公开(公告)号：US06576908B1

公开(公告)日：2003-06-10

申请号：US09432543

申请日：1999-11-03

申请人： Dieter Winkler ,  Hans-Peter Feuerbaum ,  Ralf Degenhardt

发明人： Dieter Winkler ,  Hans-Peter Feuerbaum ,  Ralf Degenhardt

IPC分类号： H01J3730

CPC分类号： H01J37/301 ,  H01J37/1472 ,  H01J2237/188 ,  H01J2237/25

摘要： A charged particle beam column with a first vacuum chamber further comprises a particle source for providing a beam of charged particles and a multi aperture unit with at least two beam defining apertures for shaping the beam of charged particles. The particle source and the beam defining apertures are located within the first vacuum chamber. A separation unit for isolating a second vacuum chamber from the first vacuum chamber whereby the separation unit comprises a path aperture for the charged particle beam is arranged between the first and second vacuum chamber. A first deflecting unit directs the beam of charged particles through one of the beam defining apertures and a second deflecting unit directs the beam of charged particles through the path aperture.

摘要翻译： 具有第一真空室的带电粒子束柱还包括用于提供带电粒子束的粒子源和具有用于成形带电粒子束的至少两个光束限定孔的多孔单元。 颗粒源和光束限定孔位于第一真空室内。 用于将第二真空室与第一真空室隔离的分离单元，由此分离单元包括用于带电粒子束的路径孔，设置在第一和第二真空室之间。 第一偏转单元将带电粒子束引导通过光束限定孔中的一个，并且第二偏转单元将带电粒子束引导通过路径孔。

公开(公告)号：US5885354A

公开(公告)日：1999-03-23

申请号：US762423

申请日：1996-12-09

申请人： Jurgen Frosien ,  Dieter Winkler ,  Hans Zimmermann

发明人： Jurgen Frosien ,  Dieter Winkler ,  Hans Zimmermann

IPC分类号： H01L21/66 ,  C23C16/04 ,  H01J37/305 ,  H01J37/317 ,  H01L21/00 ,  H01L21/768 ,  H01J37/285

CPC分类号： H01L21/76892 ,  C23C16/047 ,  H01J37/3056 ,  H01L21/67069 ,  H01J2237/049 ,  H01J2237/31732 ,  H01J2237/31744

摘要： The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.

摘要翻译： 本发明涉及一种用于处理样品，特别是集成电路的方法和装置，其中待处理样品的区域用红细胞束扫描，并且至少一种气体供应到待处理区域上方，使得 借助于红细胞束，待处理的区域发生化学反应。 通过在探头区域使用磁场可以显着提高处理速度。

公开(公告)号：US5791894A

公开(公告)日：1998-08-11

申请号：US747569

申请日：1996-11-12

申请人： Klaus Dobbeling ,  Adnan Eroglu ,  Hans Peter Knopfel ,  Wolfgang Polifke ,  Dieter Winkler

发明人： Klaus Dobbeling ,  Adnan Eroglu ,  Hans Peter Knopfel ,  Wolfgang Polifke ,  Dieter Winkler

IPC分类号： F23C7/00 ,  F23D11/40 ,  F23D14/62 ,  F23D17/00 ,  F23D14/46

CPC分类号： F23D17/002 ,  F23C7/002 ,  F23D11/402 ,  F23D14/62 ,  F23C2900/07002

摘要： In a premix burner having a swirl-stabilizing interior space (20) which is essentially formed by sectional shells (11, 12) nested one inside the other in a mutually offset manner as well as by a conically running inner body (13), one feed duct (11c, 12c) each extends upstream of the tangential air-inlet slots (11a, 12a) formed by the offset sectional shells, which feed duct (11c, 12c) is fitted at least with means (11d, 12d) for swirling an air flow (23) and with means for introducing a fuel (24). The introduction of the fuel is preferably arranged downstream of the means for swirling the air flow.

摘要翻译： 在具有旋转稳定的内部空间（20）的预混合燃烧器中，所述旋转稳定内部空间（20）基本上由相互偏移的方式嵌套在另一个内部以及由圆锥形运行的内部主体（13）嵌套的截面壳体（11,12）形成， 进料管道（11c，12c）各自在由偏移截面壳体形成的切向进气狭槽（11a，12a）的上游延伸，进料管道（11c，12c）至少装配有用于旋转的装置（11d，12d） 空气流（23）和用于引入燃料（24）的装置。 燃料的引入优选地布置在用于旋转空气流的装置的下游。

公开(公告)号：US5637538A

公开(公告)日：1997-06-10

申请号：US342743

申请日：1994-11-21

申请人： Jurgen Frosien ,  Dieter Winkler ,  Hans Zimmermann

发明人： Jurgen Frosien ,  Dieter Winkler ,  Hans Zimmermann

IPC分类号： H01L21/66 ,  C23C16/04 ,  H01J37/305 ,  H01J37/317 ,  H01L21/00 ,  H01L21/768 ,  H01L21/302

CPC分类号： H01L21/76892 ,  C23C16/047 ,  H01J37/3056 ,  H01L21/67069 ,  H01J2237/049 ,  H01J2237/31732 ,  H01J2237/31744

摘要： The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.

摘要翻译： 本发明涉及一种用于处理样品，特别是集成电路的方法和装置，其中待处理样品的区域用红细胞束扫描，并且至少一种气体供应到待处理区域上方，使得 借助于红细胞束，待处理的区域发生化学反应。 通过在探头区域使用磁场可以显着提高处理速度。

公开(公告)号：US4956057A

公开(公告)日：1990-09-11

申请号：US420954

申请日：1989-10-13

申请人： Samuel Stucki ,  Dieter Winkler

发明人： Samuel Stucki ,  Dieter Winkler

IPC分类号： C02F1/461 ,  B01D53/86 ,  C02F1/467

CPC分类号： C02F1/4676 ,  B01D53/8625 ,  C02F2101/163 ,  C02F2103/18 ,  C02F2201/46115 ,  Y02C20/10 ,  Y10S210/903

摘要： A process for complete removal of nitrites and nitrates from an aqueous solution (1) by means of electrolysis, wherein the aqueous solution (1) is fed to the cathode space (4) of an electrolysis cell (2) and an aqueous solution (10), still containing only non-participating residual salts, is discharged from the anode space (6), whereas the gas (7) formed at the cathode is fed to a catalyst bed (8). In the latter, the gases H.sub.2, NH.sub.3, NO and N.sub.2 O collected in the cathode space (4) are converted to the non-toxic substances N.sub.2 and H.sub.2 O. In addition, partial combustion of H.sub.2 by O.sub.2 from the anode space (6) for maintaining the temperature of the catalyst bed (8).

摘要翻译： 一种通过电解从水溶液（1）中完全除去亚硝酸盐和硝酸盐的方法，其中将水溶液（1）进料到电解槽（2）的阴极空间（4）和水溶液（10） ）仍然仅含有不参与的残留盐从阳极空间（6）排出，而在阴极处形成的气体（7）被供给到催化剂床（8）。 在后者中，阴极空间（4）中收集的气体H2，NH3，NO和N2O转化为无毒物质N2和H2O。 另外，为了维持催化剂床（8）的温度，通过O 2从阳极空间（6）部分燃烧H 2。

公开(公告)号：US4924136A

公开(公告)日：1990-05-08

申请号：US219580

申请日：1988-07-15

申请人： Burkhard Lischke ,  Dieter Winkler

发明人： Burkhard Lischke ,  Dieter Winkler

IPC分类号： H01J37/06 ,  H01J1/18 ,  H01J37/07 ,  H01J49/08

CPC分类号： H01J37/07 ,  H01J1/18

摘要： Beam generating system for electron beam measuring instruments. In prior art beam generators, the life expectancy of directly heated boride cathodes is limited by their thermally disadvantageous mount. The present invention provides a cathode not clamped at the lower end of the crystal shank as was previously standard, but clamped immediately below the cathode tip. The inventive mount of the boride cathode results in the crystal being only insignificantly hotter in the region of the clamping plane than at the electron-emitting tip.

摘要翻译： 用于电子束测量仪器的光束发生系统。 在现有技术的光束发生器中，直接加热的硼化物阴极的寿命受其不利的安装限制。 本发明提供了一个阴极，不像以前标准那样夹在晶体柄的下端，而是紧紧地夹在阴极尖端的正下方。 本发明的硼化阴极的安装导致晶体在夹持平面的区域中比在电子发射尖端处仅显着更热。