rockably driven by a hand, winding-up and winding-off driving pawls engageable with teeth of the change gear and changeable in response to the purpose of hoisting or lowering the load, and a braking assembly for preventing the change gear from being driven by a gravity of the load and having a spring for releasing the braking assembly. According to the invention the lever hoist further comprises a brake spring control member rotatably fitted on the driving shaft, a brake clamping spring arranged between the driving member and the brake spring control member, and a direction change transmission mechanism for transforming rotation of the brake spring control member into axial urging force of the brake clamping spring. The lever hoist is capable of lifting and lowering even a light load by repeatedly rocking the operating lever and includes the brake spring control member which is rotated to release the brake clamping and hence the load sheave into a freely rotatable condition.
摘要:
A plate-shaped denitrating catalyst comprising a metal net, a finely divided porous carrier retained on the metal net with a binder and covering the metal net, and an active component supported on the carrier.