公开(公告)号：US5703485A

公开(公告)日：1997-12-30

申请号：US687903

申请日：1996-07-29

申请人： Yimin Guo ,  Kochan Ju ,  Yimin Hsu

发明人： Yimin Guo ,  Kochan Ju ,  Yimin Hsu

IPC分类号： G01R33/09 ,  G11B5/31 ,  G11B5/39 ,  G01R33/02 ,  H01L43/00 ,  H01F10/02

CPC分类号： B82Y25/00 ,  G01R33/093 ,  G11B5/3932 ,  G11B5/3166

摘要： A method for determining through a test structure a longitudinal magnetic exchange field within a patterned exchange biased magnetoresistive (MR) sensor element. To practice the method, there is first provided a substrate. Formed upon the substrate is a patterned magnetoresistive (MR) layer which has a projected length upon the substrate and a projected width upon the substrate. There is formed at a pair of separated locations over the patterned magnetoresistive (MR) layer a pair of patterned conductor lead layers. The pair of patterned conductor lead layers is separated by a track width of the patterned magnetoresistive (MR) layer, where the track width is smaller than the projected width. There is also formed within the track width and upon the patterned magnetoresistive (MR) layer a minimum of one patterned anti-ferromagnetic layer separated from each patterned conductor lead layer within the pair of patterned conductor lead layers by a minimum of one unpinned width of the patterned magnetoresistive (MR) layer. The patterned magnetoresistive (MR) layer also has a minimum of one pinned width of the patterned magnetoresistive (MR) layer beneath the minimum of one patterned anti-ferromagnetic layer. The projected length, the unpinned width and the pinned width of the patterned magnetoresistive (MR) layer are chosen such that the magnetic domains within the unpinned width and the pinned width are coupled such that they switch jointly in an externally applied magnetic field. Finally, there is measured through the patterned conductor lead layers a resistance change within the patterned magnetoresistive (MR) layer when the patterned magnetoresistive (MR) layer is exposed to the externally applied magnetic field. The invention also contemplates the test structure through which the method of the invention is practiced.

公开(公告)号：US08233235B2

公开(公告)日：2012-07-31

申请号：US12634514

申请日：2009-12-09

申请人： Yingjian Chen ,  Liubo Hong ,  Yimin Hsu

发明人： Yingjian Chen ,  Liubo Hong ,  Yimin Hsu

IPC分类号： G11B5/147 ,  G11B5/23

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49048

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US08139319B2

公开(公告)日：2012-03-20

申请号：US12391242

申请日：2009-02-23

申请人： John Thomas Contreras ,  Yimin Hsu ,  Manfred Ernst Schabes ,  Xinzhi Xing

发明人： John Thomas Contreras ,  Yimin Hsu ,  Manfred Ernst Schabes ,  Xinzhi Xing

IPC分类号： G11B5/127

CPC分类号： G11B5/3123 ,  G11B5/02 ,  G11B5/1278 ,  G11B2005/0005

摘要： A perpendicular magnetic recording system has a write head with a main perpendicular write pole connected to a yoke with first and second electrical coils. The first coil is wrapped around the yoke on one side of the main pole, and the second coil is wrapped around the yoke on the other side of the main pole. The first end of each coil is connected to a respective terminal. The second ends of the two coils are connected together and connected to a common terminal. A lead-time circuit is connected between the common terminal and the first end of one of the coils. Immediately after the direction of write current is switched by the write driver, the lead-time circuit causes the current in one of the coils to lead the current in the other coil. The current displacement between the two coils creates a precession of the magnetic flux reversal, thereby reducing the switching time of the write head.

摘要翻译： 垂直磁记录系统具有写头，其具有与第一和第二电线圈的轭连接的主垂直写极。 第一线圈缠绕在主极的一侧上的轭架上，并且第二线圈缠绕在主极的另一侧上的轭。 每个线圈的第一端连接到相应的端子。 两个线圈的第二端连接在一起并连接到公共端子。 在公共端子和一个线圈的第一端之间连接有引线时间电路。 在写入驱动器切换写入电流的方向之后，引线时间电路使一个线圈中的电流导致另一个线圈中的电流。 两个线圈之间的电流位移产生了磁通反转的进动，从而减小了写入头的切换时间。

公开(公告)号：US20120063034A1

公开(公告)日：2012-03-15

申请号：US12880953

申请日：2010-09-13

申请人： Yimin Hsu ,  Cherngye Hwang ,  Simon Huangchung Liao ,  Stefan Maat

发明人： Yimin Hsu ,  Cherngye Hwang ,  Simon Huangchung Liao ,  Stefan Maat

IPC分类号： G11B5/127

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G01R33/098 ,  G11B5/3932 ,  G11B2005/3996

摘要： A current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor, like a CPP MR disk drive read head, has an improved insulating structure surrounding the stack of layers making up the sensor. The sensor has a first silicon nitride layer with a thickness between about 1 and 5 nm on the side edges of the sensor and on regions of the bottom shield layer adjacent the sensor below the sensor's ferromagnetic biasing layer. The sensor has a second silicon nitride layer with a thickness between about 2 and 5 nm on the back edge of the sensor and on the region of the bottom shield layer adjacent the sensor back edge, and a substantially thicker metal oxide layer on the second silicon nitride layer. The insulating structure prevents edge damage at the perimeter of the sensor and thus allows for the fabrication of CPP MR read heads with substantially smaller dimensions.

摘要翻译： 电流垂直平面（CPP）磁阻（MR）传感器，如CPP MR磁盘驱动器读头，具有围绕构成传感器的层叠层的改进的绝缘结构。 传感器具有在传感器的侧边缘上的厚度在约1和5nm之间的第一氮化硅层以及与传感器的铁磁偏置层下方的传感器相邻的底部屏蔽层的区域。 传感器具有在传感器的后边缘上和厚度在约2和5nm之间的第二氮化硅层，并且在与底部屏蔽层相邻的传感器后边缘的区域上，以及在第二硅上的基本上较厚的金属氧化物层 氮化物层。 绝缘结构防止传感器周边的边缘损坏，从而允许制造具有基本较小尺寸的CPP MR读取头。

公开(公告)号：US08111479B2

公开(公告)日：2012-02-07

申请号：US11877570

申请日：2007-10-23

申请人： Tsung Yuan Chen ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Changqing Shi

发明人： Tsung Yuan Chen ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Changqing Shi

IPC分类号： G11B5/127 ,  G11B5/23

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A magnetic write head for perpendicular magnetic data recording having a trailing shield with a two step throat height. The trailing shield is formed over a non-magnetic bump that forms a notch in the leading edge of the trailing shield. This notch defines a first, smaller throat height closest to the write pole and a larger throat height away from the write pole. The smaller throat height near the write pole prevents excess magnetic flux from leaking to the write pole, thereby ensuring efficient strong write field. The larger trailing shield throat height away from the write pole prevents magnetic saturation of the trailing shield and also greatly facilitates manufacturing avoiding problems related to variations and deviations in manufacturing processes used to define the trailing shield.

摘要翻译： 用于垂直磁数据记录的磁写头，具有具有两段喉部高度的后挡板。 后挡板形成在非磁性凸块上，该非磁性凸块在后挡板的前缘形成凹口。 该凹口限定了最靠近写入极的第一较小的喉部高度和远离写入极的较大的喉部高度。 写极附近的较小的喉部高度可防止过多的磁通量泄漏到写入极，从而确保有效的强写入场。 远离写入极的较大的后屏蔽喉部高度防止尾部屏蔽层的磁饱和，并且还极大地促进制造，避免与用于限定后屏蔽的制造工艺的变化和偏差相关的问题。

公开(公告)号：US08108985B2

公开(公告)日：2012-02-07

申请号：US11934687

申请日：2007-11-02

申请人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-Chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

发明人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-Chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T428/11 ,  Y10T428/1186

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法包括形成写极，然后沉积补充层。 掩模结构可以形成在写极和再填充层上，掩模结构被配置为限定缝合极。 然后可以执行离子铣或反应离子研磨以去除未被掩模结构保护的部分填充层。 然后可以沉积磁性材料以形成限定二次闪光点的缝合写入极。 缝合的杆也可以与电动研磨引导件自对准，以便相对于写入头的空气轴承表面精确地定位二次扩张点的前边缘。

公开(公告)号：US08066892B2

公开(公告)日：2011-11-29

申请号：US12241751

申请日：2008-09-30

申请人： Hung-Chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Sue Siyang Zhang

发明人： Hung-Chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Sue Siyang Zhang

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield.

摘要翻译： 一种用于制造用于垂直磁写头的写极的方法。 该方法采用镶嵌工艺构造具有非常精确控制的轨道宽度的写极点。 该方法包括沉积可以通过反应离子蚀刻容易地去除的材料层。 该材料可以称为可分级材料。 在RIEable材料上形成掩模，并执行反应离子蚀刻以在RIEAble材料中形成锥形沟槽。 可以将CMP停止层沉积，并将写入极电镀到沟槽中。 然后可以执行CMP以限定写入极的后沿。 可以执行另一掩模，蚀刻和电镀步骤以形成拖尾的环绕磁屏蔽。

公开(公告)号：US07881019B2

公开(公告)日：2011-02-01

申请号：US11391835

申请日：2006-03-28

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Vladimir Nikitin

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Vladimir Nikitin

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116

摘要： A magnetic structure for use in a magnetic head for avoiding stray field writing. The magnetic structure can be for example a magnetic shield or could be a magnetic pole of a write head and is particularly advantageous for use in a perpendicular recording system, because such perpendicular recording systems are especially susceptible to stray field writing. The magnetic structure includes a forward protruding portion that extends toward the air bearing surface (ABS) of the head also includes first and second wing portions that extend laterally from the forward protruding portion. The wing portions each have includes an inner constant recess portion, and an outer tapered portion. The inner constant recess portion of each wing prevents stray field writing while also preventing magnetic saturation, the outer tapered portions, which taper away from the ABS as they extend laterally outward, further prevent stray field writing by removing the outer corners of the shield away from the ABS.

摘要翻译： 用于磁头的磁结构，用于避免杂散场写入。 磁性结构可以是例如磁屏蔽或者可以是写入磁头的磁极，并且对于在垂直记录系统中使用是特别有利的，因为这样的垂直记录系统特别容易受到杂散磁场写入的影响。 磁性结构包括朝向头部的空气支承表面（ABS）延伸的向前突出部分还包括从前突出部分横向延伸的第一和第二翼部分。 翼部各自包括内部恒定凹部和外锥形部。 每个翼的内部恒定凹部防止杂散场写入，同时也防止磁饱和，当锥形横向向外延伸时，远离ABS逐渐变细的外锥形部分进一步防止杂散场写入，通过将屏蔽的外角除去 ABS。

公开(公告)号：US07764469B2

公开(公告)日：2010-07-27

申请号：US10976479

申请日：2004-10-29

申请人： Kuok San Ho ,  Yimin Hsu ,  Ching Hwa Tsang

发明人： Kuok San Ho ,  Yimin Hsu ,  Ching Hwa Tsang

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/398

摘要： A magnetic structure for use in a magnetic head for avoiding stray field writing. The magnetic structure can be for example a magnetic shield or could be a magnetic pole of a write head and is particularly advantageous for use in a perpendicular recording system, because such perpendicular recording systems are especially susceptible to stray field writing. The magnetic structure includes a forward protruding portion that extends toward the air bearing surface (ABS) of the head also includes first and second wing portions that extend laterally from the forward protruding portion. The wing portions each have a front edge that is recessed from the ABS. The wings are tapered so that the amount of recess of the front edge of the wings increases with lateral distance from the center of the magnetic structure.

摘要翻译： 用于磁头的磁结构，用于避免杂散场写入。 磁性结构可以是例如磁屏蔽或者可以是写入磁头的磁极，并且对于在垂直记录系统中使用是特别有利的，因为这样的垂直记录系统特别容易受到杂散磁场写入的影响。 磁性结构包括朝向头部的空气支承表面（ABS）延伸的向前突出部分还包括从前突出部分横向延伸的第一和第二翼部分。 翼部各自具有从ABS凹入的前边缘。 翅膀是锥形的，使得翼的前边缘的凹部的数量随着与磁性结构的中心的横向距离而增加。

公开(公告)号：US07757380B2

公开(公告)日：2010-07-20

申请号：US11595654

申请日：2006-11-10

申请人： Amanda Baer ,  Hung-chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Aron Pentek

发明人： Amanda Baer ,  Hung-chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Aron Pentek

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/112 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods for improving within wafer and wafer to wafer yields during fabrication of notched trailing shield structures are disclosed. Ta/Rh CMP stop layers are deposited prior to planarization and notch formation to ensure a planar surface for trailing shield structures. These stop layers may be blanket deposited or patterned prior to CMP. Patterned stop layers produce the highest yields.

摘要翻译： 公开了在制造缺口尾部屏蔽结构期间在晶片和晶片之间改善晶片产量的方法。 在平坦化和切口形成之前沉积Ta / Rh CMP停止层以确保用于尾部屏蔽结构的平坦表面。 这些停止层可以在CMP之前被毯式沉积或图案化。 图案化的停止层产生最高的产量。