Apparatus for the prevention of arcing in a CVD-TiN chamber
    2.
    发明申请
    Apparatus for the prevention of arcing in a CVD-TiN chamber 审中-公开
    用于防止CVD-TiN室中电弧放电的装置

    公开(公告)号:US20050133165A1

    公开(公告)日:2005-06-23

    申请号:US10744715

    申请日:2003-12-23

    摘要: A chemical vapor deposition apparatus for titanium-nitride application that is useful for preventing contaminants caused by arching between a substantially planar substrate and a substrate supporting apparatus during the deposition cycle. The apparatus includes a chemical vapor deposition chamber having a substrate-supporting heater. An annular housing supported by the heater, and a conductive strap that connectively secures the substrate-supporting heater to the annular housing by using holes instead of conventional slots. The conductive strap is designed as a flexure to flex with process temperature changes to improve electrical connectivity at its terminal connection and to prevent degradation. The annular housing has a top and a bottom surface and a cylindrical wall extending peripherally below the surfaces. The cylindrical wall encircles an isolator ring. The isolator ring is in contact with the bottom surface of the annular housing, and is placed and supported by at least three lift screws extending above the heater surface.

    摘要翻译: 一种用于氮化钛应用的化学气相沉积装置,其可用于在沉积循环期间用于防止在基本上平坦的基板和基板支撑装置之间的拱起引起的污染物。 该装置包括具有基板支撑加热器的化学气相沉积室。 由加热器支撑的环形壳体,以及通过使用孔代替常规槽将基板支撑加热器连接地固定到环形壳体的导电带。 导电带被设计为弯曲以随着过程温度变化而弯曲,以改善其端子连接处的电连接并防止退化。 环形壳体具有顶表面和底表面以及在表面下方周向延伸的圆柱形壁。 圆柱形壁环绕隔离环。 隔离环与环形壳体的底表面接触,并且由至少三个在加热器表面上方延伸的提升螺杆放置和支撑。

    Lockable wheel coupling
    4.
    发明授权
    Lockable wheel coupling 失效
    可锁定的联轴器

    公开(公告)号:US5408854A

    公开(公告)日:1995-04-25

    申请号:US931149

    申请日:1992-08-18

    申请人: Te-Shih Chiu

    发明人: Te-Shih Chiu

    IPC分类号: B60B27/06

    摘要: A lockable wheel coupling comprises an axle plate having a splined shaft with a central bore, a wheel having a fluted axial bore, and a generally cylindrical locking member. The wheel can be mounted on the axle plate by engaging the shaft thereon with the axial bore of the wheel. Spring biased and radially displaceable retaining lugs within the central bore are engaged with retaining recesses on the inner periphery of the axial bore via aligned apertures in the shaft upon insertion of the locking member into the central bore, to releasably secure the wheel to the axle plate. The locking member carries a cam surface for displacing the retaining lugs outwards into corresponding retaining recesses and a set of locking bolts that snap engage into an annular locking recess in the inner periphery of the central bore to retain the locking member therein. A key operated lock cylinder within the locking member retracts the bolts when rotated so that the member can be removed from the central bore. Afterwhich, the retaining lugs retract inwardly under the action of the springs and allow the removal of the wheel from the axle plate.

    摘要翻译: 可锁定的车轮联接器包括具有带有中心孔的花键轴的车轴板,具有槽形轴向孔的车轮和大致圆柱形的锁定构件。 轮可以通过将轴与轴的轴孔接合而将轮安装在轴板上。 中心孔内的弹簧偏置和径向移动的保持凸耳通过将锁定构件插入中心孔中的轴中的对准的孔与轴向孔的内周上的保持凹部接合,以将轮可释放地固定到轴板 。 锁定构件承载用于将保持凸耳向外移位到相应的保持凹部中的凸轮表面和一组锁定螺栓,其卡扣接合到中心孔的内周边中的环形锁定凹部中,以将锁定构件保持在其中。 锁定构件内的钥匙操作的锁芯在旋转时使螺栓缩回,使得构件能够从中心孔移除。 之后,保持突耳在弹簧的作用下向内缩回,并允许从轴板上拆下车轮。