Method of manufacturing thin film transistor
    71.
    发明授权
    Method of manufacturing thin film transistor 失效
    制造薄膜晶体管的方法

    公开(公告)号:US07011996B2

    公开(公告)日:2006-03-14

    申请号:US10444288

    申请日:2003-05-22

    IPC分类号: H01L21/335 H10L21/8232

    CPC分类号: H01L29/66757 H01L29/4908

    摘要: After a polysilicon semiconductor film 5 and a first gate oxide film 6 are formed on a transparent insulating substrate 1, the semiconductor film 5 and the first gate oxide film 6 are patterned into an island shape to form an island part. At this time, an overhang part 8 of a visor shape is formed where side end surfaces of the first gate oxide film 6 and the semiconductor film 5 are not aligned and an end part of the first gate oxide film 6 projects slightly from a position of a side end surface of the semiconductor film 5. The overhang part 8 is removed, for example, during cleaning, which thus enhances yield.

    摘要翻译: 在透明绝缘基板1上形成多晶硅半导体膜5和第一栅极氧化膜6之后,将半导体膜5和第一栅极氧化膜6图案化成岛状以形成岛状部分。 此时,形成遮光板形状的突出部8,其中第一栅氧化膜6和半导体膜5的侧端面未对准,并且第一栅极氧化膜6的端部从 半导体膜5的侧端面。例如,在清洁期间移除突出部8,从而提高了产量。

    Channel-etch thin film transistor
    72.
    发明授权
    Channel-etch thin film transistor 有权
    沟道蚀刻薄膜晶体管

    公开(公告)号:US06858867B2

    公开(公告)日:2005-02-22

    申请号:US10369756

    申请日:2003-02-21

    申请人: Hiroshi Okumura

    发明人: Hiroshi Okumura

    CPC分类号: H01L29/66765 H01L29/41733

    摘要: A channel-etch thin film transistor having a source electrode including a source electrode primary portion and a source electrode lead portion and a drain electrode including a drain electrode primary portion and a drain electrode lead portion. At least one of the source electrode lead portion and the drain electrode lead portion has a side-contact portion in contact directly with a side wall of the active layer. An averaged width of the side-contact portion is narrower than an averaged width of corresponding one of the source electrode primary portion and the drain electrode primary portion.

    摘要翻译: 一种沟道蚀刻薄膜晶体管,其具有包括源电极主要部分和源电极引线部分的源电极和包括漏电极初级部分和漏极引线部分的漏电极。 源电极引出部分和漏极引线部分中的至少一个具有与有源层的侧壁直接接触的侧接触部分。 侧接触部分的平均宽度比源极电极主要部分和漏电极主要部分中对应的一个的平均宽度窄。

    Pulse laser irradiation method for forming a semiconductor thin film
    73.
    发明授权
    Pulse laser irradiation method for forming a semiconductor thin film 有权
    用于形成半导体薄膜的脉冲激光照射方法

    公开(公告)号:US06800541B2

    公开(公告)日:2004-10-05

    申请号:US10263771

    申请日:2002-10-04

    申请人: Hiroshi Okumura

    发明人: Hiroshi Okumura

    IPC分类号: H01L2120

    摘要: A method of irradiation of plural pulse laser beams onto one position of a non-single crystal semiconductor, wherein the pulse laser beams are not higher in energy density than an energy density threshold value necessary for causing a micro-crystallization of the non-single crystal semiconductor.

    摘要翻译: 一种将多个脉冲激光束照射到非单晶半导体的一个位置上的方法,其中脉冲激光束的能量密度不高于引起非单晶的微结晶所需的能量密度阈值 半导体。

    Method of manufacturing thin film transistor
    74.
    发明授权
    Method of manufacturing thin film transistor 有权
    制造薄膜晶体管的方法

    公开(公告)号:US06703267B2

    公开(公告)日:2004-03-09

    申请号:US10231045

    申请日:2002-08-30

    IPC分类号: H01L2100

    摘要: In a thin film transistor, a first insulating film on a silicon layer formed in an island on a substrate is smaller in thickness than the silicon layer so that the stepped island edges is gentle in slope to facilitate covering the island with a second insulating film. This reduces occurrence of gate leak considerably. Since the peripheral region of the stepped island is smaller in thickness than the central region above the channel, it is possible to minimize occurrence of gate electrode breakage. The silicon layer contains two or more inert gas atoms, and the atoms smaller in mass number (e.g., He) are contained in and near an interface with a silicon active layer while the atoms larger in mass number (e.g., Ar) than those smaller in mass number are contained in and near a second interface with a gate electrode.

    摘要翻译: 在薄膜晶体管中,形成在基板上的岛上的硅层上的第一绝缘膜的厚度比硅层的厚度小,使得台阶状的岛边缘倾斜平缓以便于用第二绝缘膜覆盖岛。 这可以大大减少闸门泄漏的发生。 由于阶梯状岛的周边区域的厚度比通道上方的中心区域的厚度小,所以能够最小化栅电极断裂的发生。 硅层含有两个或更多个惰性气体原子,质量数较小的原子(例如,He)包含在与硅有源层的界面中和附近,而质量数(例如Ar)的原子比较小 质量数量被包含在与栅电极的第二界面中和附近。

    Apparatus for detecting the fuel property for an internal combustion engine
    75.
    发明授权
    Apparatus for detecting the fuel property for an internal combustion engine 失效
    用于检测内燃机的燃料特性的装置

    公开(公告)号:US06321721B1

    公开(公告)日:2001-11-27

    申请号:US09494245

    申请日:2000-01-31

    IPC分类号: F02D4136

    摘要: The following conditions are used as requirements for executing a fuel property detection: an intake air temperature is lower than a restart judging value; a water temperature is in a predetermined range; and it is in an idle operation. In a case that the requirements are established, an injection amount of fuel and a combustion amount of fuel are calculated. After that, the injection amount is corrected by using a learned value for correcting an error of system, and the combustion amount is corrected according an intake pressure. A fuel property parameter for evaluating the fuel property is calculated based on a ratio of an accumulated value of the combustion amount relative to an accumulated value of the injection amount during a predetermined time. A command value of the injection amount for a fuel injection valve is corrected according to the fuel property parameter calculated above. As a result, the fuel property is reflected in the command value of the injection amount.

    摘要翻译: 使用以下条件作为执行燃料特性检测的要求:进气温度低于再起动判定值; 水温处于预定范围内; 并且它处于空闲操作。 在要求确定的情况下,计算燃料的喷射量和燃料的燃烧量。 之后,通过使用用于校正系统误差的学习值来校正喷射量,并且根据进气压力校正燃烧量。 基于燃料量的累积值相对于预定时间内的喷射量的累积值的比率来计算用于评价燃料特性的燃料特性参数。 根据上述计算的燃料特性参数来校正燃料喷射阀的喷射量的指令值。 结果,燃料特性反映在喷射量的指令值中。

    Laser irradiation process
    76.
    发明授权
    Laser irradiation process 有权
    激光照射工艺

    公开(公告)号:US06187088B1

    公开(公告)日:2001-02-13

    申请号:US09353358

    申请日:1999-07-15

    申请人: Hiroshi Okumura

    发明人: Hiroshi Okumura

    IPC分类号: C30B2802

    CPC分类号: H01L21/02686 H01L21/2026

    摘要: A pulse laser beam having a rectangular irradiation region is irradiated on the same point in a non-single crystal semiconductor film multiple times. The pulse laser beam has an energy profile in a longitudinal direction in the beam irradiation region as follows: (a) there are the first region having an energy density of Ea or higher and the second regions on both sides of the first region having an energy density of less than Ea, and (b) an energy density slope has an absolute value of 20 to 300 J/cm3 in a boundary region extending to 1 &mgr;m from the boundary line between the first and the second regions.

    摘要翻译: 将具有矩形照射区域的脉冲激光束多次照射在非单晶半导体膜的同一点上。 脉冲激光束在束照射区域中沿纵向方向具有能量分布如下:(a)存在具有Ea或更高能量密度的第一区域,并且第一区域两侧的第二区域具有能量 密度小于Ea,(b)能量密度斜率在从第一和第二区域之间的边界线延伸至1um的边界区域中的绝对值为20至300J / cm 3。

    Ignition timing control apparatus for an internal combustion engine
    77.
    发明授权
    Ignition timing control apparatus for an internal combustion engine 失效
    用于内燃机的点火正时控制装置

    公开(公告)号:US5494016A

    公开(公告)日:1996-02-27

    申请号:US378286

    申请日:1995-01-26

    摘要: A signal rotor 6 rotates in synchronism with a crank shaft of the internal combustion engine. A pickup sensor 7 is disposed in a confronting relation to the signal rotor 6 to generate an angle signal S1 proportional to rotation of the internal combustion engine. An ignition signal producing means (31, 32) calculates an ignition timing on the basis of the angle signal S1 and generates an ignition signal (S41, S42) for igniting the internal combustion engine. A time mask means monitors a parameter representative of a battery voltage Vs, and prohibits the angle signal S1 from entering into the ignition signal producing means for a predetermined time in response to a detection of a predetermined amount fluctuation of the parameter.

    摘要翻译: 信号转子6与内燃机的曲轴同步旋转。 拾波传感器7以与信号转子6相对的关系设置,以产生与内燃机的旋转成比例的角度信号S1。 点火信号产生装置(31,32)基于角度信号S1计算点火正时,并产生用于点燃内燃机的点火信号(S41,S42)。 时间掩码意味着监视表示电池电压Vs的参数,并且响应于检测到参数的预定量波动来禁止角度信号S1进入点火信号产生装置预定时间。

    Direct teaching type robot
    78.
    发明授权
    Direct teaching type robot 失效
    直接教学型机器人

    公开(公告)号:US5103149A

    公开(公告)日:1992-04-07

    申请号:US656429

    申请日:1991-02-19

    摘要: A direct teaching type robot in which in the playback of the robot an electric power corresponding to a playback command is supplied to an electric motor from a servo driver so that the electric motor is driven to move a moving arm of the robot and in the teaching operation the moving arm is directly moved by an instructor to teach its movement to the robot includes breaking means provided in the servo driver for breaking a current generated by the electric motor when the electric motor is rotated in response to the teaching operation of the moving arm so as not to flow into the servo driver, whereby operation force by the instructor for moving the moving arm of the robot in the teaching can be reduced.