公开(公告)号：US06768111B1

公开(公告)日：2004-07-27

申请号：US10663552

申请日：2003-09-16

申请人： Oliver C. Wells ,  Lynne M. Gignac ,  Jonathan L. Rullan ,  Conal E. Murray

发明人： Oliver C. Wells ,  Lynne M. Gignac ,  Jonathan L. Rullan ,  Conal E. Murray

IPC分类号： G01N2300

CPC分类号： G01N23/2251

摘要： A method of measurement of topographic features on a surface of a substrate is presented, wherein a focused beam of particles falls onto the surface of the substrate, and backscattered particles are detected with a particle detector. An opaque material is interposed between the surface and the detector, and the position of the shadow of an edge of the opaque material on the detector is recorded. The relative position of the edge and the surface of the substrate is then determined, and the topography of the surface determined as the particle beam and the substrate are moved with respect to one another.

摘要翻译： 提出了一种测量衬底表面上的地形特征的方法，其中聚焦的粒子束落在衬底的表面上，用颗粒检测器检测背散射的颗粒。 在表面和检测器之间插入不透明材料，并记录不透明材料边缘在检测器上的位置。 然后确定边缘和基板的表面的相对位置，并且确定为粒子束和基板的表面的形貌相对于彼此移动。

公开(公告)号：US5408098A

公开(公告)日：1995-04-18

申请号：US120012

申请日：1993-09-10

申请人： Oliver C. Wells

发明人： Oliver C. Wells

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J2237/24485

摘要： A detector system for a low-loss electron operated scanning electron microscope providing a focused primary electron beam and producing backscattered electrons having a plurality of energy levels by interactions with a specimen disposed within the primary electron beam includes a plurality of grids, each of the grids having a corresponding predetermined potential, wherein the grids selectively filter the backscattered electrons to permit collection of low loss electrons having at least a predetermined threshold energy level at an exit side of the grids, a focusing grid disposed opposing the exit side of the grids for focusing the low loss electrons to produce convergence of the low loss electrons in a convergence region and an electron detector located substantially within the convergence region for detecting the low loss electrons. Both the electron detector and the focusing grids are maintained at predetermined detector and focusing potentials, which can be made equal to one another. A method for producing a detector system for a SEM is also disclosed.

摘要翻译： 一种用于低损耗电子扫描电子显微镜的检测器系统，其提供聚焦的一次电子束，并且通过与设置在一次电子束内的试样的相互作用产生具有多个能级的反向散射电子，包括多个网格，每个网格 具有相应的预定电位，其中栅极选择性地过滤反向散射电子，以允许收集在栅极的出口侧具有至少预定阈值能级的低损耗电子，与栅格的出射侧相对设置的聚焦栅格用于聚焦 低损耗电子产生会聚区域中的低损耗电子的收敛和基本上位于会聚区域内的电子检测器，用于检测低损耗电子。 电子检测器和聚焦栅都保持在预定的检测器和聚焦电位，这可以彼此相等。 还公开了用于SEM的检测器系统的制造方法。

公开(公告)号：US4962306A

公开(公告)日：1990-10-09

申请号：US444926

申请日：1989-12-04

申请人： Rodney T. Hodgson ,  Francoise K. LeGoues ,  Oliver C. Wells

发明人： Rodney T. Hodgson ,  Francoise K. LeGoues ,  Oliver C. Wells

IPC分类号： H01J37/20 ,  H01J37/14 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585

摘要： An electron microscope which includes a detector which is located in the magnetic field used to focus the primary electron beam onto the sample. The focusing magnetic field is used to energy-filter and/or energy analyze the scattered electrons without the need for additional equipment, such as a retarding-field energy filter. The magnetic field of the condenser-objective lens (or of any other type of magnetic lens) of the microscope provides the filtering and/or analyzing action, and the detector can be located so as to collect only low-loss electrons.

公开(公告)号：US4665313A

公开(公告)日：1987-05-12

申请号：US750624

申请日：1985-06-28

申请人： Oliver C. Wells

发明人： Oliver C. Wells

IPC分类号： G01N27/00 ,  G01N13/12 ,  G01R31/26 ,  G01R31/265 ,  G01R31/305 ,  H01J37/26 ,  H01J37/28 ,  H01L21/66

CPC分类号： G01R31/2653 ,  G01R31/305 ,  H01J37/268 ,  Y10S977/852

摘要： An improved electron bombardment induced conductivity apparatus and method is described for charge collection imaging of semiconductor materials and devices with unprecedented resolution. This is accomplished by bombarding a very small area of the surface of a specimen with low-energy electrons rather than high-energy electrons and by physically scanning (i.e. moving) the electron source itself (rather than only the beam of electrons) with respect to the specimen. A very small area of the specimen surface is bombarded with low-energy electrons without any need to do focussing by emitting the low-energy electrons from a sharply pointed electrode positioned very close to the surface being bombarded with the low-energy electrons. Hole-electron pairs created by the electron bombardment are sensed (preferably collected by an electric field) and a measurement of the sensed number of such pairs is displayed in synchronism with the electrode scanning to produce a charge collection image of the specimen.

摘要翻译： 描述了一种改进的电子轰击诱导电导率装置和方法，用于以前所未有的分辨率对半导体材料和器件进行电荷收集成像。 这是通过用低能电子而不是高能电子轰击样本表面的非常小的区域并且通过相对于高能电子物理扫描（即移动）电子源本身（而不仅仅是电子束）来实现的 标本。 用低能电子轰击样本表面的非常小的区域，而不需要通过从位于非常接近被低能电子轰击的表面的尖锐电极发射低能电子来进行聚焦。 感测由电子轰击产生的空穴 - 电子对（优选通过电场收集），并且与电极扫描同步地显示感测的这些对的数量的测量，以产生样本的电荷收集图像。

公开(公告)号：US5047649A

公开(公告)日：1991-09-10

申请号：US594269

申请日：1990-10-09

申请人： Rodney T. Hodgson ,  Jackson E. Stanland ,  Oliver C. Wells

发明人： Rodney T. Hodgson ,  Jackson E. Stanland ,  Oliver C. Wells

IPC分类号： H01L21/027 ,  B41M5/20 ,  G01Q10/00 ,  G01Q30/20 ,  G01Q80/00 ,  G03F7/00 ,  G11B9/00 ,  H01J37/317 ,  H01L21/203 ,  H01L21/205 ,  H01L21/30 ,  H01L21/302

CPC分类号： G03F7/0002 ,  B41M5/20 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/2049 ,  G11B9/14 ,  H01J37/3174 ,  G01Q80/00 ,  H01J2237/0044 ,  H01J2237/31738 ,  H01J2237/31747 ,  H01J2237/31759 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/859

摘要： A method and apparatus for producing fine line patterns on insulating surfaces utilizing a conductive spring-like cantilever having a pointed tip which is in proximity to the surface to be affected. Electrons emitted from the tip travel toward the insulator surface and cause changes therein or affect molecules located in the proximity of the insulator surface. Tunneling current is not required, and a highly conducting return current path for electrons through the insulator is not necessary. The incident electrons can be used to provide patterned, narrow-width features either by deposition of a material onto the insulator surface, or by producing etching in localized regions of the insulator surface, or by changing the insulator surface so that it can be etched.

公开(公告)号：US4785189A

公开(公告)日：1988-11-15

申请号：US159459

申请日：1988-02-19

申请人： Oliver C. Wells

发明人： Oliver C. Wells

IPC分类号： H01J37/317

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/31733 ,  Y10S977/855

摘要： An electron sensitive surface is patternized treated to a high resolution pattern of low-energy electrons without any need to do focussing by emitting the low-energy electrons from a pointed electrode and positioning the apex of the pointed electron emitting source suitably close to the surface being treated.

摘要翻译： 电子敏感表面被图案化处理成低能电子的高分辨率图案，而不需要通过从尖端电极发射低能电子来进行聚焦，并将尖电子发射源的顶点适当地靠近表面定位 治疗。

公开(公告)号：US4618767A

公开(公告)日：1986-10-21

申请号：US715139

申请日：1985-03-22

申请人： David A. Smith ,  Oliver C. Wells

发明人： David A. Smith ,  Oliver C. Wells

IPC分类号： H01J37/28 ,  G01N27/00 ,  G12B21/00 ,  H01J37/26

CPC分类号： H01J37/28 ,  B82Y35/00 ,  H01J2237/0245 ,  H01J2237/1502 ,  H01J2237/1503 ,  H01J2237/2583 ,  H01J2237/2802 ,  Y10S977/852 ,  Y10S977/86

摘要： Low-energy scanning transmission electron microscopy is achieved by using a sharply pointed electrode as a source of electrons having energies less than 10 eV and scanning the electron emitting pointed source across the surface of a self-supported thin film of material to be investigated at an essentially constant distance on the order of nanometers. The electrons transmitted through the specimen are sensed by a suitable detector and the output signal of the detector is used to control a display unit, such as a CRT display or a plotter. A scanning signal generating means simultaneously controls both the scanning of the electron emitting point source and the display unit while a separation control unit holds the distance between the point source and surface at a constant value. The electron emitting point source and associated mechanical drives as well as the specimen film and electron detector are all positioned in a vacuum chamber and isolated from vibration by a damped suspension apparatus.

摘要翻译： 通过使用尖锐的电极作为具有小于10eV的能量的电子源来实现低能量扫描透射电子显微镜，并且在电子发射尖锐的光源的表面上扫描电子发射尖的源，以在待调查的材料的表面上 基本恒定的距离在纳米级。 通过合适的检测器感测透过试样的电子，检测器的输出信号用于控制诸如CRT显示器或绘图仪的显示单元。 扫描信号发生装置同时控制电子发射点源和显示单元的扫描，而分离控制单元以恒定值保持点源和表面之间的距离。 电子发射点源和相关的机械驱动器以及样品膜和电子检测器都位于真空室中，并通过阻尼悬挂装置与振动隔离。