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公开(公告)号：US20060051972A1
公开(公告)日：2006-03-09
申请号：US10936156
申请日：2004-09-07
Applicant: Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung Lee
Inventor： Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung Lee
IPC: H01L21/469 , C23C16/00
CPC classification number: H01L21/02271 , H01L21/02118 , H01L21/0212 , H01L21/02123 , H01L21/02126 , H01L21/02131 , H01L21/02164 , H01L21/022 , H01L21/312 , H01L21/316 , H01L21/76808 , H01L21/76811 , H01L21/76835 , Y10T29/41
Abstract: A method of forming a hybrid inorganic/organic dielectric layer on a substrate for use in an integrated circuit is provided, wherein the method includes forming a first dielectric layer on the substrate via chemical vapor deposition, and forming a second dielectric layer on the first dielectric layer via chemical vapor deposition, wherein one of the first dielectric layer and the second dielectric layer is formed from an organic dielectric material, and wherein the other of the first dielectric layer and the second dielectric layer is formed from an inorganic dielectric material.
Abstract translation: 提供了一种在用于集成电路的衬底上形成杂化无机/有机电介质层的方法，其中所述方法包括通过化学气相沉积在衬底上形成第一电介质层，并在第一电介质上形成第二电介质层 层，其中所述第一介电层和所述第二介电层中的一个由有机介电材料形成，并且其中所述第一介电层和所述第二介电层中的另一个由无机介电材料形成。
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Patent Agency Ranking
2.发明申请Method and system for forming an organic light-emitting device display having a plurality of passive polymer layers 审中-公开用于形成具有多个被动聚合物层的有机发光器件显示器的方法和系统公开(公告)号：US20050158454A1
公开(公告)日：2005-07-21
申请号：US11071668
申请日：2005-03-02
Applicant: Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
Inventor： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
CPC classification number: B29C71/02 , B05D1/60 , B05D3/0254 , B29C2071/022 , B29C2071/025 , B29C2071/027 , C08G61/02 , C08G61/025 , C08G2261/3424 , C08J5/18 , H01L21/0212 , H01L21/3127
Abstract: A method of forming an organic light-emitting display on a substrate is disclosed, wherein the method includes forming a thin film transistor portion of the device on the substrate, wherein the thin film transistor portion includes control circuitry having an array of thin film transistors; and forming a light-emitting portion of the device over the thin film transistor portion, wherein the light-emitting portion includes an organic light-emitting layer, an electrode layer in electrical communication with the organic light-emitting layer, a polymer barrier layer disposed between the organic light-emitting layer and the electrode, and at least one other passive polymer layer, wherein the barrier layer and at least one other passive polymer layer are formed from a same polymer material.
Abstract translation: 公开了一种在衬底上形成有机发光显示器的方法，其中该方法包括在衬底上形成器件的薄膜晶体管部分，其中薄膜晶体管部分包括具有薄膜晶体管阵列的控制电路; 以及在所述薄膜晶体管部分上形成所述器件的发光部分，其中所述发光部分包括有机发光层，与所述有机发光层电连通的电极层，设置有聚合物阻挡层 在有机发光层和电极之间以及至少一个其它被动聚合物层，其中阻挡层和至少一个其它被动聚合物层由相同的聚合物材料形成。
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公开(公告)号：US20050223989A1
公开(公告)日：2005-10-13
申请号：US10816179
申请日：2004-03-31
Applicant: Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
Inventor： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
CPC classification number: H01L21/0212 , B05D1/185 , B05D1/60 , B05D3/065 , B05D3/067 , B05D7/52 , H01L21/02263 , H01L21/02304 , H01L21/02337 , H01L21/02362 , H01L21/3121 , H01L21/3127
Abstract: A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing layer. The system includes a process module having a processing chamber and a monomer delivery system configured to admit a gas-phase monomer into the processing chamber for deposition of the low dielectric constant polymer layer, a post-treatment module for annealing the composite polymer dielectric film, and a silane delivery system configured to admit a vapor flow containing a silane precursor into at least one of the process module and the post-treatment module for the formation of the first silane-containing layer and the silane-containing layer.
Abstract translation: 公开了一种用于在基板上沉积复合聚合物电介质膜的系统，其中复合聚合物电介质膜包括设置在第一含硅烷层和第二含硅烷层之间的低介电常数聚合物层。 该系统包括具有处理室和单体输送系统的处理模块，该单体输送系统构造成将气相单体进入处理室以沉积低介电常数聚合物层，用于退火复合聚合物电介质膜的后处理模块， 以及硅烷输送系统，其被构造成允许含有硅烷前体的蒸汽流进入至少一个工艺模块和后处理模块中，用于形成第一含硅烷层和含硅烷层。
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公开(公告)号：US07425346B2
公开(公告)日：2008-09-16
申请号：US10936156
申请日：2004-09-07
Applicant: Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung J. Lee
Inventor： Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung J. Lee
CPC classification number: H01L21/02271 , H01L21/02118 , H01L21/0212 , H01L21/02123 , H01L21/02126 , H01L21/02131 , H01L21/02164 , H01L21/022 , H01L21/312 , H01L21/316 , H01L21/76808 , H01L21/76811 , H01L21/76835 , Y10T29/41
Abstract: A method of forming a hybrid inorganic/organic dielectric layer on a substrate for use in an integrated circuit is provided, wherein the method includes forming a first dielectric layer on the substrate via chemical vapor deposition, and forming a second dielectric layer on the first dielectric layer via chemical vapor deposition, wherein one of the first dielectric layer and the second dielectric layer is formed from an organic dielectric material, and wherein the other of the first dielectric layer and the second dielectric layer is formed from an inorganic dielectric material.
Abstract translation: 提供了一种在用于集成电路的衬底上形成杂化无机/有机电介质层的方法，其中所述方法包括通过化学气相沉积在衬底上形成第一电介质层，并在第一电介质上形成第二电介质层 层，其中所述第一介电层和所述第二介电层中的一个由有机介电材料形成，并且其中所述第一介电层和所述第二介电层中的另一个由无机介电材料形成。
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5.发明申请Organic light-emitting device display having a plurality of passive polymer layers 审中-公开具有多个被动聚合物层的有机发光器件显示器公开(公告)号：US20050174045A1
公开(公告)日：2005-08-11
申请号：US11071764
申请日：2005-03-02
Applicant: Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
Inventor： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
CPC classification number: B29C71/02 , B05D1/60 , B05D3/0254 , B29C2071/022 , B29C2071/025 , B29C2071/027 , C08G61/02 , C08G61/025 , C08G2261/3424 , C08J5/18 , H01L21/0212 , H01L21/3127
Abstract: An organic light-emitting display is disclosed, wherein the organic light-emitting display includes a thin film transistor portion including an array of thin film transistors, and a light-emitting portion including an array of organic light-emitting elements in electrical communication with the array of thin film transistors, wherein the light-emitting portion is formed from a plurality of layers of materials, and wherein the plurality of layers of materials in the light-emitting portion includes a plurality of passive polymer layers each formed from a single polymer material. Systems and methods for forming organic light-emitting displays are also disclosed.
Abstract translation: 公开了一种有机发光显示器，其中所述有机发光显示器包括薄膜晶体管部分，所述薄膜晶体管部分包括薄膜晶体管阵列，以及发光部分，包括与所述有机发光元件电连通的有机发光元件阵列 薄膜晶体管阵列，其中所述发光部分由多层材料形成，并且其中所述发光部分中的所述多个材料层包括多个被动聚合物层，每个被动聚合物层由单一聚合物材料形成 。 还公开了用于形成有机发光显示器的系统和方法。
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公开(公告)号：US07309395B2
公开(公告)日：2007-12-18
申请号：US10816179
申请日：2004-03-31
Applicant: Chung J. Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
Inventor： Chung J. Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
IPC: C23C16/52 , C23C16/04 , C23C16/22 , C23C16/452 , C23C16/48 , C23F1/00 , H01L21/306
CPC classification number: H01L21/0212 , B05D1/185 , B05D1/60 , B05D3/065 , B05D3/067 , B05D7/52 , H01L21/02263 , H01L21/02304 , H01L21/02337 , H01L21/02362 , H01L21/3121 , H01L21/3127
Abstract: A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing layer. The system includes a process module having a processing chamber and a monomer delivery system configured to admit a gas-phase monomer into the processing chamber for deposition of the low dielectric constant polymer layer, a post-treatment module for annealing the composite polymer dielectric film, and a silane delivery system configured to admit a vapor flow containing a silane precursor into at least one of the process module and the post-treatment module for the formation of the first silane-containing layer and the silane-containing layer.
Abstract translation: 公开了一种用于在基板上沉积复合聚合物电介质膜的系统，其中复合聚合物电介质膜包括设置在第一含硅烷层和第二含硅烷层之间的低介电常数聚合物层。 该系统包括具有处理室和单体输送系统的处理模块，该单体输送系统构造成将气相单体进入处理室以沉积低介电常数聚合物层，用于退火复合聚合物电介质膜的后处理模块， 以及硅烷输送系统，其被构造成允许含有硅烷前体的蒸汽流进入至少一个工艺模块和后处理模块中，用于形成第一含硅烷层和含硅烷层。
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