公开(公告)号：US08349203B2

公开(公告)日：2013-01-08

申请号：US12554175

申请日：2009-09-04

申请人： Ho-Cheol Kim ,  Sang-min Park ,  Charles T. Rettner

发明人： Ho-Cheol Kim ,  Sang-min Park ,  Charles T. Rettner

IPC分类号： C03C15/00

CPC分类号： H01L29/0657 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0002 ,  Y10T428/24479 ,  Y10T428/24521 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24802

摘要： A method of forming a block copolymer pattern comprises providing a substrate comprising a topographic pre-pattern comprising a ridge surface separated by a height, h, greater than 0 nanometers from a trench surface; disposing a block copolymer comprising two or more block components on the topographic pre-pattern to form a layer having a thickness of more than 0 nanometers over the ridge surface and the trench surface; and annealing the layer to form a block copolymer pattern having a periodicity of the topographic pre-pattern, the block copolymer pattern comprising microdomains of self-assembled block copolymer disposed on the ridge surface and the trench surface, wherein the microdomains disposed on the ridge surface have a different orientation compared to the microdomains disposed on the trench surface.

摘要翻译： 形成嵌段共聚物图案的方法包括提供包括地形预图案的基材，所述地貌预图案包括从沟槽表面分开高度h，大于0纳米的脊表面; 在所述地形预图案上设置包含两个或更多个嵌段组分的嵌段共聚物，以在所述脊表面和所述沟槽表面上形成厚度大于0纳米的层; 并退火所述层以形成具有所述地形预图案的周期性的嵌段共聚物图案，所述嵌段共聚物图案包括设置在所述脊表面上的自组装嵌段共聚物的微区域和所述沟槽表面，其中所述微区域设置在所述脊表面上 与设置在沟槽表面上的微区域相比具有不同的取向。

公开(公告)号：US07846502B2

公开(公告)日：2010-12-07

申请号：US12482583

申请日：2009-06-11

申请人： Ho-Cheol Kim ,  Charles T Rettner ,  Sang-Min Park

发明人： Ho-Cheol Kim ,  Charles T Rettner ,  Sang-Min Park

IPC分类号： B05D3/00

CPC分类号： B05D3/02 ,  B33Y80/00 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  H01L21/0337

摘要： A method of controlling both alignment and registration (lateral position) of lamellae formed from self-assembly of block copolymers, the method comprising the steps of obtaining a substrate having an energetically neutral surface layer comprising a first topographic “phase pinning” pattern and a second topographic “guiding” pattern; obtaining a self-assembling di-block copolymer; coating the self-assembling di-block copolymer on the energetically neutral surface to obtain a coated substrate; and annealing the coated substrate to obtain micro-domains of the di-block copolymer.

摘要翻译： 一种控制由嵌段共聚物的自组装形成的薄片的对准和配准（横向位置）的方法，所述方法包括以下步骤：获得具有能量中性的表面层的基材，该基材包括第一形貌“相位钉扎”图案和第二 地形“导向”模式; 得到自组装二嵌段共聚物; 在能量中性表面上涂布自组装二嵌段共聚物以获得涂布的基材; 并对涂覆的基材进行退火以获得二嵌段共聚物的微畴。

公开(公告)号：US07682866B2

公开(公告)日：2010-03-23

申请号：US11335329

申请日：2006-01-19

申请人： Mark W. Hart ,  Christie R. K. Marrian ,  Gary M. McClelland ,  Charles T. Rettner ,  Hemantha K. Wickramasinghe

发明人： Mark W. Hart ,  Christie R. K. Marrian ,  Gary M. McClelland ,  Charles T. Rettner ,  Hemantha K. Wickramasinghe

IPC分类号： H01L29/04 ,  H01L29/06 ,  H01L21/00 ,  H01L21/82 ,  G11C11/00

CPC分类号： H01L27/2409 ,  H01L27/2472 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/126 ,  H01L45/144 ,  H01L45/1675

摘要： A method for fabrication and a structure of a self-aligned (crosspoint) memory device comprises lines (wires) in a first direction and in a second direction. The wires in the first direction are formed using a hard mask material that is resistant to the pre-selected etch processes used for creation of the lines in both the first and the second direction. Consequently, the hard mask material for the lines in the first direction form part of the memory stack.

摘要翻译： 用于制造的方法和自对准（交叉点）存储器件的结构包括在第一方向和第二方向上的线（线）。 使用硬掩模材料形成第一方向上的导线，该硬掩模材料抵抗用于在第一和第二方向上产生线的预选蚀刻工艺。 因此，用于沿第一方向的线的硬掩模材料形成存储器堆叠的一部分。

公开(公告)号：US07521090B1

公开(公告)日：2009-04-21

申请号：US12060500

申请日：2008-04-01

申请人： Joy Cheng ,  Ho-Cheol Kim ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran ,  Linda Sundberg

发明人： Joy Cheng ,  Ho-Cheol Kim ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran ,  Linda Sundberg

IPC分类号： B05D5/00

CPC分类号： B05D5/00 ,  B05D7/14 ,  B05D7/52 ,  C08L53/00 ,  C09D125/14 ,  C09D153/00

摘要： Disclosed herein is a method of controlling the orientation of microphase-separated domains in a block copolymer film, comprising forming an orientation control layer comprising an epoxy-containing cycloaliphatic acrylic polymer on a surface of a substrate, irradiating and/or heating the substrate to crosslink the orientation control layer, and forming a block copolymer assembly layer comprising block copolymers which form microphase-separated domains, on a surface of the orientation control layer opposite the substrate. The orientation control layer can be selectively cross-linked to expose regions of the substrate, or the orientation control layer can be patterned without removing the layer, to provide selective patterning on the orientation control layer. In further embodiments, bilayer and trilayer imaging schemes are disclosed.

摘要翻译： 本文公开了一种控制嵌段共聚物膜中微相分离的区域的取向的方法，包括在基材的表面上形成包含含环氧基的脂环族丙烯酸聚合物的取向控制层，照射和/或加热该基材以交联 取向控制层，并且在与衬底相对的取向控制层的表面上形成包含形成微相分离结构域的嵌段共聚物的嵌段共聚物组合层。 取向控制层可以选择性地交联以暴露衬底的区域，或者可以将取向控制层图案化而不去除该层，以在取向控制层上提供选择性图案化。 在另外的实施方案中，公开了双层和三层成像方案。

公开(公告)号：US20080180646A1

公开(公告)日：2008-07-31

申请号：US12061904

申请日：2008-04-03

申请人： Matthew E. Colburn ,  Yves C. Martin ,  Charles T. Rettner ,  Theodore G. van Kessel ,  Hematha K. Wickramasinghe

发明人： Matthew E. Colburn ,  Yves C. Martin ,  Charles T. Rettner ,  Theodore G. van Kessel ,  Hematha K. Wickramasinghe

IPC分类号： G03B27/44 ,  G03F1/00

CPC分类号： G03F7/0002 ,  B01D2239/045 ,  B82Y10/00 ,  B82Y40/00 ,  G03F9/7011 ,  G03F9/7019

摘要： A method (and resultant structure) of forming a plurality of masks, includes creating a reference template, using imprint lithography to print at least one reference template alignment mark on all of a plurality of mask blanks for a given chip set, and printing sub-patterns on each of the plurality of mask blanks, and aligning the sub-patterns to the at least one reference template alignment mark.

摘要翻译： 一种形成多个掩模的方法（和结果）包括使用压印光刻法创建参考模板以在给定芯片组的所有多个掩模坯料上打印至少一个参考模板对准标记， 所述多个掩模坯料中的每一个上的图案，以及将所述子图案对准所述至少一个参考模板对准标记。

公开(公告)号：US09298870B1

公开(公告)日：2016-03-29

申请号：US13472598

申请日：2012-05-16

申请人： Joy Cheng ,  Kafai Lai ,  Chi-Chun Liu ,  Jed W. Pitera ,  Charles T. Rettner

发明人： Joy Cheng ,  Kafai Lai ,  Chi-Chun Liu ,  Jed W. Pitera ,  Charles T. Rettner

IPC分类号： G06F17/50

CPC分类号： G06F17/5068 ,  G03F7/0002 ,  G06F2217/08

摘要： Methods and computer program products for designing topographic patterns for directing the formation of self-assembled domains at specified locations on substrates. The methods include generating mathematical models that operate on mathematical descriptions of the number and locations of cylindrical self-assembled domains in a mathematical description of a guiding pattern.

摘要翻译： 方法和计算机程序产品，用于设计用于指导在基板上的指定位置形成自组装域的地形图案。 所述方法包括在引导模式的数学描述中生成对圆柱形自组装域的数量和位置的数学描述进行操作的数学模型。

公开(公告)号：US20120135146A1

公开(公告)日：2012-05-31

申请号：US12957008

申请日：2010-11-30

申请人： Joy Cheng ,  Hayato Namai ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran

发明人： Joy Cheng ,  Hayato Namai ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran

IPC分类号： B05D3/12

CPC分类号： B81C1/00031 ,  B81C2201/0149 ,  H01L21/0337 ,  H01L21/0338

摘要： Methods are disclosed for forming topographical features. In one method, a pre-patterned structure is provided which comprises i) a support member having a surface and ii) an element for topographically guiding segregation of a polymer mixture including a first polymer and a second polymer, the element comprising a feature having a sidewall adjoined to the surface. The polymer mixture is disposed on the pre-patterned structure, wherein the disposed polymer mixture has contact with the sidewall and the surface. The first polymer and the second polymer are segregated in a plane parallel to the surface, thereby forming a segregated structure comprising a first polymer domain and a second polymer domain. The first polymer domain and/or the second polymer domain are lithographically patterned, thereby forming topographical features comprising at least one of i) a first feature comprising a lithographically patterned first polymer domain and ii) a second feature comprising a lithographically patterned second polymer domain.

摘要翻译： 公开了形成形貌特征的方法。 在一种方法中，提供预先图案化的结构，其包括i）具有表面的支撑构件和ii）用于拓扑地引导包括第一聚合物和第二聚合物的聚合物混合物的偏析的元件，所述元件包括具有 侧壁与表面相邻。 聚合物混合物设置在预图案化结构上，其中所设置的聚合物混合物与侧壁和表面接触。 第一聚合物和第二聚合物在平行于表面的平面中分离，从而形成包含第一聚合物结构域和第二聚合物结构域的分离结构。 第一聚合物结构域和/或第二聚合物结构域被光刻图案化，从而形成包括以下至少一个的拓扑特征：i）包含光刻图案化的第一聚合物结构域的第一特征和ii）包含光刻图案化的第二聚合物结构域的第二特征。

公开(公告)号：US07560141B1

公开(公告)日：2009-07-14

申请号：US12268562

申请日：2008-11-11

申请人： Ho-Cheol Kim ,  Charles T. Rettner ,  Sang-Min Park

发明人： Ho-Cheol Kim ,  Charles T. Rettner ,  Sang-Min Park

IPC分类号： B05D3/02

CPC分类号： B05D3/02 ,  B33Y80/00 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  H01L21/0337

摘要： A method of controlling both alignment and registration (lateral position) of lamellae formed from self-assembly of block copolymers, the method comprising the steps of obtaining a substrate having an energetically neutral surface layer comprising a first topographic “phase pinning” pattern and a second topographic “guiding” pattern; obtaining a self-assembling di-block copolymer; coating the self-assembling di-block copolymer on the energetically neutral surface to obtain a coated substrate; and annealing the coated substrate to obtain micro-domains of the di-block copolymer.

摘要翻译： 一种控制由嵌段共聚物的自组装形成的薄片的对准和配准（横向位置）的方法，所述方法包括以下步骤：获得具有能量中性的表面层的基材，该基材包含第一形貌“相位钉扎”图案和第二 地形“导向”模式; 得到自组装二嵌段共聚物; 在能量中性表面上涂布自组装二嵌段共聚物以获得涂布的基材; 并对涂覆的基材进行退火以获得二嵌段共聚物的微畴。

公开(公告)号：US06982844B2

公开(公告)日：2006-01-03

申请号：US10026029

申请日：2001-12-18

申请人： Charles T. Rettner ,  Barry C. Stipe

发明人： Charles T. Rettner ,  Barry C. Stipe

IPC分类号： G11B5/02

CPC分类号： G11B5/012 ,  G11B5/127 ,  G11B5/3103 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/6088 ,  G11B7/00 ,  G11B2005/0021

摘要： Electromagnetic radiation from an optical source is directed onto a metallic structure. The metallic structure in turn emits optical output from an emission region in the structure and onto a recording medium (e.g., a magnetic recording disk), thereby heating the medium. The output from the emission region is enhanced due to surface plasmons in the metallic structure. The surface plasmons are generated by an array of features (such as ridges or trenches) in the metallic structure and act to increase the emitted optical output from the emission region beyond what the emitted optical output from the emission region would be in the absence of these features. The apparatus and associated method are useful for data recording, e.g., thermally assisted data recording.

公开(公告)号：US06754017B2

公开(公告)日：2004-06-22

申请号：US10033002

申请日：2001-10-26

申请人： Charles T. Rettner ,  Bruce D. Terris

发明人： Charles T. Rettner ,  Bruce D. Terris

IPC分类号： G11B509

CPC分类号： G11B5/012 ,  G11B5/746 ,  G11B5/82 ,  G11B20/1403 ,  G11B27/3027 ,  G11B2005/0021 ,  G11B2220/20

摘要： A magnetic recording disk drive with patterned disk media, wherein discrete magnetic data blocks representative of the individual data bits are isolated from one another, uses the discrete data blocks as the source of the clocking signal to the write head. The carrier for the read/write head includes a special pattern sensor that senses the data blocks in the data tracks before they pass beneath the write head. The pattern sensor output serves as the clocking signal to precisely control the placement of the write pulses by the write head. A time delay is calculated using a timing mark on the patterned disk to delay the write pulses so that a data block sensed by the pattern sensor is the same data block to which the write pulse is applied. In this manner the actual previously recorded data provides the synchronization or clocking signal to control the writing of the new data. The time delay is calculated from measurement of the time for a timing mark to pass from the pattern sensor to the read head and from known spacings of the pattern sensor, read head and write head on the head carrier.

摘要翻译： 具有图案化盘介质的磁记录盘驱动器，其中表示各个数据位的离散磁数据块彼此隔离，使用离散数据块作为写入头的时钟信号源。 用于读/写头的载体包括一个特殊的图形传感器，它在它们通过写头之下时感测数据轨道中的数据块。 模式传感器输出用作时钟信号，以通过写入头精确控制写入脉冲的放置。 使用图案化盘上的定时标记来计算时间延迟，以延迟写入脉冲，使得由图案传感器感测的数据块与施加写入脉冲的数据块相同。 以这种方式，实际的先前记录的数据提供同步或时钟信号以控制新数据的写入。 时间延迟是通过从定时标记从图案传感器传递到读取头的时间的测量和从头部载体上的图案传感器，读取头和写入头的已知间隔的测量计算的。