Drying apparatus, drying method, substrate processing apparatus, substrate processing method, and program recording medium
    1.
    发明申请
    Drying apparatus, drying method, substrate processing apparatus, substrate processing method, and program recording medium 有权
    干燥装置,干燥方法,基板处理装置,基板处理方法和程序记录介质

    公开(公告)号:US20070113423A1

    公开(公告)日:2007-05-24

    申请号:US11594232

    申请日:2006-11-08

    IPC分类号: F26B3/00

    摘要: The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.

    摘要翻译: 本发明提供一种干燥装置,其能够通过使用干燥蒸汽令工件干燥良好。干燥装置具有控制装置,用于控制载气的供给和干燥蒸气的供给到保持工件的处理罐中。 干燥工序进行供给载气的载气供给工序以及混合流体供给工序,供给通过交替地混合载气和干燥蒸气而制备的混合流体。 执行混合流体供给步骤的总混合流体供给时间不低于执行载气供给步骤和混合流体供给步骤的总处理时间的57%。

    Substrate drying processing apparatus, method, and program recording medium
    3.
    发明授权
    Substrate drying processing apparatus, method, and program recording medium 有权
    基板干燥处理装置,方法和程序记录介质

    公开(公告)号:US07581335B2

    公开(公告)日:2009-09-01

    申请号:US11594232

    申请日:2006-11-08

    IPC分类号: F26B7/00

    摘要: The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.

    摘要翻译: 本发明提供一种干燥装置,其能够通过使用干燥蒸汽令工件干燥良好。干燥装置具有控制装置,用于控制载气的供给和干燥蒸气的供给到保持工件的处理罐中。 干燥工序进行供给载气的载气供给工序以及混合流体供给工序,供给通过交替地混合载气和干燥蒸气而制备的混合流体。 执行混合流体供给步骤的总混合流体供给时间不低于执行载气供给步骤和混合流体供给步骤的总处理时间的57%。

    Single crystalline base thin film
    4.
    发明申请
    Single crystalline base thin film 审中-公开
    单晶基底薄膜

    公开(公告)号:US20060009362A1

    公开(公告)日:2006-01-12

    申请号:US10526896

    申请日:2003-10-29

    IPC分类号: H01L39/24

    摘要: The invention relates to a technique for forming a single crystalline thin film of good quality on an underlayer. Such a technique is suitably applicable to provision of an oxide high-temperature superconductor thin film usable for a superconducting wire material, a superconducting device or the like. The single crystalline thin film formed on a substratum is made of a substance different from that of the substratum. A specific atomic layer contained in common in the substratum and the thin film is shared at an interface between the substratum and the thin film. In a region as adjacent to the interface as 100 or fewer unit cells of the thin film apart from the interface, a ratio of crystalline region having grown with an orientation of ±2 degrees or less deviation angle on the basis of a crystal orientation of the substratum is 50% or more.

    摘要翻译: 本发明涉及一种在底层上形成质量好的单晶薄膜的技术。 这种技术适用于提供可用于超导线材,超导装置等的氧化物高温超导体薄膜。 在基底上形成的单晶薄膜由与底层不同的物质制成。 在基底和薄膜中共同包含的特定原子层在基底和薄膜之间的界面处共享。 在与接口相邻的区域中,与界面相比,薄膜的单元电池为100个或更少,根据晶体取向为±2度以下的取向生长的结晶区域的比例 基质为50%以上。

    Method of forming thin film on base substance via intermediate layer
    6.
    发明申请
    Method of forming thin film on base substance via intermediate layer 审中-公开
    通过中间层在基体上形成薄膜的方法

    公开(公告)号:US20060166831A1

    公开(公告)日:2006-07-27

    申请号:US10526745

    申请日:2003-10-29

    IPC分类号: H01L39/24

    摘要: The invention relates to a technique for forming a thin film of good quality on a base substance via an intermediate layer. Such a film formation technique is suitably applicable to formation of an oxide high-temperature superconductor thin film usable for a superconducting wire material, a superconducting device or the like. In the method of forming a thin film on a base substance via an intermediate layer, an interface energy Ea at an interface A between the base substance and the intermediate layer, an interface energy Eb at an interface B between the intermediate layer and the thin film, and an interface energy Ec at an interface C between the base substance and the thin film in a state where the intermediate layer is omitted are calculated, and then a substance for the intermediate layer is selected so as to satisfy conditions of Ea

    摘要翻译: 本发明涉及通过中间层在基体上形成质量好的薄膜的技术。 这种成膜技术适用于形成可用于超导线材,超导装置等的氧化物高温超导体薄膜。 在通过中间层在基材上形成薄膜的方法中,在基材和中间层之间的界面A处的界面能量Ea,中间层和薄膜之间的界面B处的界面能量Eb ,并且计算在省略中间层的状态下在基体和薄膜之间的界面C处的界面能量Ec,然后选择中间层物质以满足Ea