公开(公告)号：US06584840B2

公开(公告)日：2003-07-01

申请号：US09978666

申请日：2001-10-18

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Eiji Yoshikawa ,  Hiroyuki Fujita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Eiji Yoshikawa ,  Hiroyuki Fujita

IPC分类号： G01C1900

CPC分类号： G01C19/5719

摘要： A sensitive angular velocity sensor is provided without increasing an inter-electrode gap for inducing a torsional vibration. An angular velocity sensor which employs an electrostatic drive system for inducing drive vibration by using inter-electrode electrostatic attraction includes a pair of inertial mass members which are connected to each other through a connection frame having a length such that the inertial mass members are point-symmetrical with respect to a central point of the connection frame and which are held along a plane direction of a substrate, a pair of elastic beams which are connected to each other at an interval in opposite directions along a longitudinal direction from the central point of the connection frame on opposite sides of the connection frame, a pair of drive plates which are connected to the ends of the elastic beams, which have an electrode constituting an electrostatic attraction generating structure together with a drive electrode on the substrate, and which are supported such that the drive plates can be moved in at least one direction along the plane direction of the substrate to torsionally vibrate the inertial mass members about the central point of the connection frame.

摘要翻译： 提供灵敏的角速度传感器，而不增加用于引起扭转振动的电极间间隙。 使用静电驱动系统的角速度传感器，其通过使用电极间静电吸引而引起驱动振动的方法包括：一对惯性质量部件，其通过具有长度使得惯性质量部件为点状的连接框架彼此连接， 相对于连接框架的中心点对称并且沿着基板的平面方向保持的一对弹性梁，沿着从中心点沿相反方向以相反方向彼此连接的一对弹性梁 连接框架的连接框架，连接到弹性梁的端部的一对驱动板，其具有与基板上的驱动电极一起构成静电引力产生结构的电极，并且被支撑为 驱动板可以沿着基板的平面方向在至少一个方向上移动 使惯性质量构件围绕连接框架的中心点扭转振动。

公开(公告)号：US06259548B1

公开(公告)日：2001-07-10

申请号：US09401947

申请日：1999-09-23

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita ,  Makoto Mita ,  Hiroshi Toshiyoshi ,  Yoshio Mita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita ,  Makoto Mita ,  Hiroshi Toshiyoshi ,  Yoshio Mita

IPC分类号： G02B2608

CPC分类号： B81B3/004 ,  B81B2201/042 ,  G02B26/0841

摘要： A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.

摘要翻译： 微镜装置包括其上配置有反射镜的反射镜形成基板。 一对扭转梁设置在反射镜形成基板的相对侧上。 锚固件从支撑基底突出，支撑扭转梁的端部。 驱动框架围绕扭转梁的至少一侧，并且通过连杆梁连接到反射镜形成基板。 驱动力发生器驱动驱动框架。

公开(公告)号：US06494094B1

公开(公告)日：2002-12-17

申请号：US09562288

申请日：2000-05-01

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes, thereby decreasing its sensor sensitivity. In an angular rate sensor, a drive frame and a driven frame are separately provided. A bending oscillation of the drive frame is transmitted to the driven frame through link beams, causing the rotational oscillation of the driven frame. The displacement amplitude of a rotational oscillation of the driven frame is not limited to provide high sensor sensitivity.

摘要翻译： 传统的角速度传感器存在由于驱动万向架结合到驱动电极上的拉入现象而导致驱动万向架的位移幅度受到限制的问题，从而降低了传感器灵敏度。 在角速率传感器中，分别提供驱动框架和从动框架。 驱动框架的弯曲振动通过连接梁传递到从动框架，导致从动框架的旋转振动。 驱动框架的旋转振荡的位移幅度不限于提供高传感器灵敏度。

公开(公告)号：US06955086B2

公开(公告)日：2005-10-18

申请号：US10739069

申请日：2003-12-19

申请人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

发明人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01P15/125

CPC分类号： G01P15/125

摘要： An acceleration sensor includes first and second fixed electrodes on a substrate, and a movable electrode located above the first and second fixed electrodes, with respect to the substrate, and facing them. The movable electrode is elastically supported on the substrate by a first elastic supporting body and is movable. A mass, which is elastically supported on the substrate by a second elastic supporting body, moves in response to an acceleration in a direction perpendicular to the substrate. A linking portion links the movable electrode and the mass at a position spaced from an axis of movement of the movable electrode by a distance. Acceleration is measured based on changes in a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the second fixed electrode and the movable electrode. Thus, a highly impact resistant and highly reliable acceleration sensor is obtained.

摘要翻译： 加速度传感器包括基板上的第一固定电极和第二固定电极以及相对于基板位于第一和第二固定电极上方并面向它们的可动电极。 可移动电极通过第一弹性支撑体弹性支撑在基板上并且可移动。 通过第二弹性支撑体弹性地支撑在基板上的质量响应于垂直于基板的方向的加速度而移动。 连接部分在与可移动电极的运动轴线间隔一定距离的位置处连接可移动电极和质量块。 基于第一固定电极和可动电极之间的第一电容的变化和第二固定电极与可动电极之间的第二电容来测量加速度。 因此，获得了高度耐冲击和高度可靠的加速度传感器。

公开(公告)号：US06201284B1

公开(公告)日：2001-03-13

申请号：US09025247

申请日：1998-02-18

申请人： Yoshiaki Hirata ,  Masahiro Tsugai ,  Nobuaki Konno

发明人： Yoshiaki Hirata ,  Masahiro Tsugai ,  Nobuaki Konno

IPC分类号： H01L2982

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/082

摘要： A movable electrode structure is formed in a single sensor element, and this movable electrode structure can be displaced along two axes within a plane, and one axis outside the plane. A detecting fixed electrode is provided via a constant space with each of these detecting axes, and a change in capacitances between the movable electrodes and the fixed electrodes is detected. As a result, the acceleration components of the two axes, or the three axes are detected. The dynamic characteristic of the sensor is controlled based on the mass of the variable electrode, the structure and length of the beam for supporting the movable electrode, and also the ratio of the length to the section of this beam.

摘要翻译： 可移动电极结构形成在单个传感器元件中，并且该可动电极结构可以在平面内的两个轴线以及平面外的一个轴线上移位。 通过这些检测轴中的每一个经由恒定空间设置检测固定电极，并且检测可动电极和固定电极之间的电容的变化。 结果，检测到两个轴的加速度分量或三个轴。 传感器的动态特性基于可变电极的质量，用于支撑可动电极的光束的结构和长度以及长度与该光束的截面的比例来控制。

公开(公告)号：US6125700A

公开(公告)日：2000-10-03

申请号：US648

申请日：1997-12-30

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5769 ,  G01P15/08 ,  G01P9/04

CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01P2015/0814

摘要： A vibrating type angular velocity sensor is comprised of: a driving vibrator element 8 supported by a first beam 9 fixed by an anchor portion 3 on a substrate, and driven by a driving comb electrode 12 along an X-axial direction parallel to the substrate; a detecting vibrator element 10 supported by a second beam 11 on the driving vibrator element and being vibratable along a Y-axial direction; and detection electrodes 14 and 15 of an electric capacitance provided with separated from the detecting vibrator element, and the detection electrodes along the X-axial direction, whereby an angular velocity while setting a Z-axial direction perpendicular to the substrate as an axis is detected. Furthermore, the driving vibrator element is fixed on the substrate by way of two sets of the anchor portions arranged at positions symmetrical to each other with respect to the detecting vibrator element. Also, one of the detection electrodes is arranged on the detecting vibrator element, and the other of the detection electrodes is arranged on the driving vibrator element with separated from each other by an equi-interval space.

摘要翻译： 振动型角速度传感器包括：驱动振子元件8，由第一梁9支撑，第一梁9由锚固部分3固定在基板上，并由平行于基板的X轴方向由驱动梳电极12驱动; 检测振动元件10，由驱动振子上的第二光束11支撑，并沿着Y轴方向振动; 检测电极14和15设置有与检测振动元件分离的电容，检测电极沿着X轴方向，从而检测将垂直于基板的Z轴方向设定为轴的角速度 。 此外，驱动振动元件通过布置在相对于检测振动器元件彼此对称的位置的两组锚定部固定在基板上。 此外，检测电极之一布置在检测振动器元件上，另一个检测电极通过等间隔空间彼此分离地布置在驱动振动器元件上。

公开(公告)号：US20060184301A1

公开(公告)日：2006-08-17

申请号：US11353169

申请日：2006-02-14

申请人： Nobuaki Konno ,  Takashi Tokunaga ,  Satoru Inoue

发明人： Nobuaki Konno ,  Takashi Tokunaga ,  Satoru Inoue

IPC分类号： G06F19/00

CPC分类号： B60R21/0132 ,  B60R16/0233 ,  B60R2021/0018 ,  B60R2021/01325 ,  B60R2021/01327 ,  G01P3/22 ,  G01P15/0888

摘要： A rollover sensing device includes a detecting unit that includes at least a pair of acceleration sensors which detect an acceleration in an vertical direction, the pair of acceleration sensors being disposed closer to each other on a same board in a lateral direction of a vehicle, an arithmetic processing unit that calculates an angular acceleration and an angular velocity of the vehicle on a basis of an output signal from the detecting unit, and a rollover determining unit that determines whether or not a rollover of the vehicle occurs on a basis of an arithmetic result obtained by the arithmetic processing unit.

摘要翻译： 翻转感测装置包括检测单元，该检测单元至少包括一对在垂直方向上检测加速度的加速度传感器，该一对加速度传感器在车辆的横向方向上彼此靠近彼此设置在同一板上， 算术处理单元，其基于来自检测单元的输出信号计算车辆的角加速度和角速度;以及翻转确定单元，其基于算术结果来确定车辆的翻转是否发生 由算术处理单元获得。

公开(公告)号：US07624638B2

公开(公告)日：2009-12-01

申请号：US11933685

申请日：2007-11-01

申请人： Nobuaki Konno ,  Yoshiaki Hirata

发明人： Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01P15/125 ,  G01P15/08

CPC分类号： G01P15/125

摘要： First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

摘要翻译： 第一和第二检测框架由基板支撑以能够围绕第一和第二扭转轴线旋转。 第一连接梁在位于从第一扭转轴的位置在与第一扭转轴相交的第一方向上移动并且指向第一检测框的一端侧的位置处的轴上连接到第一检测框。 第二连杆梁在位于从第二扭转轴的位置偏离与第一方向相反的第二方向的位置的轴上的第二检测框架上连接。 通过分别通过第一和第二连杆梁与第一和第二检测框架链接，惯性质量体可在基板的厚度方向上移动。 这种构造使得可以获得几乎不受扰动影响的高精度加速度传感器。

公开(公告)号：US08368387B2

公开(公告)日：2013-02-05

申请号：US12920682

申请日：2008-10-28

申请人： Nobuaki Konno

发明人： Nobuaki Konno

IPC分类号： G01P15/00 ,  G01P15/08

CPC分类号： G01P15/0802 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5719 ,  G01P3/22 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0831 ,  H01L29/84

摘要： An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.

摘要翻译： 加速度传感器包括基板，第一和第二扭转梁，第一和第二检测框架，第一和第二检测电极，第一和第二连杆梁以及惯性质量体。 第一和第二扭转梁围绕第一和第二扭转轴线变形。 第一和第二检测框围绕第一和第二扭转轴线旋转。 第一和第二检测电极检测基板与第一和第二检测框架中的每一个之间形成的角度。 第一连杆梁位于沿着与第一扭转轴相交叉的方向位于从第一扭转轴位置到第一检测框架的一端侧的位置的第一轴上。 第二连杆梁位于从与第一扭转轴的位置相同的方向与第二扭转轴的位置偏移的位置的第二轴上。

公开(公告)号：US20110203373A1

公开(公告)日：2011-08-25

申请号：US13127172

申请日：2009-08-13

申请人： Nobuaki Konno

发明人： Nobuaki Konno

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0831 ,  G01P2015/0837

摘要： An acceleration sensor includes a substrate, and a plurality of acceleration detection units supported by the substrate. Each of the plurality of acceleration detection units has a torsion beam supported by the substrate and distorted about a torsion axis line; a detection frame supported by the torsion beam so as to be rotatable about the torsion axis line; a detection electrode formed on the substrate so as to face the detection frame; a link beam supported by the detection frame at a position on an axis line deviated from the torsion axis line when seen in plane; and an inertia mass body supported by the link beam so as to be displaceable in a thickness direction of the substrate. The plurality of acceleration detection units include first and second acceleration detection units. The first and second acceleration detection units are disposed side by side along a direction of the first torsion axis line. Thereby, a highly accurate acceleration sensor that suppresses a vibration with a high frequency and a high acceleration can be obtained.

摘要翻译： 加速度传感器包括基板和由基板支撑的多个加速度检测单元。 多个加速度检测单元中的每一个具有由基板支撑的扭转梁，并且围绕扭转轴线变形; 所述检测框架由所述扭转梁支撑，以便能够围绕所述扭转轴线旋转; 检测电极，形成在所述基板上以面对所述检测框架; 在平面内观察时，在与所述扭转轴线偏离的轴线上的位置处由所述检测框架支撑的连杆梁; 以及由所述连杆梁支撑以便能够在所述基板的厚度方向上移位的惯性质量体。 多个加速度检测单元包括第一和第二加速度检测单元。 第一和第二加速度检测单元沿着第一扭转轴线的方向并排布置。 因此，可以获得抑制高频和高加速度的振动的高精度的加速度传感器。