Fused quartz member for use in semiconductor manufacture
    1.
    发明授权
    Fused quartz member for use in semiconductor manufacture 失效
    用于半导体制造的熔融石英片

    公开(公告)号:US4911896A

    公开(公告)日:1990-03-27

    申请号:US889142

    申请日:1986-07-24

    摘要: A composite fused quartz material is disclosed for processing semiconductor grade silicon material in an improved manner. The modified vitreous material includes a disperse phase of fine size silicon metal particles which are distributed in preselected regions of the fused quartz matrix as a means of exercising temperature control in the various semiconductor processing operations using these fused quartz parts. Such utilization of the modified vitreous material in single crystal silicon rod growth and production of semiconductor grade silicon by diffusion doping is described. A method to produce the modified vitreous material is also disclosed.

    摘要翻译: 公开了一种用于以改进的方式处理半导体级硅材料的复合熔融石英材料。 改性玻璃质材料包括分散在熔融石英基体的预选区域中的细小尺寸硅金属颗粒的分散相,作为在使用这些熔融石英部件的各种半导体加工操作中进行温度控制的手段。 描述了通过扩散掺杂将改性玻璃质材料在单晶硅棒生长和半导体级硅生产中的利用。 还公开了生产改性玻璃质材料的方法。

    Method of enhancing the refractoriness of high purity fused silica
    2.
    发明授权
    Method of enhancing the refractoriness of high purity fused silica 失效
    提高高纯度熔融石英耐火性的方法

    公开(公告)号:US4028124A

    公开(公告)日:1977-06-07

    申请号:US680451

    申请日:1976-04-26

    IPC分类号: C04B35/14

    CPC分类号: C04B35/14

    摘要: A method is disclosed wherein high purity fused silica is produced from a liquid flowable form of a silica slurry or sol and the refractoriness of the fused silica is enhanced by homogeneously doping the silica with a selected metal oxide in conjunction with elemental silicon.

    摘要翻译: 公开了一种方法,其中由二氧化硅浆料或溶胶的液体可流动形式产生高纯度熔融二氧化硅,并且通过与所选择的金属氧化物与元素硅均匀掺杂二氧化硅来增强熔融二氧化硅的不熔性。

    Ribbon burner
    4.
    发明授权
    Ribbon burner 失效
    丝带燃烧器

    公开(公告)号:US4203553A

    公开(公告)日:1980-05-20

    申请号:US810055

    申请日:1977-06-27

    摘要: An elongated burner, which produces a stream of metal oxide soot, comprises three adjacent housings. A centrally disposed housing contains a linear array of orifices for issuing a gas-oxygen mixture to produce a linear flame. Disposed on opposite sides of the central housing are two housings having orifices for issuing into the flame two linear streams of metal halide vapor. Gaps between the central and outer housings permit air to be aspired for stabilizing the flame. Additional flame stabilization may be achieved by providing a shield along the entire perimeter of the halide vapor streams to prevent the random aspiration of air into the sides of the flame.

    摘要翻译: 产生金属氧化物烟灰的细长燃烧器包括三个相邻的壳体。 中心设置的壳体包含用于发出气体 - 氧气混合物以产生线性火焰的孔的线性阵列。 设置在中央壳体的相对侧上的两个壳体具有用于向火焰中发出两个直线的金属卤化物蒸汽流的孔口。 中心和外壳之间的间隙允许空气用于稳定火焰。 可以通过沿着卤化物蒸汽流的整个周边提供屏蔽来防止空气随机抽吸到火焰的侧面来实现额外的火焰稳定化。

    Fused quartz member for use in semiconductor manufacture
    6.
    发明授权
    Fused quartz member for use in semiconductor manufacture 失效
    用于半导体制造的熔融石英片

    公开(公告)号:US5308446A

    公开(公告)日:1994-05-03

    申请号:US535233

    申请日:1990-06-07

    摘要: A composite fused quartz material is disclosed for processing semiconductor grade silicon material in an improved manner. The modified vitreous material includes a disperse phase of fine size silicon metal particles which are distributed in preselected regions of the fused quartz matrix as a means of exercising temperature control in the various semiconductor processing operations using these fused quartz parts. Such utilization of the modified vitreous material in single crystal silicon rod growth and production of semiconductor grade silicon by diffusion doping is described. A method to produce the modified vitreous material is also disclosed.

    摘要翻译: 公开了一种用于以改进的方式处理半导体级硅材料的复合熔融石英材料。 改性玻璃质材料包括分散在熔融石英基体的预选区域中的细小尺寸硅金属颗粒的分散相,作为在使用这些熔融石英部件的各种半导体加工操作中进行温度控制的手段。 描述了通过扩散掺杂将改性玻璃质材料在单晶硅棒生长和半导体级硅生产中的利用。 还公开了生产改性玻璃质材料的方法。