公开(公告)号：US08540173B2

公开(公告)日：2013-09-24

申请号：US12951557

申请日：2010-11-22

Applicant: Yuki Ichikawa ,  Zhengong Hu ,  Bing Liu ,  Yong Che

Inventor： Yuki Ichikawa ,  Zhengong Hu ,  Bing Liu ,  Yong Che

IPC: B02C19/18

CPC classification number: C09K11/025 ,  C09K11/08 ,  Y10T428/2982

Abstract: A method of forming nanometer sized fine particles of functional ceramic from a bulk functional ceramic, particularly fine particles of phosphorous ceramics from a bulk phosphor material is disclosed. The method relies on irradiation of a bulk phosphorous ceramic in a liquid with an ultrashort-pulsed-laser-fragmentation beam to thereby form nanometer sized particles of the phosphorous ceramic. The method is unique in that the generated particles retain the chemical and crystalline properties of the bulk phosphorous ceramic. The generated solutions are stable colloids from which the particles can be isolated or used as is.

Abstract translation: 公开了一种从体积功能陶瓷形成纳米尺寸的功能性陶瓷微粒的方法，特别是来自块状磷光体材料的磷陶瓷的细颗粒的方法。 该方法依赖于用超短脉冲激光破碎光束在液体中照射大块磷陶瓷，从而形成纳米尺寸的磷陶瓷颗粒。 该方法的独特之处在于所产生的颗粒保留了大块磷陶瓷的化学和结晶性质。 产生的溶液是稳定的胶体，颗粒可从其中分离或原样使用。

公开(公告)号：US20110192714A1

公开(公告)日：2011-08-11

申请号：US12951423

申请日：2010-11-22

Applicant: Bing LIU ,  Zhendong Hu ,  Yong Che

Inventor： Bing LIU ,  Zhendong Hu ,  Yong Che

IPC: B01J19/08

CPC classification number: B01J19/121 ,  B22F1/0018 ,  B22F9/04 ,  B22F2999/00 ,  Y10S977/889 ,  B22F2202/11

Abstract: A method for generating nanoparticles in a liquid comprises generating groups of ultrafast laser pulses, each pulse in a group having a pulse duration of from 10 femtoseconds to 200 picoseconds, and each group containing a plurality of pulses with a pulse separation of 1 to 100 nanoseconds and directing the groups of pulses at a target material in a liquid to ablate it. The multiple pulse group ablation produces nanoparticles with a reduced average size, a narrow size distribution, and improved production efficiency compared to prior pulsed ablation systems.

Abstract translation: 用于在液体中产生纳米颗粒的方法包括产生超快激光脉冲组，组中的每个脉冲具有10飞秒至200皮秒的脉冲持续时间，并且每组包含脉冲间隔为1至100纳秒的多个脉冲 并将脉冲组定向在液体中的目标材料以烧蚀它。 与先前的脉冲消融系统相比，多脉冲组消融产生具有降低的平均尺寸，窄尺寸分布和提高的生产效率的纳米颗粒。

公开(公告)号：US20110192450A1

公开(公告)日：2011-08-11

申请号：US12951585

申请日：2010-11-22

Applicant: Bing LIU ,  Yong Che

Inventor： Bing LIU ,  Yong Che

IPC: H01L31/0256 ,  B01J19/12 ,  B82Y40/00

CPC classification number: H01L31/035281 ,  B22F1/0022 ,  B22F9/04 ,  B22F2998/00 ,  B22F2999/00 ,  B23K26/361 ,  B82B1/001 ,  B82Y40/00 ,  H01L31/0296 ,  H01L31/0322 ,  H01L31/03923 ,  H01L31/03925 ,  H01L31/1828 ,  Y02E10/541 ,  Y02E10/543 ,  Y02P70/521 ,  B22F1/0018 ,  B22F2202/11

Abstract: A method of producing nanoparticles of solar light absorbing compound materials based on pulsed laser ablation is disclosed. The method uses irradiation of a target material of solar light absorbing compound material with a pulsed laser beam having a pulse duration of from 10 femtoseconds to 500 picoseconds to ablate the target thereby producing nanoparticles of the target. The nanoparticles are collected and a solution of the nanoparticles is applied to a substrate to produce a thin film solar cell. The method preserves the composition and structural crystalline phase of the starting target. The method is a much lower cost fabrication method for thin film solar cells.

Abstract translation: 公开了一种基于脉冲激光烧蚀制备太阳光吸收复合材料的纳米颗粒的方法。 该方法使用具有10飞秒至500皮秒的脉冲持续时间的脉冲激光束照射太阳光吸收复合材料的目标材料以烧蚀靶，从而产生靶的纳米颗粒。 收集纳米颗粒，并将纳米颗粒的溶液施加到基底以产生薄膜太阳能电池。 该方法保留起始靶的组成和结构结晶相。 该方法是薄膜太阳能电池成本低廉的制造方法。

公开(公告)号：US20100227133A1

公开(公告)日：2010-09-09

申请号：US12400438

申请日：2009-03-09

Applicant: Bing Liu ,  Zhendong Hu ,  Makoto Murakami ,  Jingzhou Xu ,  Yong Che

Inventor： Bing Liu ,  Zhendong Hu ,  Makoto Murakami ,  Jingzhou Xu ,  Yong Che

IPC: B32B3/00 ,  C23C14/34 ,  C23C14/00

CPC classification number: C23C20/04 ,  B41M5/262 ,  B41M5/267 ,  B44F1/10 ,  C23C14/28 ,  C23C14/3435 ,  G02B26/101 ,  Y10T428/24802 ,  Y10T428/24917

Abstract: A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.

Abstract translation: 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。 在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

公开(公告)号：US08748216B2

公开(公告)日：2014-06-10

申请号：US13198744

申请日：2011-08-05

Applicant: Wei Guo ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

Inventor： Wei Guo ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

IPC: H01L31/18 ,  H01L31/032

CPC classification number: H01L21/02628 ,  H01L21/02568 ,  H01L21/02601 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/0749 ,  Y02E10/541

Abstract: The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

Abstract translation: 本发明提供了一种非真空方法，其基于在元件之间具有受控原子比的纳米颗粒的混合物的电泳沉积来沉积光伏吸收层。 首先将纳米颗粒分散在液体介质中以形成胶体悬浮液，然后电泳沉积到基底上以形成薄膜光伏吸收层。 可以对吸收层进行用于光伏吸收的任选的后沉积处理。

公开(公告)号：US08663754B2

公开(公告)日：2014-03-04

申请号：US12400438

申请日：2009-03-09

Applicant: Bing Liu ,  Zhendong Hu ,  Makoto Murakami ,  Jingzhou Xu ,  Yong Che

Inventor： Bing Liu ,  Zhendong Hu ,  Makoto Murakami ,  Jingzhou Xu ,  Yong Che

IPC: C23C14/28 ,  C08J7/04 ,  B05D5/06 ,  B05D5/12 ,  B23K26/00

CPC classification number: C23C20/04 ,  B41M5/262 ,  B41M5/267 ,  B44F1/10 ,  C23C14/28 ,  C23C14/3435 ,  G02B26/101 ,  Y10T428/24802 ,  Y10T428/24917

Abstract: A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.

Abstract translation: 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。 在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

公开(公告)号：US08609205B2

公开(公告)日：2013-12-17

申请号：US12497205

申请日：2009-07-02

Applicant: Zhendong Hu ,  Yong Che ,  Bing Liu

Inventor： Zhendong Hu ,  Yong Che ,  Bing Liu

IPC: H05B7/00 ,  C23C14/14

CPC classification number: C30B23/08 ,  C23C14/083 ,  C23C14/28 ,  C30B29/16

Abstract: A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.

Abstract translation: 使用二氧化钛或金属钛靶的超快速脉冲激光烧蚀将金属氧化物如结晶二氧化钛（TiO 2）的纳米颗粒或纳米复合材料（纳米颗粒组装的）膜沉积到基底表面上的一步和室温方法。 该系统包括脉冲激光，其脉冲持续时间范围从几飞秒到几十皮秒，用于处理激光束的光学设置，使得光束以适当的平均能量密度和适当的能量聚焦到目标表面上 密度分布，以及真空室，其中安装了目标物和基质，背景气体及其压力被适当调节。

公开(公告)号：US20120098032A1

公开(公告)日：2012-04-26

申请号：US13198744

申请日：2011-08-05

Applicant: Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

Inventor： Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che ,  Kevin V. Hagedorn

IPC: H01L31/18 ,  H01L31/032

CPC classification number: H01L21/02628 ,  H01L21/02568 ,  H01L21/02601 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/0749 ,  Y02E10/541

Abstract: The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

Abstract translation: 本发明提供了一种非真空方法，其基于在元件之间具有受控原子比的纳米颗粒的混合物的电泳沉积来沉积光伏吸收层。 首先将纳米颗粒分散在液体介质中以形成胶体悬浮液，然后电泳沉积到基底上以形成薄膜光伏吸收层。 可以对吸收层进行用于光伏吸收的任选的后沉积处理。

公开(公告)号：US20120097224A1

公开(公告)日：2012-04-26

申请号：US12910929

申请日：2010-10-25

Applicant: Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che

Inventor： Wei GUO ,  Yu Jin ,  Bing Liu ,  Yong Che

IPC: H01L31/0352 ,  H01L31/18 ,  B82Y99/00 ,  B82Y40/00

CPC classification number: H01L31/0322 ,  B82Y30/00 ,  C25D13/02 ,  H01L31/0749 ,  Y02E10/541

Abstract: The present invention provides a non-vacuum method of depositing a photovoltaic absorber layer based on electrophoretic deposition of a mixture of nanoparticles with a controlled atomic ratio between the elements. The nanoparticles are first dispersed in a liquid medium to form a colloidal suspension and then electrophoretically deposited onto a substrate to form a thin film photovoltaic absorber layer. The absorber layer may be subjected to optional post-deposition treatments for photovoltaic absorption.

公开(公告)号：US07608308B2

公开(公告)日：2009-10-27

申请号：US11405020

申请日：2006-04-17

Applicant: Bing Liu ,  Zhendong Hu ,  Yong Che ,  Yuzuru Uehara

Inventor： Bing Liu ,  Zhendong Hu ,  Yong Che ,  Yuzuru Uehara

IPC: C23C14/30 ,  H05B7/00 ,  C23C8/00

CPC classification number: C23C14/22 ,  C23C14/083 ,  C23C14/28

Abstract: A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials.

Abstract translation: 公开了一种p型半导体氧化锌（ZnO）膜及其制备方法。 该膜与磷（P）和锂（Li）共掺杂。 描述脉冲激光沉积方案用于生长膜。 进一步描述的是使用透明衬底的脉冲激光沉积过程，其包括脉冲激光源，在脉冲激光的波长处是透明的衬底和多目标系统。 脉冲激光器的光路布置成使得脉冲激光从衬底的背面入射，穿过衬底，然后聚焦在靶上。 通过将基板朝向目标平移，这种几何布置可以在羽流的角宽度扩大之前利用消融羽流的根部沉积小特征，其可以沿着目标表面法线存在于一维过渡阶段中 三维绝热膨胀。 这可以提供小的沉积特征尺寸，其尺寸可以与激光焦点类似，并且提供用于直接沉积图案化材料的新颖方法。