PHOTOSENSITIVE RESIN COMPOSITION, PATTERN FORMING METHOD AND ELECTRONIC PARTS USING THE PHOTOSENSITIVE RESIN COMPOSITION
    6.
    发明申请
    PHOTOSENSITIVE RESIN COMPOSITION, PATTERN FORMING METHOD AND ELECTRONIC PARTS USING THE PHOTOSENSITIVE RESIN COMPOSITION 有权
    光敏树脂组合物,图案形成方法和使用感光树脂组合物的电子部件

    公开(公告)号:US20070218400A1

    公开(公告)日:2007-09-20

    申请号:US11688610

    申请日:2007-03-20

    IPC分类号: G03C1/00

    CPC分类号: G03F7/40 G03F7/0387 G11B5/855

    摘要: A photosensitive resin composition includes (a) a polymer mainly composed of a repeating unit represented by the following general formula (I); (b) a dissolution accelerator for a developing solution; and (c) a solvent: wherein R1 is a trivalent or tetravalent organic group, R2 is a bivalent organic group, R is a monovalent organic group having a carbon-carbon unsaturated double bond or a group represented by O−M+ (M+ represents a hydrogen ion or a cation composed of hydrogen and a compound having the carbon-carbon unsaturated double bond) in which the compound having the carbon-carbon unsaturated double bond is ionically bonded, at least one carbon-carbon unsaturated double bond is contained in all repeating units, m is an integer of 2 or more, and n is 1 or 2.

    摘要翻译: 感光性树脂组合物包含(a)主要由下述通式(I)表示的重复单元构成的聚合物。 (b)显影液的溶解促进剂; 和(c)溶剂:其中R 1是三价或四价有机基团,R 2是二价有机基团,R是具有碳 - 碳不饱和双键或由-O - O +表示的基团表示氢离子或由氢和化合物组成的阳离子 具有碳 - 碳不饱和双键),其中具有碳 - 碳不饱和双键的化合物离子键合,所有重复单元包含至少一个碳 - 碳不饱和双键,m为2以上的整数, n为1或2。

    Positive-type photosensitive resin composition, method for producing patterns, and electronic parts
    9.
    发明授权
    Positive-type photosensitive resin composition, method for producing patterns, and electronic parts 有权
    正型感光性树脂组合物,图案的制造方法和电子部件

    公开(公告)号:US08097386B2

    公开(公告)日:2012-01-17

    申请号:US12377419

    申请日:2006-08-14

    IPC分类号: G03F7/023 G03F7/30 G03F7/40

    摘要: A positive-type photosensitive resin composition for electronic materials having good film adhesiveness and sensitivity without causing a corrosion reaction to copper and copper alloys in metal wirings, a method for producing patterns and electronic parts are provided. The positive-type photosensitive resin composition includes (A) a polybenzoxazole precursor having a structure represented by the following general formula (I): wherein X represents a bivalent organic group, Y represents a tetravalent organic group, R1 represents a hydrogen atom or a monovalent organic group, and m represents an integer of 2 to 500 which represents a repeating unit number of the polymer, (B) a solvent, (C) a tetrazole derivative and (D) a compound which generates an acid by light.

    摘要翻译: 提供了一种具有良好的膜粘附性和灵敏度的不会对金属布线中的铜和铜合金产生腐蚀反应的电子材料的正型感光性树脂组合物,制造图案和电子部件的方法。 正型感光性树脂组合物包括(A)具有以下通式(I)所示结构的聚苯并恶唑前体:其中X表示二价有机基团,Y表示四价有机基团,R 1表示氢原子或一价 有机基团,m表示2〜500的整数,表示聚合物的重复单元数,(B)溶剂,(C)四唑衍生物和(D)通过光产生酸的化合物。

    Photosensitive resin composition, pattern forming method and electronic parts using the photosensitive resin composition
    10.
    发明授权
    Photosensitive resin composition, pattern forming method and electronic parts using the photosensitive resin composition 有权
    光敏树脂组合物,图案形成方法和使用感光性树脂组合物的电子部件

    公开(公告)号:US07642018B2

    公开(公告)日:2010-01-05

    申请号:US11688610

    申请日:2007-03-20

    IPC分类号: G03F7/037 G03F7/40

    CPC分类号: G03F7/40 G03F7/0387 G11B5/855

    摘要: A photosensitive resin composition includes (a) a polymer mainly composed of a repeating unit represented by the following general formula (I); (b) a dissolution accelerator for a developing solution; and (c) a solvent: wherein R1 is a trivalent or tetravalent organic group, R2 is a bivalent organic group, R is a monovalent organic group having a carbon-carbon unsaturated double bond or a group represented by O−M+ (M+ represents a hydrogen ion or a cation composed of hydrogen and a compound having the carbon-carbon unsaturated double bond) in which the compound having the carbon-carbon unsaturated double bond is ionically bonded, at least one carbon-carbon unsaturated double bond is contained in all repeating units, m is an integer of 2 or more, and n is 1 or 2.

    摘要翻译: 感光性树脂组合物包含(a)主要由下述通式(I)表示的重复单元构成的聚合物。 (b)显影液的溶解促进剂; 和(c)溶剂:其中R1是三价或四价有机基团,R2是二价有机基团,R是具有碳 - 碳不饱和双键的一价有机基团或由O-M +表示的基团(M +表示 氢离子或由氢和具有碳 - 碳不饱和双键的化合物构成的阳离子),其中具有碳 - 碳不饱和双键的化合物离子键合,至少一个碳 - 碳不饱和双键包含在所有重复 单元,m为2以上的整数,n为1或2。