公开(公告)号：US5099117A

公开(公告)日：1992-03-24

申请号：US533406

申请日：1990-06-05

Applicant: Josef Frohn ,  Harald Ibach

Inventor： Josef Frohn ,  Harald Ibach

IPC: G01B7/34 ,  G01N27/00 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q30/10 ,  G01Q30/20 ,  G01Q60/10 ,  H01J3/04 ,  H01J37/244 ,  H01J37/252 ,  H01J37/28 ,  H01J49/48

CPC classification number: G01Q30/02 ,  B82Y35/00 ,  G01Q60/16 ,  Y10S977/852 ,  Y10S977/861

Abstract: A scanning tunnel microscope having an emission tip, specimen holder and xyz movement mechanism as well as devices for applying a voltage between the emission tip and the specimen and for detecting the electrons emanating from the specimen can be used for verifying secondary electrons generated in the same surface region and/or an energy analysis of electrons emitted by the emission tip and scattered by the surface if a cylindrical mirror analyzer with assigned detector is arranged coaxially to the emission tip. With relatively high applied voltages, a cylindrically symmetrical correction electrode between the emission tip and the cylindrical mirror, arranged coaxially to the emission tip, is expedient, with which electrode the imaging properties of the analyzer open toward the specimen are made to approximate those of a conventional cylindrical mirror. A masking device allows a solid angle-oriented detection of scattered and secondary electrons. The outer cylinder of the cylindrical mirror may, at least in part, be made transmissive to photons, which are verified by a detector arranged on the outside. A channel multiplier plate with a fluorescent screen, provided opposite the emissions tip, allows detection of structural and/or emission properties of the emission tip by field ion microscopy or field electron microscopy.

Abstract translation: 具有发射尖端，样品夹持器和xyz运动机构的扫描隧道显微镜以及用于在发射尖端和样品之间施加电压并用于检测从样品发出的电子的装置可以用于验证在其中产生的二次电子 如果具有分配检测器的圆柱形镜面分析器与发射尖端同轴地布置，则由发射尖端发射并由表面散射的电子的表面区域和/或能量分析。 在相对较高的施加电压下，发射尖端和圆柱形反射镜之间的圆柱形对称的校正电极与发射尖端同轴地布置，是有利的，分析仪朝向试样开放的成像特性与哪一个电极相接近 常规圆柱镜。 掩蔽装置允许散射和二次电子的立体角度取向检测。 至少部分地，圆柱形反射镜的外圆柱体可以被制成对光子的透射，这被布置在外部的检测器所证实。 具有与发射端相对的荧光屏的通道倍增器板允许通过场离子显微镜或场电子显微镜检测发射尖端的结构和/或发射特性。

公开(公告)号：US4788473A

公开(公告)日：1988-11-29

申请号：US63972

申请日：1987-06-19

Applicant: Haruhisa Mori ,  Motoo Nakano ,  Yoshinobu Ono ,  Takashi Igarashi ,  Masanao Hotta

Inventor： Haruhisa Mori ,  Motoo Nakano ,  Yoshinobu Ono ,  Takashi Igarashi ,  Masanao Hotta

IPC: H01J27/18 ,  H01J37/08 ,  H01J37/32 ,  H01J3/04

CPC classification number: H01J37/32229 ,  H01J27/18 ,  H01J37/08

Abstract: A plasma generating device comprises:a rectangular wave guide for transmitting microwaves, wherein the width of the plasma generating device is decreased in the direction of an electrical field of the microwaves; a plasma generating chamber wherein plasma is generated by absorbing, in a gas, microwave energy transmitted by the rectangular wave guide, and a part of the plasma generating chamber has a rectangular cross-section taken along the plane perpendicular to the microwave propagation direction. A magnetic field generating device is provided having the same axial direction as the direction of propagation of the microwaves and applies a magnetic field having an Electron Cyclotron Resonance intensity to the plasma generating chamber. The magnetic field generating device is provided at least one location outside of the direction of the microwave electrical field direction, and a dielectric window is provided between the rectangular wave guide and the plasma generating chamber to realize a vacuum seal of the plasma generating chamber.

Abstract translation: 一种等离子体产生装置包括：用于传输微波的矩形波导，其中所述等离子体产生装置的宽度在所述微波的电场方向上减小; 等离子体产生室，其中通过在气体中吸收由矩形波导传输的微波能量而产生等离子体，并且等离子体产生室的一部分具有沿着与微波传播方向垂直的平面截取的矩形截面。 提供具有与微波传播方向相同轴向的磁场产生装置，并向等离子体产生室施加具有电子回旋共振强度的磁场。 磁场产生装置设置在微波电场方向外的至少一个位置处，并且在矩形波导和等离子体发生室之间设置介质窗，以实现等离子体发生室的真空密封。

公开(公告)号：US4652079A

公开(公告)日：1987-03-24

申请号：US527163

申请日：1983-08-26

Applicant: Herbert J. Shaw ,  Steven A. Newton

Inventor： Herbert J. Shaw ,  Steven A. Newton

IPC: H04B10/00 ,  G02B6/26 ,  G02B6/28 ,  G02B6/287 ,  H01J3/04 ,  H03K3/86

CPC classification number: G02B6/264 ,  G02B6/2861 ,  H03K3/86 ,  Y10S359/90

Abstract: There is disclosed a high speed pulse train generator for generating a train of pulses having arbitrarily close spacing. The apparatus consists of a generator loop comprised of a fiber optic waveguide looped through a directional coupler with the output fiber serving as the input fiber for a similarly structured multiplexer loop. The lengths of the two loops are adjusted such that the time difference in the propagation times of light around the respective loops is small compared to the time of propagation around either loop. The times are adjusted to obtain any arbitrary spacing of the pulses in the output pulse train which is comprised of interleaved pulse trains resulting from each pulse input to the multiplexer loop. Also disclosed is a single loop embodiment for bidirectional data rate transformation and methods of using all the embodiments.

Abstract translation: 公开了一种高速脉冲串发生器，用于产生具有任意紧密间隔的脉冲串。 该装置包括一个发生器回路，该发生器回路包括一个通过定向耦合器环绕的光纤波导，输出光纤用作类似结构的多路复用器回路的输入光纤。 调整两个环路的长度，使得相对于各个环路周围的光的传播时间的时间差与围绕任一环路的传播时间相比较小。 调整时间以获得输出脉冲串中的脉冲的任意间隔，其由输入到多路复用器环路的每个脉冲产生的交错脉冲串组成。 还公开了用于双向数据速率变换的单回路实施例和使用所有实施例的方法。

公开(公告)号：US4560907A

公开(公告)日：1985-12-24

申请号：US505721

申请日：1983-06-20

Applicant: Hifumi Tamura ,  Hiroshi Okano ,  Tohru Ishitani ,  Akira Shimase

Inventor： Hifumi Tamura ,  Hiroshi Okano ,  Tohru Ishitani ,  Akira Shimase

IPC: H01J37/08 ,  B01J19/08 ,  H01J3/04 ,  H01J27/26 ,  H01J49/16 ,  H01J7/24 ,  H05B31/26

CPC classification number: H01J27/26

Abstract: An ion source apparatus of surface ionization type comprises an emitter tip in the form of a round rod having a sharp-pointed end, an ion source material holder for holding the emitter tip coaxially within a crucible made of a material of a high melting point, the crucible having an opening formed in a bottom wall thereof through which the sharp-pointed end of the emitter tip extends outwardly, the ion source material is being filled in the crucible so as to enclose the outer periphery of the sharp-pointed end of the emitter tip, a filament for emitting electrons with which the emitter tip is bombarded from below, a heating power supply for the filament, an ion beam extracting electrode disposed between the emitter tip and the filament and maintained at a potential of a substantially the level as that of the filament, and an accelerating voltage power supply for applying a high voltage between the ion beam extracting electrode and the emitter tip to accelerate the electrons and ion beam.

Abstract translation: 表面电离型的离子源装置包括具有尖锐端的圆棒形式的发射极尖端，用于将发射极尖端同轴地保持在由高熔点材料制成的坩埚内的离子源材料保持器， 所述坩埚具有形成在其底壁中的开口，所述发射极尖端的尖锐尖端通过所述开口向外延伸，所述离子源材料被填充在所述坩埚中，以便包围所述坩埚的所述尖端的外周 发射极尖端，用于发射发射极尖端从下方被轰击的电子的灯丝，用于灯丝的加热电源，设置在发射极尖端和灯丝之间的离子束提取电极，并保持在基本上等级的电位 以及用于在离子束提取电极和发射极尖端之间施加高电压的加速电压电源，以加速电子和离子束 m。

公开(公告)号：US4388560A

公开(公告)日：1983-06-14

申请号：US266772

申请日：1981-05-26

Applicant: William P. Robinson ,  Hugh McNulty, Jr. ,  Robert L. Seliger ,  Weldon S. Williamson

Inventor： William P. Robinson ,  Hugh McNulty, Jr. ,  Robert L. Seliger ,  Weldon S. Williamson

IPC: H01J3/04 ,  H01J1/13 ,  H01J27/02 ,  H01J27/04 ,  H01J27/26 ,  H01J37/08 ,  H01J49/16

CPC classification number: H01J27/205 ,  H01J1/13 ,  H01J27/022 ,  H01J37/08

Abstract: Thermionic cathode 12 for a plasma ion source 10 has tungsten wire 64 advanced by wheels 56 from supply 50 to take-up spool 58. In chamber 48, the active cathode region 64 acts with anode 16 to supply electrons for ionizing a fuel gas so the ions are discharged from slit 18 for acceleration, separation and implantation.

Abstract translation: 等离子体离子源10的热阴极12具有由电源50到卷取轴58的轮56前进的钨丝64.在室48中，活性阴极区64与阳极16起作用，以提供用于电离燃料气体的电子， 离子从狭缝18排出，用于加速，分离和植入。

公开(公告)号：US4303865A

公开(公告)日：1981-12-01

申请号：US69409

申请日：1979-08-24

Applicant: Donald L. Swingler

Inventor： Donald L. Swingler

IPC: H01J49/10 ,  B03B5/26 ,  E02F3/90 ,  E02F7/06 ,  G01N27/62 ,  H01J3/04 ,  H01J15/02 ,  H01J49/02 ,  H01J49/12 ,  H01J49/42 ,  H01J27/00

CPC classification number: H01J49/126 ,  B03B5/26 ,  E02F3/90 ,  E02F7/065 ,  H01J49/025

Abstract: A plasma discharge ion source for a mass spectrometer, having a magnet forming an axial magnetic field, two cathodes axially spaced in said field and an annular anode between the cathodes. Ions generated by the source emerge via an opening in one cathode and then pass in succession through axially aligned openings in two planar electrodes. The electrode closest said one cathode has a further disc or cone shaped electrode positioned in the opening of that electrode so as to form an annular gap between the peripheries of the disc shaped electrode and opening.Ions from the source opening pass in succession through the annular gap and then through the electrode opening in the electrode furtherest from the source opening. By applying suitable electric potentials to the electrodes ions of an energy above a predetermined level are prevented from passing through the electrodes.A mass spectrometer employing the source is also disclosed this employing an electrostatic ion filter and an ion collector to receive filtered ions from the source via the filter.The collector includes a slow ion deflector arranged to deflect emergent ions from the filter to a collector member of the collector and to which deflector emergent ions of high energy travel directly without such deflection.

Abstract translation: 用于质谱仪的等离子体放电离子源，其具有形成轴向磁场的磁体，在所述场中轴向间隔开的两个阴极和阴极之间的环形阳极。 由源产生的离子通过一个阴极中的开口出现，然后连续地通过两个平面电极中的轴向对准的开口。 最靠近所述一个阴极的电极具有位于该电极的开口中的另一个圆盘或锥形电极，以便在盘状电极的周边和开口之间形成环形间隙。 来自源极开口的离子通过环形间隙连续通过，然后通过电极开口处离开源极开口的电极开口。 通过向电极施加合适的电位，防止超过预定水平的能量的离子通过电极。 还公开了采用该源的质谱仪，其采用静电离子过滤器和离子收集器以经由过滤器从源接收经过滤的离子。 收集器包括缓慢的离子偏转器，其布置成将来自过滤器的紧急离子偏转到收集器的收集器构件，并且高能量的偏转器出射离子直接行进而没有这种偏转。

公开(公告)号：US4293794A

公开(公告)日：1981-10-06

申请号：US136227

申请日：1980-04-01

Applicant: Christos A. Kapetanakos

Inventor： Christos A. Kapetanakos

IPC: H01J27/02 ,  H01J3/04

CPC classification number: H01J27/02

Abstract: A system based on the magnetic compression of ion rings, for generating intense (high-current), high-energy ion pulses that are guided to a target without a metallic wall or an applied external magnetic field includes a vacuum chamber; an inverse reflex tetrode for producing a hollow ion beam within the chamber; magnetic coils for producing a magnetic field, B.sub.o, along the axis of the chamber; a disc that sharpens a magnetic cusp for providing a rotational velocity to the beam and causing the beam to rotate; first and second gate coils for producing fast-rising magnetic field gates, the gates being spaced apart, each gate modifying a corresponding magnetic mirror peak (near and far peaks) for trapping or extracting the ions from the magnetic mirror, the ions forming a ring or layer having rotational energy; a metal liner for generating by magnetic flux compression a high, time-varying magnetic field, the time-varying magnetic field progressively increasing the kinetic energy of the ions, the magnetic field from the second gate coil decreasing the far mirror peak at the end of the compression for extracting the trapped rotating ions from the confining mirror; and a disc that sharpens a magnetic half-cusp for increasing the translational velocity of the ion beam. The system utilizes the self-magnetic field of the rotating, propagating ion beam to prevent the beam from expanding radially upon extraction.

Abstract translation: 基于离子环的磁压缩的系统，用于产生在没有金属壁或施加的外部磁场的情况下被引导到目标的强（高电流）高能离子脉冲包括真空室; 用于在室内产生中空离子束的反向反向四极杆; 用于产生磁场的磁性线圈，沿着腔室的轴线; 一个盘片，用于磨削磁性尖点，以提供转动速度到光束并使光束旋转; 用于产生快速上升磁场门的第一和第二栅极线圈，栅极间隔开，每个栅极修改相应的磁性镜峰（近峰和远端），用于从磁镜捕获或提取离子，离子形成环 或具有旋转能量的层; 用于通过磁通量压缩产生高时变磁场的金属衬垫，时变磁场逐渐增加离子的动能，来自第二栅极线圈的磁场降低了在最后的远镜峰值 用于从限制镜提取被捕获的旋转离子的压缩; 以及用于提高磁性半尖点以提高离子束的平移速度的盘。 该系统利用旋转传播离子束的自磁场，以防止光束在提取时径向膨胀。

公开(公告)号：US4264813A

公开(公告)日：1981-04-28

申请号：US53590

申请日：1979-06-29

Applicant: G. V. Chandrashekhar ,  Praveen Chaudhari ,  Jerome J. Cuomo ,  Richard J. Gambino ,  James M. E. Harper

Inventor： G. V. Chandrashekhar ,  Praveen Chaudhari ,  Jerome J. Cuomo ,  Richard J. Gambino ,  James M. E. Harper

IPC: B23K15/00 ,  H01J3/04 ,  H01J27/02 ,  H01J27/20 ,  H01J37/08 ,  H01L21/265 ,  H01L27/00 ,  B01D59/44 ,  H01J27/00

CPC classification number: H01L27/00 ,  H01J27/20 ,  H01J37/08

Abstract: The present invention describes an ion source which is capable of producing relatively high density ion currents. The ion source employs an electrically biased ionic conductor to supply ions from a reservoir of the atomic species.

Abstract translation: 本发明描述了能够产生较高密度离子电流的离子源。 离子源采用电偏置离子导体来从原子物质的储层供应离子。

公开(公告)号：US4087720A

公开(公告)日：1978-05-02

申请号：US729825

申请日：1976-10-05

Applicant: Toshinori Takagi

Inventor： Toshinori Takagi

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/16 ,  H01J27/18 ,  H01J27/20 ,  H01J37/317 ,  H01L21/265 ,  H05H7/08 ,  H05H1/00

CPC classification number: H01J27/20 ,  H01J27/18

Abstract: A multi-beam, multi-aperture ion source of the beam-plasma type comprises three major regions: the first region where there is created a plurality of electron beams useful for the extraction and focusing of ions; the second region where a gaseous discharge is effected with the aid of the electron beams emerging from the first region, and high frequency oscillation or microwave oscillation is provided by utilization of instability due to electron beam-plasma interactions to thereby create high density ions by that heating energy; and the third region where the electron beams from the second region are collected through the use of a collector, and construction and applied voltage is adjusted to facilitate the high frequency oscillation. The numerous ions created within the second region are trapped into the form of finely focused beams by the well of negative potential which is defined by the plurality of the electron beams emerging from the first region. The resulting ion beams are extracted and combined in a direction opposite to the direction of the electron beams, thereby producing a single well-focused ion beam.

Abstract translation: 束 - 等离子体型的多光束，多孔径离子源包括三个主要区域：其中产生用于离子的提取和聚焦的多个电子束的第一区域; 借助于从第一区域出射的电子束来实现气体放电的第二区域，以及由于电子束 - 等离子体相互作用而引起的不稳定性，从而产生高频振荡或微波振荡，由此产生高密度离子 加热能量; 并且通过使用集电体来收集来自第二区域的电子束的第三区域，并且调整结构和施加电压以促进高频振荡。 在第二区域内产生的许多离子被由由第一区域出射的多个电子束限定的负电位的阱捕获成精细聚焦的光束的形式。 所得到的离子束在与电子束方向相反的方向上被提取和组合，从而产生单一的良好聚焦的离子束。

公开(公告)号：US3924134A

公开(公告)日：1975-12-02

申请号：US52831274

申请日：1974-11-29

Applicant: IBM

Inventor： UMAN MYRON F ,  WINNARD JAMES R ,  WINTERS HAROLD F

IPC: H01J3/04 ,  H01J27/00 ,  H01J27/14 ,  H01J37/08 ,  H05H7/08 ,  G01T1/20

CPC classification number: H01J27/14 ,  H01J37/08

Abstract: The ion source is comprised of two discharge chambers one of which is provided with a filament and an aperture leading into the other chamber which in turn has an extraction orifice. A low voltage arc discharge is operated in an inert gas atmosphere in the filament chamber while an arc of higher voltage is operated in the second ionization chamber which contains a vapor which will give the desired dopant ion species. The entire source is immersed in an axial magnetic field parallel to a line connecting the filament, the aperture between the two chambers and the extraction orifice.

Abstract translation: 离子源包括两个放电室，其中一个放电室设置有灯丝和通向另一个室的孔，该另一个室又具有抽出孔。 在灯丝室中的惰性气体气氛中操作低电压电弧放电，而在第二离子化室中操作较高电压的电弧，该第二电离室包含将产生所需掺杂剂离子种类的蒸气。 整个源被浸入平行于连接灯丝，两个室之间的孔和提取孔的线的轴向磁场。