公开(公告)号：US4315201A

公开(公告)日：1982-02-09

申请号：US884534

申请日：1978-03-08

申请人： Akiyoshi Suzuki ,  Ryozo Hiraga ,  Ichiro Kano ,  Hideki Yoshinari ,  Masao Totsuka ,  Yuzo Kato ,  Yasuo Ogino

发明人： Akiyoshi Suzuki ,  Ryozo Hiraga ,  Ichiro Kano ,  Hideki Yoshinari ,  Masao Totsuka ,  Yuzo Kato ,  Yasuo Ogino

IPC分类号： H01L21/30 ,  G03F9/00 ,  H01L21/027 ,  H01L21/67 ,  H01L21/68 ,  G05B1/06

CPC分类号： G03F9/70

摘要： An alignment apparatus for mask and wafer each having alignment marks provided in a narrow strip like area between circuit patterns is disclosed, which mask and wafer are used in manufacturing semiconductor circuit elements. In the apparatus, the mask and wafer are scanned to obtain scan signals by means of which the amount of relative deviation between the alignment marks on mask and wafer is detected. By means of the detected signal, an alignment is effected between the mask and wafer in the apparatus. For this type of alignment apparatus, there is a problem that since the alignment marks are provided in the narrow strip like area, no coincidence between the scanning position and the strip area is attainable with pre-alignment accuracy. Improvement in the alignment apparatus according to the invention lies in that a reading of alignment marks is initiated after the coincidence is photoelectrically detected.

摘要翻译： 公开了一种用于掩模和晶片的对准装置，每个具有设置在电路图案之间的窄带状区域中的对准标记，该掩模和晶片用于制造半导体电路元件。 在该装置中，对掩模和晶片进行扫描以获得扫描信号，通过该扫描信号检测掩模和晶片上的对准标记之间的相对偏离量。 通过检测到的信号，在设备中的掩模和晶片之间进行对准。 对于这种对准装置，存在这样的问题，即由于将对准标记设置在窄条状区域中，所以在预定位精度下不能使扫描位置和条带区域之间重合。 根据本发明的对准装置的改进在于，在光电检测一致之后开始对准标记的读取。

公开(公告)号：US4278893A

公开(公告)日：1981-07-14

申请号：US14359

申请日：1979-02-23

申请人： Yuzo Kato ,  Yasuo Ogino ,  Ryozo Hiraga ,  Hideki Yoshinari ,  Masao Tozuka ,  Ichiro Kano ,  Akiyoshi Suzuki

发明人： Yuzo Kato ,  Yasuo Ogino ,  Ryozo Hiraga ,  Hideki Yoshinari ,  Masao Tozuka ,  Ichiro Kano ,  Akiyoshi Suzuki

IPC分类号： H01L21/30 ,  G03F9/00 ,  H01L21/027 ,  H01L21/67 ,  H01L21/68 ,  G01N21/86

CPC分类号： G03F9/70 ,  H01L21/681

摘要： An alignment apparatus by which two points on a first standard line on a first workpiece may be aligned in two regions having as the centers two standard points on a second standard line on a second workpiece optically opposed to the first workpiece and having predetermined areas. The two regions are diamond-shaped. By this, it is possible to reduce the alignment error of the first and second workpieces.

摘要翻译： 对准装置，其中在第一工件上的第一标准线上的两个点可以在与第一工件光学相对并具有预定区域的第二工件上的第二标准线上具有作为中心两个标准点的两个区域中对准。 这两个地区是菱形的。 由此，可以减小第一和第二工件的对准误差。

公开(公告)号：US4275306A

公开(公告)日：1981-06-23

申请号：US16165

申请日：1979-02-23

申请人： Yuzo Kato ,  Yasuo Ogino ,  Ryozo Hiraga ,  Hideki Yoshinari ,  Masao Tozuka ,  Ichiro Kano

发明人： Yuzo Kato ,  Yasuo Ogino ,  Ryozo Hiraga ,  Hideki Yoshinari ,  Masao Tozuka ,  Ichiro Kano

IPC分类号： H01L21/30 ,  G03F9/00 ,  H01L21/027 ,  H01L21/67 ,  H01L21/68 ,  G01N21/86

CPC分类号： G03F9/70 ,  H01L21/681

摘要： An alignment apparatus in which alignment marks on a mask and a wafer for producing a semiconductor circuit element are photoelectrically read and the positional deviation between the two alignment marks is detected and one of the mask and the wafer is parallel-moved in accordance with the detected amount to align the mask and wafer into a predetermined positional relation. This apparatus has the function of correcting any interval error which may be present between the alignment marks.

摘要翻译： 对其进行光电读取的掩模和用于制造半导体电路元件的晶片的对准标记，并且检测出两个对准标记之间的位置偏差，并根据检测到的掩模和晶片中的一个平行移动 将掩模和晶片对准到预定的位置关系。 该装置具有校正可能存在于对准标记之间的间隔误差的功能。

公开(公告)号：US4262208A

公开(公告)日：1981-04-14

申请号：US49980

申请日：1979-06-19

申请人： Akiyoshi Suzki ,  Ichiro Kano ,  Hideki Yoshinari ,  Masao Tozuka ,  Ryozo Hiraga ,  Yuzo Kato ,  Yasuo Ogino

发明人： Akiyoshi Suzki ,  Ichiro Kano ,  Hideki Yoshinari ,  Masao Tozuka ,  Ryozo Hiraga ,  Yuzo Kato ,  Yasuo Ogino

IPC分类号： G01B11/00 ,  G02B21/08 ,  G02B21/10 ,  G02B27/00 ,  G03F9/00 ,  H01L21/00 ,  H01L21/027 ,  H01L21/30 ,  G02B21/06

CPC分类号： G03F9/7069 ,  G02B21/082 ,  G02B21/10

摘要： This invention relates to a photo-electrical detecting apparatus for forming a dark-field image of an object on a one-dimensional image sensor and reading said image photo-electrically. The apparatus includes a telecentric objective lens, and a light source image is formed on the clear aperture plane of said lens, said image being in focus in a direction on said plane and out of focus in a perpendicular direction. A line- or band-shaped area of the object is illuminated by the light from said light source image. Thus a dark-field image of the object is formed on said one-dimensional image sensor by providing, on a plane equivalent to said aperture plane, a filter which intercepts the normal reflected light from said object and transmits the scattered light therefrom.

摘要翻译： 本发明涉及一种用于在一维图像传感器上形成物体的暗视场图像和光电读取的光电检测装置。 该装置包括远心物镜，并且在所述透镜的透明孔径平面上形成光源图像，所述图像在所述平面上的方向上聚焦，并且在垂直方向上聚焦。 物体的线条或带状区域被来自所述光源图像的光照射。 因此，在所述一维图像传感器上，通过在与所述孔径平面相当的平面上设置一个截取来自所述物体的法线反射光并从其透射散射光的滤光器，形成所述物体的暗视场图像。

公开(公告)号：US4202627A

公开(公告)日：1980-05-13

申请号：US900856

申请日：1978-04-28

申请人： Akiyoshi Suzki ,  Ichiro Kano ,  Hideki Yoshinari ,  Masao Tozuka ,  Ryozo Hiraga ,  Yuzo Kato ,  Yasuo Ogino

发明人： Akiyoshi Suzki ,  Ichiro Kano ,  Hideki Yoshinari ,  Masao Tozuka ,  Ryozo Hiraga ,  Yuzo Kato ,  Yasuo Ogino

IPC分类号： G01B11/00 ,  G01B11/02 ,  G02B27/00 ,  G02B27/46 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/70 ,  G01B11/02

摘要： An improved photoelectric detecting apparatus is disclosed in which a subject surface containing a pattern which diffracts light in a predetermined direction is scanned with spotlight and the diffracted light coming from the pattern is detected by means of photoelectric element so as to read out information of the pattern. The apparatus comprises a first photoelectric element for detecting the light diffracted in the predetermined direction, a second photoelectric element adapted for detecting light diffracted in directions other than the predetermined direction and an operational circuit for operating the signal derived from the first photoelectric element and that derived from the second one. Thus, when there is any diffractive matter such as flaw, dust and the like on the subject surface, diffracted light from the diffractive matter is detected by both the first and second photoelectric elements whereas diffracted light from the pattern is detected only by the first photoelectric element. By operating the outputs of the two photoelectric elements only the necessary information of the pattern can be read out.

摘要翻译： 公开了一种改进的光电检测装置，其中包含以预定方向衍射光的图案的被摄体表面用聚光灯扫描，并且通过光电元件检测来自图案的衍射光，以便读出图案的信息 。 该装置包括用于检测沿预定方向衍射的光的第一光电元件，适用于检测沿除了预定方向以外的方向衍射的光的第二光电元件和用于操作从第一光电元件导出的信号的操作电路， 从第二个。 因此，当在物体表面上存在诸如缺陷，灰尘等的衍射物质时，来自衍射物质的衍射光由第一和第二光电元件都被检测，而来自图案的衍射光仅由第一光电 元件。 通过操作两个光电元件的输出，只能读出图案的必要信息。

公开(公告)号：US4331616A

公开(公告)日：1982-05-25

申请号：US217123

申请日：1980-12-17

申请人： Yuzo Kato ,  Mikitoshi Kako ,  Kunio Kadowaki

发明人： Yuzo Kato ,  Mikitoshi Kako ,  Kunio Kadowaki

IPC分类号： F02M19/01 ,  F02M3/10 ,  F02M7/22 ,  F16B41/00

CPC分类号： F02M7/22 ,  F02M3/10 ,  F02M2003/105 ,  Y10S261/84 ,  Y10T137/7062 ,  Y10T137/71

摘要： An adjusting screw of a carburetor comprising a threaded portion, an enlarged head portion and a reduced diameter portion located therebetween. A thin hollow cylindrical wall is formed on a link lever of the carburetor. After the adjusting screw is screwed into the threaded hole of the hollow cylindrical wall, the reduced diameter portion of the adjusting screw is cut. Then, the top portion of the hollow cylindrical wall is bent inward for irremovably fixing the adjusting screw onto the link lever.

摘要翻译： 化油器的调节螺钉包括螺纹部分，扩大的头部和位于其间的直径减小的部分。 在化油器的连杆上形成一个薄的中空圆柱形壁。 调整螺丝拧入中空圆筒壁的螺纹孔后，调节螺丝的直径减小部分被切断。 然后，中空圆柱形壁的顶部向内弯曲，以将调节螺钉可拆卸地固定在连杆上。

公开(公告)号：US4193097A

公开(公告)日：1980-03-11

申请号：US899724

申请日：1978-04-25

申请人： Sadasuke Kurahayashi ,  Yuzo Kato ,  Shin Tsuda ,  Hakaru Muto ,  Asao Watanabe

发明人： Sadasuke Kurahayashi ,  Yuzo Kato ,  Shin Tsuda ,  Hakaru Muto ,  Asao Watanabe

IPC分类号： H04N1/411 ,  H04N7/12

CPC分类号： H04N1/411

摘要： This invention relates to the reduction in time required for signal transmission in facsimile apparatus, and consists of a transmitting apparatus adapted for eliminating the signal indicating the line thickness from the binary image signal obtained by scanning the original to be transmitted and transmitting thus obtained band-compressed transmission signal, and a receiving apparatus adapted for adding a signal approximately equal to the above-mentioned signal indicating the line thickness to the above-mentioned transmission signal thereby forming received image.

摘要翻译： 本发明涉及传真装置中信号传输所需的时间的减少，并且包括一种发射装置，其适用于从通过扫描待传送的原稿获得的二进制图像信号中消除指示线路厚度的信号， 压缩的发送信号，以及适于将与上述表示线路厚度的信号大致相等的信号添加到上述发送信号的接收装置，从而形成接收图像。

公开(公告)号：US06590274B2

公开(公告)日：2003-07-08

申请号：US09916320

申请日：2001-07-30

申请人： Takashi Ohsumi ,  Yuzo Kato

发明人： Takashi Ohsumi ,  Yuzo Kato

IPC分类号： H01L23544

CPC分类号： H01L23/544 ,  H01L24/11 ,  H01L2223/5442 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2223/5448 ,  H01L2224/05001 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05548 ,  H01L2224/1147 ,  H01L2224/13099 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14

摘要： A semiconductor wafer which is covered by an opaque resin in a dicing process includes marks formed on the semiconductor wafer, where the marks are distinguished from electrodes formed on the semiconductor wafer. In a dicing process, separating semiconductor chips from the semiconductor wafer can be precisely achieved.

摘要翻译： 在切割工艺中由不透明树脂覆盖的半导体晶片包括形成在半导体晶片上的标记，其中标记与形成在半导体晶片上的电极不同。 在切割工艺中，可以精确地实现半导体芯片与半导体晶片的分离。

公开(公告)号：US4686580A

公开(公告)日：1987-08-11

申请号：US577250

申请日：1984-02-06

申请人： Yuzo Kato ,  Hidetoshi Suzuki

发明人： Yuzo Kato ,  Hidetoshi Suzuki

IPC分类号： G06T3/40 ,  H04N1/393 ,  H04N1/04

CPC分类号： H04N1/3935 ,  G06T3/4023

摘要： An image is magnified or reduced by dividing the image into divisional images, magnifying or reducing each of the divisional images and combining the magnified or reduced divisional images. The magnification or reduction of the divisional images is carried out by inserting one pixel into, or deleting one pixel from, each of the divisional images.

摘要翻译： 通过将图像划分成分割图像来放大或缩小图像，放大或缩小每个分割图像并组合放大或缩小的分割图像。 分割图像的放大或缩小通过将每个分割图像插入一个像素或从其中删除一个像素来进行。

公开(公告)号：US4414581A

公开(公告)日：1983-11-08

申请号：US313302

申请日：1981-10-20

申请人： Yuzo Kato ,  Shunichi Ishihara ,  Yasushi Sato ,  Nobuyoshi Tanaka ,  Naoto Kawamura ,  Hisashi Nakatsui

发明人： Yuzo Kato ,  Shunichi Ishihara ,  Yasushi Sato ,  Nobuyoshi Tanaka ,  Naoto Kawamura ,  Hisashi Nakatsui

IPC分类号： H04N1/40 ,  H04N1/405

CPC分类号： H04N1/40062 ,  H04N1/4058

摘要： An image signal processing method and apparatus for practicing the method are capable of identifying and differentiating information not having tonal rendition such as characters and linetone images from information having tonal rendition such as photographs and pictures, based on the difference of signal characteristics, for example based on the fact that the spatial frequency distribution in portions of an image not having tonal rendition are in the higher frequency range compared to that of the portions of the image having tonal rendition. The method and apparatus are also capable of conducting different processes on the identified different images.

摘要翻译： 用于实施该方法的图像信号处理方法和装置能够基于信号特性的差异来识别和区分不具有诸如照片和图像的音调再现的信息的诸如字符和动画图像的音调再现的信息，例如基于 关于不具有音调再现的图像的部分中的空间频率分布与具有音调再现的图像的部分相比更高的频率范围的事实。 所述方法和装置还能够对所识别的不同图像进行不同的处理。