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1.发明申请公开(公告)号：US20120111838A1
公开(公告)日：2012-05-10
申请号：US13347618
申请日：2012-01-10
IPC分类号： H01L21/324 , B23K26/08 , B23K26/12 , B23K26/00
CPC分类号： B23K26/0608 , B23K26/073 , B23K26/082 , B23K26/083 , H01L21/268
摘要： Provided are apparatuses and method for the thermal processing of a substrate surface, e.g., controlled laser thermal annealing (LTA) of substrates. The invention typically involves irradiating the substrate surface with first and second images to process regions of the substrate surface at a substantially uniform peak processing temperature along a scan path. A first image may serve to effect spike annealing of the substrates while another may be used to provide auxiliary heat treatment to the substrates before and/or after the spike annealing. Control over the temperature profile of the prespike and/or postspike may also reduce stresses and strains generated in the wafers. Also provided are microelectronic devices formed using the inventive apparatuses and methods.
摘要翻译： 提供了用于衬底表面的热处理的装置和方法，例如衬底的受控激光热退火（LTA）。 本发明通常包括用基板表面照射第一和第二图像，以沿着扫描路径的基本均匀的峰值处理温度处理基板表面的区域。 第一图像可以用于实现基板的尖峰退火，而另一个可以用于在尖峰退火之前和/或之后向基板提供辅助热处理。 控制预压和/或后刺的温度分布也可以减少在晶片中产生的应力和应变。 还提供了使用本发明的装置和方法形成的微电子器件。
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2.发明申请Thermal Processing of Substrates with Pre- and Post-Spike Temperature Control 审中-公开具有前后穗温度控制的基板的热处理公开(公告)号：US20110298093A1
公开(公告)日：2011-12-08
申请号：US13210310
申请日：2011-08-15
IPC分类号： H01L21/324 , H01L29/02
CPC分类号： B23K26/0608 , B23K26/073 , B23K26/082 , B23K26/083 , H01L21/268
摘要： Provided are apparatuses and method for the thermal processing of a substrate surface, e.g., controlled laser thermal annealing (LTA) of substrates. The invention typically involves irradiating the substrate surface with first and second images to process regions of the substrate surface at a substantially uniform peak processing temperature along a scan path. A first image may serve to effect spike annealing of the substrates while another may be used to provide auxiliary heat treatment to the substrates before and/or after the spike annealing. Control over the temperature profile of the prespike and/or postspike may also reduce stresses and strains generated in the wafers. Also provided are microelectronic devices formed using the inventive apparatuses and methods.
摘要翻译： 提供了用于衬底表面的热处理的装置和方法，例如衬底的受控激光热退火（LTA）。 本发明通常包括用基板表面照射第一和第二图像，以沿着扫描路径的基本均匀的峰值处理温度处理基板表面的区域。 第一图像可以用于实现基板的尖峰退火，而另一个可以用于在尖峰退火之前和/或之后向基板提供辅助热处理。 控制预压和/或后刺的温度分布也可以减少在晶片中产生的应力和应变。 还提供了使用本发明的装置和方法形成的微电子器件。
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3.发明申请Thermal processing of substrates with pre- and post-spike temperature control 审中-公开具有前和后峰值温度控制的基板的热处理公开(公告)号：US20100084744A1
公开(公告)日：2010-04-08
申请号：US12287085
申请日：2008-10-06
CPC分类号： B23K26/0608 , B23K26/073 , B23K26/082 , B23K26/083 , H01L21/268
摘要： Provided are apparatuses and method for the thermal processing of a substrate surface, e.g., controlled laser thermal annealing (LTA) of substrates. The invention typically involves irradiating the substrate surface with first and second images to process regions of the substrate surface at a substantially uniform peak processing temperature along a scan path. A first image may serve to effect spike annealing of the substrates while another may be used to provide auxiliary heat treatment to the substrates before and/or after the spike annealing. Control over the temperature profile of the prespike and/or postspike may also reduce stresses and strains generated in the wafers. Also provided are microelectronic devices formed using the inventive apparatuses and methods.
摘要翻译： 提供了用于衬底表面的热处理的装置和方法，例如衬底的受控激光热退火（LTA）。 本发明通常包括用基板表面照射第一和第二图像，以沿着扫描路径的基本均匀的峰值处理温度处理基板表面的区域。 第一图像可以用于实现基板的尖峰退火，而另一个可以用于在尖峰退火之前和/或之后向基板提供辅助热处理。 控制预压和/或后刺的温度分布也可以减少在晶片中产生的应力和应变。 还提供了使用本发明的装置和方法形成的微电子器件。
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4.发明授权Apparatus for reducing spacing of beams delivered by stacked diode-laser bars 失效用于减少由堆叠的二极管激光棒传递的光束的间隔的装置公开(公告)号：US06993059B2
公开(公告)日：2006-01-31
申请号：US10458833
申请日：2003-06-11
IPC分类号： H01S3/08
CPC分类号： G02B19/0057 , G02B19/0028 , G02B27/0977 , G02B27/283 , H01S3/005 , H01S5/4012 , H01S5/405
摘要： Apparatus for reducing spacing between a plurality of parallel, spaced apart plane-polarized laser-radiation beams delivered by a stack of laser-diode bars includes a ninety degree polarization rotator, and a compound prism including a total reflecting surface an internal polarization-selective surface parallel to each other. The polarization-selective surface is highly transmissive for radiation plane-polarized in one polarization orientation and highly reflective for radiation plane-polarized at ninety degrees to that orientation. The polarization rotator rotates the polarization of a portion of the beams. The beams are transmitted through the compound prism with the portion of polarization-rotated beams following a different path through the prism from that of the beams that are not polarization rotated. The beams exit the prism with spacing therebetween one-half of the spacing between beams entering the prism.
摘要翻译： 用于减少由一堆激光二极管条输送的多个平行，间隔开的平面偏振的激光辐射束之间的间隔的装置包括九十度偏振旋转器，以及包括全反射表面的复合棱镜，内部偏振选择表面 彼此平行。 偏振选择性表面对于在一个偏振取向中的辐射平面偏振是高度透射的，并且对于朝向该取向的九十度的辐射平面极化是高反射性的。 偏振旋转器旋转一部分光束的偏振。 光束通过复合棱镜透射，偏振旋转光束的部分跟随着不是偏振旋转的光束穿过棱镜的不同路径。 光束离开棱镜之间的间隔，进入棱镜的光束之间的间隔的一半。
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公开(公告)号：US07355800B2
公开(公告)日：2008-04-08
申请号：US11052240
申请日：2005-02-07
CPC分类号： H01S5/4025 , G02B6/4218 , G02B19/0014 , G02B19/0057 , G02B27/0966 , G02B27/0994 , H01S5/005 , H01S5/4012
摘要： A line-of-light projecting module is illuminated by a diode-laser bar and includes light-pipe for homogenizing light from the diode-laser bar in the slow-axis. A shaping optics assembly directs the light emitted by the diode-laser bar into the entrance end of the light-pipe as a diverging beam in the slow-axis and as a collimated beam in the fast-axis. The light propagates through the light-pipe unguided in the fast axis. The light is guided by the light-pipe in the slow-axis, and homogenized in the slow-axis by making multiple reflections from walls of the light-pipe. An anamorphic projection optics assembly projects the light from the exit end of the light-pipe and focuses the light to form the line-of-light.
摘要翻译： 光线投射模块由二极管激光棒照亮，并包括用于使来自二极管激光条的慢光轴均匀化的光管。 成形光学组件将二极管激光棒发射的光引导到光管的入口端，作为慢轴中的发散光束，并将其作为快轴中的准直光束。 光在快轴上无引导的光管传播。 光由光轴在慢轴中引导，并通过从光管的壁进行多次反射，在慢轴上均匀化。 变形投影光学组件投射来自光管的出口端的光并聚焦光以形成光线。
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6.发明授权Method and apparatus for coupling radiation from a stack of diode-laser bars into a single-core optical fiber 失效用于将来自二极管激光棒的叠层的辐射耦合到单芯光纤中的方法和装置公开(公告)号：US07010194B2
公开(公告)日：2006-03-07
申请号：US10266066
申请日：2002-10-07
IPC分类号： G02B6/34
CPC分类号： G02B6/4214 , G02B6/4206 , G02B6/4208 , G02B6/425 , G02B27/283 , H01S5/4012
摘要： A method of coupling laser-radiation into an optical fiber includes providing a stack of diode-laser bars and first and second parallel mirrors, the second mirror is selectively reflective only for one polarization plane of the laser-radiation. Each of the diode-laser bars includes at least two spaced-apart diode-laser emitters each emitting a plane-polarized beam of laser-radiation having a fast axis and a slow axis. The laser-radiation beams are collimated in the fast axis by a cylindrical lens located in front of each bar. In one arrangement the polarization orientation of one collimated beam from each diode-laser is rotated by 90 degrees and transmitted through the selectively-reflective mirror. The other collimated beam from each diode-laser bar is reflected onto the selectively-reflective mirror by the first mirror and reflected from the selectively-reflective mirror such that the reflected beam combines with the transmitted beam to form a combined beam. As many combined beams are formed as there are diode-laser bars in the stack. These combined beams are focused into an entrance face of the optical fiber.
摘要翻译： 将激光辐射耦合到光纤中的方法包括提供二极管激光棒和第一和第二平行反射镜的叠层，第二反射镜仅针对激光辐射的一个偏振平面进行选择性反射。 每个二极管激光棒包括至少两个间隔开的二极管激光发射器，每个发射激光辐射的平面偏振光束具有快轴和慢轴。 激光辐射束通过位于每个杆前方的柱面透镜在快轴中准直。 在一种布置中，来自每个二极管激光器的一个准直光束的偏振取向被旋转90度并透过选择性反射镜。 来自每个二极管激光条的另一个准直束通过第一反射镜反射到选择性反射镜上并从选择反射镜反射，使得反射光束与透射光束组合以形成组合光束。 由于堆叠中存在二极管激光条，因此形成多个组合光束。 这些组合光束聚焦在光纤的入射面上。
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公开(公告)号：US07272956B1
公开(公告)日：2007-09-25
申请号：US10902976
申请日：2004-07-30
IPC分类号： C03B37/028
CPC分类号： G02B6/2835 , G02B6/02023 , H01S3/094007 , H01S3/094019
摘要： A multimode to low-mode optical fiber is constructed by forming a plurality of multimode optical fibers into a fiber bundle. The bundle is then selectively heated and drawn to form a bi-tapered fiber bundle having a central straight portion in which the multimode fibers are fused into a single length of fiber. During the drawing step, measures are taken to provide an aperture extending through the bi-tapered bundle, including the single straight portion of the bundle. An optical fiber having a low-mode or single-mode core is inserted through the aperture into the straight section of the bi-tapered bundle. The bi-tapered bundle and the low-mode core fiber are heated to a temperature at which cladding of the low-mode core fiber fuses to the straight portion of the bi-tapered bundle. The bi-tapered bundle is then cleaved in the straight portion to provide the multimode to low-mode optical fiber combiner. In one example, the multimode fiber bundle is formed around a metal wire before the drawing operation. After the drawing operation the wire is extracted from the bi-tapered bundle leaving the aperture in the bi-tapered bundle.
摘要翻译： 通过将多个多模光纤形成为纤维束来构造多模至低模式光纤。 然后选择性地加热和拉伸束以形成具有中心直线部分的双锥形纤维束，其中多模纤维熔合成单长度的纤维。 在拉伸步骤中，采取措施来提供延伸穿过双锥形束的孔，包括束的单个直的部分。 具有低模或单模芯的光纤通过该孔插入双锥形束的直线部分。 将双锥形束和低模芯纤维加热到低模芯纤维的包层熔合到双锥形束的直线部分的温度。 然后将双锥形束在直线部分切割，以将多模式提供给低模式光纤组合器。 在一个示例中，在牵引操作之前，多模纤维束围绕金属线形成。 在绘图操作之后，将线从双锥形束提取出，留下双锥形束中的孔。
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公开(公告)号：US07139300B2
公开(公告)日：2006-11-21
申请号：US10643621
申请日：2003-08-19
IPC分类号： H01S5/00
CPC分类号： B82Y20/00 , H01S5/0425 , H01S5/0655 , H01S5/1014 , H01S5/1082 , H01S5/162 , H01S5/3211 , H01S5/3434 , H01S5/4031 , H01S2304/00
摘要： A wide-stripe diode-laser includes a lower cladding region, a lower waveguide region, an active region, an upper waveguide region, and an upper cladding region all comprising semiconductor layers epitaxially grown on a semiconductor substrate. An elongated rectangular electrode on the upper cladding layer defines a stripe or pumped section. Adjacent the electrode is an unpumped section in which at least the quantum-well layer has been treated to cause the active region to be disordered. In this unpumped section, at least one area of the area is etched to a depth equal to or less than the thickness of the cladding region. The etched area provides a diverging lens effect in the waveguide region. The diverging lens effect expands the fundamental mode of the laser in the stripe to a width sufficient to improve single mode performance.
摘要翻译： 宽条形二极管激光器包括全部包括在半导体衬底上外延生长的半导体层的下包层区域，下波导区域，有源区域，上波导区域和上覆层区域。 上包层上的细长矩形电极限定条状或泵送部分。 与电极相邻的是未冲洗的部分，其中至少已经处理了量子阱层以使有源区域无序。 在该未抽出部分中，该区域的至少一个区域被蚀刻到等于或小于包层区域的厚度的深度。 蚀刻区域在波导区域中提供发散透镜效应。 发散透镜效应将条纹中的激光器的基本模式扩展到足以改善单模性能的宽度。
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公开(公告)号：US06947466B2
公开(公告)日：2005-09-20
申请号：US10767420
申请日：2004-01-29
IPC分类号： H01L21/00 , H01S3/091 , H01S3/094 , H01S5/00 , H01S5/026 , H01S5/028 , H01S5/04 , H01S5/042 , H01S5/223 , H01S5/40
CPC分类号： H01S5/041 , H01S5/026 , H01S5/028 , H01S5/0287 , H01S5/0288 , H01S5/0425 , H01S5/2231 , H01S5/4031 , H01S2304/00
摘要： A multilayer semiconductor laser includes a substrate on which is formed a semiconductor multilayer heterostructure divided into a plurality of electrically pumped regions and an elongated optically pumped region. The electrically pumped regions generate and delivering optical pump radiation laterally into the elongated optically pumped region. Output radiation is generated and delivered by the optically pumped region.
摘要翻译： 多层半导体激光器包括在其上形成分为多个电泵浦区域和细长的光泵浦区域的半导体多层异质结构的衬底。 电泵浦区域产生并将光泵浦辐射横向地输送到细长的光泵浦区域中。 输出辐射由光泵浦区域产生和传送。
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公开(公告)号：US06919990B2
公开(公告)日：2005-07-19
申请号：US10258995
申请日：2001-04-18
CPC分类号： G02B27/143 , G02B27/1026 , G02B27/126 , G02B27/144 , H04N5/7416 , H04N5/7458 , H04N9/3105
摘要： A display system is disclosed that includes a light source, an integrator rod receiving a light beam from the light source and producing an integrated light beam, a beam splitting device splitting the integrated light beam into at least a first cone of light and a second cone of light, the cones of light having complementary intensity distributions, and at least a first spatial light modulator and a second spatial light modulator, wherein the first spatial light modulator is capable of selectively reflecting portions of the first cone of light in an ON direction and the second spatial light modulator is capable of selectively reflecting portions of the second cone of light in an ON direction. The display system further includes a combining device for combining the selectively reflected portions of the cones of light in the ON direction and projection optics for projecting the combined reflected cones of light.
摘要翻译： 公开了一种显示系统，其包括光源，接收来自光源的光束并产生集成光束的积分器杆，将所述集成光束分成至少第一光锥和第二锥体的分束装置 的光，具有互补强度分布的光的锥形，以及至少第一空间光调制器和第二空间光调制器，其中第一空间光调制器能够选择性地反射第一锥形光在ON方向上的部分， 第二空间光调制器能够选择性地反射第二光锥的部分在ON方向上。 该显示系统还包括一个组合装置，用于将ON方向上的锥形光纤的选择反射部分与用于投射组合的反射光锥的投影光学装置组合。
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