公开(公告)号：US06798814B2

公开(公告)日：2004-09-28

申请号：US10205567

申请日：2002-07-25

申请人： Stephan Geiger ,  Claus Strowitzki ,  Tobias Pflanz ,  Ansgar Matern ,  Thomas Petracek ,  Martin Kappels ,  Andreas Goertler

发明人： Stephan Geiger ,  Claus Strowitzki ,  Tobias Pflanz ,  Ansgar Matern ,  Thomas Petracek ,  Martin Kappels ,  Andreas Goertler

IPC分类号： H01S322

CPC分类号： G03F7/70025 ,  H01S3/0346 ,  H01S3/036

摘要： The invention relates to a gas discharge laser including a discharge tube (1), in which a gas is present and which has at least one aperture (19) through which a laser beam emerges or at which a laser beam is reflected. For withdrawing a partial amount of the gas contained in the discharge tube (1), at least one gas withdrawal point (9) is present, from which the withdrawn gas is supplied to a sintered filter (11) for being cleaned. The cleaned gas may be led in via at least one gas inlet point (27) in the zone of the aperture (19). The invention further relates to a method of operating a gas discharge laser, and the use of a sintered filter for cleaning gas withdrawn from a discharge tube (1) of a gas discharge laser.

摘要翻译： 本发明涉及一种气体放电激光器，其包括放电管（1），其中存在气体，并且具有至少一个孔（19），激光束通过该孔径或激光束被反射。 为了排出包含在排出管（1）中的气体的一部分量，存在至少一个气体取出点（9），将排出的气体从其中供给到用于清洁的烧结过滤器（11）。 清洁的气体可以经由孔（19）的区域中的至少一个气体入口点（27）被引入。 本发明还涉及一种操作气体放电激光器的方法，以及使用烧结过滤器来清洗从气体放电激光器的放电管（1）中取出的气体。

公开(公告)号：US06618421B2

公开(公告)日：2003-09-09

申请号：US09837035

申请日：2001-04-18

申请人： Palash P. Das ,  Jennan Yu ,  Stuart L. Anderson ,  Helmut Schillinger ,  Tobias Pflanz ,  Claus Strowitzki ,  Claudia A. Hartmann ,  Stephan Geiger ,  Brett D. Smith ,  William N. Partlo

发明人： Palash P. Das ,  Jennan Yu ,  Stuart L. Anderson ,  Helmut Schillinger ,  Tobias Pflanz ,  Claus Strowitzki ,  Claudia A. Hartmann ,  Stephan Geiger ,  Brett D. Smith ,  William N. Partlo

IPC分类号： H01S0322

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80

摘要： A high repetition rate, compact, modular gas discharge, ultraviolet laser. The laser is useful as a light source for very rapid inspections of wafers in an integrated circuit fabrication process. It is also useful for reticle writing at very rapid rates. A preferred embodiment operates at pulse repetition rates of 1000 to 4000 Hz and is designed for round-the-clock production line operation. This preferred embodiment comprises a pulse control unit which controls the timing of pulses to an accuracy of less than 4 nanoseconds. Preferred embodiments of this gas discharge laser can be configured to operate with a KrF gas mixture, an ArF gas mixture or an F2 gas mixture, each with an approximate buffer gas, producing 248 nm, 197 nm or 157 nm ultraviolet light pulses.

公开(公告)号：US20090294548A1

公开(公告)日：2009-12-03

申请号：US12223756

申请日：2007-02-07

申请人： Stephan Geiger ,  Karl Leu ,  Robert Dubuis

发明人： Stephan Geiger ,  Karl Leu ,  Robert Dubuis

IPC分类号： A61L9/04 ,  B32B27/02 ,  B32B3/28 ,  B32B5/02 ,  B32B27/04 ,  B01F3/04 ,  F24F6/04 ,  B01D1/00

CPC分类号： C08G73/022 ,  B32B5/022 ,  B32B5/08 ,  B32B5/26 ,  B32B2255/02 ,  B32B2255/26 ,  B32B2262/0253 ,  B32B2262/0284 ,  B32B2262/12 ,  C08J7/047 ,  C08J2479/00 ,  D06M15/53 ,  D06M15/568 ,  D06M15/61 ,  D06N3/12 ,  F24F6/02 ,  Y10T428/24446 ,  Y10T428/24694 ,  Y10T428/249921 ,  Y10T442/2672 ,  Y10T442/2861 ,  Y10T442/2918

摘要： Devices for the evaporation of liquid, in particular water, have an evaporation mat which is wetted with the liquid and on which the liquid evaporates. The evaporation mat comprises a textile fabric (1) having fibres, wherein the surface of the fibres is coated with a covering (2) which comprises a cured reaction product of a polyamine and a polyalkylene glycol etherified with end groups of the structure X—CH2[CH(OR)]wCH2—, in which structure w is an integer from 0 to 1 and, when w is 0, X is a halogen, and, when w is 1, X is halogen and R is hydrogen, or X and R together are —O—. Preferably, the evaporation mat is a consolidated nonwoven which contains fibres made of a synthetic thermoplastic which are bonded to one another by means of a thermoplastic hotmelt glue at their intersection points. The devices are used for air humidification, for concentrating solutions, or for evaporative cooling.

摘要翻译： 用于蒸发液体，特别是水的装置具有被液体润湿并且液体蒸发的蒸发垫。 蒸发垫包括具有纤维的纺织织物（1），其中纤维的表面涂覆有覆盖物（2），所述覆盖物包括聚胺和与结构X-CH 2的端基醚化的聚亚烷基二醇的固化反应产物 [CH（OR）] wCH 2 - ，其中w为0至1的整数，当w为0时，X为卤素，当w为1时，X为卤素，R为氢，X为 R一起是-O-。 优选地，蒸发垫是包含由合成热塑性材料制成的纤维的固结非织造材料，它们通过热塑性热熔胶在它们的交点处彼此粘结。 这些设备用于空气加湿，浓缩溶液或蒸发冷却。

公开(公告)号：US07149234B2

公开(公告)日：2006-12-12

申请号：US10650578

申请日：2003-08-27

申请人： Palash P. Das ,  Jennan Yu ,  Stuart L. Anderson ,  Helmut Schillinger ,  Tobias Pflanz ,  Claus Strowitzki ,  Claudia A. Hartmann ,  Stephan Geiger ,  Brett D. Smith ,  William N. Partlo

发明人： Palash P. Das ,  Jennan Yu ,  Stuart L. Anderson ,  Helmut Schillinger ,  Tobias Pflanz ,  Claus Strowitzki ,  Claudia A. Hartmann ,  Stephan Geiger ,  Brett D. Smith ,  William N. Partlo

IPC分类号： H01S3/22

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80

摘要： A high repetition rate, compact, modular gas discharge, ultraviolet laser. The laser is useful as a light source for very rapid inspections of wafers in an integrated circuit fabrication process. It is also useful for reticle writing at very rapid rates. A preferred embodiment operates at pulse repetition rates of 1000 to 4000 Hz and is designed for round-the-clock production line operation. This preferred embodiment comprises a pulse control unit which controls the timing of pulses to an accuracy of less than 4 nanoseconds. Preferred embodiments of this gas discharge laser can be configured to operate with a KrF gas mixture, an ArF gas mixture or an F2 gas mixture, each with an approximate buffer gas, producing 248 nm, 197 nm or 157 nm ultraviolet light pulses.

摘要翻译： 高重复率，紧凑型，模块化气体放电，紫外线激光。 激光器可用作用于在集成电路制造工艺中非常快速地检查晶片的光源。 它也以非常快的速度对掩模版书写有用。 优选实施例以1000至4000Hz的脉冲重复率工作，并被设计用于全天候的生产线操作。 该优选实施例包括脉冲控制单元，其将脉冲的定时控制到小于4纳秒的精度。 该气体放电激光器的优选实施例可被配置为与KrF气体混合物，ArF气体混合物或F 2气体混合物一起操作，每个气体混合物具有近似的缓冲气体，产生248nm，197nm或 157 nm紫外光脉冲。

公开(公告)号：US20060153266A1

公开(公告)日：2006-07-13

申请号：US10527705

申请日：2003-09-10

申请人： Stephan Geiger ,  Martin Paster ,  Siegfried Freer

发明人： Stephan Geiger ,  Martin Paster ,  Siegfried Freer

IPC分类号： H01S3/08

CPC分类号： H01S3/08 ,  H01S3/08072 ,  H01S3/0941 ,  Y10T70/5071

摘要： Disclosed is a diode-pumped solid-state laser having an asymmetrical optical resonator provided with at least two resonator mirrors, inside said resonator being provided at least one thermal lens having an optical refractive power D and having two principal planes respectively and said resonator being definable by the following stability criteria: 0

公开(公告)号：US6019599A

公开(公告)日：2000-02-01

申请号：US129867

申请日：1998-08-06

申请人： Alexander Volcker ,  Stephan Geiger

发明人： Alexander Volcker ,  Stephan Geiger

IPC分类号： B08B15/00 ,  A61C13/00 ,  B08B15/04 ,  B23K26/14 ,  B23K26/142 ,  A61C1/00

CPC分类号： B23K26/1476 ,  B08B15/04 ,  B23K26/142

摘要： A suction system in a laser device for the bonding of prosthesis parts in dental technology formed of an annular suction nozzle that concentrically surrounds the laser focusing unit or an annular nozzle encircling the latter for the introduction of protective inert gas. The lower rim of the laser focusing unit or the annular nozzle for the supply of protective gas projects beyond the annular suction nozzle by 10 to 25 mm.

摘要翻译： 激光装置中的用于粘合牙科技术中的假体部件的吸引系统，其由环形吸嘴形成，该环形吸嘴同心地围绕激光聚焦单元或环形喷嘴，环形喷嘴环绕该激光聚焦单元引入保护惰性气体。 激光聚焦单元的下边缘或用于供应保护气体的环形喷嘴突出超过环形吸嘴10至25mm。

公开(公告)号：US07177338B2

公开(公告)日：2007-02-13

申请号：US10527705

申请日：2003-09-10

申请人： Stephan Geiger ,  Martin Paster ,  Siegfried Freer

发明人： Stephan Geiger ,  Martin Paster ,  Siegfried Freer

IPC分类号： H01S3/09 ,  H01S3/092

CPC分类号： H01S3/08 ,  H01S3/08072 ,  H01S3/0941 ,  Y10T70/5071

摘要： Disclosed is a diode-pumped solid-state laser having an asymmetrical optical resonator provided with at least two resonator mirrors, inside said resonator being provided at least one thermal lens having an optical refractive power D and having two principal planes respectively and said resonator being definable by the following stability criteria: 0

公开(公告)号：US20060153265A1

公开(公告)日：2006-07-13

申请号：US10527704

申请日：2003-09-10

申请人： Stephan Geiger ,  Martin Paster ,  Siegfried Freer

发明人： Stephan Geiger ,  Martin Paster ,  Siegfried Freer

IPC分类号： H01S3/08

CPC分类号： H01S3/09415

摘要： Disclosed is a diode-pumped solid-state laser having at least one intracavity positioned laser crystal having at least one optical axis longitudinally to which at least one pumped-light beam emitted from at least one pumped-light source is incident on the laser crystal. The invention is distinguished by the pumped-light beam having a beam diameter corresponding to at least 1.25 times the beam cross section of a laser beam forming inside the resonator with the oscillation mode TEM00.

摘要翻译： 公开了一种二极管泵浦固体激光器，其具有至少一个腔内定位的激光晶体，其具有纵向至少一个光轴，至少一个从至少一个泵浦光源发射的泵浦光束入射到激光晶体上。 本发明的特征在于具有对应于谐振器内形成激光束的波束横截面的至少1.25倍的光束直径的泵浦光束，具有振荡模式TEM 。