公开(公告)号：US20120325407A1

公开(公告)日：2012-12-27

申请号：US13585570

申请日：2012-08-14

申请人： Rajinder Dhindsa ,  Felix Kozakevich ,  James H. Rogers ,  David Trussell

发明人： Rajinder Dhindsa ,  Felix Kozakevich ,  James H. Rogers ,  David Trussell

IPC分类号： C23F1/08

CPC分类号： H01J37/32623 ,  H01J37/32477 ,  H01J37/32522 ,  H01J37/32642 ,  Y10S156/914 ,  Y10S156/915

摘要： Plasma confinement ring assemblies are provided that include confinement rings adapted to reach sufficiently high temperatures on plasma-exposed surfaces of the rings to avoid polymer deposition on those surfaces. The plasma confinement rings include thermal chokes adapted to localize heating at selected portions of the rings that include the plasma exposed surfaces. The thermal chokes reduce heat conduction from those portions to other portions of the rings, which causes selected portions of the rings to reach desired temperatures during plasma processing.

摘要翻译： 提供等离子体限制环组件，其包括适于在等离子体暴露的表面上达到足够高的温度的限制环，以避免聚合物沉积在这些表面上。 等离子体约束环包括适于在包括等离子体暴露表面的环的选定部分处定位加热的热扼流圈。 热扼流圈减少从这些部分到环的其他部分的热传导，这导致环的选定部分在等离子体处理期间达到期望的温度。

公开(公告)号：US08290717B2

公开(公告)日：2012-10-16

申请号：US12367443

申请日：2009-02-06

申请人： Rajinder Dhindsa ,  James H. Rogers

发明人： Rajinder Dhindsa ,  James H. Rogers

IPC分类号： G01N31/00

CPC分类号： H01J37/32642 ,  H01J37/32449 ,  H01J37/32623

摘要： In a plasma processing chamber, a method and an arrangement to stabilize pressure are provided. The method includes providing coarse pressure adjustments in an open-loop manner and thereafter providing fine pressure adjustments in a closed-loop manner. The coarse pressure adjustments are performed by rapidly re-position confinement rings employing an assumed linear relationship between the conductance and the confinement rings position to bring the pressure in the plasma generating region quickly to roughly a desired set point. The fine pressure adjustments are performed by at least employing mechanical vacuum pump(s), turbo pump(s), confinement ring positioning and/or combinations thereof to achieve a derive pressure set point.

摘要翻译： 在等离子体处理室中，提供了稳定压力的方法和装置。 该方法包括以开环方式提供粗调压，然后以闭环方式提供精细的压力调节。 通过使用电导和限制环位置之间的假设线性关系快速重新定位限制环来使等离子体产生区域中的压力快速地达到大致期望的设定点来执行粗调压力调节。 通过至少采用机械真空泵，涡轮泵，限制环定位和/或其组合来实现精细压力调节以实现导出压力设定点。

公开(公告)号：US06228429B1

公开(公告)日：2001-05-08

申请号：US09495545

申请日：2000-02-01

申请人： Terry Bluck ,  James H. Rogers ,  Jun Xie ,  Eric C. Lawson

发明人： Terry Bluck ,  James H. Rogers ,  Jun Xie ,  Eric C. Lawson

IPC分类号： B05D140

CPC分类号： C23C14/345 ,  B05D3/145 ,  C23C14/50 ,  C23C14/568 ,  G11B5/8404

摘要： A disk gripper for gripping an insulating disk, such as a glass disk, at its edge during processing includes a contact device for contacting the edge of the insulating disk and a mechanism for moving the contact device between a contact position, in contact with the edge of the disk, and a retracted position. In a first processing station, a conductive coating is applied to a disk held by the gripper, with the contact device in the retracted position. In a second processing station, ions are generated in a plasma adjacent to the surface of the disk held by the gripper. The contact device is in the contact position in contact with the conductive coating, and a bias voltage is applied to the contact device in the second processing station. The ions are accelerated from the plasma toward the disk by the bias voltage applied to the conductive coating.

摘要翻译： 用于在加工过程中在其边缘处夹持诸如玻璃盘的绝缘盘的盘夹持器包括用于接触绝缘盘的边缘的接触装置和用于使接触装置在与边缘接触的接触位置之间移动的机构 的缩回位置。 在第一处理站中，将导电涂层施加到由夹持器保持的盘上，其中接触装置处于缩回位置。 在第二处理站中，在由夹持器保持的盘的表面附近的等离子体中产生离子。 接触装置处于与导电涂层接触的接触位置，并且偏压被施加到第二处理站中的接触装置。 通过施加到导电涂层的偏置电压将离子从等离子体加速到盘。

公开(公告)号：US6027337A

公开(公告)日：2000-02-22

申请号：US88211

申请日：1998-05-29

申请人： James H. Rogers ,  Edward T. Albus ,  Philip S. Sprague ,  Richard J. Wimberger

发明人： James H. Rogers ,  Edward T. Albus ,  Philip S. Sprague ,  Richard J. Wimberger

IPC分类号： D01F9/32 ,  F24F9/00 ,  F27B9/28 ,  F27D99/00

CPC分类号： F27D99/0075 ,  D01F9/32 ,  F24F9/00 ,  F27B9/28

摘要： An oxidation oven for use in the production of carbon fibers from a polyacrylonitrile precursor fiber. The oven has an oven chamber formed by sides and ends. At least one of the ends has a first opening and a second opening. The product passes through the openings for treatment in the oven chamber. The oven is also provided with a first nozzle adjacent the first opening and a second nozzle adjacent the second opening. Each nozzle is effective for discharging air from an air flow pathway into the oven chamber and forming an air curtain at the opening to which it is adjacent. An air bar defines the air flow pathway.

摘要翻译： 一种用于从聚丙烯腈前体纤维生产碳纤维的氧化炉。 烘箱具有由侧面和末端形成的烤箱室。 端部中的至少一个具有第一开口和第二开口。 产品通过开口进行烘箱处理。 烘箱还设置有与第一开口相邻的第一喷嘴和邻近第二开口的第二喷嘴。 每个喷嘴有效地将空气从空气流动通道排入烘箱室，并在与其相邻的开口处形成气帘。 空气杆限定空气流动通路。

公开(公告)号：US5372255A

公开(公告)日：1994-12-13

申请号：US175018

申请日：1993-12-29

申请人： Mark J. Skorski ,  James H. Rogers

发明人： Mark J. Skorski ,  James H. Rogers

IPC分类号： B65D71/00 ,  B65D19/00 ,  B65D5/42

CPC分类号： B65D71/0096 ,  B65D2571/00055

摘要： A one piece shroud combined with a stack and preferably a pallet. The shroud includes first and second central panels, first and third lateral panels on either side of the first central panel and second and fourth lateral panels on either side of the second central panel.

摘要翻译： 一体式护罩与堆叠结合，优选托盘。 护罩包括第一和第二中心面板，在第一中心面板的任一侧上的第一和第三侧面板以及在第二中心面板的任一侧上的第二和第四侧面板。

公开(公告)号：US3952855A

公开(公告)日：1976-04-27

申请号：US498995

申请日：1974-08-20

申请人： James H. Rogers

发明人： James H. Rogers

IPC分类号： B65G47/68 ,  B65G47/30

CPC分类号： B65G47/681

摘要： Discloses a machine for feeding groups of bottles in one-by-one fashion onto an outlet conveyor. The machine involves the use of a spacing conveyor interposed between the feed conveyor and an outlet conveyor and channel means disposed over the end of the feed conveyor so as to orient the groups of bottles in side-by-side rows. Spacing guides are positioned on the spacing conveyor at an angle so that a row of the bottles in side-by-side relationship are retained on the spacing conveyor while the foremost row is angled so that the bottles reach the output belt at different times and can then be carried away one at a time. The spacing guides are angled so that the last bottle in one row is fed onto the outlet conveyor before the first bottle of the next row is fed onto the outlet conveyor.

摘要翻译： 公开了一种用于将瓶子组逐一装入出口输送机的机器。 该机器包括使用间隔输送机，该输送机置于进料输送机和出口输送机之间，并且通道装置设置在进料输送机的端部之上，以便使并排排成型的瓶子组。 间隔导向器以一定角度定位在间隔输送机上，使得并排关系的一排瓶子保持在间隔输送器上，而最前排成一定角度，使得瓶子在不同时间到达输出带，并且可以 然后一次被带走。 间隔引导件是成角度的，使得一排中的最后一个瓶子被供给到出口输送机上，然后将下一排的第一个瓶子送到出口输送机上。

公开(公告)号：US3620013A

公开(公告)日：1971-11-16

申请号：US3620013D

申请日：1969-10-31

申请人： JAMES H ROGERS ,  WILLIAM G DUNN

发明人： ROGERS JAMES H ,  DUNN WILLIAM G

IPC分类号： F02C7/00 ,  F23D13/04

CPC分类号： F23N5/16 ,  F02C7/00 ,  F05D2220/323 ,  F05D2260/96 ,  F05D2260/964 ,  F23R3/28 ,  F23R2900/00013

摘要： TWO NOISE ABATEMENT TECHNIQUES ARE EMPLOYED IN CONNECTION WITH FLAME GENERATION AND THE PRODUCTION OF JETS. ONE OF THESE TECHNIQUES INVOLVES INTRODUCTING A DISRUPTION ROD OF NEEDLE AT THE FOCAL POINT OF THE APRABOLIC SECTION OF THE APEX OF THE INNER COME OF A FLAME. THE OTHER INVOLVES USING A ROD OF RODS FOR CANCELLING THE RESONANT NODE OR NODE DEVELOPED IN A SUPPLY TUBE BY A COMBUSTIBLE MEDIUM PASSING THERETHROUGH TO THE FRAME PRODUCTION ZONE. THE APPARATUS USES THE ABOVE TECHNIQUES SEPARATELY OR IN COMBINATION AND PROVIDES CONTROLS FOR ADJUSTING NODE CANCELLING ROD AND/OR DISRUPTING ROD OF NEEDLE PERFORMING THE AFORESAID FUNCTIONS. THE CONTROLS TAKE INTO ACCOUNT THAT THE NODES AND FOCAL POINT VARY ACCORDING TO FUEL SUPPLY RATE AND OTHER FACTORS RELATING TO AMBIENT AND ASSOCIATED CONDITIONS.

公开(公告)号：US08500952B2

公开(公告)日：2013-08-06

申请号：US13585570

申请日：2012-08-14

申请人： Rajinder Dhindsa ,  Felix Kozakevich ,  James H. Rogers ,  David Trussell

发明人： Rajinder Dhindsa ,  Felix Kozakevich ,  James H. Rogers ,  David Trussell

IPC分类号： C23C16/00 ,  C23C16/509 ,  H01L21/306 ,  H01L21/302

CPC分类号： H01J37/32623 ,  H01J37/32477 ,  H01J37/32522 ,  H01J37/32642 ,  Y10S156/914 ,  Y10S156/915

摘要： Plasma confinement ring assemblies are provided that include confinement rings adapted to reach sufficiently high temperatures on plasma-exposed surfaces of the rings to avoid polymer deposition on those surfaces. The plasma confinement rings include thermal chokes adapted to localize heating at selected portions of the rings that include the plasma exposed surfaces. The thermal chokes reduce heat conduction from those portions to other portions of the rings, which causes selected portions of the rings to reach desired temperatures during plasma processing.

摘要翻译： 提供等离子体限制环组件，其包括适于在等离子体暴露的表面上达到足够高的温度的限制环，以避免聚合物沉积在这些表面上。 等离子体约束环包括适于在包括等离子体暴露表面的环的选定部分处定位加热的热扼流圈。 热扼流圈减少从这些部分到环的其他部分的热传导，这导致环的选定部分在等离子体处理期间达到期望的温度。

公开(公告)号：US20090204342A1

公开(公告)日：2009-08-13

申请号：US12367443

申请日：2009-02-06

申请人： Rajinder Dhindsa ,  James H. Rogers

发明人： Rajinder Dhindsa ,  James H. Rogers

IPC分类号： G01N33/00 ,  H01L21/3065 ,  G01L7/00

CPC分类号： H01J37/32642 ,  H01J37/32449 ,  H01J37/32623

摘要： In a plasma processing chamber, a method and an arrangement to stabilize pressure are provided. The method includes providing coarse pressure adjustments in an open-loop manner and thereafter providing fine pressure adjustments in a closed-loop manner. The coarse pressure adjustments are performed by rapidly re-position confinement rings employing an assumed linear relationship between the conductance and the confinement rings position to bring the pressure in the plasma generating region quickly to roughly a desired set point. The fine pressure adjustments are performed by at least employing mechanical vacuum pump(s), turbo pump(s), confinement ring positioning and/or combinations thereof to achieve a derive pressure set point.

摘要翻译： 在等离子体处理室中，提供了稳定压力的方法和装置。 该方法包括以开环方式提供粗调压，然后以闭环方式提供精细的压力调节。 通过使用假定的电导和限制环位置之间的线性关系快速重新定位限制环来使等离子体产生区域中的压力快速地达到大致期望的设定点来执行粗调压力调节。 通过至少采用机械真空泵，涡轮泵，限制环定位和/或其组合来实现精细压力调节以实现导出压力设定点。

公开(公告)号：US07000418B2

公开(公告)日：2006-02-21

申请号：US10845702

申请日：2004-05-14

申请人： James H. Rogers ,  Brian Hoffman

发明人： James H. Rogers ,  Brian Hoffman

IPC分类号： F25D23/12 ,  F28F7/00 ,  F28F5/00 ,  C23C16/00 ,  C23C13/00

CPC分类号： G11B5/8404 ,  H01L21/67109 ,  H01L21/67259

摘要： Described is a cooling system for use in the manufacture of substrates into magnetic disk memory in which cooling plates are positioned dynamically in relation to a substrate to be cooled. This enables positioning the cooling plates closer for more effective cooling. Positioning is controlled by capacitive measurements between the cooling plates and the substrate to be cooled.

摘要翻译： 描述了用于将基板制造到磁盘存储器中的冷却系统，其中冷却板相对于待冷却的基板动态地定位。 这样可以使冷却板更靠近，以实现更有效的冷却。 定位由冷却板和要冷却的基板之间的电容测量来控制。