公开(公告)号：US06189570B1

公开(公告)日：2001-02-20

申请号：US09371655

申请日：1999-08-10

申请人： Eric J. Redemann ,  Kim N. Vu

发明人： Eric J. Redemann ,  Kim N. Vu

IPC分类号： F16K1110

CPC分类号： H01L21/67017 ,  C23C16/44 ,  C23C16/455 ,  C23C16/45561 ,  H01J37/3244 ,  Y10T137/4259 ,  Y10T137/5109 ,  Y10T137/5283 ,  Y10T137/87885 ,  Y10T137/87917

摘要： A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

公开(公告)号：US06179006B2

公开(公告)日：2001-01-30

申请号：US09380872

申请日：1999-09-08

申请人： Kurt Stoll ,  Dieter Beyer

发明人： Kurt Stoll ,  Dieter Beyer

IPC分类号： F16K1100

CPC分类号： F15B13/0839 ,  F15B13/0817 ,  F15B13/0821 ,  F15B13/085 ,  F15B13/0857 ,  F15B13/0889 ,  F15B13/0892 ,  Y10T137/5109 ,  Y10T137/87885

摘要： A tabular assembly base (2) is proposed, which serves for the detachable fitting of a valve unit (3). The assembly base (2) is modular in design and comprises a plurality of individual base segments (23) joined together as a rigid unit. The valve unit (3) comprises several valve modules (4). Underneath the base segments (23) several connection segments (25) are located which are associated with the valve modules (4). They possess load ducts (33) communicating with the valve modules (4) and having an electrical and/or fluid power functional unit (38) associated with them at least in part.

摘要翻译： 提出了一种用于可拆卸地安装阀单元（3）的平板组件基座（2）。 组装基座（2）设计为模块化并且包括作为刚性单元连接在一起的多个单独的基部段（23）。 阀单元（3）包括多个阀模块（4）。 在基部段（23）的下方，定位有与阀模块（4）相关联的几个连接段（25）。 它们具有与阀模块（4）连通并且具有至少部分地与它们相关联的电和/或流体功率功能单元（38）的负载管道（33）。

公开(公告)号：US6085775A

公开(公告)日：2000-07-11

申请号：US211912

申请日：1998-12-15

申请人： Leon B. Smith

发明人： Leon B. Smith

IPC分类号： B67D7/74 ,  B67D7/78 ,  F16L41/03 ,  G05D7/06

CPC分类号： B67D7/74 ,  B67D7/78 ,  F16L41/03 ,  Y10T137/5109 ,  Y10T137/5196

摘要： A manifold for distributing fuel within a fuel distribution system that is convertible between a multi-hose output design and a single hose output design. The manifold includes a main housing, and a plurality of ports connected with the main housing for inputting and outputting fuel. The ports are selectively positionable between an open position to allow the fuel to pass through the port, and a closed position to prevent fuel to pass through the port. A cover is positioned on the main housing for selectively directing the flow of the fuel through the main housing.

摘要翻译： 用于在燃料分配系统内分配燃料的歧管，其可在多管输出设计和单软管输出设计之间转换。 歧管包括主壳体和与主壳体连接的多个端口，用于输入和输出燃料。 端口可以​​选择性地定位在允许燃料通过端口的打开位置之间，以及关闭位置以防止燃料通过端口。 盖子定位在主壳体上，用于选择性地引导燃料的流动通过主壳体。

公开(公告)号：US5992463A

公开(公告)日：1999-11-30

申请号：US739936

申请日：1996-10-30

申请人： Eric J. Redemann ,  Kim N. Vu

发明人： Eric J. Redemann ,  Kim N. Vu

IPC分类号： F16K27/00 ,  C23C16/44 ,  C23C16/455 ,  F16K11/10 ,  F16K51/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/304 ,  F16K11/20

CPC分类号： H01L21/67017 ,  C23C16/44 ,  C23C16/455 ,  C23C16/45561 ,  H01J37/3244 ,  Y10T137/4259 ,  Y10T137/5109 ,  Y10T137/5283 ,  Y10T137/87885 ,  Y10T137/87917

摘要： A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

公开(公告)号：US5979489A

公开(公告)日：1999-11-09

申请号：US061789

申请日：1998-04-16

申请人： Walter Pitsch

发明人： Walter Pitsch

IPC分类号： E03C1/04

CPC分类号： E03C1/04 ,  E03C2201/50 ,  Y10T137/5109 ,  Y10T137/6977

摘要： A faucet fitting system having interchangeable components useable in both single handle and dual handle faucet fixtures. The component system is designed to allow the same putty plate with breast plate, waterway spout, aerator and mounting nuts to be used with the various escutcheons, metering valves and waterways associated with the single handle and dual handle faucet fixtures. Specially constructed water valves, putty plates and escutcheon constructions useable in conjunction with the system are also disclosed.

摘要翻译： 水龙头配件系统具有可互换组件，可用于单把手和双手柄水龙头夹具。 组件系统设计为允许与具有胸板，水道喷嘴，曝气器和安装螺母的相同的油灰板与与单把手和双手柄龙头固定装置相关联的各种孔，计量阀和水道一起使用。 还公开了可与系统结合使用的特殊构造的水阀，腻子板和孔盖结构。

公开(公告)号：US5924447A

公开(公告)日：1999-07-20

申请号：US105966

申请日：1998-06-26

申请人： Bryce Evans ,  Helen E. Rebenne

发明人： Bryce Evans ,  Helen E. Rebenne

IPC分类号： F17D1/04 ,  C23C16/44 ,  F16K1/44 ,  F16L29/04 ,  F17C13/04 ,  G05D7/01 ,  H01L21/205 ,  F16K31/122

CPC分类号： C23C16/4409 ,  C23C16/4401 ,  C23C16/4402 ,  F16K1/443 ,  F16L29/04 ,  F17C13/04 ,  F17C2205/0146 ,  F17C2205/0323 ,  F17C2205/0338 ,  F17C2205/0341 ,  F17C2205/0385 ,  F17C2221/014 ,  F17C2221/05 ,  F17C2223/0123 ,  F17C2227/036 ,  F17C2227/044 ,  F17C2250/043 ,  F17C2250/0636 ,  F17C2260/036 ,  F17C2265/01 ,  F17C2270/0518 ,  Y10T137/5109 ,  Y10T137/7976 ,  Y10T137/8326 ,  Y10T137/88062

摘要： Valved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount of the wetted surface of the coupler is exposed to the external environment. A gas processing component (e.g., a filter), or an entire integrated gas stick assembly, may be sealed from the exterior environment at both its inlet and outlet sides, by these valved couplers. As a result, the entire device can be purged after manufacture and left in a controlled environment during shipment and installation, reducing the need for purging after installation.

公开(公告)号：US5778924A

公开(公告)日：1998-07-14

申请号：US605009

申请日：1996-04-26

申请人： Helmut Stangl ,  Gerhard Beutler

发明人： Helmut Stangl ,  Gerhard Beutler

IPC分类号： F15B13/042 ,  F04B49/08 ,  F15B11/00 ,  F15B13/02

CPC分类号： F04B49/08 ,  F04B2201/1204 ,  F04B2205/08 ,  Y10T137/5109 ,  Y10T137/86614

摘要： The invention relates to a hydraulic control valve block in standard configuration having a first control valve (2) and a second control valve (3), functionally cooperating with the first control valve and connected therewith via pressure medium channels (28-31, 33), having a valve piston (5) which is controlled on the one hand by a hydraulic control pressure in a pressure chamber (25) and on the other hand is acted upon by a spring pressure part (7). In order to reduce the construction and installation costs of the control valve block, whilst employing a remotely controllable seat valve, and maintaining its functions, it is provided in accordance with the invention that a supplementary pressure medium channel (36) is formed in the control valve block and that the spring pressure part (7) of the second control valve (3) is replaced by an electrically controllable seat valve (60.1; 60.2) having an electromechanical control part (66.1; 66.2) and at least two hydraulic connections (63.1; 64.1) as valve inlet (63) and valve outlet (64.1; 64.2), and in that the valve piston (5) of the second control valve (3) is deactivated and therewith, at the same time, one (64.1; 64.2) of the two hydraulic connections (63, 64.1; 64.2) of the seat valve (60.1; 60.2) is connected to a hydraulic connection (T) already present and the other hydraulic connection (63) is connected to the supplementary pressure medium channel (36).

摘要翻译： PCT No.PCT / EP94 / 02857 Sec。 371日期：1996年4月26日 102（e）日期1996年4月26日PCT 1994年8月29日PCT PCT。 公开号WO95 / 06818 日期：1995年3月9日本发明涉及具有第一控制阀（2）和第二控制阀（3）的标准结构的液压控制阀块，其功能上与第一控制阀配合并通过压力介质通道（28 -31,33），其具有一个通过压力室（25）中的液压控制压力控制的阀活塞（5），另一方面由弹簧压力部件（7）作用。 为了减少控制阀块的结构和安装成本，同时采用可遥控的座阀，并保持其功能，根据本发明提供了一种辅助压力介质通道（36）形成在控制器 并且第二控制阀（3）的弹簧压力部分（7）由具有机电控制部分（66.1; 66.2）和至少两个液压连接（63.1）的电控座阀（60.1; 60.2）代替 ; 64.1）作为阀入口（63）和阀出口（64.1; 64.2），并且第二控制阀（3）的阀活塞（5）停用，同时，一个（64.1; 64.2 座阀（60.1; 60.2）的两个液压连接件（63,64.1; 64.2）连接到已经存在的液压连接件（T），而另一液压连接件（63）连接到辅助压力介质通道 36）。

公开(公告)号：US5771918A

公开(公告)日：1998-06-30

申请号：US553552

申请日：1995-12-18

申请人： Yoshihiro Fukano ,  Yoshitada Doi

发明人： Yoshihiro Fukano ,  Yoshitada Doi

IPC分类号： F15B13/00 ,  F15B13/08 ,  F16K27/00 ,  F16K27/04 ,  F16K39/00

CPC分类号： F15B13/0817 ,  F15B13/0825 ,  F15B13/0835 ,  F15B13/0871 ,  F16K27/003 ,  F16K27/041 ,  Y10T137/5109 ,  Y10T137/5283

摘要： A valve body has second output ports defined in an upper surface thereof. To the second output ports there are selectively and detachably attached quick-connect-and-disconnect pipe couplings or a pipe adapter which provides communication between the second output ports and front output ports through output passages. When the quick-connect-and-disconnect pipe couplings are attached, output pipes can be connected to the valve body from its upper side through the quick-connect-and-disconnect pipe couplings. When the pipe adapter is attached, output pipes can be connected to the valve body from its front side through quick-connect-and-disconnect pipe couplings connected to the front output ports.

摘要翻译： PCT No.PCT / JP94 / 00639 Sec。 371 1995年12月18日第 102（e）日期1995年12月18日PCT 1994年4月18日PCT PCT。 公开号WO95 / 28590 日期1995年10月26日阀体具有限定在其上表面中的第二输出端口。 对于第二输出端口，有选择性地和可拆卸地连接的快速连接和断开的管接头或通过输出通道提供第二输出端口和前端输出端口之间的通信的管接头。 当连接快速连接和断开的管接头时，输出管可以通过快速连接和断开的管接头从其上侧连接到阀体。 当连接管道适配器时，输出管道可以通过连接到前端输出端口的快速连接断开的管接头从其前侧连接到阀体。

公开(公告)号：US5758684A

公开(公告)日：1998-06-02

申请号：US683737

申请日：1996-07-17

申请人： Hugh F. Hudson ,  James S. Greevers ,  Dennis J. Ulicny

发明人： Hugh F. Hudson ,  James S. Greevers ,  Dennis J. Ulicny

IPC分类号： F16K31/04 ,  F16K31/53

CPC分类号： F16K31/53 ,  F16K31/046 ,  F16K31/047 ,  F16H2025/2068 ,  Y10T137/5109

摘要： An apparatus for selectively effecting actuation of one of a rotatably driven device and a linearly driven device. The apparatus includes a frame, an output gear cluster coupled to the frame for rotation relative thereto and driving means for selectively rotating the output gear cluster in a first direction and a second direction. The actuator further includes an output hub having at least one of a rotary output head adapted to couple the output gear cluster to the positioning member of the rotatably driven device and a linear output head adapted to couple the output gear cluster to the positioning member of the linearly driven device. By this arrangement, and by selectively coupling one of the rotary output head and linear output head to the output gear cluster and to the positioning member of one of the rotatably driven device and linearly driven device, the actuator selectively actuates one of the rotatably driven device and the linearly driven device.

摘要翻译： 一种用于选择性地实现可旋转驱动的装置和线性驱动装置之一的致动的装置。 该装置包括框架，耦合到框架以便相对于其旋转的输出齿轮组和用于在第一方向和第二方向选择性地旋转输出齿轮组的驱动装置。 致动器还包括输出轮毂，其具有旋转输出头中的至少一个，该旋转输出头适于将输出齿轮组联接到可旋转驱动的装置的定位构件;以及线性输出头，适于将输出齿轮组联接到定位构件 线性驱动装置。 通过这种布置，并且通过将旋转输出头和线性输出头中的一个选择性地耦合到输出齿轮组和可旋转驱动的装置和线性驱动装置中的一个的定位构件，致动器选择性地致动可旋转驱动装置 和线性驱动装置。

公开(公告)号：US5686657A

公开(公告)日：1997-11-11

申请号：US678844

申请日：1996-07-12

申请人： Stephen R. Craig ,  Paul B. Welsh ,  Robert C. Henderson

发明人： Stephen R. Craig ,  Paul B. Welsh ,  Robert C. Henderson

IPC分类号： G01N30/26 ,  G01N30/02 ,  G01N30/24 ,  G01N30/32 ,  G01N30/38 ,  G01N30/88 ,  G01N30/04

CPC分类号： G01N30/88 ,  G01N30/32 ,  G01N2030/025 ,  G01N2030/385 ,  G01N2030/8881 ,  G01N30/24 ,  Y10T137/5109 ,  Y10T137/87885

摘要： An analytical instrument preferably in the form of a chromatograph includes a computer, a pneumatic controller responsive to the computer, and planar manifold assembly. The planar manifold assembly includes one or more fluid-handling functional devices that may be surface mounted to a planar manifold. The fluid-handling functional device may be constructed as a valve, operable in response to a control signal from pneumatic controller for controlling fluid flow in selected fluid flow paths in the chromatograph, or as a sensor, a fluid regulator, a fluid flow input or output line, or the like.

摘要翻译： 优选以色谱仪形式的分析仪器包括计算机，响应于计算机的气动控制器和平面歧管组件。 平面歧管组件包括可以表面安装到平面歧管的一个或多个流体处理功能装置。 流体处理功能装置可以被构造为阀，其响应于来自气动控制器的控制信号而可操作，用于控制色谱仪中所选择的流体流动路径中的流体流动，或者作为传感器，流体调节器，流体流量输入或 输出线等。