公开(公告)号：US20170110358A1

公开(公告)日：2017-04-20

申请号：US15395938

申请日：2016-12-30

Applicant: Applied Materials, Inc.

Inventor： S. M. Reza SADJADI ,  Wendell Glen BOYD, JR. ,  Vijay D. PARKHE ,  Maxim Mikhailovich NOGINOV

IPC: H01L21/683 ,  H01L21/67 ,  H01J37/32 ,  H01L27/12

CPC classification number: H01L21/28556 ,  C23C16/00 ,  G06K2009/00738 ,  H01J37/32697 ,  H01J37/32715 ,  H01J2237/334 ,  H01L21/02252 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/0262 ,  H01L21/265 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/32136 ,  H01L21/67063 ,  H01L21/67103 ,  H01L21/6833 ,  H01L27/1255 ,  H01L29/93 ,  H04N7/181 ,  H04N7/188

Abstract: Implementations described herein provide a chucking circuit for a pixilated electrostatic chuck which enables both lateral and azimuthal tuning of the RF coupling between an electrostatic chuck and a substrate placed thereon. In one embodiment, a chucking circuit for an electrostatic chuck (ESC) has one or more chucking electrodes disposed in a dielectric body of the ESC, a plurality of pixel electrodes disposed in the dielectric body, and a chucking circuit having the one or more chucking electrodes and the plurality of pixel electrodes, the chucking circuit operable to electrostatically chuck a substrate to a workpiece support surface of the ESC, the chucking circuit having a plurality of secondary circuits, wherein each secondary circuit includes at least one capacitor of a plurality of capacitors, each secondary circuit is configured to independently control an impedance between one of the pixel electrodes and a ground.

公开(公告)号：US20170004988A1

公开(公告)日：2017-01-05

申请号：US15268087

申请日：2016-09-16

Applicant: Applied Materials, Inc.

Inventor： Reza SADJADI ,  Wendell Glen BOYD, JR. ,  Vijay D. PARKHE ,  Maxim Mikhailovich NOGINOV

IPC: H01L21/683 ,  H01J37/32 ,  H01L27/12

CPC classification number: H01L21/28556 ,  C23C16/00 ,  G06K2009/00738 ,  H01J37/32697 ,  H01J37/32715 ,  H01J2237/334 ,  H01L21/02252 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/0262 ,  H01L21/265 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/32136 ,  H01L21/67063 ,  H01L21/67103 ,  H01L21/6833 ,  H01L27/1255 ,  H01L29/93 ,  H04N7/181 ,  H04N7/188

Abstract: Implementations described herein provide a chucking circuit for a pixilated electrostatic chuck which enables both lateral and azimuthal tuning of the RF coupling between an electrostatic chuck and a substrate placed thereon. In one embodiment, a chucking circuit for an electrostatic chuck (ESC) has one or more chucking electrodes disposed in a dielectric body of the ESC, a plurality of pixel electrodes disposed in the dielectric body, and a chucking circuit having the one or more chucking electrodes and the plurality of pixel electrodes, the chucking circuit operable to electrostatically chuck a substrate to a workpiece support surface of the ESC, the chucking circuit having a plurality of secondary circuits, wherein each secondary circuit includes at least one capacitor of a plurality of capacitors, each secondary circuit is configured to independently control an impedance between one of the pixel electrodes and a ground.

Abstract translation: 本文所述的实施例提供了用于像素化静电卡盘的夹持电路，其能够在静电卡盘和放置在其上的基板之间的RF耦合的侧向和方位调谐。 在一个实施例中，用于静电卡盘（ESC）的夹紧电路具有设置在ESC的电介质体中的一个或多个夹持电极，设置在电介质体中的多个像素电极以及具有一个或多个卡盘 电极和多个像素电极，所述夹持电路可操作以将基板静电吸附到ESC的工件支撑表面，所述夹持电路具有多个次级电路，其中每个次级电路包括多个电容器中的至少一个电容器 每个次级电路被配置为独立地控制像素电极之一和地之间的阻抗。

公开(公告)号：US20160163511A1

公开(公告)日：2016-06-09

申请号：US14829662

申请日：2015-08-19

Applicant: Applied Materials, Inc.

Inventor： Andrew NGUYEN ,  Tza-Jing GUNG ,  Haitao WANG ,  Maxim Mikhailovich NOGINOV ,  Reza SADJADI ,  Chunlei ZHANG ,  Xue YANG

IPC: H01J37/32 ,  H01L21/3065 ,  C23C14/22 ,  H01L21/02 ,  C23C16/50 ,  C23C16/455

CPC classification number: H01L21/3065 ,  C23C14/22 ,  C23C16/45565 ,  C23C16/46 ,  C23C16/50 ,  C23C16/505 ,  H01J37/32082 ,  H01J37/32669 ,  H01L21/02274

Abstract: Implementations described herein provide a magnetic ring which enables both lateral and azimuthal tuning of the plasma in a processing chamber. In one embodiment, the magnetic ring has a body. The body has a top surface and a bottom surface, and a plurality of magnets are disposed on the bottom surface of the body.

Abstract translation: 本文所述的实施方案提供一种能够在处理室中进行等离子体的横向和方位调谐的磁环。 在一个实施例中，磁环具有主体。 主体具有顶表面和底表面，并且多个磁体设置在主体的底表面上。