Substrate of a ceramic material
    3.
    发明授权
    Substrate of a ceramic material 失效
    陶瓷材料基体

    公开(公告)号:US5571757A

    公开(公告)日:1996-11-05

    申请号:US568774

    申请日:1995-12-07

    CPC分类号: C04B35/117

    摘要: The invention relates to a substrate made from a novel type of ceramic material. This material comprises 44-47 at. % Al, 31-39 at. % O, 8-13 at. % C and 8-12 at. % N. Substrates made from this material exhibit a relatively high heat conductance, a relatively great strength and their coefficient of expansion is equal to that of Si. Consequently, the substrates in accordance with the invention are very suitable for use in the Si-semiconductor technology. The main component of the ceramic material of the substrates preferably corresponds to the formula Al.sub.28 O.sub.21 C.sub.6 N.sub.6. The invention also provides methods of manufacturing substrates and other mouldings from this material.

    摘要翻译: 本发明涉及由新型陶瓷材料制成的基片。 这种材料包括44-47在。 %Al,31-39 at。 %O,8-13 at。 %C和8-12 at。 %N.由该材料制成的基板表现出相当高的导热性,相对较大的强度和它们的膨胀系数等于Si。 因此,根据本发明的衬底非常适用于Si半导体技术。 基板的陶瓷材料的主要成分优选对应于式Al 28 O 21 C 6 N 6。 本发明还提供了从该材料制造基底和其它模制品的方法。

    Method of making a substrate of a ceramic material
    6.
    发明授权
    Method of making a substrate of a ceramic material 失效
    陶瓷材料的制造方法

    公开(公告)号:US5635429A

    公开(公告)日:1997-06-03

    申请号:US682216

    申请日:1996-07-17

    CPC分类号: C04B35/117

    摘要: The invention relates to a substrate made from a novel type of ceramic material. This material comprises 44-47 at. % A1, 31-39 at. % O, 8-13 at. % C and 8-12 at. % N. Substrates made from this material exhibit a relatively high heat conductance, a relatively great strength and their coefficient of expansion is equal to that of Si. Consequently, the substrates in accordance with the invention are very suitable for use in the Si-semiconductor technology. The main component of the ceramic material of the substrates preferably corresponds to the formula Al.sub.28 O.sub.21 C.sub.6 N.sub.6. The invention also provides methods of manufacturing substrates and other mouldings from this material.

    摘要翻译: 本发明涉及由新型陶瓷材料制成的基片。 这种材料包括44-47在。 %A1,31-39在。 %O,8-13 at。 %C和8-12 at。 %N.由该材料制成的基板表现出相当高的导热性,相对较大的强度和它们的膨胀系数等于Si。 因此,根据本发明的衬底非常适用于Si半导体技术。 基板的陶瓷材料的主要成分优选对应于式Al 28 O 21 C 6 N 6。 本发明还提供了从该材料制造基底和其它模制品的方法。

    Ceramic body
    10.
    发明授权
    Ceramic body 失效
    陶瓷体

    公开(公告)号:US5411924A

    公开(公告)日:1995-05-02

    申请号:US196938

    申请日:1994-02-15

    摘要: The invention provides a ceramic body and a method of manufacturing such a body. The body is characterized by its composition, which comprises 20-30 at. % of magnesium, 20-30 at. % of silicon, 40-60 at. % of nitrogen and maximally 15 at. % of oxygen. A preferred composition corresponds to the formula MgSiN.sub.2-x O.sub.x, where x is smaller than 0.5. The manufacture of the ceramic body in accordance with the invention is simpler and cheaper than that of aluminium nitride, and a number of properties of said ceramic material are better than those of the known aluminium oxide.

    摘要翻译: 本发明提供一种陶瓷体及其制造方法。 身体的特征在于其组成,其中包括20-30 at。 %的镁,20-30在。 硅的百分比,40-60 at。 氮的百分比和最大15 at。 %的氧气。 优选的组成对应于式MgSiN 2-x O x,其中x小于0.5。 根据本发明的陶瓷体的制造比氮化铝的制造更简单和便宜,并且所述陶瓷材料的许多性能优于已知的氧化铝。