Method for producing thin films
    2.
    发明授权
    Method for producing thin films 失效
    薄膜制造方法

    公开(公告)号:US06676994B2

    公开(公告)日:2004-01-13

    申请号:US09819277

    申请日:2001-03-28

    IPC分类号: C23C1600

    摘要: Thin films are produced by a method wherein a material is heated in a furnace placed inside a vacuum system. An inert gas is flown over/through the heated material. The vapors of the material are entrained in the carrier gas which is then directed onto a substrate heated to a temperature below that of the furnace temperature and placed in close proximity to the exit of the furnace.

    摘要翻译: 通过一种方法制造薄膜,其中将材料在放置在真空系统内的炉中加热。 惰性气体流过/通过加热的材料。 材料的蒸气被夹带在载气中,然后将其引导到加热到低于炉温的温度的基底上,并放置在靠近炉的出口处。

    All-vapor processing of p-type tellurium-containing II-VI semiconductor and ohmic contacts thereof
    4.
    发明授权
    All-vapor processing of p-type tellurium-containing II-VI semiconductor and ohmic contacts thereof 失效
    含有p型碲的II-VI半导体及其欧姆接触的全蒸汽处理

    公开(公告)号:US06251701B1

    公开(公告)日:2001-06-26

    申请号:US09516686

    申请日:2000-03-01

    IPC分类号: H01L2100

    摘要: An all dry method for producing solar cells is provided comprising first heat-annealing a II-VI semiconductor; enhancing the conductivity and grain size of the annealed layer; modifying the surface and depositing a tellurium layer onto the enhanced layer; and then depositing copper onto the tellurium layer so as to produce a copper tellurium compound on the layer.

    摘要翻译: 提供了用于生产太阳能电池的全干法,其包括首先对II-VI半导体进行热退火; 提高退火层的导电性和晶粒尺寸; 修饰表面并在增强层上沉积碲层; 然后将铜沉积到碲层上,以便在该层上产生铜碲化合物。

    Process for fabricating thin film photovoltaic solar cells
    5.
    发明授权
    Process for fabricating thin film photovoltaic solar cells 失效
    制造薄膜光伏太阳能电池的工艺

    公开(公告)号:US4709466A

    公开(公告)日:1987-12-01

    申请号:US723054

    申请日:1985-04-15

    IPC分类号: H01L31/073 H01L31/18

    摘要: Thin film photovoltaic solar cells are made by forming the cell structure from a number of layers including the contact layers and semiconductor layers. At least one of the semiconductor layers is a tellurium containing II-VI compound. After the structure is formed, it is heated to temperatures above 300.degree. C. and then rapidly cooled at rates greater than 10.degree. C./s. Cells comprising CdS and CdTe have increased fill factor when the fabrication process includes heating and rapid cooling.

    摘要翻译: 通过从包括接触层和半导体层的多个层形成电池结构来制造薄膜光伏太阳能电池。 至少一个半导体层是含Ⅵ-VI化合物的碲。 在结构形成之后,将其加热到高于300℃的温度,然后以大于10℃/ s的速率快速冷却。 当制造工艺包括加热和快速冷却时,包含CdS和CdTe的电池具有增加的填充因子。