Micromechanical device and method of manufacturing micromechanical device
    4.
    发明授权
    Micromechanical device and method of manufacturing micromechanical device 有权
    微机械装置及其制造方法

    公开(公告)号:US07972884B2

    公开(公告)日:2011-07-05

    申请号:US12399348

    申请日:2009-03-06

    IPC分类号: H01L21/00

    摘要: An example of the present invention is a micromechanical device including, a substrate in which a signal line is provided, a micromachine which is mounted on the substrate, is formed of a conductive material into a beam-like shape, is elastically deformed by a function of an electric field in such a manner that the beam-like part moves closer to or apart from the signal line, and changes the electric characteristics concomitantly with the deformation, a deformation restraint section constituted of a material having a higher viscosity coefficient than the conductive material, provided on the opposite side of the micromachine to the signal line, for restraining deformation of the micromachine in a direction in which the micromachine is separated from the signal line, and a sealing body provided on the principal surface of the substrate, for covering the micromachine with a hollow section located therebetween.

    摘要翻译: 本发明的一个实例是一种微机械装置,其特征在于,包括:设置有信号线的基板,安装在基板上的微机械,由导电材料形成为梁状,通过功能弹性变形 电场的方式使得束状部分靠近信号线或离开信号线移动,并且随着变形而改变电特性,变形抑制部分由具有比导电性更高的粘度系数的材料构成 材料,其设置在所述微机械相对于所述信号线的相反侧,用于限制所述微机械从所述微机械与所述信号线分离的方向上的变形;以及设置在所述基板主表面上的密封体, 具有位于其间的中空部分的微机械。

    HOLLOW SEALING STRUCTURE AND MANUFACTURING METHOD FOR HOLLOW SEALING STRUCTURE
    5.
    发明申请
    HOLLOW SEALING STRUCTURE AND MANUFACTURING METHOD FOR HOLLOW SEALING STRUCTURE 审中-公开
    中空密封结构的中空密封结构和制造方法

    公开(公告)号:US20080297992A1

    公开(公告)日:2008-12-04

    申请号:US12128956

    申请日:2008-05-29

    IPC分类号: H05K7/00 H01L21/00

    摘要: A hollow sealing structure includes, a substrate, a functional element portion disposed on a principal surface of the substrate, and a covering portion disposed over the principal surface of the substrate to form a hollow portion in which the covering portion covers the functional element portion, the covering portion including a first covering structure portion having a plurality of openings, second covering structure portions disposed individually on imaginary straight lines which connect the functional element portion and the openings, and a sealing structure portion which seals gaps defined between the first covering structure portion and the second covering structure portions.

    摘要翻译: 中空密封结构包括:基板,设置在基板的主表面上的功能元件部分和设置在基板的主表面上的覆盖部分,以形成覆盖部分覆盖功能元件部分的中空部分, 所述覆盖部分包括具有多个开口的第一覆盖结构部分,分别设置在连接所述功能元件部分和所述开口的假想直线上的第二覆盖结构部分和密封结构部分,所述密封结构部分密封限定在所述第一覆盖结构部分 和第二覆盖结构部分。

    Lighting apparatus
    6.
    发明授权
    Lighting apparatus 有权
    照明设备

    公开(公告)号:US08956017B2

    公开(公告)日:2015-02-17

    申请号:US13405668

    申请日:2012-02-27

    摘要: A lighting apparatus includes a case, a power source unit, and a light emitting unit. The case has a side portion provided around a first axis parallel to a direction from the power source unit toward the light emitting unit. The side portion has a first portion and a second portion disposed around a central axis parallel to the first axis. The first portion has a long distance to the central axis. The second portion has a short distance to the central axis. An end portion of an inner surface of the second portion is configured to have at least one selected from a portion perpendicular to the central axis and a portion has a recessed configuration with respect to the central axis when the inner surface is cut by a cross-section perpendicular to the central axis.

    摘要翻译: 照明装置包括壳体,电源单元和发光单元。 壳体具有围绕平行于从电源单元朝向发光单元的方向的第一轴线设置的侧部。 侧部具有围绕平行于第一轴线的中心轴线设置的第一部分和第二部分。 第一部分与中心轴的距离很长。 第二部分与中心轴的距离很短。 第二部分的内表面的端部构造成具有从垂直于中心轴线的部分中选择的至少一个部分,并且当内表面被切断时,部分具有相对于中心轴线的凹陷构造, 垂直于中心轴的截面。

    Micromechanical device and method of manufacturing micromechanical device
    9.
    发明授权
    Micromechanical device and method of manufacturing micromechanical device 有权
    微机械装置及其制造方法

    公开(公告)号:US08004053B2

    公开(公告)日:2011-08-23

    申请号:US12255144

    申请日:2008-10-21

    IPC分类号: H01L29/84

    摘要: A micromechanical device according to an aspect of the present invention includes, a substrate, a micromachine which is mounted on the substrate, is provided with a mechanism deformed by a function of an electric field, and changes the electrical characteristics concomitantly with the deformation, an inner inorganic sealing film which contains an inorganic material, is provided on a principal surface of the substrate, covers the micromachine through a hollow section containing a gaseous body therein, and is provided with opening shape sections allowing the hollow section to communicate with the outside, an organic sealing film which contains an organic material, is formed on the inner inorganic sealing film, and blocks up the opening shape sections, and an outer inorganic sealing film which contains an inorganic material with lower moisture permeability than the organic material, is formed on the organic sealing film, and covers the organic sealing film.

    摘要翻译: 根据本发明的一个方面的微机械装置包括:基板,安装在基板上的微型机械,具有通过电场的功能变形的机构,并且随着变形而改变电特性, 含有无机材料的内无机密封膜设置在基板的主表面上,通过包含气体的中空部分覆盖微机械,并且设置有允许中空部分与外部连通的开口形状部分, 在内无机密封膜上形成含有有机材料的有机密封膜,并且封闭开口形状部分,并且形成包含具有比有机材料低的透湿性的无机材料的外部无机密封膜, 有机密封膜,并覆盖有机密封膜。