Plasma chemical vapor deposition device capable of suppressing
generation of polysilane powder
    1.
    发明授权
    Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder 失效
    能够抑制聚硅烷粉末产生的等离子体化学气相沉积装置

    公开(公告)号:US5487786A

    公开(公告)日:1996-01-30

    申请号:US363226

    申请日:1994-12-22

    摘要: There is provided a plasma CVD device which can deposit a high-quality a-Si:H or other film at a high rate, and which can improve production efficiency thereof remarkably. The CVD device has a substrate holding electrode and a high frequency application electrode arranged opposite to and parallel to a substrate held by the substrate holding electrode. A material gas introduced between the substrate holding electrode and the high frequency application electrode is decomposed by glow discharge, so that a thin film is deposited on the heated substrate. A first electrode heater for heating a peripheral portion of the high frequency application electrode is installed along the peripheral portion of the high frequency application electrode. A second electrode heater for heating the peripheral portion of the high frequency application electrode and a surface of the high frequency application electrode opposite to its surface facing the substrate is composed of a bottom portion and a side portion provided uprightly along a peripheral edge of the bottom portion and formed in a concave shape to surround the high frequency application electrode with a spacing therebetween.

    摘要翻译: 提供了能够以高速率沉积高质量的a-Si:H或其它膜的等离子体CVD装置,并且可以显着提高其生产效率。 CVD装置具有基板保持电极和与由基板保持电极保持的基板相对并平行的高频施加电极。 在基板保持电极和高频施加电极之间引入的原料气体通过辉光放电分解,使得在被加热的基板上沉积薄膜。 用于加热高频施加电极的周边部分的第一电极加热器沿着高频施加电极的周边部分安装。 用于加热高频施加电极的周边部分的第二电极加热器和与其面向基板的表面相对的高频施加电极的表面由底部和沿着底部的周边垂直设置的侧部分组成 并且形成为凹形,以围绕高频施加电极间隔开。

    Method for forming a thin semiconductor film and a plasma CVD apparatus
to be used in the method
    2.
    发明授权
    Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method 失效
    用于形成薄半导体膜的方法和用于该方法的等离子体CVD装置

    公开(公告)号:US6009828A

    公开(公告)日:2000-01-04

    申请号:US783283

    申请日:1997-01-10

    摘要: A method for producing a thin semiconductor film according to the present invention includes the steps of: placing a group-IV compound or a derivative thereof in a plasma state; decomposing the group-IV compound or the derivative thereof into active species; and depositing the active species on a substrate, wherein energy for generating plasma is intermittently supplied at a supply time interval which is equal to or less than a reciprocal of {(secondary reaction rate constant of a source gas reacting with active species other than long-life active species within the plasma).times.(number of source gas molecules)}.

    摘要翻译: 根据本发明的薄半导体膜的制造方法包括以下步骤:将IV族化合物或其衍生物置于等离子体状态; 将IV族化合物或其衍生物分解成活性物质; 并且将活性物质沉积在基板上,其中用于产生等离子体的能量间歇地以供给时间间隔供给,所述供给时间间隔等于或小于{(除了长时间活性物质以外的活性物质反应的源气体的二次反应速率常数) 血浆中的生命活性物质)x(源气体分子数)}。

    Method for forming a thin semiconductor film and a plasma CVD apparatus
to be used in the method
    3.
    发明授权
    Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method 失效
    用于形成薄半导体膜的方法和用于该方法的等离子体CVD装置

    公开(公告)号:US5618758A

    公开(公告)日:1997-04-08

    申请号:US601990

    申请日:1996-02-15

    摘要: A method for producing a thin semiconductor film according to the present invention includes the steps of: placing a group-IV compound or a derivative thereof in a plasma state; decomposing the group-IV compound or the derivative thereof into active species; and depositing the active species on a substrate, wherein energy for generating plasma is intermittently supplied at a supply time interval which is equal to or less than a reciprocal of {(secondary reaction rate constant of a source gas reacting with active species other than long-life active species within the plasma).times.(number of source gas molecules)}.

    摘要翻译: 根据本发明的薄半导体膜的制造方法包括以下步骤:将IV族化合物或其衍生物置于等离子体状态; 将IV族化合物或其衍生物分解成活性物质; 并且将活性物质沉积在基板上,其中用于产生等离子体的能量间歇地以供给时间间隔供给,所述供给时间间隔等于或小于{(除了长时间活性物质以外的活性物质反应的源气体的二次反应速率常数) 血浆中的生命活性物质)x(源气体分子数)}。

    Electric automobile
    4.
    发明授权
    Electric automobile 失效
    电动汽车

    公开(公告)号:US07939210B2

    公开(公告)日:2011-05-10

    申请号:US10594702

    申请日:2005-03-30

    IPC分类号: H01M8/06 H01M8/04 B60L11/18

    摘要: An electric automobile includes a fuel cell for power generation by supply of hydrogen and oxidizing agent, a hydrogen generating device for generating a gas containing hydrogen to be supplied to the fuel cell, and a motor driven by electricity generated by the fuel cell. The hydrogen generating device generates gas containing hydrogen by decomposing an organic compound-containing fuel, and includes a proton conductive partition membrane, a fuel electrode provided on one surface of the partition membrane to directly generate the gas containing hydrogen, a device for supplying, to the fuel electrode, water and organic compound-containing fuel capable of producing a proton as a result of electrochemical oxidization which can pass through the partition membrane, an oxidizing electrode provided on the other surface of the partition membrane, a device for supplying the oxidizing agent to the oxidizing electrode, and a device for generating and collecting the gas containing hydrogen.

    摘要翻译: 电动汽车包括用于通过供应氢气和氧化剂发电的燃料电池,用于产生供给燃料电池的含氢气体的氢产生装置和由燃料电池产生的电驱动的电动机。 氢发生装置通过分解含有机化合物的燃料来产生含氢气体,并且包括质子传导隔膜,设置在分隔膜的一个表面上的燃料电极,以直接产生含氢气体的装置, 能够通过隔离膜的电化学氧化产生质子的燃料电极,水和含有机化合物的燃料,设置在分隔膜的另一个表面上的氧化电极,用于供给氧化剂的装置 到氧化电极,以及用于产生和收集含氢气体的装置。

    Hydrogen supply system
    5.
    发明授权
    Hydrogen supply system 失效
    供氢系统

    公开(公告)号:US07910252B2

    公开(公告)日:2011-03-22

    申请号:US10594711

    申请日:2005-03-30

    IPC分类号: H01M8/10 H01M8/06 C25B9/00

    摘要: A hydrogen supply system includes at least a hydrogen supply device for supplying hydrogen to a hydrogen storing device, and a hydrogen generating device producing hydrogen containing gas to be supplied to the hydrogen supply device. The hydrogen generating device produces the hydrogen containing gas by decomposing a fuel containing an organic compound, and includes a partition membrane, a fuel electrode provided on one surface of the partition membrane for generating hydrogen containing gas, a device for supplying a fuel containing the organic compound and water to the fuel electrode, an oxidizing electrode provided on the other surface of the partition membrane, a device for supplying an oxidizing agent to the oxidizing electrode, and a device for collecting the hydrogen containing gas directly from the fuel electrode.

    摘要翻译: 氢供给系统至少包括用于向氢存储装置供给氢的氢供给装置和产生供给氢供给装置的含氢气体的氢生成装置。 氢产生装置通过分解含有有机化合物的燃料来产生含氢气体,并且包括分隔膜,设置在用于产生含氢气体的分隔膜的一个表面上的燃料电极,用于供给含有有机化合物的燃料的装置 化合物和水到燃料电极,设置在分隔膜的另一个表面上的氧化电极,向氧化电极供应氧化剂的装置,以及用于从燃料电极直接收集含氢气体的装置。

    NOVEL CARBOXYLIC ACID ESTER, USE OF THE SAME, AND METHOD FOR PRODUCING THE SAME
    6.
    发明申请
    NOVEL CARBOXYLIC ACID ESTER, USE OF THE SAME, AND METHOD FOR PRODUCING THE SAME 有权
    新型羧酸酯,其用途及其生产方法

    公开(公告)号:US20100234634A1

    公开(公告)日:2010-09-16

    申请号:US12734606

    申请日:2008-11-06

    IPC分类号: C07C69/63 C07C41/22 C07C68/06

    摘要: The present invention provides a process for producing a novel compound, i.e., α-chloromethoxycarboxylic acid ester represented by General Formula (1): (CF3)2C(OCH2Cl)COOR, wherein R is a hydrocarbon group which may be substituted with at least one atom selected from the group consisting of halogen, oxygen, nitrogen, and sulfur atoms, comprising reacting an α-methoxycarboxylic acid ester represented by General Formula (2): (CF3)2C(OCH3)COOR, wherein R is as defined above, with molecular chlorine; and a process for producing 1,1,1,3,3,3-hexafluoroisopropyl fluoromethyl ether represented by a chemical formula (CF3)2CH(OCH2F), comprising fluorinating and decarboxylating the α-chloromethoxycarboxylic acid ester.According to the present invention, 1,1,1,3,3,3-hexafluoroisopropyl fluoromethyl ether (sevoflurane), which is known as a compound having an anesthetic property, can be produced efficiently and at a low cost.

    摘要翻译: 本发明提供一种新型化合物的制备方法,即由通式(1)表示的α-氯甲氧基羧酸酯:(CF 3)2 C(OCH 2 Cl)COOR,其中R为可被至少一个 包括将由通式(2)表示的α-甲氧基羧酸酯:(CF 3)2 C(OCH 3)COOR(其中R如上所定义)与由卤素,氧,氮和硫原子组成的组中的原子与 分子氯; 以及由化学式(CF 3)2 CH(OCH 2 F)表示的1,1,1,3,3,3-六氟异丙基氟甲基醚的制备方法,其包括使α-氯甲氧基羧酸酯氟化和脱羧。 根据本发明,可以有效且低成本地制备作为具有麻醉性的化合物的1,1,1,3,3,3-六氟异丙基氟甲基醚(七氟烷)。

    Hydrogen Generating Device as Well as Fuel Cell Power Generating Device, Electric Automobile, Sumbergible Ship and Hydrogen Supply System Using the Same

    公开(公告)号:US20090123801A1

    公开(公告)日:2009-05-14

    申请号:US11921471

    申请日:2006-06-02

    IPC分类号: H01M8/18

    摘要: A hydrogen generating device capable of generating a gas containing hydrogen at a low temperature, as well as a fuel cell power generating device, an electric automobile, a submergible ship and a hydrogen supply system using the hydrogen generating device are provided.A hydrogen generating device (10) for generating a gas containing hydrogen by decomposing a fuel containing an organic compound, includes: a partition membrane (11); a fuel electrode (12) provided on one surface of the partition membrane (11); a means for supplying a fuel containing organic compound and water to the fuel electrode (12); an oxidizing electrode (14) provided on the other surface of the partition membrane (11); a means for supplying an oxidizing agent to the oxidizing electrode (14); and a means for generating and collecting the gas containing hydrogen from the fuel electrode, and a region of insufficient oxidizing agent supply is provided on the oxidizing electrode side so that a reaction (C) 6H++6e−→3H2 may occur on the fuel electrode side and a reaction (D) CH3OH+H2O→6H++6e−+CO2 may occur on the oxidizing electrode side. The region of insufficient oxidizing agent supply can be provided by performing masking (14M) on part of the gas diffusion layer of the oxidizing electrode (14). Moreover, by connecting the hydrogen generating device (10) to a fuel cell and connecting a fuel cell power generating device for supplying a gas containing hydrogen generated by the hydrogen generating device (10) to the fuel cell, an electric automobile and a submergible ship incorporating the fuel cell power generating device, and the hydrogen generating device (10) to a hydrogen storage means, a hydrogen supply system can be configured for supplying a gas containing hydrogen generated by the hydrogen generating device (10) to the hydrogen storage means.

    Standalone Hydrogen Generating System
    9.
    发明申请
    Standalone Hydrogen Generating System 审中-公开
    独立氢气发生系统

    公开(公告)号:US20080171244A1

    公开(公告)日:2008-07-17

    申请号:US11794357

    申请日:2005-12-26

    IPC分类号: H01M8/06 H01M8/10

    摘要: A standalone hydrogen generating system is provided using a hydrogen generating device which can generate a hydrogen-containing gas at a low temperature and can be operated only by electric energy supplied from a fuel cell and does not require large electric energy.In the standalone hydrogen generating system provided with at least a hydrogen generating cell (10) constituting a hydrogen generating device, auxiliary machines (16), (17) for operating the hydrogen generating device, and a fuel cell (33) for supplying electric energy to the auxiliary machines (16), (17), the hydrogen generating device is to generate a gas containing hydrogen by decomposing a fuel containing an organic compound, comprising a partition membrane (11), a fuel electrode (12) provided on one surface of the partition membrane (11), means for supplying a fuel containing the organic compound and water to the fuel electrode (12), an oxidizing electrode (14) provided on the other surface of the partition membrane (11), means for supplying an oxidizing agent to the oxidizing electrode (14), and means for generating and collecting the gas containing hydrogen from the fuel electrode (12). There are cases in the hydrogen generating device: (a) the hydrogen generating cell (10) in the hydrogen generating device is an open circuit having neither means for withdrawing electric energy to outside from the cell (10), nor means for providing electric energy from outside to the cell (10); (b) means for withdrawing electric energy to outside with the fuel electrode (12) serving as a negative electrode and the oxidizing electrode (14) as a positive electrode; and (c) means for providing electric energy from outside with the fuel electrode (12) serving as cathode and the oxidizing electrode (14) as anode.

    摘要翻译: 使用能够在低温下产生含氢气体的氢生成装置来提供独立的氢生成系统,并且仅能够通过从燃料电池供给的电能进行操作,并且不需要大的电能。 在至少具有构成氢生成装置的氢生成电池(10)的独立的氢生成系统中,用于操作氢生成装置的辅助机器(16),(17)和用于供给电能的燃料电池(33) 通过分解含有有机化合物的燃料,氢辅助机构(16),(17)通过分解含有氢气的气体,包括分隔膜(11),设置在一个表面上的燃料电极(12) 的分隔膜(11)的另一面上设置有用于向燃料电极(12)供给含有有机化合物和水的燃料的装置,设置在分隔膜(11)的另一个面上的氧化电极(14) 氧化剂到氧化电极(14),以及用于从燃料电极(12)产生和收集含有氢的气体的装置。 在氢生成装置中存在这样的情况:(a)氢生成装置中的氢生成单元(10)是不具有从电池(10)向外部取出电能的开路,也不具有用于提供电能的装置 从外部到细胞(10); (b)用作为负极的燃料电极(12)和作为正极的氧化电极(14)将电能抽出到外部的装置; 和(c)用于从作为阴极的燃料电极(12)和作为阳极的氧化电极(14)从外部提供电能的装置。