公开(公告)号：US09911743B2

公开(公告)日：2018-03-06

申请号：US11835852

申请日：2007-08-08

申请人： Claude L. Bertin ,  Thomas Rueckes ,  X. M. Henry Huang ,  Ramesh Sivarajan ,  Eliodor G. Ghenciu ,  Steven L. Konsek ,  Mitchell Meinhold ,  Jonathan W. Ward ,  Darren K. Brock

发明人： Claude L. Bertin ,  Thomas Rueckes ,  X. M. Henry Huang ,  Ramesh Sivarajan ,  Eliodor G. Ghenciu ,  Steven L. Konsek ,  Mitchell Meinhold ,  Jonathan W. Ward ,  Darren K. Brock

IPC分类号： H01L27/102 ,  B82Y10/00 ,  G11C13/02 ,  H01L21/822 ,  H01L27/06 ,  H01L27/12

CPC分类号： H01L27/1021 ,  B82Y10/00 ,  G11C13/025 ,  G11C2213/19 ,  G11C2213/71 ,  G11C2213/72 ,  H01L21/8221 ,  H01L27/0688 ,  H01L27/1203

摘要： Under one aspect, a method of making a nanotube switch includes: providing a substrate having a first conductive terminal; depositing a multilayer nanotube fabric over the first conductive terminal; and depositing a second conductive terminal over the multilayer nanotube fabric, the nanotube fabric having a thickness, density, and composition selected to prevent direct physical and electrical contact between the first and second conductive terminals. In some embodiments, the first and second conductive terminals and the multilayer nanotube fabric are lithographically patterned so as to each have substantially the same lateral dimensions, e.g., to each have a substantially circular or rectangular lateral shape. In some embodiments, the multilayer nanotube fabric has a thickness from 10 nm to 200 nm, e.g., 10 nm to 50 nm. The structure may include an addressable diode provided under the first conductive terminal or deposited over the second terminal.

公开(公告)号：US08604459B1

公开(公告)日：2013-12-10

申请号：US13491550

申请日：2012-06-07

申请人： Jonathan W. Ward ,  Garo J. Derderian

发明人： Jonathan W. Ward ,  Garo J. Derderian

IPC分类号： H01L29/06

CPC分类号： H01L29/0673 ,  B82Y10/00 ,  H01L51/0048 ,  H01L51/0558 ,  H01L51/107

摘要： Electrical devices containing carbon nanotubes can be passivated to protect the carbon nanotubes from degradation while substantially preserving the carbon nanotubes' electrical conductivity and switching characteristics. Such electrical devices can include a first metal contact, a switching layer containing a plurality of carbon nanotubes disposed on the first metal contact, a passivation layer containing amorphous carbon, a metal carbide, or any combination thereof that is disposed on at least a top surface of the switching layer, and a second metal contact disposed upon the passivation layer. Methods for forming the electrical devices can include disposing a passivation layer containing amorphous carbon on at least a top surface of the switching layer, and optionally heating to at least partially convert the amorphous carbon within the passivation layer into a metal carbide.

摘要翻译： 可以钝化包含碳纳米管的电子器件以保护碳纳米管免受降解，同时基本上保留碳纳米管的电导率和开关特性。 这样的电气装置可以包括第一金属触点，包含设置在第一金属触点上的多个碳纳米管的开关层，包含无定形碳的钝化层，金属碳化物或其任何组合，其设置在至少一个顶表面 以及设置在钝化层上的第二金属触点。 用于形成电气装置的方法可以包括在开关层的至少顶表面上设置含有无定形碳的钝化层，以及任选地加热至少部分地将钝化层内的无定形碳转化为金属碳化物。

公开(公告)号：US08525143B2

公开(公告)日：2013-09-03

申请号：US12066053

申请日：2006-09-06

申请人： Jonathan W. Ward ,  Thomas Rueckes ,  Mitchell Meinhold ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Thomas Rueckes ,  Mitchell Meinhold ,  Brent M. Segal

IPC分类号： H01L45/00

CPC分类号： H01L45/1286 ,  B82Y10/00 ,  G11C13/0004 ,  G11C13/025 ,  G11C2213/81 ,  H01L27/2436 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/1233 ,  H01L45/144

摘要： Methods and systems of using nanotube elements as joule heating elements for memories and other applications. Under one aspect, a method includes providing an electrical stimulus, regulated by a drive circuit, through a nanotube element in order to heat an adjacent article. Further, a detection circuit electrically gauges the state of the article. The article heated by the nanotube element is, in preferred embodiments, a phase changing material, hi memory applications, the invention may be used as a small-scale CRAM capable of employing small amounts of current to induce rapid, large temperature changes in a chalcogenide material. Under various embodiments of the disclosed invention, the nanotube element is composed of a non-woven nanotube fabric which is either suspended from supports and positioned adjacent to the phase change material or is disposed on a substrate and in direct contact with the phase change material. A plurality of designs using various geometric orientations of nanotube fabrics, phase change materials, and drive and detection circuitry is disclosed. Additionally, methods of fabricating nanotube heat emitters are disclosed.

摘要翻译： 使用纳米管元件作为焦耳加热元件用于存储器和其他应用的方法和系统。 在一个方面，一种方法包括通过纳米管元件提供由驱动电路调节的电刺激，以加热邻近的物品。 此外，检测电路电测量物品的状态。 在优选实施例中，由纳米管元​​件加热的物品是相变材料。在记忆应用中，本发明可以用作能够使用少量电流以在硫族化物中快速，大的温度变化的小规模CRAM 材料。 在所公开的发明的各种实施例中，纳米管元件由无纺布纳米管织物组成，该无纺布纳米管织物从支撑物悬挂并且邻近相变材料定位，或者设置在基底上并与相变材料直接接触。 公开了使用纳米管织物，相变材料以及驱动和检测电路的各种几何取向的多个设计。 另外，公开了制造纳米管热发射体的方法。

公开(公告)号：US08471238B2

公开(公告)日：2013-06-25

申请号：US11227468

申请日：2005-09-15

申请人： Jonathan W. Ward ,  Mitchell Meinhold ,  Claude L. Bertin ,  Benjamin Schlatka ,  Brent M. Segal ,  Thomas Ruckes

发明人： Jonathan W. Ward ,  Mitchell Meinhold ,  Claude L. Bertin ,  Benjamin Schlatka ,  Brent M. Segal ,  Thomas Ruckes

IPC分类号： H01L29/06

CPC分类号： H01K1/04 ,  B82Y10/00 ,  B82Y20/00 ,  H01L51/0048 ,  H01L51/0052

摘要： Light emitters using nanotubes and methods of making same. A light emitter includes a nanotube article in electrical communication with a first and a second contact, a substrate having a predefined region with a relatively low thermal conductivity said region in predefined physical relation to said nanotube article; and a stimulus circuit in electrical communication with the first and second contacts. The stimulus circuit provides electrical stimulation sufficient to induce light emission from the nanotube article in the proximity of the predefined region. The predefined region is a channel formed in the substrate or a region of material with relatively low thermal conductivity. The light emitter can be integrated with semiconductor circuits including CMOS circuits. The light emitter can be integrated into optical driver circuits (on- and off-chip drivers) and opto-isolators.

摘要翻译： 使用纳米管的发光体及其制作方法。 光发射器包括与第一和第二接触电连通的纳米管制品，具有预定区域的基底，所述预定区域具有相对于所述纳米管制品预定的物理关系的相对低导热性的所述区域; 以及与第一和第二触点电连通的激励电路。 刺激电路提供足以在预定区域附近从纳米管制品引发光发射的电刺激。 预定区域是形成在衬底中的通道或具有相对较低热导率的材料区域。 光发射器可以与包括CMOS电路的半导体电路集成。 光发射器可以集成到光驱动器电路（片上和片外驱动器）和光隔离器中。

公开(公告)号：US08405189B1

公开(公告)日：2013-03-26

申请号：US12946834

申请日：2010-11-15

申请人： Jonathan W. Ward ,  Quoc X. Ngo

发明人： Jonathan W. Ward ,  Quoc X. Ngo

IPC分类号： H01L21/02

CPC分类号： H01G4/33 ,  B82Y10/00 ,  H01G4/002 ,  H01G4/08 ,  H01L28/40 ,  H01L51/0048

摘要： An example of a carbon nanotube capacitor may include (i) a carbon nanotube film having carbon nanotubes and voids with dielectric material, (ii) conductive contacts and (iii) a dielectric layer. The carbon nanotube film may switch from a conductive state to a non-conductive state when a voltage is applied by creating an electrical break within the carbon nanotube film and providing a first conductive region and a second conductive region within the carbon nanotube film. The electrical break may separate the first conductive region from the second conductive region. The first and second conductive regions may store charge. An integrated device may include one or more transistors and one or more carbon nanotube capacitors. A method of making a carbon nanotube capacitor is also disclosed.

摘要翻译： 碳纳米管电容器的实例可以包括（i）具有碳纳米管的碳纳米管膜和具有电介质材料的空隙，（ii）导电触点和（iii）电介质层。 当通过在碳纳米管膜内产生电断裂并且在碳纳米管膜内提供第一导电区域和第二导电区域施加电压时，碳纳米管膜可以从导电状态切换到非导通状态。 电断裂可以将第一导电区域与第二导电区域分离。 第一和第二导电区域可以存储电荷。 集成器件可以包括一个或多个晶体管和一个或多个碳纳米管电容器。 还公开了制造碳纳米管电容器的方法。

公开(公告)号：US08366999B2

公开(公告)日：2013-02-05

申请号：US12065857

申请日：2006-09-06

申请人： Jonathan W. Ward ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Brent M. Segal

IPC分类号： G01N21/00 ,  H01L27/14

CPC分类号： G01N21/65 ,  B82Y15/00

摘要： Under one aspect, a system (100) for sensing the presense of an analyte in a fluid includes a nanotube sensor element including a plurality of nanotubes and positioned for exposure to a fluid; an optical source capable of generating optical radiation (102), the radiation having a source frequency and a fluence selected to generate a nonlinear optical response by the nanotube sensor element; an optical detector (110) capable of measuring the nonlinear optical response by the nanotube sensor element; and logic in electrical communications with the optical detector to sense the presense of an analyte in the fluid based on the nonlinear optical response measured by the optical detector.

摘要翻译： 在一个方面，用于感测流体中分析物的脱色的系统（100）包括纳米管传感器元件，其包括多个纳米管并定位成暴露于流体; 能够产生光辐射（102）的光源，所述辐射具有选择的源频率和能量密度，以通过纳米管传感器元件产生非线性光学响应; 能够测量纳米管传感器元件的非线性光学响应的​​光学检测器（110）; 以及与光学检测器进行电通信的逻辑，以基于由光学检测器测量的非线性光学响应来感测流体中分析物的突出。

公开(公告)号：US08253171B1

公开(公告)日：2012-08-28

申请号：US12857494

申请日：2010-08-16

申请人： Garo J. Derderian ,  Michael J. O'Connor ,  Adrian N. Robinson ,  Jonathan W. Ward

发明人： Garo J. Derderian ,  Michael J. O'Connor ,  Adrian N. Robinson ,  Jonathan W. Ward

IPC分类号： H01L27/118

CPC分类号： B82Y10/00 ,  H01L27/2436 ,  H01L27/2463 ,  H01L29/413 ,  H01L45/04 ,  H01L45/1226 ,  H01L45/149 ,  H01L45/1641

摘要： A two terminal switching device includes a first conductive terminal, a second conductive terminal in spaced relation to the first terminal, the first terminal encompassed by the second terminal. The device also includes an electrically insulating spacer that encompasses the first terminal and provides the spaced relation between the second terminal and the first terminal. It also includes a nanotube article comprising at least one carbon nanotube, the nanotube article being arranged to overlap at least a portion of each of the first and second terminals. The device also includes a stimulus circuit in electrical communication with at least one of the first and second terminals that is capable of applying a first electrical stimulus to at least one of the first and second terminals to change the resistance of the device between the first and second terminals from a relatively low resistance to a relatively high resistance.

摘要翻译： 双端开关装置包括第一导电端子，与第一端子间隔开的第二导电端子，由第二端子包围的第一端子。 该装置还包括电绝缘间隔件，其包围第一端子并且提供第二端子和第一端子之间的间隔关系。 其还包括包含至少一个碳纳米管的纳米管制品，所述纳米管制品被布置成与所述第一和第二端子中的每一个的至少一部分重叠。 该装置还包括与第一和第二端子中的至少一个电连通的刺激电路，其能够对第一和第二端子中的至少一个施加第一电刺激，以改变装置在第一和第二端子之间的电阻 第二端子从相对较低的电阻到相对较高的电阻。

公开(公告)号：US08134220B2

公开(公告)日：2012-03-13

申请号：US12139910

申请日：2008-06-16

申请人： H. Montgomery Manning ,  Thomas Rueckes ,  Jonathan W. Ward ,  Brent M. Segal

发明人： H. Montgomery Manning ,  Thomas Rueckes ,  Jonathan W. Ward ,  Brent M. Segal

IPC分类号： G11C11/00 ,  H01L23/52 ,  H01L21/02

CPC分类号： H01L51/0591 ,  B82Y10/00 ,  G11C13/025 ,  H01L51/0048 ,  Y10S977/943

摘要： Nanotube switching devices having nanotube bridges are disclosed. Two-terminal nanotube switches include conductive terminals extending up from a substrate and defining a void in the substrate. Nantoube articles are suspended over the void or form a bottom surface of a void. The nanotube articles are arranged to permanently contact at least a portion of the conductive terminals. An electrical stimulus circuit in communication with the conductive terminals is used to generate and apply selected waveforms to induce a change in resistance of the device between relatively high and low resistance values. Relatively high and relatively low resistance values correspond to states of the device. A single conductive terminal and a interconnect line may be used. The nanotube article may comprise a patterned region of nanotube fabric, having an active region with a relatively high or relatively low resistance value. Methods of making each device are disclosed.

摘要翻译： 公开了具有纳米管桥的纳米管开关器件。 两端纳米管开关包括从衬底向上延伸并且在衬底中限定空隙的导电端子。 纳米管制品悬浮在空隙上或形成空隙的底部表面。 纳米管制品布置成永久地接触导电端子的至少一部分。 使用与导电端子连通的电刺激电路来产生并施加所选择的波形以引起器件在较高和较低电阻值之间的电阻变化。 相对较高且相对较低的电阻值对应于器件的状态。 可以使用单个导电端子和互连线。 纳米管制品可以包括具有相对较高或相对低的电阻值的有源区的纳米管织物的图案化区域。 公开了制造每个装置的方法。

公开(公告)号：US08044388B2

公开(公告)日：2011-10-25

申请号：US12506878

申请日：2009-07-21

申请人： Jonathan W. Ward ,  Benjamin Schlatka ,  Mitchell Meinhold ,  Robert F. Smith ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Benjamin Schlatka ,  Mitchell Meinhold ,  Robert F. Smith ,  Brent M. Segal

IPC分类号： H01L35/24

CPC分类号： H01L33/40 ,  B82Y20/00 ,  H01L21/28575 ,  H01L29/2003 ,  H01L29/417 ,  H01L29/452 ,  H01L33/32 ,  Y10S438/924 ,  Y10T428/30 ,  Y10T428/31678

摘要： Manufacturers encounter limitations in forming low resistance ohmic electrical contact to semiconductor material P-type Gallium Nitride (p-GaN), commonly used in photonic applications, such that the contact is highly transparent to the light emission of the device. Carbon nanotubes (CNTs) can address this problem due to their combined metallic and semiconducting characteristics in conjunction with the fact that a fabric of CNTs has high optical transparency. The physical structure of the contact scheme is broken down into three components, a) the GaN, b) an interface material and c) the metallic conductor. The role of the interface material is to make suitable contact to both the GaN and the metal so that the GaN, in turn, will make good electrical contact to the metallic conductor that interfaces the device to external circuitry. A method of fabricating contact to GaN using CNTs and metal while maintaining protection of the GaN surface is provided.

摘要翻译： 制造商在与通常用于光子应用的半导体材料P型氮化镓（p-GaN）形成低电阻欧姆电接触方面遇到限制，使得接触对器件的发光是高度透明的。 碳纳米管（CNT）由于其组合的金属和半导体特性以及CNT的织物具有高的光学透明度的事实，可以解决这个问题。 接触方案的物理结构分为三个部分：a）GaN，b）界面材料和c）金属导体。 界面材料的作用是使GaN和金属两者适当地接触，这样GaN又将与将器件与外部电路接口的金属导体进行良好的电接触。 提供了一种使用CNT和金属制造与GaN接触的方法，同时保持了GaN表面的保护。

公开(公告)号：US20110211313A1

公开(公告)日：2011-09-01

申请号：US13090135

申请日：2011-04-19

申请人： Jonathan W. WARD ,  Claude L. BERTIN ,  Brent M. SEGAL

发明人： Jonathan W. WARD ,  Claude L. BERTIN ,  Brent M. SEGAL

IPC分类号： H05K7/20 ,  B82Y99/00

CPC分类号： H01L23/373 ,  H01L23/433 ,  H01L24/28 ,  H01L24/31 ,  H01L2224/0554 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16 ,  H01L2224/73253 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/1306 ,  H01L2924/14 ,  Y10S977/80 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： Under one aspect, a method of cooling a circuit element includes providing a thermal reservoir having a temperature lower than an operating temperature of the circuit element; and providing a nanotube article in thermal contact with the circuit element and with the reservoir, the nanotube article including a non-woven fabric of nanotubes in contact with other nanotubes to define a plurality of thermal pathways along the article, the nanotube article having a nanotube density and a shape selected such that the nanotube article is capable of transferring heat from the circuit element to the thermal reservoir.

摘要翻译： 在一个方面，冷却电路元件的方法包括提供具有低于电路元件的工作温度的温度的热存储器; 并且提供与所述电路元件和所述储存器热接触的纳米管制品，所述纳米管制品包括与其它纳米管接触的纳米管的无纺织物以限定沿着所述制品的多个热路径，所述纳米管制品具有纳米管 密度和形状，使得纳米管制品能够将热量从电路元件传递到热储存器。