Fabrication processes of a MEMS alloy probe
    5.
    发明申请
    Fabrication processes of a MEMS alloy probe 审中-公开
    MEMS合金探针的制造工艺

    公开(公告)号:US20080124828A1

    公开(公告)日:2008-05-29

    申请号:US11601753

    申请日:2006-11-20

    IPC分类号: H01L21/56

    CPC分类号: G01R1/06744 G01R3/00

    摘要: MEMS processes for fabrication of a MEMS alloy probe are revealed. Multiple layers of the MEMS alloy probe are formed on the substrate in sequences as a first surface layer, a first conductive layer, a core layer, a second conductive layer, and a second surface layer where the width of the first conductive layer is smaller than the one of first surface layer so that all the exposed edges of the first surface layer are not covered by the first conductive layer. The second surface layer is extended from the sidewalls of the core layer to the exposed edges of the first surface layer to encapsulate the core layer, the first conductive layer, and the second conductive layer. The MEMS alloy probe fabricated by the MEMS processes can eliminate the issue of oxidation.

    摘要翻译: 揭示了用于制造MEMS合金探针的MEMS工艺。 多层MEMS合金探针以顺序形成在基板上,作为第一表面层,第一导电层,芯层,第二导电层和第二表面层,其中第一导电层的宽度小于 第一表面层中的一个,使得第一表面层的所有暴露边缘都不被第一导电层覆盖。 第二表面层从芯层的侧壁延伸到第一表面层的暴露边缘,以封装芯层,第一导电层和第二导电层。 通过MEMS工艺制造的MEMS合金探针可以消除氧化问题。

    Methods for stud bump formation and apparatus for performing the same
    9.
    发明授权
    Methods for stud bump formation and apparatus for performing the same 有权
    螺栓凸块形成方法及其执行方法

    公开(公告)号:US08540136B1

    公开(公告)日:2013-09-24

    申请号:US13605403

    申请日:2012-09-06

    IPC分类号: B23K31/02 B23K37/00

    摘要: Methods for forming stud bumps and apparatuses for forming stud bumps are disclosed. According to an embodiment, a method includes clamping a wire with a clamp. The clamp includes at least two opposing plates, and at least one of the opposing plates includes a protruding feature that intersects the wire when the wire is clamped forming a first notch in the wire. The method further includes bonding the wire to a bonding surface, releasing the wire from the clamp, passing the wire a notch pitch distance through the clamp, clamping the wire with the clamp forming a second notch in the wire, and breaking the wire leaving a bonded portion of the wire on the bonding surface. The second notch is the notch pitch distance from the first notch along the wire.

    摘要翻译: 公开了用于形成柱形凸块的方法和用于形成凸块凸块的装置。 根据实施例,一种方法包括用夹具夹紧线。 所述夹具包括至少两个相对的板,并且当所述线被夹紧形成所述线中的第一凹口时,所述相对板中的至少一个包括与所述线相交的突出特征。 该方法还包括将线接合到接合表面,将线从夹具中释放出来,使线穿过钳口的间距距离通过夹具夹紧线,夹具在线中形成第二凹口,并将线断开, 接合表面上的导线的接合部分。 第二个凹口是距离第一个凹口沿导线的切口间距距离。