公开(公告)号：US06955086B2

公开(公告)日：2005-10-18

申请号：US10739069

申请日：2003-12-19

申请人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

发明人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01P15/125

CPC分类号： G01P15/125

摘要： An acceleration sensor includes first and second fixed electrodes on a substrate, and a movable electrode located above the first and second fixed electrodes, with respect to the substrate, and facing them. The movable electrode is elastically supported on the substrate by a first elastic supporting body and is movable. A mass, which is elastically supported on the substrate by a second elastic supporting body, moves in response to an acceleration in a direction perpendicular to the substrate. A linking portion links the movable electrode and the mass at a position spaced from an axis of movement of the movable electrode by a distance. Acceleration is measured based on changes in a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the second fixed electrode and the movable electrode. Thus, a highly impact resistant and highly reliable acceleration sensor is obtained.

摘要翻译： 加速度传感器包括基板上的第一固定电极和第二固定电极以及相对于基板位于第一和第二固定电极上方并面向它们的可动电极。 可移动电极通过第一弹性支撑体弹性支撑在基板上并且可移动。 通过第二弹性支撑体弹性地支撑在基板上的质量响应于垂直于基板的方向的加速度而移动。 连接部分在与可移动电极的运动轴线间隔一定距离的位置处连接可移动电极和质量块。 基于第一固定电极和可动电极之间的第一电容的变化和第二固定电极与可动电极之间的第二电容来测量加速度。 因此，获得了高度耐冲击和高度可靠的加速度传感器。

公开(公告)号：US06584840B2

公开(公告)日：2003-07-01

申请号：US09978666

申请日：2001-10-18

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Eiji Yoshikawa ,  Hiroyuki Fujita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Eiji Yoshikawa ,  Hiroyuki Fujita

IPC分类号： G01C1900

CPC分类号： G01C19/5719

摘要： A sensitive angular velocity sensor is provided without increasing an inter-electrode gap for inducing a torsional vibration. An angular velocity sensor which employs an electrostatic drive system for inducing drive vibration by using inter-electrode electrostatic attraction includes a pair of inertial mass members which are connected to each other through a connection frame having a length such that the inertial mass members are point-symmetrical with respect to a central point of the connection frame and which are held along a plane direction of a substrate, a pair of elastic beams which are connected to each other at an interval in opposite directions along a longitudinal direction from the central point of the connection frame on opposite sides of the connection frame, a pair of drive plates which are connected to the ends of the elastic beams, which have an electrode constituting an electrostatic attraction generating structure together with a drive electrode on the substrate, and which are supported such that the drive plates can be moved in at least one direction along the plane direction of the substrate to torsionally vibrate the inertial mass members about the central point of the connection frame.

摘要翻译： 提供灵敏的角速度传感器，而不增加用于引起扭转振动的电极间间隙。 使用静电驱动系统的角速度传感器，其通过使用电极间静电吸引而引起驱动振动的方法包括：一对惯性质量部件，其通过具有长度使得惯性质量部件为点状的连接框架彼此连接， 相对于连接框架的中心点对称并且沿着基板的平面方向保持的一对弹性梁，沿着从中心点沿相反方向以相反方向彼此连接的一对弹性梁 连接框架的连接框架，连接到弹性梁的端部的一对驱动板，其具有与基板上的驱动电极一起构成静电引力产生结构的电极，并且被支撑为 驱动板可以沿着基板的平面方向在至少一个方向上移动 使惯性质量构件围绕连接框架的中心点扭转振动。

公开(公告)号：US6125700A

公开(公告)日：2000-10-03

申请号：US648

申请日：1997-12-30

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5769 ,  G01P15/08 ,  G01P9/04

CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01P2015/0814

摘要： A vibrating type angular velocity sensor is comprised of: a driving vibrator element 8 supported by a first beam 9 fixed by an anchor portion 3 on a substrate, and driven by a driving comb electrode 12 along an X-axial direction parallel to the substrate; a detecting vibrator element 10 supported by a second beam 11 on the driving vibrator element and being vibratable along a Y-axial direction; and detection electrodes 14 and 15 of an electric capacitance provided with separated from the detecting vibrator element, and the detection electrodes along the X-axial direction, whereby an angular velocity while setting a Z-axial direction perpendicular to the substrate as an axis is detected. Furthermore, the driving vibrator element is fixed on the substrate by way of two sets of the anchor portions arranged at positions symmetrical to each other with respect to the detecting vibrator element. Also, one of the detection electrodes is arranged on the detecting vibrator element, and the other of the detection electrodes is arranged on the driving vibrator element with separated from each other by an equi-interval space.

摘要翻译： 振动型角速度传感器包括：驱动振子元件8，由第一梁9支撑，第一梁9由锚固部分3固定在基板上，并由平行于基板的X轴方向由驱动梳电极12驱动; 检测振动元件10，由驱动振子上的第二光束11支撑，并沿着Y轴方向振动; 检测电极14和15设置有与检测振动元件分离的电容，检测电极沿着X轴方向，从而检测将垂直于基板的Z轴方向设定为轴的角速度 。 此外，驱动振动元件通过布置在相对于检测振动器元件彼此对称的位置的两组锚定部固定在基板上。 此外，检测电极之一布置在检测振动器元件上，另一个检测电极通过等间隔空间彼此分离地布置在驱动振动器元件上。

公开(公告)号：US06201284B1

公开(公告)日：2001-03-13

申请号：US09025247

申请日：1998-02-18

申请人： Yoshiaki Hirata ,  Masahiro Tsugai ,  Nobuaki Konno

发明人： Yoshiaki Hirata ,  Masahiro Tsugai ,  Nobuaki Konno

IPC分类号： H01L2982

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/082

摘要： A movable electrode structure is formed in a single sensor element, and this movable electrode structure can be displaced along two axes within a plane, and one axis outside the plane. A detecting fixed electrode is provided via a constant space with each of these detecting axes, and a change in capacitances between the movable electrodes and the fixed electrodes is detected. As a result, the acceleration components of the two axes, or the three axes are detected. The dynamic characteristic of the sensor is controlled based on the mass of the variable electrode, the structure and length of the beam for supporting the movable electrode, and also the ratio of the length to the section of this beam.

摘要翻译： 可移动电极结构形成在单个传感器元件中，并且该可动电极结构可以在平面内的两个轴线以及平面外的一个轴线上移位。 通过这些检测轴中的每一个经由恒定空间设置检测固定电极，并且检测可动电极和固定电极之间的电容的变化。 结果，检测到两个轴的加速度分量或三个轴。 传感器的动态特性基于可变电极的质量，用于支撑可动电极的光束的结构和长度以及长度与该光束的截面的比例来控制。

公开(公告)号：US06494094B1

公开(公告)日：2002-12-17

申请号：US09562288

申请日：2000-05-01

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes, thereby decreasing its sensor sensitivity. In an angular rate sensor, a drive frame and a driven frame are separately provided. A bending oscillation of the drive frame is transmitted to the driven frame through link beams, causing the rotational oscillation of the driven frame. The displacement amplitude of a rotational oscillation of the driven frame is not limited to provide high sensor sensitivity.

摘要翻译： 传统的角速度传感器存在由于驱动万向架结合到驱动电极上的拉入现象而导致驱动万向架的位移幅度受到限制的问题，从而降低了传感器灵敏度。 在角速率传感器中，分别提供驱动框架和从动框架。 驱动框架的弯曲振动通过连接梁传递到从动框架，导致从动框架的旋转振动。 驱动框架的旋转振荡的位移幅度不限于提供高传感器灵敏度。

公开(公告)号：US06259548B1

公开(公告)日：2001-07-10

申请号：US09401947

申请日：1999-09-23

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita ,  Makoto Mita ,  Hiroshi Toshiyoshi ,  Yoshio Mita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita ,  Makoto Mita ,  Hiroshi Toshiyoshi ,  Yoshio Mita

IPC分类号： G02B2608

CPC分类号： B81B3/004 ,  B81B2201/042 ,  G02B26/0841

摘要： A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.

摘要翻译： 微镜装置包括其上配置有反射镜的反射镜形成基板。 一对扭转梁设置在反射镜形成基板的相对侧上。 锚固件从支撑基底突出，支撑扭转梁的端部。 驱动框架围绕扭转梁的至少一侧，并且通过连杆梁连接到反射镜形成基板。 驱动力发生器驱动驱动框架。

公开(公告)号：US20060283245A1

公开(公告)日：2006-12-21

申请号：US11423281

申请日：2006-06-09

申请人： Nobuaki KONNO ,  Masahiro Tsugai ,  Jun Fujita

发明人： Nobuaki KONNO ,  Masahiro Tsugai ,  Jun Fujita

IPC分类号： G01P15/08

CPC分类号： G01C19/5719

摘要： According to one of the aspects of the present invention, a vibratory gyroscope includes a pair of proof masses having the same inertia mass, each of the proof masses having a first axis. The proof masses are arranged symmetrically in relation to a second axis. Also, the vibratory gyroscope includes a pair of drive elements, each of which has a driving axis extending in parallel to the second axis and supports respective one of the proof masses to allow oscillation thereof about the first axis. Further, the vibratory gyroscope includes a supporting element with an anchor element for supporting the drive elements to allow oscillation thereof about the driving axes. Finally, the vibratory gyroscope includes a main body having an inner space for receiving the supporting element, in which the main body is in contact with the anchor element of the supporting element and spaced away from the proof masses and the drive elements.

摘要翻译： 根据本发明的一个方面，振动陀螺仪包括具有相同惯性质量的一对校验块，每个校验块具有第一轴。 证明质量体相对于第二轴对称地布置。 此外，振动陀螺仪还包括一对驱动元件，每一个驱动元件具有平行于第二轴线延伸的驱动轴，并支撑相应的一个检验质量块，以允许围绕第一轴线的振荡。 此外，振动陀螺仪包括支撑元件，该支撑元件具有用于支撑驱动元件的锚定元件，以允许绕驱动轴线的摆动。 最后，振动陀螺仪包括主体，其具有用于接收支撑元件的内部空间，主体与支撑元件的锚定元件接触并与检测块和驱动元件隔开。

公开(公告)号：US6078016A

公开(公告)日：2000-06-20

申请号：US244891

申请日：1999-02-05

申请人： Eiji Yoshikawa ,  Masahiro Tsugai

发明人： Eiji Yoshikawa ,  Masahiro Tsugai

IPC分类号： B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/135 ,  H01H1/00 ,  H01H35/14 ,  H01L29/84 ,  H01H57/00

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/135 ,  G01P2015/0817 ,  G01P2015/0828 ,  H01H1/0036 ,  H01H35/14

摘要： A semiconductor accelerometer switch having a fixed portion including a first control electrode and a movable portion including a movable body. By applying a voltage between the first control electrode and an electrode on the movable body, electrostatic attraction holds the movable body in an initial position. The movable body is displaced when acceleration having a magnitude in a direction acts on the switch. The threshold of acceleration to be detected and general-purpose properties of the accelerometer switch are easily adjusted.

摘要翻译： 一种半导体加速度计开关，其具有包括第一控制电极和包括可动体的可动部分的固定部分。 通过在第一控制电极和可移动​​体上的电极之间施加电压，静电吸引将可动体保持在初始位置。 当具有方向上的大小的加速度作用在开关上时，移动体被移位。 可以容易地调整要检测的加速度阈值和加速度计开关的通用特性。

公开(公告)号：US06194678B1

公开(公告)日：2001-02-27

申请号：US09567007

申请日：2000-05-09

申请人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Toru Araki

发明人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Toru Araki

IPC分类号： H01H3534

CPC分类号： H01H1/0036 ,  H01H35/34

摘要： A pressure switch with improved sealing of an airtight chamber, and improved electrical characteristics reducing chattering, increasing response rate, and minimizing the pressure necessary for activation. The pressure switch includes an upper substrate with a diaphragm readily deformed by an applied stress, a lower substrate overlapped with the upper substrate to form the airtight chamber, a contact electrically switched in response to the deformation of the diaphragm, and a sealing member continuously surrounding the airtight chamber, disposed between the first and second substrate, and hermetically sealing the airtight chamber.

摘要翻译： 具有改进的密封腔密封的压力开关，以及改善的电气特性，减少抖动，增加响应速度，并使活化所需的压力最小化。 压力开关包括具有通过施加的应力容易变形的膜片的上基板，与上基板重叠的下基板以形成气密室，响应于膜片的变形而电切换的触点和连续围绕的密封构件 所述密封室设置在所述第一和第二基板之间，并且气密地密封所述气密室。

公开(公告)号：US5980762A

公开(公告)日：1999-11-09

申请号：US806150

申请日：1997-02-25

申请人： Hiroshi Otani ,  Masahiro Tsugai

发明人： Hiroshi Otani ,  Masahiro Tsugai

IPC分类号： H01L29/84 ,  B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  H01L21/306 ,  H01L21/302

CPC分类号： B81C1/00626 ,  G01P15/0802 ,  G01P15/125 ,  H01L21/30608 ,  B81B2201/0235 ,  B81C2201/0133 ,  B81C2201/0142

摘要： A method of micromachining a silicon wafer that simultaneously forms narrow gaps having a width of 10 .mu.m or less and wider gap portions using an anistropic etching solution. The etching solution contains KOH in a concentration of 35% or less and the penetration etching is carried out such that the etching of the opposing walls and the face of the silicon wafer occur at the same rate. A method of manufacturing a capacitance-type acceleration detector in a silicon wafer using the aforementioned etching method.

摘要翻译： 一种微晶加工硅晶片的方法，其同时形成宽度为10μm或更小的窄间隙，并且使用有机蚀刻溶液形成较宽的间隙部分。 蚀刻溶液含有浓度为35％以下的KOH，进行贯通蚀刻，使得相对的壁和硅晶片的表面以相同的速率进行蚀刻。 使用上述蚀刻方法制造硅晶片中的电容式加速度检测器的方法。