MAGNETRON SPUTTERING DEVICE AND METHOD USING THE SAME
    1.
    发明申请
    MAGNETRON SPUTTERING DEVICE AND METHOD USING THE SAME 审中-公开
    MAGNETRON SPUTTERING DEVICE及其使用方法

    公开(公告)号:US20170044659A1

    公开(公告)日:2017-02-16

    申请号:US15138811

    申请日:2016-04-26

    Abstract: The present invention relates to a magnetron sputtering device, which comprises at least two targets, each of which is used for placing a target material for sputtering a film forming area of a same substrate; and magnetic field generating devices corresponding to the targets respectively and used for generating magnetic fields for controlling the directions of target sputtering particles. The magnetron sputtering device comprises at least two targets, and the target materials of the at least two targets are different from each other in composition, so that the purpose of doping different elements can be achieved by adjusting the proportion of the two target materials; by controlling the magnetic fields generated by the magnetic field generating devices, the sputtering speed and direction of the target materials can be controlled. The present invention also relates to a method for forming a film on a substrate by magnetron sputtering.

    Abstract translation: 磁控管溅射装置技术领域本发明涉及一种磁控管溅射装置,其包括至少两个靶,每个靶用于放置用于溅射相同基板的成膜区域的靶材料; 和分别对应于目标的磁场产生装置,用于产生用于控制靶溅射颗粒的方向的磁场。 所述磁控管溅射装置至少包含两个靶,并且所述至少两个靶的目标材料的组成彼此不同,从而可以通过调节两种靶材料的比例来实现掺杂不同元素的目的。 通过控制由磁场产生装置产生的磁场,可以控制溅射速度和目标材料的方向。 本发明还涉及通过磁控溅射在基板上形成膜的方法。

    DISPLAY SUBSTRATE, DISPLAY PANEL AND DISPLAY DEVICE

    公开(公告)号:US20190043408A1

    公开(公告)日:2019-02-07

    申请号:US15977015

    申请日:2018-05-11

    Abstract: A display substrate, a display panel, and a display device. The display substrate includes a substrate, and a plurality of polygonal pixels arranged in an array on the substrate. Each polygonal pixel includes a plurality of sub-pixels and a photoelectric sensor. An orthographic projection of the plurality of sub-pixels on the substrate and an orthogonal projection of the photoelectric sensor on the substrate do not overlap with each other. The display substrate, the display panel and the display device of the embodiments of the present disclosure can maximize the collection of optical signals, thereby improving the efficiency of the photoelectric sensor and the accuracy of a fingerprint identification in certain applications.

    THIN-FILM TRANSISTOR AND METHOD FOR PREPARING THE SAME, DISPLAY SUBSTRATE AND DISPLAY DEVICE

    公开(公告)号:US20200220020A1

    公开(公告)日:2020-07-09

    申请号:US16608549

    申请日:2019-04-25

    Abstract: The present disclosure relates to a thin-film transistor, a method for preparing the same, and a display substrate. The method for preparing the thin-film transistor includes the steps of forming a source electrode, a drain electrode, and an active layer, in which the step of forming the source electrode, the drain electrode, and the active layer includes: forming a first thin film from a first metal oxide material in an atmosphere of a first oxygen content; and forming a second thin film from a second metal oxide material in an atmosphere of a second oxygen content, in which the first thin film is configured to form the active layer, the second thin film is configured to form a source electrode and a drain electrode, and the second oxygen content is less than the first oxygen content.

    FINGERPRINT IDENTIFICATION SENSOR, FINGERPRINT IDENTIFICATION METHOD AND ELECTRONIC DEVICE

    公开(公告)号:US20190087624A1

    公开(公告)日:2019-03-21

    申请号:US15767704

    申请日:2017-09-30

    CPC classification number: G06K9/0004 G06K9/00087

    Abstract: A fingerprint identification sensor, a fingerprint identification method and an electronic device are disclosed. The fingerprint identification sensor includes a substrate; a fingerprint sensing element disposed on the substrate and including a thin film transistor, an off-state leakage current of the thin film transistor varying with the intensity of light irradiating onto an active area thereof; and a fingerprint identification light source arranged to emit light that irradiates onto a finger and is reflected thereby, the reflected light irradiating onto the active area of the thin film transistor. Thus, the fingerprint identification can be realized conveniently, and the fingerprint identification sensor has at least one of the advantages like high sensitivity and simple structure.

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