摘要:
There is provided a plasma CVD device which can deposit a high-quality a-Si:H or other film at a high rate, and which can improve production efficiency thereof remarkably. The CVD device has a substrate holding electrode and a high frequency application electrode arranged opposite to and parallel to a substrate held by the substrate holding electrode. A material gas introduced between the substrate holding electrode and the high frequency application electrode is decomposed by glow discharge, so that a thin film is deposited on the heated substrate. A first electrode heater for heating a peripheral portion of the high frequency application electrode is installed along the peripheral portion of the high frequency application electrode. A second electrode heater for heating the peripheral portion of the high frequency application electrode and a surface of the high frequency application electrode opposite to its surface facing the substrate is composed of a bottom portion and a side portion provided uprightly along a peripheral edge of the bottom portion and formed in a concave shape to surround the high frequency application electrode with a spacing therebetween.
摘要:
A method for producing a thin semiconductor film according to the present invention includes the steps of: placing a group-IV compound or a derivative thereof in a plasma state; decomposing the group-IV compound or the derivative thereof into active species; and depositing the active species on a substrate, wherein energy for generating plasma is intermittently supplied at a supply time interval which is equal to or less than a reciprocal of {(secondary reaction rate constant of a source gas reacting with active species other than long-life active species within the plasma).times.(number of source gas molecules)}.
摘要:
A method for producing a thin semiconductor film according to the present invention includes the steps of: placing a group-IV compound or a derivative thereof in a plasma state; decomposing the group-IV compound or the derivative thereof into active species; and depositing the active species on a substrate, wherein energy for generating plasma is intermittently supplied at a supply time interval which is equal to or less than a reciprocal of {(secondary reaction rate constant of a source gas reacting with active species other than long-life active species within the plasma).times.(number of source gas molecules)}.
摘要:
An electric automobile includes a fuel cell for power generation by supply of hydrogen and oxidizing agent, a hydrogen generating device for generating a gas containing hydrogen to be supplied to the fuel cell, and a motor driven by electricity generated by the fuel cell. The hydrogen generating device generates gas containing hydrogen by decomposing an organic compound-containing fuel, and includes a proton conductive partition membrane, a fuel electrode provided on one surface of the partition membrane to directly generate the gas containing hydrogen, a device for supplying, to the fuel electrode, water and organic compound-containing fuel capable of producing a proton as a result of electrochemical oxidization which can pass through the partition membrane, an oxidizing electrode provided on the other surface of the partition membrane, a device for supplying the oxidizing agent to the oxidizing electrode, and a device for generating and collecting the gas containing hydrogen.
摘要:
A hydrogen supply system includes at least a hydrogen supply device for supplying hydrogen to a hydrogen storing device, and a hydrogen generating device producing hydrogen containing gas to be supplied to the hydrogen supply device. The hydrogen generating device produces the hydrogen containing gas by decomposing a fuel containing an organic compound, and includes a partition membrane, a fuel electrode provided on one surface of the partition membrane for generating hydrogen containing gas, a device for supplying a fuel containing the organic compound and water to the fuel electrode, an oxidizing electrode provided on the other surface of the partition membrane, a device for supplying an oxidizing agent to the oxidizing electrode, and a device for collecting the hydrogen containing gas directly from the fuel electrode.
摘要:
The present invention provides a process for producing a novel compound, i.e., α-chloromethoxycarboxylic acid ester represented by General Formula (1): (CF3)2C(OCH2Cl)COOR, wherein R is a hydrocarbon group which may be substituted with at least one atom selected from the group consisting of halogen, oxygen, nitrogen, and sulfur atoms, comprising reacting an α-methoxycarboxylic acid ester represented by General Formula (2): (CF3)2C(OCH3)COOR, wherein R is as defined above, with molecular chlorine; and a process for producing 1,1,1,3,3,3-hexafluoroisopropyl fluoromethyl ether represented by a chemical formula (CF3)2CH(OCH2F), comprising fluorinating and decarboxylating the α-chloromethoxycarboxylic acid ester.According to the present invention, 1,1,1,3,3,3-hexafluoroisopropyl fluoromethyl ether (sevoflurane), which is known as a compound having an anesthetic property, can be produced efficiently and at a low cost.
摘要:
A hydrogen generating device capable of generating a gas containing hydrogen at a low temperature, as well as a fuel cell power generating device, an electric automobile, a submergible ship and a hydrogen supply system using the hydrogen generating device are provided.A hydrogen generating device (10) for generating a gas containing hydrogen by decomposing a fuel containing an organic compound, includes: a partition membrane (11); a fuel electrode (12) provided on one surface of the partition membrane (11); a means for supplying a fuel containing organic compound and water to the fuel electrode (12); an oxidizing electrode (14) provided on the other surface of the partition membrane (11); a means for supplying an oxidizing agent to the oxidizing electrode (14); and a means for generating and collecting the gas containing hydrogen from the fuel electrode, and a region of insufficient oxidizing agent supply is provided on the oxidizing electrode side so that a reaction (C) 6H++6e−→3H2 may occur on the fuel electrode side and a reaction (D) CH3OH+H2O→6H++6e−+CO2 may occur on the oxidizing electrode side. The region of insufficient oxidizing agent supply can be provided by performing masking (14M) on part of the gas diffusion layer of the oxidizing electrode (14). Moreover, by connecting the hydrogen generating device (10) to a fuel cell and connecting a fuel cell power generating device for supplying a gas containing hydrogen generated by the hydrogen generating device (10) to the fuel cell, an electric automobile and a submergible ship incorporating the fuel cell power generating device, and the hydrogen generating device (10) to a hydrogen storage means, a hydrogen supply system can be configured for supplying a gas containing hydrogen generated by the hydrogen generating device (10) to the hydrogen storage means.
摘要:
A polymerization catalyst composition for a radically polymerizable monomer of the present invention comprises a transition metal-containing phosphazenium composition which is produced by mixing a phosphazenium compound with a compound of a transition metal belonging to Groups 4 to 12 in the periodic table and an organic halogen compound.
摘要:
A standalone hydrogen generating system is provided using a hydrogen generating device which can generate a hydrogen-containing gas at a low temperature and can be operated only by electric energy supplied from a fuel cell and does not require large electric energy.In the standalone hydrogen generating system provided with at least a hydrogen generating cell (10) constituting a hydrogen generating device, auxiliary machines (16), (17) for operating the hydrogen generating device, and a fuel cell (33) for supplying electric energy to the auxiliary machines (16), (17), the hydrogen generating device is to generate a gas containing hydrogen by decomposing a fuel containing an organic compound, comprising a partition membrane (11), a fuel electrode (12) provided on one surface of the partition membrane (11), means for supplying a fuel containing the organic compound and water to the fuel electrode (12), an oxidizing electrode (14) provided on the other surface of the partition membrane (11), means for supplying an oxidizing agent to the oxidizing electrode (14), and means for generating and collecting the gas containing hydrogen from the fuel electrode (12). There are cases in the hydrogen generating device: (a) the hydrogen generating cell (10) in the hydrogen generating device is an open circuit having neither means for withdrawing electric energy to outside from the cell (10), nor means for providing electric energy from outside to the cell (10); (b) means for withdrawing electric energy to outside with the fuel electrode (12) serving as a negative electrode and the oxidizing electrode (14) as a positive electrode; and (c) means for providing electric energy from outside with the fuel electrode (12) serving as cathode and the oxidizing electrode (14) as anode.
摘要:
A 3-aminomethyltetrahydrofuran derivative is produced by preparing a 3-cyanotetrahydrofuran derivative in a high yield from a malic acid derivative, and reducing the cyano group of the 3-cyanotetrahydrofuran derivative. The process can produce the 3-cyanotetrahydrofuran derivative in a high yield from inexpensive industrial materials.