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1.发明授权Lithographic device, device manufacturing method and device manufactured thereby 有权平版印刷装置，装置制造方法和由此制造的装置公开(公告)号：US07684012B2
公开(公告)日：2010-03-23
申请号：US11391731
申请日：2006-03-29
申请人： Johannes Henricus Wilhelmus Jacobs , Vadim Yevgenyevich Banine , Barrie Dudley Brewster , Vladimir Vitalevitch Ivanov , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors , Robert Gordon Livesey , Bastiaan Theodoor Wolschrijn
发明人： Johannes Henricus Wilhelmus Jacobs , Vadim Yevgenyevich Banine , Barrie Dudley Brewster , Vladimir Vitalevitch Ivanov , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors , Robert Gordon Livesey , Bastiaan Theodoor Wolschrijn
CPC分类号： G03F7/70933 , G03F7/70908
摘要： A lithographic apparatus is configured to project a pattern from a patterning device onto a substrate. The apparatus includes a gas purged sealing aperture extending between at least two different zones of the apparatus, and a gas supplier configured to supply the sealing aperture one or more gases selected from a group including hydrogen, deuterium, heavy hydrogen, deuterated hydrogen, and a mixture of argon and hydrogen.
摘要翻译： 光刻设备被配置为将图案从图案形成装置投影到基板上。 该装置包括在装置的至少两个不同区域之间延伸的气体净化密封孔，以及构造成为密封孔提供一种或多种选自包括氢，氘，重氢，氘代氢和 氩和氢的混合物。
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2.发明授权Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权平版印刷设备，器件制造方法和由此制造的器件公开(公告)号：US07502095B2
公开(公告)日：2009-03-10
申请号：US11091926
申请日：2005-03-29
CPC分类号： G03F7/70933
摘要： A lithographic apparatus includes a patterning device for patterning a beam of radiation, a projection system for projecting the patterned beam of radiation onto a substrate, a gas purged sealing aperture extending between different zones of the apparatus, and a gas supply arrangement for supplying a mixture of at least argon and hydrogen to the sealing aperture.
摘要翻译： 光刻设备包括用于图案化辐射束的图案形成装置，用于将图案化的辐射束投射到衬底上的投影系统，在装置的不同区域之间延伸的气体清除的密封孔以及用于提供混合物的气体供应装置 至少氩和氢至密封孔。
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3.发明授权Sealing assembly, a lithographic projection apparatus, and a device manufacturing method 失效密封组件，光刻投影装置和装置制造方法公开(公告)号：US07256863B2
公开(公告)日：2007-08-14
申请号：US10875511
申请日：2004-06-25
CPC分类号： G03F7/70808 , F16J15/04 , F16J15/443 , G03F7/70841
摘要： A sealing assembly for sealing a slit between two regions in a lithographic apparatus is disclosed. The assembly includes a vacuum pumping device that extends substantially in a longitudinal slit direction for at least partially preventing particle transmission in a transversal slit direction.
摘要翻译： 公开了一种用于在光刻设备中的两个区域之间密封狭缝的密封组件。 该组件包括基本上沿纵向狭缝方向延伸以至少部分地防止在横向狭缝方向上的颗粒传播的真空泵送装置。
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公开(公告)号：US08181944B2
公开(公告)日：2012-05-22
申请号：US10588470
申请日：2005-02-02
CPC分类号： F04D29/668 , F04D19/04 , F16F15/067
摘要： A pre-compressed vibration damper is provided for inhibiting transfer of vibration to an apparatus during the evacuation thereof by a pump.
摘要翻译： 提供了一种预压缩振动阻尼器，用于在通过泵抽真空期间抑制振动传递给设备。
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5.发明授权Magnetic bearing assembly formed by measuring first and second order transverse stray magnetic fields 有权通过测量第一和第二级横向杂散磁场形成的磁性轴承组件公开(公告)号：US09464667B2
公开(公告)日：2016-10-11
申请号：US14112457
申请日：2012-05-04
CPC分类号： F16C32/04 , F16C32/0425 , F16C43/00 , F16C2360/45 , G01P3/487 , G01R33/1215 , H01F7/0236 , Y10T29/49004
摘要： Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump.
摘要翻译： 在涡轮分子泵中使用的磁轴承组件的旋转磁体阵列中的永磁体的非对称磁化产生的杂散磁场可能对诸如扫描电子显微镜的装置造成重大问题。 为了最小化杂散场，首先测量阵列中每个磁体的至少偶极和四极矩。 然后阵列中的磁体相对于彼此布置，使得偶极子和四极矩都被最小化，从而当磁体阵列在涡轮分子泵中旋转时最小化杂散磁场。
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公开(公告)号：US08186937B2
公开(公告)日：2012-05-29
申请号：US11921983
申请日：2006-05-26
CPC分类号： F04D29/668 , F04D17/168 , F04D19/04 , F04D29/0563 , F04D29/059 , F16C19/06 , F16C27/045 , F16C32/0425 , F16C33/6666 , F16C33/6685 , F16C2300/34 , F16C2360/45
摘要： A turbomolecular vacuum pump (54) comprises a housing (70) and a rotor (52) supported by a bearing arrangement (64) for rotation relative to the housing (70). The bearing arrangement (64) comprises a bearing (72, 74, 76, 78) supported in both radial and axial directions by a resilient support (80) comprising inner (86) and outer (88) annular portions connected by a plurality of flexible members (84), the resilient support (80) having a radial stiffness in the range from 50 to 500 N/mm.
摘要翻译： 涡轮分子真空泵（54）包括壳体（70）和由轴承装置（64）支撑以相对于壳体（70）旋转的转子（52）。 轴承装置（64）包括通过弹性支撑件（80）在径向和轴向方向上支撑的轴承（72,74,78），所述弹性支撑件包括内部（86）和外部（88）环形部分，所述环形部分通过多个柔性 构件（84），弹性支撑件（80）的径向刚度在50至500N / mm的范围内。
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公开(公告)号：US20100215475A1
公开(公告)日：2010-08-26
申请号：US11921983
申请日：2006-05-26
CPC分类号： F04D29/668 , F04D17/168 , F04D19/04 , F04D29/0563 , F04D29/059 , F16C19/06 , F16C27/045 , F16C32/0425 , F16C33/6666 , F16C33/6685 , F16C2300/34 , F16C2360/45
摘要： A turbomolecular vacuum pump (54) comprises a housing (70) and a rotor (52) supported by a bearing arrangement (64) for rotation relative to the housing (70). The bearing arrangement (64) comprises a bearing (72, 74, 76, 78) supported in both radial and axial directions by a resilient support (80) comprising inner (86) and outer (88) annular portions connected by a plurality of flexible members (84), the resilient support (80) having a radial stiffness in the range from 50 to 500 N/mm.
摘要翻译： 涡轮分子真空泵（54）包括壳体（70）和由轴承装置（64）支撑以相对于壳体（70）旋转的转子（52）。 轴承装置（64）包括通过弹性支撑件（80）在径向和轴向方向上支撑的轴承（72,74,78），所述弹性支撑件包括内部（86）和外部（88）环形部分，所述环形部分通过多个柔性 构件（84），弹性支撑件（80）的径向刚度在50至500N / mm的范围内。
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公开(公告)号：US20090162220A1
公开(公告)日：2009-06-25
申请号：US12316292
申请日：2008-12-11
CPC分类号： F04D19/042 , F04D25/0606 , H02K3/28 , H02K29/12 , H02P6/16 , H02P6/18 , H02P6/182 , H02P25/16
摘要： A vacuum pump having a vacuum pumping mechanism mounted for rotation by a shaft and a brushless motor for rotating the shaft where the vacuum pumping mechanism comprises a turbo pumping mechanism comprising pumping stages, and a molecular drag pumping mechanism comprising at least one pumping stage, and a shaft supported for rotation by bearings, and where the motor comprises a permanent magnet rotor fixed relative to the shaft and the rotor has four poles and a stator has non-overlapping stator coils.
摘要翻译： 一种真空泵，其具有安装为用于由轴旋转的真空泵机构和用于旋转轴的无刷电动机，其中真空泵送机构包括包括泵送级的涡轮泵送机构，以及包括至少一个泵送级的分子拖动泵送机构，以及 支撑轴承旋转的轴，其中电动机包括相对于轴固定的永磁体转子，转子具有四个极，并且定子具有非重叠的定子线圈。
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公开(公告)号：US06200107B1
公开(公告)日：2001-03-13
申请号：US09132889
申请日：1998-08-12
IPC分类号： F04B300
CPC分类号： F04D19/04 , F04D27/0207
摘要： A vacuum pumping system for use with a process chamber. The pumping system has a first vacuum pump whose inlet is adapted for communication via a first line with a chamber outlet and a second vacuum pump whose inlet is adapted for communication via a second line with a first pump outlet. A third line containing a throttle valve is linked to the first and to the second lines in parallel to the first vacuum pump to enable variable amounts of gas to flow through the throttle valve from the second line to the first line depending on the position of the throttle valve.
摘要翻译： 一种与处理室一起使用的真空泵系统。 泵送系统具有第一真空泵，其入口适于经由具有室出口的第一管线和第二真空泵连通，第二真空泵的入口适于经由具有第一泵出口的第二管线进行连通。 包含节流阀的第三线路与第一和第二线路平行于第一真空泵连接，以使得可变量的气体能够通过节流阀从第二线路流到第一线路，这取决于 节流阀。
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公开(公告)号：US20100068054A1
公开(公告)日：2010-03-18
申请号：US12311233
申请日：2007-07-27
IPC分类号： F04D29/046
CPC分类号： F04D17/168
摘要： A vacuum pump comprises a housing, a drive shaft supported by a beating arrangement for rotation relative to the housing about an axis, and a pumping mechanism comprising a stator component mounted on the housing and a disk-shaped rotor component mounted on the drive shaft axially proximate the stator component. The bearing arrangement comprises a bearing supported in both radial and axial directions by a resilient support, comprising inner and outer annular portions connected by a plurality of flexible members, so that there is a fixed relation between the inner race of the bearing and the outer portion of the resilient support to determine the axial clearance between the rotor and stator components of the pumping mechanism.
摘要翻译： 真空泵包括壳体，由轴承装置支撑的驱动轴，用于围绕轴线相对于壳体旋转;以及泵送机构，其包括安装在壳体上的定子部件和轴向安装在驱动轴上的盘形转子部件 靠近定子部件。 轴承装置包括通过弹性支撑件在径向和轴向方向上支撑的轴承，包括通过多个柔性构件连接的内部和外部环形部分，使得在轴承的内圈与外部部分之间存在固定的关系 以确定泵送机构的转子和定子部件之间的轴向间隙。
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