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    ARRANGEMENT FOR MEASURING SECTIONS OF TRACK FOR THE PURPOSE OF MAINTAINING RAILROAD TRACKS
    82.
    发明申请
    ARRANGEMENT FOR MEASURING SECTIONS OF TRACK FOR THE PURPOSE OF MAINTAINING RAILROAD TRACKS 有权
    用于测量维护铁路轨道用途的轨道部分的安排

    公开(公告)号：US20120257195A1

    公开(公告)日：2012-10-11

    申请号：US13307413

    申请日：2011-11-30

    Applicant: Wilfried Scherf ,  Michael Luddeneit

    Inventor： Wilfried Scherf ,  Michael Luddeneit

    IPC: G01N21/88

    CPC classification number: G01N21/00 ,  B61K9/08 ,  B61L23/045 ,  B61L23/047 ,  B61L23/048 ,  E01B35/00 ,  G01N21/55

    Abstract: An arrangement for marking and measuring sections of railroad track, which allows track sections which are susceptible to wear to be determined reliably and accurately. A sensor unit is provided for detecting measuring points, and has at least two independent detector units measuring in a non-contacting manner, based on a first optical sensor having spectrally selective sensitivity and a second identification detector. The measuring points, as angle elements, are detachably fastened to the rail and are provided at a horizontally oriented leg with a coating emitting in a narrow spectral band and with an identification value carrier for the identification detector. The sensor unit is so arranged at a device which can travel on tracks that the independent detector units are guided parallel to the rail in the same direction over the measuring points with the movement of the device which can travel on tracks.

    Abstract translation: 用于标记和测量轨道的部分的布置，其允许可靠且准确地确定容易磨损的轨道部分。 提供了一种用于检测测量点的传感器单元，并且具有至少两个独立的检测器单元，其基于具有光谱选择灵敏度的第一光学传感器和第二识别检测器以非接触的方式测量。 作为角度元件的测量点可拆卸地紧固到轨道，并且设置在水平定向的腿部处，其具有在窄光谱带中发射的涂层以及用于识别检测器的识别值载体。 传感器单元被布置在可以在轨道上行进的装置上，独立的检测器单元可以在可以在轨道上行进的装置的运动的情况下以相同的方向在测量点上平行于轨道被引导。

    Fabrication method of semiconductor integrated circuit device
    83.
    发明授权
    Fabrication method of semiconductor integrated circuit device 有权

    公开(公告)号：US08259295B2

    公开(公告)日：2012-09-04

    申请号：US13399684

    申请日：2012-02-17

    Applicant: Norio Watanabe

    Inventor： Norio Watanabe

    IPC: G01N21/00

    CPC classification number: G01N21/00 ,  G01N21/95684 ,  G01N2021/95646 ,  H01L2224/73204 ,  H01L2924/13091 ,  H01L2924/15311 ,  H05K1/0269 ,  H05K3/3452 ,  H05K3/3484 ,  H05K2203/163 ,  H01L2924/00

    Abstract: In the fabrication of a semiconductor integrated circuit device, a 2D-3D inspection technique for solder printed on a substrate is provided which permits easy preparation of data and easy visual confirmation of a defective portion. In a substrate inspecting step, first, a 3D inspection is performed, followed by execution of 2D inspection, whereby a 2D picked-up image of the portion of a pad determined to be defective can be displayed on a larger scale simultaneously with the end of inspection, thereby providing an environment for efficient visual confirmation of the defect. Further, by subjecting a raw substrate to measurement at the time of preparing inspection data, a relation between an original height measurement reference generated automatically by the inspection system and the height of a pad upper surface is checked, whereby it is possible to measure the height and volume of printed solder based on the pad upper surface.

    STRUCTURED ILLUMINATION FOR CONTRAST ENHANCEMENT IN OVERLAY METROLOGY
    84.
    发明申请
    STRUCTURED ILLUMINATION FOR CONTRAST ENHANCEMENT IN OVERLAY METROLOGY 有权
    结构化照明在超大规模的对比度增强

    公开(公告)号：US20120206729A1

    公开(公告)日：2012-08-16

    申请号：US13394064

    申请日：2012-02-08

    Applicant: Joel Seligson ,  Noam Sapiens ,  Daniel Kandel

    Inventor： Joel Seligson ,  Noam Sapiens ,  Daniel Kandel

    IPC: G01N21/47

    CPC classification number: G01N21/47 ,  G01B11/02 ,  G01N21/00 ,  G03F7/70633

    Abstract: Contrast enhancement in a metrology tool may include generating a beam of illumination, directing a portion of the generated beam onto a surface of a spatial light modulator (SLM), directing at least a portion of the generated beam incident on the surface of the SLM through an aperture of an aperture stop and onto one or more target structures of one or more samples, and generating a selected illumination pupil function of the illumination transmitted through the aperture utilizing the SLM in order to establish a contrast level of one or more field images of the one or more target structures above a selected contrast threshold, and performing one or more metrology measurements on the one or more target structures utilizing the selected illumination pupil function.

    Abstract translation: 计量工具中的对比度增强可以包括产生照射光束，将所产生的光束的一部分引导到空间光调制器（SLM）的表面上，引导入射到SLM的表面上的所产生的光束的至少一部分通过 孔径的孔径停止并且连接到一个或多个样本的一个或多个目标结构上，并且利用SLM生成通过孔径透射的照明的选择的照明光瞳函数，以便建立一个或多个场图像的对比度 所述一个或多个目标结构在所选择的对比度阈值之上，以及利用所选择的照明光瞳功能对所述一个或多个目标结构执行一个或多个度量测量。

    PHOTONIC SENSING METHOD AND DEVICE
    86.
    发明申请
    PHOTONIC SENSING METHOD AND DEVICE 有权
    光电传感方法及装置

    公开(公告)号：US20120170041A1

    公开(公告)日：2012-07-05

    申请号：US13388086

    申请日：2010-07-21

    Applicant: Jaime Garcia Ruperez ,  Javier Marti Sendra ,  Alejandro Jose Martinez Abietar

    Inventor： Jaime Garcia Ruperez ,  Javier Marti Sendra ,  Alejandro Jose Martinez Abietar

    IPC: G01N21/59

    CPC classification number: G01N21/00 ,  B82Y20/00 ,  G01N21/552 ,  G01N21/774 ,  G02B6/1225 ,  G02B6/124 ,  G02B2006/1213 ,  G02B2006/12138

    Abstract: This invention describes a photonic sensing method and device based on the periodic dielectric structures of photonic forbidden band, in which the sensing process is carried out through the measurement of variation in signal amplitude as it exits the device. The variation in amplitude is due to a variation in the refraction index of the structure, as a consequence of the presence of the substances that are the object of the sensing. Among the advantages provided by the invention, it is worth mentioning its simplicity in the sensing process; its high level of integration, allowing for a design of reduced proportions; and its adaptability to dielectric structures of one, two or three dimensions.

    Abstract translation: 本发明描述了一种基于光子禁带的周期介质结构的光子感测方法和装置，其中通过测量信号幅度随着离开设备的变化而进行感测处理。 振幅的变化是由于作为感测对象的物质的存在而导致的结构的折射率的变化。 在本发明提供的优点中，值得一提的是它在传感过程中的简单性; 其高度的整合，允许设计减少比例; 以及其对一维，二维或三维的介电结构的适应性。

    MULTI-LAYER VARIABLE MICRO STRUCTURE FOR SENSING SUBSTANCE
    88.
    发明申请
    MULTI-LAYER VARIABLE MICRO STRUCTURE FOR SENSING SUBSTANCE 有权
    用于传感物质的多层可变微结构

    公开(公告)号：US20120086021A1

    公开(公告)日：2012-04-12

    申请号：US13316532

    申请日：2011-12-11

    Applicant: Hong Wang

    Inventor： Hong Wang

    IPC: H01L33/48 ,  H01L29/66

    CPC classification number: G01N21/658 ,  G01N21/00 ,  H01L33/48

    Abstract: An optical sensor includes a substrate having an upper surface, a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface, and two or more structural layers in the sloped surfaces. The surfaces of the two or more structural layers can adsorb molecules of a chemical or biological substance.

    Abstract translation: 光学传感器包括具有上表面的基板，在基板上的多个突起，其中，所述多个突起中的每一个由基板在基板的上表面处限定，并且一个或多个倾斜表面以相对倾斜的角度定向 到上表面，以及倾斜表面中的两个或多个结构层。 两个或多个结构层的表面可吸附化学或生物物质的分子。

    EXAMINING APPARATUS AND EXAMINING METHOD
    90.
    发明申请
    EXAMINING APPARATUS AND EXAMINING METHOD 有权
    检验设备和检验方法

    公开(公告)号：US20110304848A1

    公开(公告)日：2011-12-15

    申请号：US13202717

    申请日：2009-11-19

    Applicant: Kazumasa Tanaka ,  Hiroyuki Yamashita

    Inventor： Kazumasa Tanaka ,  Hiroyuki Yamashita

    IPC: G01N21/88

    CPC classification number: G01N21/00 ,  G01N21/9501 ,  G01N21/95607

    Abstract: When examination at a scan speed equal to or higher than the line rate of the sensor such as a TDI sensor is carried out, the line rate of the TDI sensor is asynchronous with the scan speed, and the image is blurred. Therefore, a TDI sensor cannot be used at a scan speed equal to or higher than the line rate of the TDI sensor. This problem has not been considered. To solve the problem, high-speed examination irrespective of the line rate of the TDI sensor is enabled. To control the line rate of the TDI sensor and stage scan speed asynchronously and to solve the problem of the image addition variation due to the charge accumulation of the TDI sensor, the object to be examined is irradiated with thin-line illumination, and only a given pixel line of the TDI sensor is made to receive light scattered by the object to be examined. The aspect ratio of the detection pixel size can be controlled by the speed ratio between the line rate of the TDI sensor and the stage scan speed.

    Abstract translation: 当扫描速度等于或高于诸如TDI传感器的传感器的线路速率进行检查时，TDI传感器的线路速率与扫描速度异步，图像模糊。 因此，TDI传感器不能以等于或高于TDI传感器的线路速率的扫描速度使用。 这个问题还没有被考虑。 为了解决这个问题，无论TDI传感器的线路速率如何，都可以进行高速检查。 为了异步地控制TDI传感器的线路速率和级扫描速度，并且为了解决由于TDI传感器的电荷累积引起的图像增加变化的问题，用细线照明照射被检查对象，只有 使TDI传感器的给定像素线接收被被检体散射的光。 检测像素尺寸的宽高比可以通过TDI传感器的线路速率与平台扫描速度之间的速度比来控制。

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