Semiconductor structure and method of manufacturing the same

    公开(公告)号:US12057313B2

    公开(公告)日:2024-08-06

    申请号:US17556972

    申请日:2021-12-20

    Inventor: Shin-Hung Li

    CPC classification number: H01L21/02565 H01L21/8258 H01L29/66969 H01L29/7869

    Abstract: The present invention provides a semiconductor structure, including a substrate, a thin-film transistor (TFT) on the substrate, wherein the thin-film transistor including a TFT channel layer, a first source and a first drain in the TFT channel layer and a first capping layer on the TFT channel layer. A MOSFET is on the substrate, with a second gate, a second source and a second drain on two sides of the second gate and a second capping layer on the second gate, wherein top surfaces of the second capping layer and the first capping layer are leveled, and a first ILD layer is on the first capping layer and the second capping layer, wherein the first ILD layer and the first capping layer function collectively as a gate dielectric layer for the TFT.

    METHOD FOR FORMING A SEMICONDUCTOR MEMORY DEVICE

    公开(公告)号:US20240260489A1

    公开(公告)日:2024-08-01

    申请号:US18635027

    申请日:2024-04-15

    Inventor: Chia-Ching Hsu

    Abstract: A semiconductor memory device includes a substrate, a first dielectric layer on the substrate, a bottom electrode on the first dielectric layer, a second dielectric layer on the first dielectric layer, and a top electrode in the second dielectric layer. The top electrode has a lower portion around the bottom electrode and a tapered upper portion. A third dielectric layer is disposed above the bottom electrode and around the tapered upper portion of the top electrode. A resistive-switching layer is disposed between a sidewall of the bottom electrode and a sidewall of the lower portion of the top electrode and between the third dielectric layer and a sidewall of the tapered upper portion of the top electrode. An air gap is disposed in the third dielectric layer.

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