Air kerma conventional true value determining method

    公开(公告)号:US10031240B2

    公开(公告)日:2018-07-24

    申请号:US15529554

    申请日:2015-06-01

    IPC分类号: G01T1/00 G01T1/02 G01N23/20

    摘要: An air kerma conventional true value determining method is provided, which addresses the problem of on-site and in-situ verification or calibration of radiation protection with existing standard reference radiation, which is large in spatial volume and unable or difficult to be moved. The method includes establishing a minitype reference radiation, selecting a proper radiation source and source intensity for providing incident rays for a shielding box, selecting a plurality of gamma ray dosimeters as samples for training a prediction model to obtain the prediction model of the air kerma conventional true value of a point of test, putting a probe of a dosimeter being verified at the point of test, recording scattering gamma spectrum measured by a gamma spectrometer, with the spectrum applied as input to the prediction model to obtain the air kerma conventional true value. The results are accurate and the reference radiation is small in size.

    Model Independent Grazing Incidence X-Ray Reflectivity

    公开(公告)号:US20180180561A1

    公开(公告)日:2018-06-28

    申请号:US15853257

    申请日:2017-12-22

    IPC分类号: G01N23/20

    摘要: A method of measuring properties of a thin film stack by GIXR divides the stack into sub-layers and represents the composition of each sub-layer by an number P. The numbers P represent the composition of each layer. For example, integers may represent pure material and fractional values represent mixtures of the adjacent pure materials. This representation is then used to fit to measured data and the best fit gives an indication of the material composition of each of the sub-layers and hence as a function of depth.

    Closed-loop control of X-ray knife edge
    78.
    发明申请

    公开(公告)号:US20180088062A1

    公开(公告)日:2018-03-29

    申请号:US15717961

    申请日:2017-09-28

    IPC分类号: G01N23/20 G01S17/08

    摘要: Apparatus for X-ray scatterometry includes an X-ray source, which directs an X-ray beam to be incident at a grazing angle on an area of a surface of a sample, and an X-ray detector measures X-rays scattered from the area. A knife edge is arranged parallel to the surface of the sample in a location adjacent to the area so as to define a gap between the surface and the knife edge and to block a portion of the X-ray beam that does not pass through the gap. A motor moves the knife edge perpendicular to the surface so as to control a size of the gap. An optical rangefinder receives optical radiation reflected from the surface and outputs a signal indicative of a distance of the knife edge from the surface. Control circuitry drives the motor responsively to the signal in order to regulate the size of the gap.