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165 条记录 (耗时 0.022 秒)

    USE OF ENHANCED TURBOMOLECULAR PUMP FOR GAPFILL DEPOSITION USING HIGH FLOWS OF LOW-MASS FLUENT GAS
    81.
    发明申请
    USE OF ENHANCED TURBOMOLECULAR PUMP FOR GAPFILL DEPOSITION USING HIGH FLOWS OF LOW-MASS FLUENT GAS 审中-公开
    使用低流量气体高流量的增强型涡轮分子泵进行气泡沉积

    公开(公告)号：US20060225648A1

    公开(公告)日：2006-10-12

    申请号：US11422212

    申请日：2006-06-05

    申请人： Muhammad Rasheed ,  Steven Kim

    发明人： Muhammad Rasheed ,  Steven Kim

    IPC分类号： B05C11/00

    CPC分类号： C23C16/4412 ,  C23C16/045 ,  H01L21/02164 ,  H01L21/02274 ,  H01L21/31612

    摘要： High flows of low-mass fluent gases are used in an HDP-CVD process for gapfill deposition of a silicon oxide film. An enhanced turbomolecular pump that provides a large compression ratio for such low-mass fluent gases permits pressures to be maintained at relatively low levels in a substrate processing chamber, thereby improving the gapfill characteristics.

    摘要翻译： 在HDP-CVD工艺中使用高流量的低质量流动气体用于氧化硅膜的间隙填充。 为这种低质量流动气体提供大的压缩比的增强的涡轮分子泵允许在衬底处理室中保持相对较低水平的压力，从而提高间隙填充特性。

    Biopsy marker delivery system
    82.
    发明授权
    Biopsy marker delivery system 失效

    公开(公告)号：US07083576B2

    公开(公告)日：2006-08-01

    申请号：US10639050

    申请日：2003-08-11

    申请人： Sascha Zarins ,  Steven Kim

    发明人： Sascha Zarins ,  Steven Kim

    IPC分类号： A61B10/00

    CPC分类号： A61B10/0275 ,  A61B10/0283 ,  A61B90/39 ,  A61B2017/00539 ,  A61B2090/034 ,  A61B2090/038 ,  A61B2090/3987

    摘要： An apparatus for delivering subcutaneous cavity marking devices. More particularly, the delivery devices may be used with biopsy systems permitting efficient placement of a biopsy marker within a cavity. The device may include an intermediate member which assists in deployment of the marking device. The devices may also include a deployment lock to prevent premature deployment of a biopsy marker. The invention may further include the capability to match an orientation of a biopsy probe which has been rotated upon procurement of a biopsy sample.

    Magnetic-field concentration in inductively coupled plasma reactors
    83.
    发明申请
    Magnetic-field concentration in inductively coupled plasma reactors 审中-公开
    电感耦合等离子体反应堆中的磁场浓度

    公开(公告)号：US20060075967A1

    公开(公告)日：2006-04-13

    申请号：US10963030

    申请日：2004-10-12

    申请人： Siqing Lu ,  Canfeng Lai ,  Qiwei Liang ,  Maolin Long ,  Irene Chou ,  Jason Bloking ,  Steven Kim ,  Ellie Yieh

    发明人： Siqing Lu ,  Canfeng Lai ,  Qiwei Liang ,  Maolin Long ,  Irene Chou ,  Jason Bloking ,  Steven Kim ,  Ellie Yieh

    IPC分类号： H01L21/20 ,  C23C16/00

    CPC分类号： H01J37/321 ,  C23C16/045 ,  C23C16/401 ,  C23C16/507 ,  H05B6/26

    摘要： A substrate processing system is provided with a housing defining a process chamber. A substrate holder is disposed within the process chamber and configured to support a substrate during substrate processing. A gas delivery system is configured to introduce a gas into the process chamber. A pressure-control system is provided for maintaining a selected pressure within the process chamber. A high-density-plasma generating system is operatively coupled with the process chamber and includes a coil for inductively coupling energy into a plasma formed within the process chamber. It also includes magneto-dielectric material proximate the coil for concentrating a magnetic field generated by the coil. A controller is also provided for controlling the gas-delivery system, the pressure-control system, and the high-density-plasma generating system.

    摘要翻译： 衬底处理系统设置有限定处理室的壳体。 衬底保持器设置在处理室内并且构造成在衬底处理期间支撑衬底。 气体输送系统构造成将气体引入处理室。 提供压力控制系统以保持处理室内的选定压力。 高密度等离子体发生系统与处理室可操作地耦合，并且包括用于将能量感应耦合到处理室内形成的等离子体中的线圈。 它还包括靠近线圈的磁电介质材料，用于集中由线圈产生的磁场。 还提供用于控制气体输送系统，压力控制系统和高密度等离子体产生系统的控制器。

    Devices and methods for cooling microwave antennas
    86.
    发明申请
    Devices and methods for cooling microwave antennas 有权
    用于冷却微波天线的设备和方法

    公开(公告)号：US20050015081A1

    公开(公告)日：2005-01-20

    申请号：US10622800

    申请日：2003-07-18

    申请人： Roman Turovskiy ,  Steven Kim

    发明人： Roman Turovskiy ,  Steven Kim

    IPC分类号： A61B18/00 ,  A61B18/18

    CPC分类号： A61B18/1815 ,  A61B18/18 ,  A61B2017/00084 ,  A61B2018/00017 ,  A61B2018/00023 ,  A61B2018/0022 ,  A61B2018/00577 ,  A61B2018/00744 ,  A61B2018/00791 ,  A61B2018/00863 ,  A61B2018/00875 ,  A61B2018/1838 ,  A61N5/045

    摘要： Devices and methods for cooling microwave antennas are disclosed herein. The cooling systems can be used with various types of microwave antennas. One variation generally comprises a handle portion with an elongate outer jacket extending from the handle portion. A microwave antenna is positioned within the handle and outer jacket such that cooling fluid pumped into the handle comes into contact directly along a portion of the length, or a majority of the length, or the entire length of the antenna to allow for direct convective cooling. Other variations include cooling sheaths which form defined cooling channels around a portion of the antenna. Yet another variation includes passively-cooled systems which utilize expandable balloons to urge tissue away from the surface of the microwave antenna as well as cooling sheaths which are cooled through endothermic chemical reactions. Furthermore, the microwave antennas themselves can have cooling lumens integrated directly therethrough.

    摘要翻译： 本文公开了用于冷却微波天线的装置和方法。 冷却系统可用于各种类型的微波天线。 一个变型通常包括具有从手柄部分延伸的细长外护套的手柄部分。 微波天线位于手柄和外护套内，使得泵送到手柄中的冷却液体沿着长度的一部分，或长度的大部分或天线的整个长度直接接触以允许直接对流冷却 。 其他变型包括在天线的一部分周围形成限定的冷却通道的冷却护套。 另一个变型包括被动冷却的系统，其利用可膨胀的气囊来促使组织远离微波天线的表面，以及通过吸热化学反应冷却的冷却鞘。 此外，微波天线本身可以具有直接集成在其中的冷却管道。