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    Ion beam process for deposition of highly abrasion-resistant coatings
    1.
    再颁专利
    Ion beam process for deposition of highly abrasion-resistant coatings 失效
    用于沉积高耐磨涂层的离子束工艺

    公开(公告)号：USRE37294E1

    公开(公告)日：2001-07-24

    申请号：US09048016

    申请日：1998-03-25

    申请人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph H. Petrmichl ,  Norman D. Galvin

    发明人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph H. Petrmichl ,  Norman D. Galvin

    IPC分类号： B05D314

    CPC分类号： C23C16/30 ,  C23C16/0245 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/513

    摘要： An ion beam deposition method is provided for manufacturing a coated substrate with improved abrasion resistance, and improved lifetime. According to the method, the substrate is first chemically cleaned to remove contaminants. In the second step, the substrate is inserted into a vacuum chamber, and the air in said chamber is evacuated. In the third step, the substrate surface is bombarded with energetic ions to assist in the removal of residual hydrocarbons and surface oxides, and to activate the surface. Alter After the substrate surface has been sputter-etched, a protective, abrasion-resistant coating is deposited by ion beam deposition. The ion beam-deposited coating may contain one or more layers. Once the chosen thickness of the coating has been achieved, the deposition process on the substrates is terminated, the vacuum chamber pressure is increased to atmospheric pressure, and the coated substrate products having improved abrasion-resistance are removed from the vacuum chamber. The coated products of this invention have utility as plastic sunglass lenses, ophthalmic lenses, bar codes scanner windows, and industrial wear parts that must be protected from scratches and abrasion.

    摘要翻译： 提供了一种离子束沉积方法，用于制造具有改善的耐磨性和改善寿命的涂覆基材。 根据该方法，首先对基材进行化学清洗以除去污染物。 在第二步骤中，将基板插入真空室中，并将所述室中的空气抽真空。 在第三步骤中，用能量离子轰击衬底表面，以帮助去除残留的烃和表面氧化物，并激活表面。 更改 之后，已经对衬底表面进行了溅射蚀刻，通过离子束沉积沉积了保护性的耐磨涂层。 离子束沉积涂层可以包含一层或多层。 一旦实现了所选择的涂层厚度，就终止在基板上的沉积过程，真空室压力增加到大气压，并且从真空室中除去具有改善的耐磨性的涂覆的基材产品。 本发明的涂覆产品具有塑料太阳眼镜，眼镜，条形码扫描仪窗口以及必须防止划痕和磨损的工业耐磨件的用途。

    Ion beam process for deposition of highly abrasion-resistant coatings
    2.
    发明授权
    Ion beam process for deposition of highly abrasion-resistant coatings 失效
    用于沉积高耐磨涂层的离子束工艺

    公开(公告)号：US5508368A

    公开(公告)日：1996-04-16

    申请号：US205898

    申请日：1994-03-03

    申请人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph H. Petrmichl ,  Norman D. Galvin

    发明人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph H. Petrmichl ,  Norman D. Galvin

    IPC分类号： B05D3/04 ,  B32B7/02 ,  B32B9/00 ,  C23C14/32 ,  C23C16/02 ,  C23C16/30 ,  C23C16/32 ,  C23C16/34 ,  C23C16/513 ,  C23F4/00 ,  B05D3/14 ,  C23C14/02 ,  C23C14/14 ,  H05H1/24

    CPC分类号： C23C16/30 ,  C23C16/0245 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/513

    摘要： An ion beam deposition method is provided for manufacturing a coated substrate with improved abrasion resistance, and improved lifetime. According to the method, the substrate is first chemically cleaned to remove contaminants. In the second step, the substrate is inserted into a vacuum chamber, and the air in said chamber is evacuated. In the third step, the substrate surface is bombarded with energetic ions to assist in the removal of residual hydrocarbons and surface oxides, and to activate the surface. Alter the substrate surface has been sputter-etched, a protective, abrasion-resistant coating is deposited by ion beam deposition. The ion beam-deposited coating may contain one or more layers. Once the chosen thickness of the coating has been achieved, the deposition process on the substrates is terminated, the vacuum chamber pressure is increased to atmospheric pressure, and the coated substrate products having improved abrasion-resistance are removed from the vacuum chamber. The coated products of this invention have utility as plastic sunglass lenses, ophthalmic lenses, bar codes scanner windows, and industrial wear parts that must be protected from scratches and abrasion.

    摘要翻译： 提供了一种离子束沉积方法，用于制造具有改善的耐磨性和改善寿命的涂覆基材。 根据该方法，首先对基材进行化学清洗以除去污染物。 在第二步骤中，将基板插入真空室中，并将所述室中的空气抽真空。 在第三步骤中，用能量离子轰击衬底表面，以帮助去除残留的烃和表面氧化物，并激活表面。 改变衬底表面已被溅射蚀刻，通过离子束沉积沉积保护性，耐磨损的涂层。 离子束沉积涂层可以包含一层或多层。 一旦实现了所选择的涂层厚度，就终止在基板上的沉积过程，真空室压力增加到大气压，并且从真空室中除去具有改进的耐磨性的涂覆的基底产品。 本发明的涂覆产品具有塑料太阳眼镜，眼镜，条形码扫描仪窗口以及必须防止划痕和磨损的工业耐磨件的用途。

    Highly abrasion-resistant, flexible coatings for soft substrates
    3.
    发明授权
    Highly abrasion-resistant, flexible coatings for soft substrates 失效
    高耐磨，柔性基材的柔性涂层

    公开(公告)号：US5618619A

    公开(公告)日：1997-04-08

    申请号：US205954

    申请日：1994-03-03

    申请人： Rudolph H. Petrmichl ,  Bradley J. Knapp ,  Fred M. Kimock ,  Brian K. Daniels

    发明人： Rudolph H. Petrmichl ,  Bradley J. Knapp ,  Fred M. Kimock ,  Brian K. Daniels

    IPC分类号： B05D5/00 ,  B05D1/12 ,  B05D7/24 ,  B29C59/16 ,  C23C16/00 ,  C23C16/02 ,  C23C16/30 ,  C23C16/44 ,  C23C16/50 ,  C23C16/513 ,  G02B1/10 ,  B32B9/04

    CPC分类号： C08J7/123 ,  B05D1/62 ,  C23C16/0245 ,  C23C16/30 ,  C23C16/513 ,  G02B1/105 ,  B29C59/16 ,  Y10S428/913 ,  Y10T428/263 ,  Y10T428/265 ,  Y10T428/31507 ,  Y10T428/31663

    摘要： An abrasion wear resistant coated substrate product is described comprising a substrate and an abrasion wear resistant coating material comprising carbon, hydrogen, silicon, and oxygen. The abrasion wear resistant coating material has the properties of Nanoindentation hardness in the range of about 2 to about 5 GPa and a strain to microcracking greater than about 1% and a transparency greater than 85% in the visible spectrum. The coated products of the present invention are suitable for use in optical applications such as ophthalmic lenses or laser bar code scanner windows. In the method for making the products, the substrate is first chemically cleaned to remove contaminants. In the second step, the substrate is inserted into a vacuum chamber, and the air in said chamber is evacuated. In the third step, the substrate surface is bombarded with energetic ions and/or reactive species to assist in the removal of residual hydrocarbons and surface oxides, and to activate the surface. After the substrate surface has been etched, a protective, abrasion-resistant coating is deposited by plasma or ion beam deposition. Once the chosen thickness of the coating has been achieved, the deposition process on the substrates is terminated, the vacuum chamber pressure is increased to atmospheric pressure, and the coated substrate products having improved abrasion-resistance are removed from the vacuum chamber.

    摘要翻译： 描述了一种耐磨损涂层基材产品，其包括基材和包含碳，氢，硅和氧的耐磨损涂层材料。 耐磨损涂层材料具有在约2至约5GPa的范围内的纳米压痕硬度和在可见光谱中大于约1％的微裂纹应变和透明度大于85％的性质。 本发明的涂覆产品适用于诸如眼科镜片或激光条码扫描仪窗口的光学应用中。 在制造产品的方法中，首先对基材进行化学清洗以除去污染物。 在第二步骤中，将基板插入真空室中，并将所述室中的空气抽真空。 在第三步骤中，用能量离子和/或反应物质轰击衬底表面，以帮助去除残留的烃和表面氧化物，并激活表面。 在蚀刻基材表面之后，通过等离子体或离子束沉积沉积保护性的耐磨涂层。 一旦实现了所选择的涂层厚度，就终止在基板上的沉积过程，真空室压力增加到大气压，并且从真空室中除去具有改善的耐磨性的涂覆的基材产品。

    Highly durable and abrasion-resistant dielectric coatings for lenses
    4.
    发明授权
    Highly durable and abrasion-resistant dielectric coatings for lenses 失效

    公开(公告)号：US5846649A

    公开(公告)日：1998-12-08

    申请号：US632610

    申请日：1996-04-15

    申请人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph Hugo Petrmichl ,  Brian Kenneth Daniels

    发明人： Bradley J. Knapp ,  Fred M. Kimock ,  Rudolph Hugo Petrmichl ,  Brian Kenneth Daniels

    IPC分类号： B05D7/24 ,  B29C59/16 ,  C23C14/02 ,  C23C16/02 ,  C23C16/30 ,  C23C16/32 ,  C23C16/34 ,  C23C16/44 ,  C23C16/513 ,  G02B1/10 ,  B32B9/04

    CPC分类号： B05D1/62 ,  C08J7/123 ,  C23C14/02 ,  C23C14/024 ,  C23C16/0245 ,  C23C16/0272 ,  C23C16/30 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/513 ,  G02B1/105 ,  B29C59/16 ,  Y10T428/263 ,  Y10T428/31507 ,  Y10T428/31551 ,  Y10T428/31598 ,  Y10T428/31663

    摘要： An abrasion-resistant dielectric composite product is described comprising a substrate and an abrasion wear resistant coating material comprising carbon, hydrogen, silicon, and oxygen and a dielectric material. An improved method is provided for the deposition of highly durable and abrasion-resistant multilayer dielectric antireflective coatings and reflective colored mirror coatings onto plastic lenses such as ophthalmic lenses, safety lenses, sunglass lenses, and sports optics. An adhesion-enhancing polymer layer may be deposited onto the plastic substrate prior to deposition of the abrasion-resistant first coating layer. The multilayer dielectric coating structure consists of a transparent, highly abrasion-resistant first coating, and a second dielectric coating composed of at least one layer of dielectric material. The abrasion-resistant first coating layer is deposited by ion-assisted plasma deposition from mixtures of organosiloxane or organosilazane precursor gases and oxygen, and has the properties of Nanoindentation hardness in the range of about 2 GPa to about 5 GPa, a strain to microcracking greater than about 1.5% and less than about 3.5%, a transparency greater than 85% throughout the visible spectrum, and an abrasion resistance greater than or equal to the abrasion resistance of glass. The preferred method for deposition of the abrasion-resistant first coating layer is plasma ion beam deposition using an organosiloxane precursor gas and oxygen. Optimum abrasion-resistance is obtained when the first coating layer thickness is in the range of about 5 microns to about 20 microns. The thickness, refractive index, and number of the dielectric layers in the second coating are chosen to produce the desired optical effects of either antireflection, or reflected color. Optimum environmental durability and abrasion-resistance is obtained by producing highly dense dielectric coatings by ion beam assisted electron beam evaporation, magnetron sputtering, ion beam assisted magnetron sputtering, ion beam sputtering, and ion-assisted plasma deposition, including plasma ion beam deposition, from precursor gases.