Tunable optical phase filter
    4.
    发明授权

    公开(公告)号:US09716368B2

    公开(公告)日:2017-07-25

    申请号:US14956888

    申请日:2015-12-02

    IPC分类号: H01S5/00 H01S5/183 H01S5/343

    摘要: An embodiment provides a 850 nm VCSEL transmitter that includes an active region having: one or more quantum wells having InGaAs material; and two or more quantum well barriers having AlGaAs or GaAsP materials adjacent to the one or more quantum wells. An in-phase or anti-phase, step or ring surface relief structure depth control is made on either (i) the topmost GaAs surface/contact layers by either dry or wet etching, or (ii) with the help of PECVD made thin SiN layer made on GaAs layer with wet etching for tunable static and dynamic characteristics such as output power, slope efficiency, and resonance oscillation bandwidth, photon lifetime through its damping, rise/fall times of eye-opening, over shooting, and jitter respectively. Moreover, anti-phase surface relief structure diameter control can be made on the topmost GaAs step surface/contact, or SiN ring layers for filtering of higher order modes and reduction of spectral line width.

    TUNABLE OPTICAL PHASE FILTER
    7.
    发明申请
    TUNABLE OPTICAL PHASE FILTER 有权
    可逆光学滤波器

    公开(公告)号:US20170005455A1

    公开(公告)日:2017-01-05

    申请号:US14956888

    申请日:2015-12-02

    摘要: An embodiment provides a 850 nm VCSEL transmitter that includes an active region having: one or more quantum wells having InGaAs material; and two or more quantum well barriers having AlGaAs or GaAsP materials adjacent to the one or more quantum wells. An in-phase or anti-phase, step or ring surface relief structure depth control is made on either (i) the topmost GaAs surface/contact layers by either dry or wet etching, or (ii) with the help of PECVD made thin SiN layer made on GaAs layer with wet etching for tunable static and dynamic characteristics such as output power, slope efficiency, and resonance oscillation bandwidth, photon lifetime through its damping, rise/fall times of eye-opening, over shooting, and jitter respectively. Moreover, anti-phase surface relief structure diameter control can be made on the topmost GaAs step surface/contact, or SiN ring layers for filtering of higher order modes and reduction of spectral line width.

    摘要翻译: 实施例提供一种850nm VCSEL发射器,其包括有源区域,该有源区域具有:具有InGaAs材料的一个或多个量子阱; 以及具有与一个或多个量子阱相邻的AlGaAs或GaAsP材料的两个或更多个量子阱屏障。 通过干蚀刻或湿蚀刻,在(i)最上面的GaAs表面/接触层上进行同相或反相,阶梯或环表面浮雕结构深度控制,或(ii)借助于PECVD制成的薄SiN 分别通过湿法刻蚀制成GaAs层,可调谐静态和动态特性如输出功率,斜率效率和谐振振荡带宽,光子寿命通过其阻尼,睁眼上升/下降时间,过拍和抖动。 此外,可以在最高的GaAs台阶表面/接触上进行抗相表面浮雕结构直径控制,或者可以对SiN环层进行高阶模式的滤波和降低谱线宽度。