公开(公告)号：US20100199783A1

公开(公告)日：2010-08-12

申请号：US12702858

申请日：2010-02-09

申请人： Nobuhiro SAKURAI

发明人： Nobuhiro SAKURAI

IPC分类号： G01L1/22 ,  G01P15/12

CPC分类号： G01P15/18 ,  G01L5/161 ,  G01P15/123 ,  G01P2015/0842

摘要： There is provided a multi-axis force sensor including first and second bridge circuit groups detecting resistances of respective first and second groups of strain resistance elements provided at respective strain producing portions. The strain producing portions are formed on two axes intersecting with respect to each other at a right angle. The first group of strain resistance elements are arranged on one axis across an action portion so as to face with respect to each other, and the second group of strain resistance elements are arranged on another axis across the action portion so as to face with respect to each other. The first bridge circuit groups respectively output a positive voltage when receiving tensile force, and the second bridge circuit groups respectively output a negative voltage when receiving tensile force.

摘要翻译： 提供了一种多轴力传感器，其包括第一和第二桥接电路组，其检测设置在各个应变产生部分处的各个第一和第二组应变电阻元件的电阻。 应变产生部分以相对于彼此以直角相交的两个轴线形成。 第一组应变电阻元件布置在跨越作用部分的一个轴上以相对于彼此面对，并且第二组应变阻力元件布置在跨越作用部分的另一个轴上，以相对于 彼此。 第一桥电路组在接收拉力时分别输出正电压，第二桥电路组在接收拉力时分别输出负电压。

公开(公告)号：US20100071468A1

公开(公告)日：2010-03-25

申请号：US12527141

申请日：2008-02-19

申请人： Satoshi Ohuchi ,  Hiroyuki Aizawa

发明人： Satoshi Ohuchi ,  Hiroyuki Aizawa

IPC分类号： G01C19/56

CPC分类号： G01P15/0802 ,  G01C19/5719 ,  G01P15/123 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0842

摘要： An inertia force sensor includes a detection element having an acceleration detection section (1). This detection element (1) has: two orthogonal arms obtained by connecting first arms (8) to second arms (10) so as to be orthogonal to each other, a support section (12) for supporting one ends of the two first arm (8), a fixation section (4) connected to the other ends of the two first arms (8), and weight sections (2) fixed to tip ends of the second arms (10). The first arm (8) has a thickness thinner than thicknesses of the second arm (10) and weight section (2) to thereby provide an increased detection sensitivity.

摘要翻译： 惯性力传感器包括具有加速度检测部（1）的检测元件。 该检测元件（1）具有：通过将第一臂（8）与第二臂（10）连接成彼此正交而获得的两个正交臂，用于支撑两个第一臂的一端的支撑部（12） 连接到两个第一臂（8）的另一端的固定部分（4）和固定到第二臂（10）的尖端的重量部分（2）。 第一臂（8）的厚度比第二臂（10）和重量部（2）的厚度薄，从而提高检测灵敏度。

公开(公告)号：US07674638B2

公开(公告)日：2010-03-09

申请号：US12094771

申请日：2006-11-24

申请人： Takafumi Okudo ,  Yuji Suzuki ,  Yoshiyuki Takegawa ,  Toru Baba ,  Kouji Gotou ,  Hisakazu Miyajima ,  Kazushi Kataoka ,  Takashi Saijo

发明人： Takafumi Okudo ,  Yuji Suzuki ,  Yoshiyuki Takegawa ,  Toru Baba ,  Kouji Gotou ,  Hisakazu Miyajima ,  Kazushi Kataoka ,  Takashi Saijo

IPC分类号： H01L21/66 ,  H01L23/58 ,  G01R31/26

CPC分类号： G01P15/0802 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00269 ,  B81C2203/0109 ,  B81C2203/019 ,  B81C2203/038 ,  B81C2203/0735 ,  G01P1/023 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842

摘要： A compact sensor device having stable sensor characteristics and the production method are provided. The sensor device is formed with a sensor substrate and a pair of package substrates bonded to both surface of the sensor substrate. The sensor substrate has a frame with an opening, a movable portion held in the opening to be movable relative to the frame, and a detecting portion for outputting an electric signal according to a positional displacement of the movable portion. Surface-activated regions are formed on the frame of the sensor substrate and the package substrates by use of an atomic beam, an ion beam or a plasma of an inert gas. By forming a direct bonding between the surface-activated regions of the sensor substrate and each of the package substrates at room temperature, it is possible to avoid inconvenience resulting from residual stress at the bonding portion.

摘要翻译： 提供了具有稳定的传感器特性的紧凑的传感器装置和制造方法。 传感器装置形成有传感器基板和粘合到传感器基板的两个表面上的一对封装基板。 传感器基板具有开口的框架，保持在开口中的可移动部分可相对于框架移动;以及检测部分，用于根据可移动部分的位置偏移输出电信号。 通过使用原子束，离子束或惰性气体的等离子体，在传感器基板的框架和封装基板上形成表面激活区域。 通过在室温下在传感器基板的表面激活区域和封装基板之间形成直接接合，可以避免由于接合部分处的残余应力引起的不便。

公开(公告)号：US20090305439A1

公开(公告)日：2009-12-10

申请号：US12522786

申请日：2008-10-30

申请人： Akio Morii

发明人： Akio Morii

IPC分类号： H01L21/66 ,  H01L21/302

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  G01P2015/0842

摘要： A method for correcting a mask pattern used for dry-etching an object with higher accuracy, and for manufacturing an acceleration sensor and an angular velocity sensor. The object is first etched by a dry-etching process using an uncorrected reference mask pattern. Then, distribution of the size of expansion of a tapered portion formed in a surface of the object is measured. Thereafter, the measured distribution is approximated by using a quadratic curve (Y=AX2+B) so as to determine A and B. Consequently, an amount t of correction for the tapered portion, which is expressed by the following equation (1) and related to a width of an opening of the mask pattern in a position at a distance r from a center of the object to be etched, can be set. In this way, the correction for the tapered portion can be carried out. t=(Ar2+B)/2  (1)

摘要翻译： 一种用于校正用于以更高精度对物体进行干法蚀刻的掩模图案，以及用于制造加速度传感器和角速度传感器的方法。 首先通过使用未校正的参考掩模图案的干蚀刻工艺蚀刻该物体。 然后，测量形成在物体的表面中的锥形部分的膨胀尺寸的分布。 此后，通过使用二次曲线（Y = AX2 + B）近似测量分布，以便确定A和B.因此，由下式（1）表示的锥形部分的校正量t和 可以设置与距离被蚀刻物的中心距离r的位置处的掩模图案的开口的宽度。 以这种方式，可以进行锥形部的校正。 t =（Ar2 + B）/ 2（1）

公开(公告)号：US20090241668A1

公开(公告)日：2009-10-01

申请号：US12382796

申请日：2009-03-24

申请人： Younseok JANG

发明人： Younseok JANG

IPC分类号： G01P15/125

CPC分类号： G01P15/123 ,  G01P1/023 ,  G01P15/18 ,  G01P2015/0842 ,  H01L2224/05571 ,  H01L2224/05573 ,  H01L2224/056 ,  H01L2224/05624 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2924/10158 ,  H01L2924/00014

摘要： The acceleration sensor package comprises an acceleration sensor chip having a pad forming surface formed with a plurality of pads at at least one edge portion, a control chip having a terminal forming surface formed with connecting terminals, and a case body having a storage concave section for accommodating the acceleration sensor chip and the control chip therein and bottom face terminals respectively disposed at positions corresponding to the pads at a bottom face of the storage concave section. The pads of the acceleration sensor chip are respectively electrically connected to the bottom face terminals of the case body. A back surface located on the side opposite to the terminal forming surface, of the control chip is mated with its corresponding back surface located on the side of the pad forming surface, of the acceleration sensor chip.

摘要翻译： 加速度传感器组件包括加速度传感器芯片，其具有在至少一个边缘部分处形成有多个焊盘的焊盘形成表面，具有形成有连接端子的端子形成表面的控制芯片以及具有用于 容纳其中的加速度传感器芯片和控制芯片以及分别设置在与存储凹部的底面处的焊盘相对应的位置处的底面端子。 加速度传感器芯片的焊盘分别电连接到壳体的底面端子。 位于控制芯片的与端子形成表面相对的一侧的背面与加速度传感器芯片的位于焊盘形成表面侧的对应的后表面配合。

公开(公告)号：US20090152656A1

公开(公告)日：2009-06-18

申请号：US12094771

申请日：2006-11-24

申请人： Takafumi Okudo ,  Yuji Suzuki ,  Yoshiyuki Takegawa ,  Toru Baba ,  Kouji Gotou ,  Hisakazu Miyajima ,  Kazushi Kataoka ,  Takashi Saijo

发明人： Takafumi Okudo ,  Yuji Suzuki ,  Yoshiyuki Takegawa ,  Toru Baba ,  Kouji Gotou ,  Hisakazu Miyajima ,  Kazushi Kataoka ,  Takashi Saijo

IPC分类号： H01L29/84 ,  H01L21/50

CPC分类号： G01P15/0802 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00269 ,  B81C2203/0109 ,  B81C2203/019 ,  B81C2203/038 ,  B81C2203/0735 ,  G01P1/023 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842

摘要： A compact sensor device having stable sensor characteristics and the production method are provided. The sensor device is formed with a sensor substrate and a pair of package substrates bonded to both surface of the sensor substrate. The sensor substrate has a frame with an opening, a movable portion held in the opening to be movable relative to the frame, and a detecting portion for outputting an electric signal according to a positional displacement of the movable portion. Surface-activated regions are formed on the frame of the sensor substrate and the package substrates by use of an atomic beam, an ion beam or a plasma of an inert gas. By forming a direct bonding between the surface-activated regions of the sensor substrate and each of the package substrates at room temperature, it is possible to avoid inconvenience resulting from residual stress at the bonding portion.

摘要翻译： 提供了具有稳定的传感器特性的紧凑的传感器装置和制造方法。 传感器装置形成有传感器基板和粘合到传感器基板的两个表面上的一对封装基板。 传感器基板具有开口的框架，保持在开口中的可移动部分可相对于框架移动;以及检测部分，用于根据可移动部分的位置偏移输出电信号。 通过使用原子束，离子束或惰性气体的等离子体，在传感器基板的框架和封装基板上形成表面激活区域。 通过在室温下在传感器基板的表面激活区域和封装基板之间形成直接接合，可以避免由于接合部分处的残余应力引起的不便。

公开(公告)号：US20080148849A1

公开(公告)日：2008-06-26

申请号：US11737410

申请日：2007-04-19

申请人： Ryoichi Yoshikawa

发明人： Ryoichi Yoshikawa

IPC分类号： G01P15/125 ,  H01L21/4763

CPC分类号： G01P15/125 ,  G01C19/56 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

摘要： A micromachine includes a movable section formed of a conductor and a support section formed of a conductor, wherein the movable section and the support section are separated from each other, an insulating layer is provided on the conductor, a conductive layer is provided on the insulating layer, and the conductive layer is formed so as to straddle the movable section and the support section.

摘要翻译： 微机械包括由导体形成的可移动部分和由导体形成的支撑部分，其中可动部分和支撑部分彼此分离，绝缘层设置在导体上，导电层设置在绝缘体上 并且导电层形成为跨越可移动部分和支撑部分。

公开(公告)号：US07389691B2

公开(公告)日：2008-06-24

申请号：US11295500

申请日：2005-12-07

申请人： Takayuki Kai

发明人： Takayuki Kai

IPC分类号： G01P15/12

CPC分类号： G01P15/18 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842

摘要： A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that the protruding part supports the beam part. With such an arrangement, the adjustment of the sensitivity of the acceleration sensor can be easily performed, as well as the evaluation of the acceleration sensor.

摘要翻译： 加速度传感器包括支撑部分，连接到支撑部分的梁部分，连接到梁部分的重量部分和形成在梁部分下方的突出部分，使得突出部分支撑梁部分。 通过这样的结构，可以容易地进行加速度传感器的灵敏度的调整，以及加速度传感器的评价。

公开(公告)号：US07367232B2

公开(公告)日：2008-05-06

申请号：US11042721

申请日：2005-01-24

申请人： Vladimir Vaganov ,  Nickolai Belov

发明人： Vladimir Vaganov ,  Nickolai Belov

IPC分类号： G01P15/12

CPC分类号： G01P15/18 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842

摘要： A system and method for inputting motion measurement data into a computationally based device are provided. In a first version three-axis accelerometer determines components of an inertial force vector with respect to an orthogonal coordinate system. The accelerometer includes a sensor die made of a semiconductor substrate having a frame element, a proof mass element, and an elastic element mechanically coupling the frame and the proof mass. The accelerometer also has three or more stress-sensitive IC components integrated into the elastic element adjacent to the frame element for electrical connectivity without metal conductor traversal of the elastic element.

摘要翻译： 提供了一种用于将运动测量数据输入到基于计算的设备中的系统和方法。 在第一版本中，三轴加速度计确定相对于正交坐标系的惯性力矢量的分量。 加速度计包括由半导体衬底制成的传感器芯片，该半导体衬底具有框架元件，校验质量元件和机械地联接框架和校验块的弹性元件。 加速度计还具有集成到与框架元件相邻的弹性元件中的三个或更多个应力敏感的IC部件，用于电连接而不需要金属导体穿过弹性元件。

公开(公告)号：US07357026B2

公开(公告)日：2008-04-15

申请号：US11063551

申请日：2005-02-24

申请人： Nobuo Ozawa

发明人： Nobuo Ozawa

IPC分类号： G01P15/12

CPC分类号： G01P15/123 ,  B81B3/0051 ,  B81B2201/025 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

摘要： An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion of the weight portion and a stopper portion disposed above the base portion and disposed over the weight portion away from the weight portion, wherein the stopper portion restricts an amount of displacement of the weight portion in the direction of the stopper portion.

摘要翻译： 加速度传感器包括成形为框架形状的基部，位于基部内部并且远离基部设置的配重部分，设置在基部的上部上方的柔性梁部分和 所述止动部设置在所述基部的上方并且配置在所述配重部分上方远离所述配重部分，其中，所述止动部限制所述配重部在所述止动部的方向上的位移量。